electromagnetic

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CPC
H01J2237/0266

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/0266electromagnetic

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,068,136
- Issue date Aug 20, 2024
- Kokusai Electric Corporation
- Tsuyoshi Takeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radio frequency screen for an ultraviolet lamp system
- Patent number 12,020,910
- Issue date Jun 25, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Sheng-chun Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated electrode and ground plane for a substrate support
- Patent number 12,020,912
- Issue date Jun 25, 2024
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radio frequency screen for an ultraviolet lamp system
- Patent number 11,670,491
- Issue date Jun 6, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Sheng-chun Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead shroud
- Patent number 11,488,810
- Issue date Nov 1, 2022
- Lam Research Corporation
- Andrew Borth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and operational method thereof
- Patent number 11,424,110
- Issue date Aug 23, 2022
- HITACHI HIGH-TECH CORPORATION
- Masahito Togami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lower electrode mechanism and reaction chamber
- Patent number 11,410,833
- Issue date Aug 9, 2022
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Yahui Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam inspection tool and method of controlling heat load
- Patent number 11,158,484
- Issue date Oct 26, 2021
- ASML Netherlands B.V.
- Dennis Herman Caspar Van Banning
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Elementary device for producing a plasma, having a coaxial applicator
- Patent number 11,120,972
- Issue date Sep 14, 2021
- SAIREM SOCIETE POUR L'APPLICATION INDUSTRIELLE DE LA RECHERCHE EN ELECTRONIQU...
- Louis Latrasse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer support
- Patent number 10,861,680
- Issue date Dec 8, 2020
- NGK Insulators, Ltd.
- Daiki Maeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ferrite cage RF isolator for power circuitry
- Patent number 10,460,914
- Issue date Oct 29, 2019
- Lam Research Corporation
- Hema Swaroop Mopidevi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conductive interface system between vacuum chambers in a charged pa...
- Patent number 10,290,522
- Issue date May 14, 2019
- Hitachi High-Technologies Corporation
- Masashi Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
XRF analyzer with separate source and detector heat sinks
- Patent number 10,219,363
- Issue date Feb 26, 2019
- Moxtek, Inc.
- Vincent Floyd Jones
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
XRF analyzer with a hand shield
- Patent number 9,961,753
- Issue date May 1, 2018
- Moxtek, Inc.
- Vincent Floyd Jones
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
XRF analyzer
- Patent number 9,775,574
- Issue date Oct 3, 2017
- Moxtek, Inc.
- Vincent Floyd Jones
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Plasma processing apparatus and operational method thereof
- Patent number 9,767,997
- Issue date Sep 19, 2017
- Hitachi High-Technologies Corporation
- Masahito Togami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Target positioning device, method for driving a target positioning...
- Patent number 9,030,649
- Issue date May 12, 2015
- Mapper Lithography IP B.V.
- Jerry Johannes Martinus Peijster
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Source bushing shielding
- Patent number 9,006,689
- Issue date Apr 14, 2015
- Ion Technology Solutions, LLC
- Manuel A. Jerez
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Small-scale fabrication systems and methods
- Patent number 8,999,105
- Issue date Apr 7, 2015
- President and Fellows of Harvard College
- Marko Loncar
- G02 - OPTICS
Information Patent Grant
System and method for electromagnetic interference shielding for cr...
- Patent number 8,952,330
- Issue date Feb 10, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Chi Tsao
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for electromagnetic interference shielding for cr...
- Patent number 8,633,439
- Issue date Jan 21, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Chi Tsao
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for controlling the temperature of an RF ion source window
- Patent number 8,436,318
- Issue date May 7, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for compensating for magnetic noise
- Patent number 8,389,962
- Issue date Mar 5, 2013
- Applied Materials Israel, Ltd.
- Konstantine Chirko
- G01 - MEASURING TESTING
Information Patent Grant
Specimen holder, specimen inspection apparatus, specimen inspection...
- Patent number 7,745,802
- Issue date Jun 29, 2010
- Jeol Ltd.
- Hidetoshi Nishiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Double shield for electron and ion beam columns
- Patent number 6,297,512
- Issue date Oct 2, 2001
- Cirrus Logic, Inc.
- Steven M. Czapski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus including condensation preventing means
- Patent number 5,342,471
- Issue date Aug 30, 1994
- Tokyo Electron Yamanashi Limited
- Kazuo Fukasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma generating apparatus employing capacitive shielding and proc...
- Patent number 5,234,529
- Issue date Aug 10, 1993
- Wayne L. Johnson
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
RADIO FREQUENCY SCREEN FOR AN ULTRAVIOLET LAMP SYSTEM
- Publication number 20240304426
- Publication date Sep 12, 2024
- Taiwan Semiconductor Manufacturing Co., LTD
- Sheng-chun YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240071730
- Publication date Feb 29, 2024
- TOKYO ELECTRON LIMITED
- Masaki HIRAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON-OPTICAL ASSEMBLY COMPRISING ELECTROMAGNETIC SHIELDING
- Publication number 20230317402
- Publication date Oct 5, 2023
- ASML NETHERLANDS B.V.
- Derk Ferdinand WALVOORT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RADIO FREQUENCY SCREEN FOR AN ULTRAVIOLET LAMP SYSTEM
- Publication number 20230260764
- Publication date Aug 17, 2023
- Taiwan Semiconductor Manufacturing Co., LTD
- Sheng-chun YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR ARCING DIAGNOSIS, PLASMA PROCESS EQUIPMENT INCLUDING...
- Publication number 20230109672
- Publication date Apr 13, 2023
- Samsung Electronics Co., Ltd.
- Changsoon Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM
- Publication number 20230109124
- Publication date Apr 6, 2023
- CARL ZEISS MICROSCOPY GMBH
- Gero Walter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD SHROUD
- Publication number 20220093372
- Publication date Mar 24, 2022
- LAM RESEARCH CORPORATION
- Andrew BORTH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE SENSOR AND PLASMA PROCESSING APPARATUS
- Publication number 20220020571
- Publication date Jan 20, 2022
- TOKYO ELECTRON LIMITED
- Hiroyuki MATSUURA
- G01 - MEASURING TESTING
Information Patent Application
RADIO FREQUENCY SCREEN FOR AN ULTRAVIOLET LAMP SYSTEM
- Publication number 20220020573
- Publication date Jan 20, 2022
- Taiwan Semiconductor Manufacturing Co., LTD
- Sheng-chun YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20210202213
- Publication date Jul 1, 2021
- Kokusai Electric Corporation
- Tsuyoshi TAKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED ELECTRODE AND GROUND PLANE FOR A SUBSTRATE SUPPORT
- Publication number 20210104384
- Publication date Apr 8, 2021
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOWER ELECTRODE MECHANISM AND REACTION CHAMBER
- Publication number 20200321198
- Publication date Oct 8, 2020
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yahui HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM INSPECTION TOOL AND METHOD OF CONTROLLING HEAT LOAD
- Publication number 20200203117
- Publication date Jun 25, 2020
- ASML NETHERLANDS B.V.
- Dennis Herman Caspar VAN BANNING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC LINER WITH INTEGRATED FARADAY SHIELDING
- Publication number 20190341230
- Publication date Nov 7, 2019
- ASM NEXX, INC.
- Daniel GOODMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ferrite Cage RF Isolator For Power Circuitry
- Publication number 20190164729
- Publication date May 30, 2019
- LAM RESEARCH CORPORATION
- Hema Swaroop Mopidevi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20190148119
- Publication date May 16, 2019
- Samsung Electronics Co., Ltd.
- Jung-mo SUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELEMENTARY DEVICE FOR PRODUCING A PLASMA, HAVING A COAXIAL APPLICATOR
- Publication number 20180261433
- Publication date Sep 13, 2018
- SAIREM SOCIETE POUR L'APPLICATION INDUSTRIELLE DE LA RECHERCHE EN ELECTRONIQU...
- Louis LATRASSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
XRF Analyzer with Separate Source and Detector Heat Sinks
- Publication number 20180228009
- Publication date Aug 9, 2018
- Moxtek, Inc.
- Vincent Floyd Jones
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
WAFER SUPPORT
- Publication number 20180218885
- Publication date Aug 2, 2018
- NGK Insulators, Ltd.
- Daiki Maeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND OPERATIONAL METHOD THEREOF
- Publication number 20170372878
- Publication date Dec 28, 2017
- Hitachi High-Technologies Corporation
- Masahito Togami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND OPERATIONAL METHOD THEREOF
- Publication number 20150021294
- Publication date Jan 22, 2015
- Hitachi High-Technologies Corporation
- Masahito Togami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SMALL-SCALE FABRICATION SYSTEMS AND METHODS
- Publication number 20140367687
- Publication date Dec 18, 2014
- Marko Loncar
- G02 - OPTICS
Information Patent Application
Source Bushing Shielding
- Publication number 20140291554
- Publication date Oct 2, 2014
- Manuel A. Jerez
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
ANTENNA FOR PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING DEVICE...
- Publication number 20140210337
- Publication date Jul 31, 2014
- EMD CORPORATION
- Yuichi Setsuhara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System And Method For Electromagnetic Interference Shielding For Cr...
- Publication number 20140124667
- Publication date May 8, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Chi Tsao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGET POSITIONING DEVICE, METHOD FOR DRIVING A TARGET POSITIONING...
- Publication number 20130094008
- Publication date Apr 18, 2013
- Jerry Johannes Martinus Peijster
- B82 - NANO-TECHNOLOGY
Information Patent Application
SYSTEM AND METHOD FOR ELECTROMAGNETIC INTERFERECE SHIELDING FOR CRI...
- Publication number 20130001419
- Publication date Jan 3, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Chi Tsao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR COMPENSATING FOR MAGNETIC NOISE
- Publication number 20120305763
- Publication date Dec 6, 2012
- Konstantine Chirko
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR CONTROLLING THE TEMPERATURE OF AN RF ION SOURCE WINDOW
- Publication number 20110240876
- Publication date Oct 6, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20090139658
- Publication date Jun 4, 2009
- SURFACE TECHNOLOGY SYSTEMS PLC
- Leslie Michael LEA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

electromagnetic

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing apparatus, method of manufacturing semiconduct...

Radio frequency screen for an ultraviolet lamp system

Integrated electrode and ground plane for a substrate support

Radio frequency screen for an ultraviolet lamp system

Showerhead shroud

Plasma processing apparatus and operational method thereof

Lower electrode mechanism and reaction chamber

Electron beam inspection tool and method of controlling heat load

Elementary device for producing a plasma, having a coaxial applicator

Wafer support

Ferrite cage RF isolator for power circuitry

Conductive interface system between vacuum chambers in a charged pa...

XRF analyzer with separate source and detector heat sinks

XRF analyzer with a hand shield

XRF analyzer

Plasma processing apparatus and operational method thereof

Target positioning device, method for driving a target positioning...

Source bushing shielding

Small-scale fabrication systems and methods

System and method for electromagnetic interference shielding for cr...

System and method for electromagnetic interference shielding for cr...

Apparatus for controlling the temperature of an RF ion source window

System and method for compensating for magnetic noise

Specimen holder, specimen inspection apparatus, specimen inspection...

Double shield for electron and ion beam columns

Plasma processing apparatus including condensation preventing means

Plasma generating apparatus employing capacitive shielding and proc...

Patents Applicationslast 30 patents

RADIO FREQUENCY SCREEN FOR AN ULTRAVIOLET LAMP SYSTEM

PLASMA PROCESSING APPARATUS

ELECTRON-OPTICAL ASSEMBLY COMPRISING ELECTROMAGNETIC SHIELDING

RADIO FREQUENCY SCREEN FOR AN ULTRAVIOLET LAMP SYSTEM

APPARATUS FOR ARCING DIAGNOSIS, PLASMA PROCESS EQUIPMENT INCLUDING...

PARTICLE BEAM SYSTEM

SHOWERHEAD SHROUD

TEMPERATURE SENSOR AND PLASMA PROCESSING APPARATUS

RADIO FREQUENCY SCREEN FOR AN ULTRAVIOLET LAMP SYSTEM

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

INTEGRATED ELECTRODE AND GROUND PLANE FOR A SUBSTRATE SUPPORT

LOWER ELECTRODE MECHANISM AND REACTION CHAMBER

ELECTRON BEAM INSPECTION TOOL AND METHOD OF CONTROLLING HEAT LOAD

CERAMIC LINER WITH INTEGRATED FARADAY SHIELDING

Ferrite Cage RF Isolator For Power Circuitry

PLASMA PROCESSING APPARATUS

ELEMENTARY DEVICE FOR PRODUCING A PLASMA, HAVING A COAXIAL APPLICATOR

XRF Analyzer with Separate Source and Detector Heat Sinks

WAFER SUPPORT

PLASMA PROCESSING APPARATUS AND OPERATIONAL METHOD THEREOF

PLASMA PROCESSING APPARATUS AND OPERATIONAL METHOD THEREOF

SMALL-SCALE FABRICATION SYSTEMS AND METHODS

Source Bushing Shielding

ANTENNA FOR PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING DEVICE...

System And Method For Electromagnetic Interference Shielding For Cr...

TARGET POSITIONING DEVICE, METHOD FOR DRIVING A TARGET POSITIONING...

SYSTEM AND METHOD FOR ELECTROMAGNETIC INTERFERECE SHIELDING FOR CRI...

SYSTEM AND METHOD FOR COMPENSATING FOR MAGNETIC NOISE

APPARATUS FOR CONTROLLING THE TEMPERATURE OF AN RF ION SOURCE WINDOW

PLASMA PROCESSING APPARATUS