Electron sources Electron guns

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CPC
H01J37/06

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/06Electron sources Electron guns

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Positron source and method
- Patent number 12,219,689
- Issue date Feb 4, 2025
- Ian Clague
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun, electron beam applicator, and method for controlling...
- Patent number 12,198,889
- Issue date Jan 14, 2025
- Photo electron Soul Inc.
- Atsushi Koizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam bending snout for mobile electron accelerators
- Patent number 12,172,367
- Issue date Dec 24, 2024
- Fermi Research Alliance, LLC
- Aaron Sauers
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Method and system of image-forming multi-electron beams
- Patent number 12,165,831
- Issue date Dec 10, 2024
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam processing apparatus, electrode assembly, and method of cl...
- Patent number 12,119,203
- Issue date Oct 15, 2024
- Canon Anelva Corporation
- Yasushi Yasumatsu
- B08 - CLEANING
Information Patent Grant
Cathode mechanism of electron emission source, and method for manuf...
- Patent number 12,106,928
- Issue date Oct 1, 2024
- NuFlare Technology, Inc.
- Ryoei Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for multiple charged-particle beams
- Patent number 12,080,515
- Issue date Sep 3, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cathode assembly for electron gun
- Patent number 12,062,518
- Issue date Aug 13, 2024
- FREEMELT AB
- Ulric Ljungblad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron-beam irradiation apparatus and maintenance method for elec...
- Patent number 12,033,828
- Issue date Jul 9, 2024
- NHV CORPORATION
- Masahiro Nagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron source, method for manufacturing same, and device provided...
- Patent number 12,014,894
- Issue date Jun 18, 2024
- DENKA COMPANY LIMITED
- Hiromitsu Chatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Emitter, electron gun in which same is used, electronic device in w...
- Patent number 11,984,294
- Issue date May 14, 2024
- National Institute for Materials Science
- Jie Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron-beam irradiation apparatus and maintenance method for elec...
- Patent number 11,984,293
- Issue date May 14, 2024
- NHV CORPORATION
- Masahiro Nagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron source, method for manufacturing same, and device provided...
- Patent number 11,984,291
- Issue date May 14, 2024
- DENKA COMPANY LIMITED
- Hiromitsu Chatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple electron-beam image acquisition apparatus and multiple ele...
- Patent number 11,961,703
- Issue date Apr 16, 2024
- NuFlare Technology, Inc.
- Chosaku Noda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron source, method for manufacturing same, emitter, and device...
- Patent number 11,915,921
- Issue date Feb 27, 2024
- DENKA COMPANY LIMITED
- Dai Tsukada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for pasteurizing and/or sterilizing particulate m...
- Patent number 11,896,041
- Issue date Feb 13, 2024
- Buhler AG
- Alasdair Currie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conical heat shield for electron emitting cathode
- Patent number 11,901,154
- Issue date Feb 13, 2024
- NUFLARE TECHNOLOGY, INC.
- Victor Katsap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,887,807
- Issue date Jan 30, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Infrastructure-scale additive manufacturing using mobile electron a...
- Patent number 11,878,462
- Issue date Jan 23, 2024
- Fermi Research Alliance, LLC
- Aaron Sauers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number RE49784
- Issue date Jan 2, 2024
- ASML Netherlands B.V.
- Weiming Ren
Information Patent Grant
Ion generator and ion implanter
- Patent number 11,848,170
- Issue date Dec 19, 2023
- SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO, LTD.
- Syuta Ochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Broad-energy spectrum electron gun
- Patent number 11,848,174
- Issue date Dec 19, 2023
- The Regents of the University of Colorado, a Body Corporate
- Kieran Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cold-field-emitter electron gun with self-cleaning extractor using...
- Patent number 11,830,699
- Issue date Nov 28, 2023
- KLA Corporation
- Luca Grella
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for targeted re-examination, inner layer defect a...
- Patent number 11,774,382
- Issue date Oct 3, 2023
- Eric Arno Vigen
- G01 - MEASURING TESTING
Information Patent Grant
Charged-particle source
- Patent number 11,735,391
- Issue date Aug 22, 2023
- IMS Nanofabrication GmbH
- Stefan Gerhold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Emitter, electron gun using same, and electronic device
- Patent number 11,721,516
- Issue date Aug 8, 2023
- National Institute for Materials Science
- Han Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Schottky thermal field emitter with integrated beam splitter
- Patent number 11,699,564
- Issue date Jul 11, 2023
- NUFLARE TECHNOLOGY, INC.
- Victor Katsap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron emitter and method of fabricating same
- Patent number 11,688,579
- Issue date Jun 27, 2023
- ASML Netherlands B.V.
- Juying Dou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,587,758
- Issue date Feb 21, 2023
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system
- Patent number 11,562,881
- Issue date Jan 24, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PHOTO-ASSISTED ELECTRON BEAM EMITTER
- Publication number 20250062095
- Publication date Feb 20, 2025
- Board of Trustees of Michigan State University
- Peng ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN AND SYSTEM AND METHOD USING ELECTRON GUN
- Publication number 20250054720
- Publication date Feb 13, 2025
- Ralf Edinger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Determining Properties of a Substrate
- Publication number 20250012743
- Publication date Jan 9, 2025
- Eric Arno Vigen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...
- Publication number 20250014861
- Publication date Jan 9, 2025
- Canon ANELVA Corporation
- Yasushi Yasumatsu
- B08 - CLEANING
Information Patent Application
COATING METHOD
- Publication number 20240420914
- Publication date Dec 19, 2024
- Jiangsu Favored Nanotechnology Co., Ltd.
- Jian ZONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CATHODE ASSEMBLY FOR ELECTRON GUN
- Publication number 20240363303
- Publication date Oct 31, 2024
- Freemelt AB
- Ulric LJUNGBLAD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND APPARATUS FOR STABILIZING ELECTRON SOURCES IN CHARGED PA...
- Publication number 20240347311
- Publication date Oct 17, 2024
- ASML NETHERLANDS B.V.
- Bruno LA FONTAINE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ADJUSTING BEAM CURRENT USING A FEEDBACK LOOP...
- Publication number 20240312758
- Publication date Sep 19, 2024
- ASML NETHERLANDS B.V.
- Zheng FAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR EVALUATING THERMIONIC ELECTRON EMITTER IN SITU
- Publication number 20240290594
- Publication date Aug 29, 2024
- NUFLARE TECHNOLOGY, INC.
- Victor KATSAP
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION REACTORS AND ASSOCIATED M...
- Publication number 20240282546
- Publication date Aug 22, 2024
- Kayaku Advanced Materials, Inc.
- W. Shannan O'Shaughnessy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICRO DEVICE FABRICATING METHOD AND APPARATUS
- Publication number 20240274403
- Publication date Aug 15, 2024
- Zhejiang University
- He TIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High-Voltage Insulating Structure, Charged Particle Gun, and Charge...
- Publication number 20240242917
- Publication date Jul 18, 2024
- Hitachi High-Tech Corporation
- Yasuchika SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Structure for Particle Acceleration And Charged Particle Beam Appar...
- Publication number 20240242918
- Publication date Jul 18, 2024
- Hitachi High-Tech Corporation
- RYO SUGIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON-ENHANCED ATOMIC LAYER DEPOSITION (EE-ALD) METHODS AND DEVI...
- Publication number 20240240317
- Publication date Jul 18, 2024
- The Regents of the University of Colorado, a Body Corporate
- Steven George
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRON BEAM IRRADIATION DEVICE
- Publication number 20240186099
- Publication date Jun 6, 2024
- NHV CORPORATION
- Tomonori SHIRAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POWER POLISHING APPARATUSES AND METHODS FOR IN-SITU FINISHING AND C...
- Publication number 20240167150
- Publication date May 23, 2024
- EDMUND OPTICS, INC.
- Joel Bagwell
- B24 - GRINDING POLISHING
Information Patent Application
PATHOGENIC CONTROL COMPOSITIONS AND METHODS
- Publication number 20240156101
- Publication date May 16, 2024
- Salveo, Inc.
- John Kenneth Bracewell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR TARGETED RE-EXAMINATION, INNER LAYER DEFECT A...
- Publication number 20240159695
- Publication date May 16, 2024
- Eric Arno Vigen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE INSPECTION APPARATUS AND A METHOD OF INSPECTING A SUBSTRA...
- Publication number 20240151664
- Publication date May 9, 2024
- Samsung Electronics Co., Ltd.
- Kwang-Eun KIM
- G01 - MEASURING TESTING
Information Patent Application
BEAM BENDING SNOUT FOR MOBILE ELECTRON ACCELERATORS
- Publication number 20240140025
- Publication date May 2, 2024
- FERMI RESEARCH ALLIANCE, LLC
- Aaron Sauers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WIRE OR ROD SHAPED EXTRACTION ELECTRODE OPTICS
- Publication number 20240145213
- Publication date May 2, 2024
- Axcelis Technologies, Inc.
- Neil Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AN ELECTRON GUN CATHODE MOUNT
- Publication number 20240128042
- Publication date Apr 18, 2024
- TWI LIMITED
- Colin RIBTON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20240128044
- Publication date Apr 18, 2024
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EBEAM INSPECTION
- Publication number 20240120173
- Publication date Apr 11, 2024
- VueReal Inc.
- Gholamreza CHAJI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM OF IMAGE-FORMING MULTI-ELECTRON BEAMS
- Publication number 20240096586
- Publication date Mar 21, 2024
- KLA Corporation
- Xinrong JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON-BEAM IRRADIATION APPARATUS AND MAINTENANCE METHOD FOR ELEC...
- Publication number 20240087836
- Publication date Mar 14, 2024
- NHV CORPORATION
- Masahiro NAGAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EMITTER, ELECTRON GUN IN WHICH SAME IS USED, ELECTRONIC DEVICE IN W...
- Publication number 20240079198
- Publication date Mar 7, 2024
- NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Jie TANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION GENERATOR AND ION IMPLANTER
- Publication number 20240079199
- Publication date Mar 7, 2024
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Syuta Ochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON SOURCE, METHOD FOR MANUFACTURING SAME, AND DEVICE PROVIDED...
- Publication number 20240029989
- Publication date Jan 25, 2024
- Denka Company Limited
- Hiromitsu CHATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON SOURCE, ELECTRON GUN, AND CHARGED PARTICLE BEAM DEVICE
- Publication number 20230352262
- Publication date Nov 2, 2023
- HITACHI HIGH-TECH CORPORATION
- Keigo KASUYA
- H01 - BASIC ELECTRIC ELEMENTS

Electron sources Electron guns

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Positron source and method

Electron gun, electron beam applicator, and method for controlling...

Beam bending snout for mobile electron accelerators

Method and system of image-forming multi-electron beams

Ion beam processing apparatus, electrode assembly, and method of cl...

Cathode mechanism of electron emission source, and method for manuf...

Apparatus for multiple charged-particle beams

Cathode assembly for electron gun

Electron-beam irradiation apparatus and maintenance method for elec...

Electron source, method for manufacturing same, and device provided...

Emitter, electron gun in which same is used, electronic device in w...

Electron-beam irradiation apparatus and maintenance method for elec...

Electron source, method for manufacturing same, and device provided...

Multiple electron-beam image acquisition apparatus and multiple ele...

Electron source, method for manufacturing same, emitter, and device...

Device and method for pasteurizing and/or sterilizing particulate m...

Conical heat shield for electron emitting cathode

Apparatus of plural charged-particle beams

Infrastructure-scale additive manufacturing using mobile electron a...

Apparatus of plural charged-particle beams

Ion generator and ion implanter

Broad-energy spectrum electron gun

Cold-field-emitter electron gun with self-cleaning extractor using...

System and method for targeted re-examination, inner layer defect a...

Charged-particle source

Emitter, electron gun using same, and electronic device

Schottky thermal field emitter with integrated beam splitter

Electron emitter and method of fabricating same

Apparatus of plural charged-particle beams

Charged particle beam system

Patents Applicationslast 30 patents

PHOTO-ASSISTED ELECTRON BEAM EMITTER

ELECTRON GUN AND SYSTEM AND METHOD USING ELECTRON GUN

System and Method for Determining Properties of a Substrate

ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...

COATING METHOD

CATHODE ASSEMBLY FOR ELECTRON GUN

SYSTEM AND APPARATUS FOR STABILIZING ELECTRON SOURCES IN CHARGED PA...

SYSTEM AND METHOD FOR ADJUSTING BEAM CURRENT USING A FEEDBACK LOOP...

METHOD FOR EVALUATING THERMIONIC ELECTRON EMITTER IN SITU

PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION REACTORS AND ASSOCIATED M...

MICRO DEVICE FABRICATING METHOD AND APPARATUS

High-Voltage Insulating Structure, Charged Particle Gun, and Charge...

Structure for Particle Acceleration And Charged Particle Beam Appar...

ELECTRON-ENHANCED ATOMIC LAYER DEPOSITION (EE-ALD) METHODS AND DEVI...

ELECTRON BEAM IRRADIATION DEVICE

POWER POLISHING APPARATUSES AND METHODS FOR IN-SITU FINISHING AND C...

PATHOGENIC CONTROL COMPOSITIONS AND METHODS

SYSTEM AND METHOD FOR TARGETED RE-EXAMINATION, INNER LAYER DEFECT A...

SUBSTRATE INSPECTION APPARATUS AND A METHOD OF INSPECTING A SUBSTRA...

BEAM BENDING SNOUT FOR MOBILE ELECTRON ACCELERATORS

WIRE OR ROD SHAPED EXTRACTION ELECTRODE OPTICS

AN ELECTRON GUN CATHODE MOUNT

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

EBEAM INSPECTION

METHOD AND SYSTEM OF IMAGE-FORMING MULTI-ELECTRON BEAMS

ELECTRON-BEAM IRRADIATION APPARATUS AND MAINTENANCE METHOD FOR ELEC...

EMITTER, ELECTRON GUN IN WHICH SAME IS USED, ELECTRONIC DEVICE IN W...

ION GENERATOR AND ION IMPLANTER

ELECTRON SOURCE, METHOD FOR MANUFACTURING SAME, AND DEVICE PROVIDED...

ELECTRON SOURCE, ELECTRON GUN, AND CHARGED PARTICLE BEAM DEVICE