Claims
- 1. A focused electron beam apparatus, comprising:
a plasma ion source which produces a plasma from which electrons are extracted; a compact acceleration and focusing column through which a beam of the extracted electrons is accelerated and focused.
- 2. The apparatus of claim 1 wherein the plasma ion source is a multicusp plasma ion source.
- 3. The apparatus of claim 1 wherein the plasma ion source is RF driven.
- 4. The apparatus of claim 1 wherein the plasma ion source is a source of positive ions and electrons.
- 5. The apparatus of claim 4 wherein the plasma ion source is an argon plasma source.
- 6. The apparatus of claim 4 wherein the plasma ion source includes an extraction system to which a positive polarity is applied to extract the electrons.
- 7. The apparatus of claim 6 further comprising a collimator between the extraction system and the acceleration and focusing column.
- 8. The apparatus of claim 1 wherein the acceleration and focusing column comprises a plurality of spaced electrostatic electrodes.
- 9. The apparatus of claim 1 wherein the acceleration and focusing column has a length of about 1 cm.
- 10. The apparatus of claim 1 wherein the acceleration and focusing column includes an Einzel lens for steering the electron beam.
- 11. An ion and electron source, comprising:
a compact chamber; an RF antenna wound around the outside of the chamber for producing a plasma inside the chamber; a compact acceleration and focusing column for accelerating a beam of ions or electrons extracted from the plasma inside the chamber.
- 12. The source of claim 11 wherein the chamber is formed of quartz.
- 13. The source of claim 11 wherein the chamber has an outer diameter down to about 2 cm and a length down to about 2.5 cm.
- 14. The source of claim 11 wherein the chamber contains argon.
- 15. The source of claim 11 further comprising a DC current carrying coil wound outside the chamber over the RF antenna for providing a solenoid B-field for plasma confinement within the chamber.
- 16. The source of claim 11 wherein the acceleration and focusing column comprises a plurality of spaced electrostatic electrodes.
- 17. The source of claim 11 wherein the acceleration and focusing column includes an Einzel lens for steering the electron beam.
- 18. The source of claim 11 further comprising a grounded housing containing the chamber, RF antenna, and acceleration and focusing column.
- 19. Apparatus comprising a plurality of sources of claim 11, each source producing a different ion, one source producing an electron beam.
- 20. The apparatus of claim 19 wherein each of the plurality of sources is individually adjustable in position around a stationary substrate.
RELATED APPLICATIONS
[0001] This application claims priority of Provisional Applications Ser. No. 60/316,789 filed Aug. 31, 2001 and 60/375,101 filed Apr. 22, 2002.
GOVERNMENT RIGHTS
[0002] The United States Government has rights in this invention pursuant to Contract No. DE-AC03-76SF00098 between the United States Department of Energy and the University of California.
Provisional Applications (2)
|
Number |
Date |
Country |
|
60316789 |
Aug 2001 |
US |
|
60375101 |
Apr 2002 |
US |