Electron guns using discharge in gases or vapours as electron sources

Industry

CPC
H01J37/077

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/077Electron guns using discharge in gases or vapours as electron sources

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Electron beam apparatus and method for controlling electron beam ap...
- Patent number 11,894,211
- Issue date Feb 6, 2024
- HITACHI HIGH-TECH CORPORATION
- Erina Kawamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Source for selectively providing positively or negatively charged p...
- Patent number 9,601,312
- Issue date Mar 21, 2017
- FEI Company
- Brian Roberts Routh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Melting furnace including wire-discharge ion plasma electron emitter
- Patent number 9,453,681
- Issue date Sep 27, 2016
- ATI PROPERTIES LLC
- Robin M. Forbes Jones
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Source for selectively providing positively or negatively charged p...
- Patent number 9,275,828
- Issue date Mar 1, 2016
- FEI Company
- Brian Roberts Routh
- G01 - MEASURING TESTING
Information Patent Grant
Plasma source apparatus and methods for generating charged particle...
- Patent number 9,076,626
- Issue date Jul 7, 2015
- THE WELDING INSTITUTE
- Colin Ribton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for generating electron beams
- Patent number 9,064,671
- Issue date Jun 23, 2015
- Arcam AB
- Ulric Ljungblad
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Ion plasma electron emitters for a melting furnace
- Patent number 8,748,773
- Issue date Jun 10, 2014
- ATI Properties, Inc.
- Robin M. Forbes Jones
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Inductively coupled plasma source as an electron beam source for sp...
- Patent number 8,716,673
- Issue date May 6, 2014
- FEI Company
- Brian Roberts Routh
- G01 - MEASURING TESTING
Information Patent Grant
Melting furnace including wire-discharge ion plasma electron emitter
- Patent number 8,642,916
- Issue date Feb 4, 2014
- ATI Properties, Inc.
- Robin M. Forbes Jones
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Linear electron source, evaporator using linear electron source, an...
- Patent number 8,294,115
- Issue date Oct 23, 2012
- Applied Materials, Inc.
- Guenter Klemm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Linear electron source, evaporator using linear electron source, an...
- Patent number 7,928,411
- Issue date Apr 19, 2011
- Applied Materials, Inc.
- Guenter Klemm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Source for providing an electron beam of settable power
- Patent number 7,911,120
- Issue date Mar 22, 2011
- Centre National de la Recherche Scientifique
- Ana Lacoste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-ambipolar radio-frequency plasma electron source and systems an...
- Patent number 7,875,867
- Issue date Jan 25, 2011
- Wisconsin Alumni Research Foundation
- Noah Hershkowitz
- F03 - MACHINES OR ENGINES FOR LIQUIDS WIND, SPRING WEIGHT AND MISCELLANEOUS M...
Information Patent Grant
High brightness—multiple beamlets source for patterned X-ray produc...
- Patent number 7,609,815
- Issue date Oct 27, 2009
- The Regents of the University of California
- Ka-Ngo Leung
- G01 - MEASURING TESTING
Information Patent Grant
Non-ambipolar radio-frequency plasma electron source and systems an...
- Patent number 7,498,592
- Issue date Mar 3, 2009
- Wisconsin Alumni Research Foundation
- Noah Hershkowitz
- F03 - MACHINES OR ENGINES FOR LIQUIDS WIND, SPRING WEIGHT AND MISCELLANEOUS M...
Information Patent Grant
Slotted antenna waveguide plasma source
- Patent number 7,305,935
- Issue date Dec 11, 2007
- The United States of America as represented by the Administration of NASA
- John Foster
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron flood apparatus and ion implantation system
- Patent number 7,126,138
- Issue date Oct 24, 2006
- Applied Materials, Inc.
- Hiroyuki Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam treatment apparatus
- Patent number 7,049,606
- Issue date May 23, 2006
- Applied Materials, Inc.
- Alexandros T. Demos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Characterizing an electron beam treatment apparatus
- Patent number 7,045,798
- Issue date May 16, 2006
- Applied Materials, Inc.
- Khaled A. Elsheref
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focused electron and ion beam systems
- Patent number 6,768,120
- Issue date Jul 27, 2004
- The Regents of the University of California
- Ka-Ngo Leung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductively coupled high-frequency electron source with a reduced p...
- Patent number 6,661,165
- Issue date Dec 9, 2003
- Astrium GmbH
- Martin Closs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Uniformity correction for large area electron source
- Patent number 6,407,399
- Issue date Jun 18, 2002
- Electron Vision Corporation
- William R. Livesay
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Blanker array for a multipixel electron source
- Patent number 6,291,940
- Issue date Sep 18, 2001
- Applied Materials, Inc.
- Bart Scholte Van Mast
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Source for the generation of large area pulsed ion and electron beams
- Patent number 5,841,235
- Issue date Nov 24, 1998
- Forschungszentrum Karlsruhe GmbH
- Vladimir Engelko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam excited plasma system
- Patent number 5,397,956
- Issue date Mar 14, 1995
- Tokyo Electron Limited
- Yoh-ichi Araki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron generating apparatus
- Patent number 5,049,784
- Issue date Sep 17, 1991
- Tokyo Electron Limited
- Masahiko Matsudo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Large-area uniform electron source
- Patent number 5,003,178
- Issue date Mar 26, 1991
- Electron Vision Corporation
- William R. Livesay
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Intense steady state electron beam generator
- Patent number 4,942,339
- Issue date Jul 17, 1990
- The United States of America as represented by the United States Department o...
- Ady Hershcovitch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dynamic electron emitter
- Patent number 4,739,214
- Issue date Apr 19, 1988
- Anatech Ltd.
- Robert W. Barr
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Broad-beam electron source
- Patent number 4,684,848
- Issue date Aug 4, 1987
- Kaufman & Robinson, Inc.
- Harold R. Kaufman
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTRON SOURCE, PLASMA SOURCE AND SWITCH DEVICE
- Publication number 20230377828
- Publication date Nov 23, 2023
- Kabushiki Kaisha Toshiba
- Hisao MIYAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM WELDING SYSTEMS EMPLOYING A PLASMA CATHODE
- Publication number 20220384138
- Publication date Dec 1, 2022
- US Electron, Inc.
- John Noonan
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ELECTRON BEAM APPARATUS AND METHOD FOR CONTROLLING ELECTRON BEAM AP...
- Publication number 20220351934
- Publication date Nov 3, 2022
- HITACHI HIGH-TECH CORPORATION
- Erina KAWAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR ANGLED ETCHING
- Publication number 20200321186
- Publication date Oct 8, 2020
- Applied Materials, Inc.
- John M. WHITE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE SOURCE ARRANGEMENT FOR A CHARGED PARTICLE BEAM DEV...
- Publication number 20160240345
- Publication date Aug 18, 2016
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Jürgen FROSIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOURCE FOR SELECTIVELY PROVIDING POSITIVELY OR NEGATIVELY CHARGED P...
- Publication number 20160172156
- Publication date Jun 16, 2016
- FEI Company
- Brian Roberts Routh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Source Apparatus and Methods for Generating Charged Particle...
- Publication number 20150144808
- Publication date May 28, 2015
- The Welding Institute
- Colin Ribton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Source for Selectively Providing Positively or Negatively Charged P...
- Publication number 20140326877
- Publication date Nov 6, 2014
- FEI Company
- Brian Roberts Routh
- G01 - MEASURING TESTING
Information Patent Application
METHODS OF PROCESSING METALLIC MATERIALS
- Publication number 20140230605
- Publication date Aug 21, 2014
- ATI Properties, Inc.
- Robin M. Forbes Jones
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
METHOD AND APPARATUS FOR GENERATING ELECTRON BEAMS
- Publication number 20130300286
- Publication date Nov 14, 2013
- ARCAM AB
- Ulric Ljungblad
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
MELTING FURNACE INCLUDING WIRE-DISCHARGE ION PLASMA ELECTRON EMITTER
- Publication number 20130279533
- Publication date Oct 24, 2013
- ATI Properties, Inc.
- Robin M. Forbes Jones
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
DEVICE FOR PRODUCING AN ELECTRON BEAM
- Publication number 20130162134
- Publication date Jun 27, 2013
- Goesta Mattausch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inductively Coupled Plasma Source as an Electron Beam Source for Sp...
- Publication number 20130134307
- Publication date May 30, 2013
- FEI Company
- Brian Roberts Routh
- G01 - MEASURING TESTING
Information Patent Application
Radiation-Cured Coatings
- Publication number 20110217477
- Publication date Sep 8, 2011
- CAMVAC Limited
- John Topping
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM GENERATOR HAVING ADJUSTABLE BEAM WIDTH
- Publication number 20110199027
- Publication date Aug 18, 2011
- Yong Hwan Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Plasma Electron Emitters for a Melting Furnace
- Publication number 20100012629
- Publication date Jan 21, 2010
- ATI Properties, Inc.
- Robin M. Forbes Jones
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
LINEAR ELECTRON SOURCE, EVAPORATOR USING LINEAR ELECTRON SOURCE, AN...
- Publication number 20090159818
- Publication date Jun 25, 2009
- Applied Materials, Inc.
- Guenter KLEMM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LINEAR ELECTRON SOURCE, EVAPORATOR USING LINEAR ELECTRON SOURCE, AN...
- Publication number 20090159811
- Publication date Jun 25, 2009
- Guenter Klemm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINEAR ELECTRON SOURCE, EVAPORATOR USING LINEAR ELECTRON SOURCE, AN...
- Publication number 20090161719
- Publication date Jun 25, 2009
- Applied Materials, Inc.
- Guenter Klemm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NON-AMBIPOLAR RADIO-FREQUENCY PLASMA ELECTRON SOURCE AND SYSTEMS AN...
- Publication number 20090140176
- Publication date Jun 4, 2009
- Noah Hershkowitz
- F03 - MACHINES OR ENGINES FOR LIQUIDS WIND, SPRING WEIGHT AND MISCELLANEOUS M...
Information Patent Application
Melting Furnace Including Wire-Discharge Ion Plasma Electron Emitter
- Publication number 20080237200
- Publication date Oct 2, 2008
- ATI Properties, Inc.
- Robin M. Forbes Jones
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
NON-AMBIPOLAR RADIO-FREQUENCY PLASMA ELECTRON SOURCE AND SYSTEMS AN...
- Publication number 20080067430
- Publication date Mar 20, 2008
- Noah Hershkowitz
- F03 - MACHINES OR ENGINES FOR LIQUIDS WIND, SPRING WEIGHT AND MISCELLANEOUS M...
Information Patent Application
High Brightness - Multiple Beamlets Source for Patterned X-ray Prod...
- Publication number 20080049888
- Publication date Feb 28, 2008
- Ka-Ngo Leung
- G01 - MEASURING TESTING
Information Patent Application
CHARACTERIZING AN ELECTRON BEAM TREATMENT APPARATUS
- Publication number 20050184257
- Publication date Aug 25, 2005
- APPLIED MATERIALS, INC.
- Khaled A. Elsheref
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron flood apparatus and ion implantation system
- Publication number 20050116156
- Publication date Jun 2, 2005
- Hiroyuki Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM TREATMENT APPARATUS
- Publication number 20050092935
- Publication date May 5, 2005
- APPLIED MATERIALS, INC.
- Alexandros T. Demos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron source
- Publication number 20050062387
- Publication date Mar 24, 2005
- Centre National De La Recherche Scientifique
- Ana Lacoste
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Focused electron and ion beam systems
- Publication number 20040036032
- Publication date Feb 26, 2004
- Ka-Ngo Leung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inductively coupled high-frequency electron source with a reduced p...
- Publication number 20020101159
- Publication date Aug 1, 2002
- Martin Closs
- H01 - BASIC ELECTRIC ELEMENTS

Electron guns using discharge in gases or vapours as electron sources

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Electron beam apparatus and method for controlling electron beam ap...

Source for selectively providing positively or negatively charged p...

Melting furnace including wire-discharge ion plasma electron emitter

Source for selectively providing positively or negatively charged p...

Plasma source apparatus and methods for generating charged particle...

Method and apparatus for generating electron beams

Ion plasma electron emitters for a melting furnace

Inductively coupled plasma source as an electron beam source for sp...

Melting furnace including wire-discharge ion plasma electron emitter

Linear electron source, evaporator using linear electron source, an...

Linear electron source, evaporator using linear electron source, an...

Source for providing an electron beam of settable power

Non-ambipolar radio-frequency plasma electron source and systems an...

High brightness—multiple beamlets source for patterned X-ray produc...

Non-ambipolar radio-frequency plasma electron source and systems an...

Slotted antenna waveguide plasma source

Electron flood apparatus and ion implantation system

Electron beam treatment apparatus

Characterizing an electron beam treatment apparatus

Focused electron and ion beam systems

Inductively coupled high-frequency electron source with a reduced p...

Uniformity correction for large area electron source

Blanker array for a multipixel electron source

Source for the generation of large area pulsed ion and electron beams

Electron beam excited plasma system

Electron generating apparatus

Large-area uniform electron source

Intense steady state electron beam generator

Dynamic electron emitter

Broad-beam electron source

Patents Applicationslast 30 patents

ELECTRON SOURCE, PLASMA SOURCE AND SWITCH DEVICE

ELECTRON BEAM WELDING SYSTEMS EMPLOYING A PLASMA CATHODE

ELECTRON BEAM APPARATUS AND METHOD FOR CONTROLLING ELECTRON BEAM AP...

METHOD AND APPARATUS FOR ANGLED ETCHING

CHARGED PARTICLE SOURCE ARRANGEMENT FOR A CHARGED PARTICLE BEAM DEV...

SOURCE FOR SELECTIVELY PROVIDING POSITIVELY OR NEGATIVELY CHARGED P...

Plasma Source Apparatus and Methods for Generating Charged Particle...

Source for Selectively Providing Positively or Negatively Charged P...

METHODS OF PROCESSING METALLIC MATERIALS

METHOD AND APPARATUS FOR GENERATING ELECTRON BEAMS

MELTING FURNACE INCLUDING WIRE-DISCHARGE ION PLASMA ELECTRON EMITTER

DEVICE FOR PRODUCING AN ELECTRON BEAM

Inductively Coupled Plasma Source as an Electron Beam Source for Sp...

Radiation-Cured Coatings

ELECTRON BEAM GENERATOR HAVING ADJUSTABLE BEAM WIDTH

Ion Plasma Electron Emitters for a Melting Furnace

LINEAR ELECTRON SOURCE, EVAPORATOR USING LINEAR ELECTRON SOURCE, AN...

LINEAR ELECTRON SOURCE, EVAPORATOR USING LINEAR ELECTRON SOURCE, AN...

LINEAR ELECTRON SOURCE, EVAPORATOR USING LINEAR ELECTRON SOURCE, AN...

NON-AMBIPOLAR RADIO-FREQUENCY PLASMA ELECTRON SOURCE AND SYSTEMS AN...

Melting Furnace Including Wire-Discharge Ion Plasma Electron Emitter

NON-AMBIPOLAR RADIO-FREQUENCY PLASMA ELECTRON SOURCE AND SYSTEMS AN...

High Brightness - Multiple Beamlets Source for Patterned X-ray Prod...

CHARACTERIZING AN ELECTRON BEAM TREATMENT APPARATUS

Electron flood apparatus and ion implantation system

ELECTRON BEAM TREATMENT APPARATUS

Electron source

Focused electron and ion beam systems

Inductively coupled high-frequency electron source with a reduced p...