electrostatic

Industry

CPC
H01J37/12

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/12electrostatic

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Lens designs
- Patent number 12,243,714
- Issue date Mar 4, 2025
- ASML Netherlands B.V.
- Laura Del Tin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus using multiple beams of charged particles
- Patent number 12,237,144
- Issue date Feb 25, 2025
- ASML Netherlands B.V.
- Xuerang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample pre-charging methods and apparatuses for charged particle be...
- Patent number 12,191,109
- Issue date Jan 7, 2025
- ASML Netherlands B.V.
- Xuedong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system of image-forming multi-electron beams
- Patent number 12,165,831
- Issue date Dec 10, 2024
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for Schottky TFE inspection
- Patent number 12,165,834
- Issue date Dec 10, 2024
- NUFLARE TECHNOLOGY, INC.
- Victor Katsap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modulation of rolling k vectors of angled gratings
- Patent number 12,106,935
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Joseph C. Olson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 12,106,930
- Issue date Oct 1, 2024
- HITACHI HIGH-TECH CORPORATION
- Takafumi Miwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 12,087,541
- Issue date Sep 10, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam deflection device, aberration corrector, monochromator, and ch...
- Patent number 12,062,519
- Issue date Aug 13, 2024
- HITACHI HIGH-TECH CORPORATION
- Pieter Kruit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and axis adjustment method thereof
- Patent number 12,027,342
- Issue date Jul 2, 2024
- HITACHI HIGH-TECH CORPORATION
- Yuta Imai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus
- Patent number 12,009,175
- Issue date Jun 11, 2024
- NuFlare Technology, Inc.
- Hirofumi Morita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle assessment tool, inspection method
- Patent number 11,984,295
- Issue date May 14, 2024
- ASML Netherlands B.V.
- Marco Jan-Jaco Wieland
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum chamber arrangement for charged particle beam generator
- Patent number 11,961,627
- Issue date Apr 16, 2024
- ASML Netherlands B.V.
- Alexander Hendrik Vincent Van Veen
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Charged particle beam writing apparatus, charged particle beam writ...
- Patent number 11,961,708
- Issue date Apr 16, 2024
- NuFlare Technology, Inc.
- Haruyuki Nomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus using charged particle beams
- Patent number 11,961,697
- Issue date Apr 16, 2024
- ASML Netherlands B.V.
- Xuerang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device for inspection of a specimen with a pl...
- Patent number 11,961,709
- Issue date Apr 16, 2024
- FEI Company
- Ali Mohammadi-Gheidari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatuses for adjusting beam condition of charged par...
- Patent number 11,948,772
- Issue date Apr 2, 2024
- ASML Netherlands B.V.
- Xuedong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for operating a particle beam microscope
- Patent number 11,915,907
- Issue date Feb 27, 2024
- Carl Zeiss Microscopy GmbH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems, devices, and methods for contaminant resistant insulative...
- Patent number 11,894,212
- Issue date Feb 6, 2024
- TAE TECHNOLOGIES, INC.
- Christopher J. Killer
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
High throughput multi-electron beam system
- Patent number 11,869,743
- Issue date Jan 9, 2024
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus using multiple beams of charged particles
- Patent number 11,804,356
- Issue date Oct 31, 2023
- ASML Netherlands B.V.
- Xuerang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam adjustment method, multi charged partic...
- Patent number 11,804,360
- Issue date Oct 31, 2023
- NuFlare Technology, Inc.
- Tsubasa Nanao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Charged particle assessment tool, inspection method
- Patent number 11,798,783
- Issue date Oct 24, 2023
- ASML Netherlands B.V.
- Marco Jan-Jaco Wieland
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Axially progressive lens for transporting charged particles
- Patent number 11,791,149
- Issue date Oct 17, 2023
- Agilent Technologies, Inc.
- Tong Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and axis adjustment method thereof
- Patent number 11,764,028
- Issue date Sep 19, 2023
- HITACHI HIGH-TECH CORPORATION
- Yuta Imai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focused ion beam processing apparatus
- Patent number 11,721,517
- Issue date Aug 8, 2023
- Hitachi High-Tech Science Corporation
- Hiroshi Oba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implanter and electrostatic quadrupole lens device
- Patent number 11,710,618
- Issue date Jul 25, 2023
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Haruka Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum chamber arrangement for charged particle beam generator
- Patent number 11,705,252
- Issue date Jul 18, 2023
- ASML Netherlands B.V.
- Alexander Hendrik Vincent Van Veen
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Schottky thermal field emitter with integrated beam splitter
- Patent number 11,699,564
- Issue date Jul 11, 2023
- NUFLARE TECHNOLOGY, INC.
- Victor Katsap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic devices to influence beams of charged particles
- Patent number 11,699,566
- Issue date Jul 11, 2023
- ViaMEMS Technologies, Inc.
- David Xuan-Qi Wang
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...

Patents Applicationslast 30 patents

Information Patent Application
OBJECTIVE LENS AND CHARGED PARTICLE BEAM APPARATUS INCLUDING SAME
- Publication number 20250046562
- Publication date Feb 6, 2025
- Korea Research Institute of Standards and Science
- Takashi OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE APPARATUS AND METHOD
- Publication number 20250014855
- Publication date Jan 9, 2025
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS, DEVICES, AND METHODS FOR CONTAMINANT RESISTANT INSULATIVE...
- Publication number 20250006452
- Publication date Jan 2, 2025
- TAE TECHNOLOGIES, INC.
- Christopher J. Killer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTING COLD PHOTOCATHODE DEVICE USING ELECTRIC FIELD TO CON...
- Publication number 20240412938
- Publication date Dec 12, 2024
- ATTOLIGHT AG
- Nicolas Tappy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM SYSTEM AND MULTI-BEAM GENERATING UNIT WITH REDUCED SENSI...
- Publication number 20240379322
- Publication date Nov 14, 2024
- Carl Zeiss MultiSEM GmbH
- Alexander Wertz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS, SYSTEM AND TECHNIQUES FOR MASS ANALYZED ION BEAM
- Publication number 20240339287
- Publication date Oct 10, 2024
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID APPARATUS, SYSTEM AND TECHNIQUES FOR MASS ANALYZED ION BEAM
- Publication number 20240339288
- Publication date Oct 10, 2024
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20240321544
- Publication date Sep 26, 2024
- Kabushiki Kaisha Toshiba
- Tomohiro SAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSULATING STRUCTURE, ELECTROSTATIC LENS, AND CHARGED PARTICLE BEAM...
- Publication number 20240274394
- Publication date Aug 15, 2024
- EBARA CORPORATION
- Yasushi TOMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD
- Publication number 20240249912
- Publication date Jul 25, 2024
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM DEVICE AND EMITTER TIP MILLING METHOD
- Publication number 20240203682
- Publication date Jun 20, 2024
- HITACHI HIGH-TECH CORPORATION
- Shinichi MATSUBARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM GENERATING UNIT WITH INCREASED FOCUSING POWER
- Publication number 20240170252
- Publication date May 23, 2024
- Carl Zeiss MultiSEM GmbH
- Yanko Sarov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING A MULTI-BEAM PARTICLE MICROSCOPE WITH FAST CLO...
- Publication number 20240128048
- Publication date Apr 18, 2024
- Carl Zeiss MultiSEM GmbH
- Ingo Mueller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE APPARATUS AND METHOD
- Publication number 20240128043
- Publication date Apr 18, 2024
- ASML NETHERLANDS B.V.
- Jurgen VAN SOEST
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM CHARGED PARTICLE BEAM SYSTEM WITH ANISOTROPIC FILTERING...
- Publication number 20240128051
- Publication date Apr 18, 2024
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF COMPENSATING FOR AN EFFECT OF ELECTRODE DISTORTION, ASSES...
- Publication number 20240105416
- Publication date Mar 28, 2024
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM OF IMAGE-FORMING MULTI-ELECTRON BEAMS
- Publication number 20240096586
- Publication date Mar 21, 2024
- KLA Corporation
- Xinrong JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE DEVICE AND METHOD
- Publication number 20240087835
- Publication date Mar 14, 2024
- ASML NETHERLANDS B.V.
- Albertus Victor Gerardus MANGNUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ASSESSMENT SYSTEM, METHOD OF ASSESSING
- Publication number 20240079205
- Publication date Mar 7, 2024
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS USING MULTIPLE BEAMS OF CHARGED PARTICLES
- Publication number 20240071711
- Publication date Feb 29, 2024
- ASML NETHERLANDS B.V.
- Xuerang HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AXIALLY PROGRESSIVE LENS FOR TRANSPORTING CHARGED PARTICLES
- Publication number 20240038521
- Publication date Feb 1, 2024
- Agilent Technologies, Inc.
- Tong Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOOD COLUMN AND CHARGED PARTICLE APPARATUS
- Publication number 20240006147
- Publication date Jan 4, 2024
- ASML NETHERLANDS B.V.
- Christiaan OTTEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION MICROSCOPE
- Publication number 20240006146
- Publication date Jan 4, 2024
- National University of Singapore
- Jeroen Anton VAN KAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE FOR INSPECTION OF A SPECIMEN WITH A PL...
- Publication number 20240006149
- Publication date Jan 4, 2024
- FEI Company
- Ali Mohammadi-Gheidari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS USING CHARGED PARTICLE BEAMS
- Publication number 20230411110
- Publication date Dec 21, 2023
- ASML NETHERLANDS B.V.
- Xuerang HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Creating Multiple Electron Beams with a Photocathode Film
- Publication number 20230395349
- Publication date Dec 7, 2023
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
- Publication number 20230386696
- Publication date Nov 30, 2023
- ASML NETHERLANDS B.V.
- Alexander Hendrik Vincent VAN VEEN
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Charged Particle Beam Device and Axis Adjustment Method Thereof
- Publication number 20230377829
- Publication date Nov 23, 2023
- HITACHI HIGH-TECH CORPORATION
- Yuta IMAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE PRE-CHARGING METHODS AND APPARATUSES FOR CHARGED PARTICLE BE...
- Publication number 20230360877
- Publication date Nov 9, 2023
- ASML NETHERLANDS B.V.
- Xuedong LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON-OPTICAL DEVICE
- Publication number 20230352266
- Publication date Nov 2, 2023
- ASML NETHERLANDS B.V.
- Stijn Wilem Herman Karel STEENBRINK
- H01 - BASIC ELECTRIC ELEMENTS

electrostatic

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Lens designs

Apparatus using multiple beams of charged particles

Sample pre-charging methods and apparatuses for charged particle be...

Method and system of image-forming multi-electron beams

Method and apparatus for Schottky TFE inspection

Modulation of rolling k vectors of angled gratings

Charged particle beam device

Apparatus of plural charged-particle beams

Beam deflection device, aberration corrector, monochromator, and ch...

Charged particle beam device and axis adjustment method thereof

Charged particle beam writing apparatus

Charged particle assessment tool, inspection method

Vacuum chamber arrangement for charged particle beam generator

Charged particle beam writing apparatus, charged particle beam writ...

Apparatus using charged particle beams

Charged particle beam device for inspection of a specimen with a pl...

Methods and apparatuses for adjusting beam condition of charged par...

Method for operating a particle beam microscope

Systems, devices, and methods for contaminant resistant insulative...

High throughput multi-electron beam system

Apparatus using multiple beams of charged particles

Multi charged particle beam adjustment method, multi charged partic...

Charged particle assessment tool, inspection method

Axially progressive lens for transporting charged particles

Charged particle beam device and axis adjustment method thereof

Focused ion beam processing apparatus

Ion implanter and electrostatic quadrupole lens device

Vacuum chamber arrangement for charged particle beam generator

Schottky thermal field emitter with integrated beam splitter

Electrostatic devices to influence beams of charged particles

Patents Applicationslast 30 patents

OBJECTIVE LENS AND CHARGED PARTICLE BEAM APPARATUS INCLUDING SAME

CHARGED PARTICLE APPARATUS AND METHOD

SYSTEMS, DEVICES, AND METHODS FOR CONTAMINANT RESISTANT INSULATIVE...

SEMICONDUCTING COLD PHOTOCATHODE DEVICE USING ELECTRIC FIELD TO CON...

MULTI-BEAM SYSTEM AND MULTI-BEAM GENERATING UNIT WITH REDUCED SENSI...

APPARATUS, SYSTEM AND TECHNIQUES FOR MASS ANALYZED ION BEAM

HYBRID APPARATUS, SYSTEM AND TECHNIQUES FOR MASS ANALYZED ION BEAM

ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING THE SAME

INSULATING STRUCTURE, ELECTROSTATIC LENS, AND CHARGED PARTICLE BEAM...

CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD

ION BEAM DEVICE AND EMITTER TIP MILLING METHOD

MULTI-BEAM GENERATING UNIT WITH INCREASED FOCUSING POWER

METHOD FOR OPERATING A MULTI-BEAM PARTICLE MICROSCOPE WITH FAST CLO...

CHARGED PARTICLE APPARATUS AND METHOD

MULTI-BEAM CHARGED PARTICLE BEAM SYSTEM WITH ANISOTROPIC FILTERING...

METHOD OF COMPENSATING FOR AN EFFECT OF ELECTRODE DISTORTION, ASSES...

METHOD AND SYSTEM OF IMAGE-FORMING MULTI-ELECTRON BEAMS

CHARGED PARTICLE DEVICE AND METHOD

ASSESSMENT SYSTEM, METHOD OF ASSESSING

APPARATUS USING MULTIPLE BEAMS OF CHARGED PARTICLES

AXIALLY PROGRESSIVE LENS FOR TRANSPORTING CHARGED PARTICLES

FLOOD COLUMN AND CHARGED PARTICLE APPARATUS

ION MICROSCOPE

CHARGED PARTICLE BEAM DEVICE FOR INSPECTION OF A SPECIMEN WITH A PL...

APPARATUS USING CHARGED PARTICLE BEAMS

Creating Multiple Electron Beams with a Photocathode Film

VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR

Charged Particle Beam Device and Axis Adjustment Method Thereof

SAMPLE PRE-CHARGING METHODS AND APPARATUSES FOR CHARGED PARTICLE BE...

ELECTRON-OPTICAL DEVICE