electron

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CPC
H01J2237/2561

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/2561electron

Industries

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Patents Grantslast 30 patents

Information Patent Grant
3D metrology from 3D datacube created from stack of registered imag...
- Patent number 11,728,126
- Issue date Aug 15, 2023
- Applied Materials Israel Ltd.
- Ilya Blayvas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-ray imaging in cross-section using un-cut lamella with background...
- Patent number 11,501,951
- Issue date Nov 15, 2022
- Applied Materials Israel Ltd.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nano vacuum tube
- Patent number 11,152,188
- Issue date Oct 19, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsien-Yu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-ray analyzer and method for correcting counting rate
- Patent number 10,748,741
- Issue date Aug 18, 2020
- Jeol Ltd.
- Kazunori Tsukamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nano vacuum tube
- Patent number 10,566,173
- Issue date Feb 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsien-Yu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron probe microanalyzer and storage medium
- Patent number 10,410,825
- Issue date Sep 10, 2019
- Shimadzu Corporation
- Hiroshi Sakamae
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle inspection method and charged particle system
- Patent number 10,354,831
- Issue date Jul 16, 2019
- Carl Zeiss Microscopy GmbH
- Thomas Kemen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mineral identification using sequential decomposition into elements...
- Patent number 9,734,986
- Issue date Aug 15, 2017
- FEI Company
- Michael James Owen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle inspection method and charged particle system
- Patent number 9,324,537
- Issue date Apr 26, 2016
- Applied Materials Israel, Ltd.
- Thomas Kemen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mineral identification using sequential decomposition into elements...
- Patent number 9,048,067
- Issue date Jun 2, 2015
- FEI Company
- Michael James Owen
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for spectroscopic data analysis
- Patent number 8,589,086
- Issue date Nov 19, 2013
- FEI Company
- Paul Gottlieb
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle-optical systems, methods and components
- Patent number 8,039,813
- Issue date Oct 18, 2011
- Carl Zeiss SMT GmbH
- Antonio Casares
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for spectroscopic data analysis
- Patent number 7,979,217
- Issue date Jul 12, 2011
- FEI Company
- Paul Gottlieb
- G01 - MEASURING TESTING
Information Patent Grant
Methods for spectral image analysis by exploiting spatial simplicity
- Patent number 7,840,626
- Issue date Nov 23, 2010
- Sandia Corporation
- Michael R. Keenan
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for analysis using X-ray spectra
- Patent number 7,742,565
- Issue date Jun 22, 2010
- Jeol Ltd.
- Kazuyasu Kawabe
- G01 - MEASURING TESTING
Information Patent Grant
Methods for spectral image analysis by exploiting spatial simplicity
- Patent number 7,725,517
- Issue date May 25, 2010
- Sandia Corporation
- Michael R. Keenan
- G01 - MEASURING TESTING
Information Patent Grant
X-ray analyzer using electron beam
- Patent number 7,592,591
- Issue date Sep 22, 2009
- Jeol Ltd.
- Satoshi Notoya
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for analyzing sample
- Patent number 7,579,591
- Issue date Aug 25, 2009
- Jeol Ltd.
- Masaru Takakura
- G01 - MEASURING TESTING
Information Patent Grant
X-ray metrology with diffractors
- Patent number 7,519,153
- Issue date Apr 14, 2009
- KLA-Tencor Technologies Corporation
- Jeffrey A. Moore
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for spectroscopic data analysis
- Patent number 7,490,009
- Issue date Feb 10, 2009
- FEI Company
- Paul Gottlieb
- G01 - MEASURING TESTING
Information Patent Grant
Large collection angle x-ray monochromators for electron probe micr...
- Patent number 7,427,757
- Issue date Sep 23, 2008
- KLA-Tencor Technologies Corporation
- Gary R. Janik
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
X-ray detecting devices and apparatus for analyzing a sample using...
- Patent number 7,227,143
- Issue date Jun 5, 2007
- Dongbu Electronics Co., Ltd.
- Kyung-Duk Choi
- G01 - MEASURING TESTING
Information Patent Grant
Rapid defect composition mapping using multiple X-ray emission pers...
- Patent number 7,202,475
- Issue date Apr 10, 2007
- KLA-Tencor Technologies Corporation
- Anne L. Testoni
- G01 - MEASURING TESTING
Information Patent Grant
Automatic classification of defects using pattern recognition appli...
- Patent number 7,132,652
- Issue date Nov 7, 2006
- KLA-Tencor Technologies Corporation
- Anne L. Testoni
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Site stepping for electron beam micro analysis
- Patent number 7,115,866
- Issue date Oct 3, 2006
- KLA-Tencor Technologies, Inc.
- Roger Kroeze
- G01 - MEASURING TESTING
Information Patent Grant
Device for measuring the emission of X-rays produced by an object e...
- Patent number 7,049,588
- Issue date May 23, 2006
- CAMECA
- Emmanuel De Chambost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Void characterization in metal interconnect structures using X-ray...
- Patent number 6,924,484
- Issue date Aug 2, 2005
- KLA-Tencor Corporation
- Ying Wang
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope and sample observation method using th...
- Patent number 6,855,931
- Issue date Feb 15, 2005
- Hitachi, Ltd.
- Tetsuya Sawahata
- G01 - MEASURING TESTING
Information Patent Grant
Non-destructive root cause analysis on blocked contact or via
- Patent number 6,777,676
- Issue date Aug 17, 2004
- KLA-Tencor Technologies Corporation
- Ying Wang
- G01 - MEASURING TESTING
Information Patent Grant
Analytical method for electron microscopy
- Patent number 6,774,362
- Issue date Aug 10, 2004
- Jeol Ltd.
- Masumi Katagami
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
3D METROLOGY FROM 3D DATACUBE CREATED FROM STACK OF REGISTERED IMAG...
- Publication number 20230335370
- Publication date Oct 19, 2023
- APPLIED MATERIALS ISRAEL LTD.
- Ilya Blayvas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
X-RAY IMAGING IN CROSS-SECTION USING UN-CUT LAMELLA WITH BACKGROUND...
- Publication number 20220367146
- Publication date Nov 17, 2022
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NANO VACUUM TUBE
- Publication number 20200161085
- Publication date May 21, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Hsien-Yu CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
X-Ray Analyzer and Method for Correcting Counting Rate
- Publication number 20200058464
- Publication date Feb 20, 2020
- JEOL Ltd.
- Kazunori Tsukamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NANO VACUUM TUBE
- Publication number 20190035598
- Publication date Jan 31, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Hsien-Yu CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON PROBE MICROANALYZER AND STORAGE MEDIUM
- Publication number 20190006146
- Publication date Jan 3, 2019
- Shimadzu Corporation
- Hiroshi SAKAMAE
- G01 - MEASURING TESTING
Information Patent Application
SAMPLE HOLDER FOR CHARGED PARTICLE BEAM DEVICE, AND CHARGED PARTICL...
- Publication number 20170018397
- Publication date Jan 19, 2017
- Hitachi High-Technologies Corporation
- Yuya SUZUKI
- G01 - MEASURING TESTING
Information Patent Application
MINERAL IDENTIFICATION USING SEQUENTIAL DECOMPOSITION INTO ELEMENTS...
- Publication number 20140117229
- Publication date May 1, 2014
- FEI Company
- Michael James Owen
- G01 - MEASURING TESTING
Information Patent Application
Method and System for Spectroscopic Data Analysis
- Publication number 20110301869
- Publication date Dec 8, 2011
- FEI Company
- Paul Gottlieb
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus for Treating Workpieces
- Publication number 20090323895
- Publication date Dec 31, 2009
- EADS Deutschland GmbH
- Alois Friedberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Analysis Using X-Ray Spectra
- Publication number 20090310748
- Publication date Dec 17, 2009
- JEOL Ltd.
- Kazuyasu KAWABE
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR SPECTROSCOPIC DATA ANALYSIS
- Publication number 20090306906
- Publication date Dec 10, 2009
- FEI Company
- Paul Gottlieb
- G01 - MEASURING TESTING
Information Patent Application
Charged Particle Inspection Method and Charged Particle System
- Publication number 20090256075
- Publication date Oct 15, 2009
- Carl Zeiss SMT AG
- Thomas Kemen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Particle-Optical Component
- Publication number 20090114818
- Publication date May 7, 2009
- Carl Zeiss SMT AG
- Antonio Casares
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Method for X-Ray Analysis of Chemical State
- Publication number 20090052620
- Publication date Feb 26, 2009
- JEOL Ltd.
- Masaru Takakura
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus for Analyzing Sample
- Publication number 20080111072
- Publication date May 15, 2008
- JEOL Ltd.
- Masaru Takakura
- G01 - MEASURING TESTING
Information Patent Application
X-ray analyzer using electron beam
- Publication number 20080067379
- Publication date Mar 20, 2008
- JEOL Ltd.
- Satoshi Notoya
- G01 - MEASURING TESTING
Information Patent Application
Inspection apparatus and method
- Publication number 20080061234
- Publication date Mar 13, 2008
- NEC Electronics Corporation
- Toyokazu Nakamura
- G01 - MEASURING TESTING
Information Patent Application
Electron Spectroscope With Emission Induced By A Monochromatic Elec...
- Publication number 20070210249
- Publication date Sep 13, 2007
- STMicroelectronics S.r.I
- Stefano Giovanni Alberici
- G01 - MEASURING TESTING
Information Patent Application
X-ray detecting devices and apparatus for analyzing a sample using...
- Publication number 20060138325
- Publication date Jun 29, 2006
- Kyung-Duk Choi
- G01 - MEASURING TESTING
Information Patent Application
Method and system for spectroscopic data analysis
- Publication number 20060028643
- Publication date Feb 9, 2006
- Intellection Pty Ltd
- Paul Gottlieb
- G01 - MEASURING TESTING
Information Patent Application
Device for measuring the emission of x rays produced by an object e...
- Publication number 20050211898
- Publication date Sep 29, 2005
- CAMECA
- Emmanuel De Chambost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DEFECT ROOT CAUSE ANALYSIS
- Publication number 20050049836
- Publication date Mar 3, 2005
- Long-Hui Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning electron microscope and sample observation method using th...
- Publication number 20040183016
- Publication date Sep 23, 2004
- Hitachi, Ltd
- Tetsuya Sawahata
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON MICROSCOPE INCLUDING APPARATUS FOR X-RAY ANALYSIS AND METH...
- Publication number 20040099805
- Publication date May 27, 2004
- Isao Ochiai
- G01 - MEASURING TESTING
Information Patent Application
Scanning electron microscope and sample observation method using th...
- Publication number 20030189172
- Publication date Oct 9, 2003
- Hitachi, Ltd
- Tetsuya Sawahata
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for observing sample using electron beam
- Publication number 20030089852
- Publication date May 15, 2003
- Isao Ochiai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Analytical method for electron microscopy
- Publication number 20030089851
- Publication date May 15, 2003
- JEOL Ltd.
- Masumi Katagami
- H01 - BASIC ELECTRIC ELEMENTS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

3D metrology from 3D datacube created from stack of registered imag...

X-ray imaging in cross-section using un-cut lamella with background...

Nano vacuum tube

X-ray analyzer and method for correcting counting rate

Nano vacuum tube

Electron probe microanalyzer and storage medium

Charged particle inspection method and charged particle system

Mineral identification using sequential decomposition into elements...

Charged particle inspection method and charged particle system

Mineral identification using sequential decomposition into elements...

Method and system for spectroscopic data analysis

Charged particle-optical systems, methods and components

Method and system for spectroscopic data analysis

Methods for spectral image analysis by exploiting spatial simplicity

Method and apparatus for analysis using X-ray spectra

Methods for spectral image analysis by exploiting spatial simplicity

X-ray analyzer using electron beam

Method and apparatus for analyzing sample

X-ray metrology with diffractors

Method and system for spectroscopic data analysis

Large collection angle x-ray monochromators for electron probe micr...

X-ray detecting devices and apparatus for analyzing a sample using...

Rapid defect composition mapping using multiple X-ray emission pers...

Automatic classification of defects using pattern recognition appli...

Site stepping for electron beam micro analysis

Device for measuring the emission of X-rays produced by an object e...

Void characterization in metal interconnect structures using X-ray...

Scanning electron microscope and sample observation method using th...

Non-destructive root cause analysis on blocked contact or via

Analytical method for electron microscopy

Patents Applicationslast 30 patents

3D METROLOGY FROM 3D DATACUBE CREATED FROM STACK OF REGISTERED IMAG...

X-RAY IMAGING IN CROSS-SECTION USING UN-CUT LAMELLA WITH BACKGROUND...

NANO VACUUM TUBE

X-Ray Analyzer and Method for Correcting Counting Rate

NANO VACUUM TUBE

ELECTRON PROBE MICROANALYZER AND STORAGE MEDIUM

SAMPLE HOLDER FOR CHARGED PARTICLE BEAM DEVICE, AND CHARGED PARTICL...

MINERAL IDENTIFICATION USING SEQUENTIAL DECOMPOSITION INTO ELEMENTS...

Method and System for Spectroscopic Data Analysis

Method and Apparatus for Treating Workpieces

Method and Apparatus for Analysis Using X-Ray Spectra

METHOD AND SYSTEM FOR SPECTROSCOPIC DATA ANALYSIS

Charged Particle Inspection Method and Charged Particle System

Particle-Optical Component

Apparatus and Method for X-Ray Analysis of Chemical State

Method and Apparatus for Analyzing Sample

X-ray analyzer using electron beam

Inspection apparatus and method

Electron Spectroscope With Emission Induced By A Monochromatic Elec...

X-ray detecting devices and apparatus for analyzing a sample using...

Method and system for spectroscopic data analysis

Device for measuring the emission of x rays produced by an object e...

METHOD OF DEFECT ROOT CAUSE ANALYSIS

Scanning electron microscope and sample observation method using th...

ELECTRON MICROSCOPE INCLUDING APPARATUS FOR X-RAY ANALYSIS AND METH...

Scanning electron microscope and sample observation method using th...

Apparatus and method for observing sample using electron beam

Analytical method for electron microscopy