Emission microscopes

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H01J37/285

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/285Emission microscopes

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Graphene based substrates for imaging
- Patent number 12,217,931
- Issue date Feb 4, 2025
- University of Kansas
- Eduardo Rosa-Molinar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor charged particle detector for microscopy
- Patent number 12,205,792
- Issue date Jan 21, 2025
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun and electron beam application apparatus
- Patent number 12,165,828
- Issue date Dec 10, 2024
- HITACHI HIGH-TECH CORPORATION
- Takashi Ohshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning charged-particle-beam microscopy with energy-dispersive x-...
- Patent number 12,094,684
- Issue date Sep 17, 2024
- Mochii, Inc.
- Christopher Su-Yan Own
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atom probe tomography specimen preparation
- Patent number 11,837,435
- Issue date Dec 5, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shih-Wei Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microscope
- Patent number 11,798,781
- Issue date Oct 24, 2023
- Focus-eBeam Technology (Beijing) Co., Ltd.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated tomography field ion microscope
- Patent number 11,791,129
- Issue date Oct 17, 2023
- Centre National de la Recherche Scientifique
- François Vurpillot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cathodoluminescence focal scans to characterize 3D NAND CH profile
- Patent number 11,713,964
- Issue date Aug 1, 2023
- Applied Materials Israel Ltd.
- David Goldovsky
- G01 - MEASURING TESTING
Information Patent Grant
Multi-beam image acquisition apparatus and multi-beam image acquisi...
- Patent number 11,694,868
- Issue date Jul 4, 2023
- NuFlare Technology, Inc.
- Kazuhiko Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for transmission electron microscopy cathodoluminescence
- Patent number 11,688,581
- Issue date Jun 27, 2023
- Gatan, Inc.
- John Andrew Hunt
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus of plural charged particle beams
- Patent number 11,676,793
- Issue date Jun 13, 2023
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Correlation between emission spots utilizing CAD data in combinatio...
- Patent number 11,561,256
- Issue date Jan 24, 2023
- Synopsys, Inc.
- Ankush Bharati Oberai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of imaging a 2D sample with a multi-beam particle microscope
- Patent number 11,521,827
- Issue date Dec 6, 2022
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor charged particle detector for microscopy
- Patent number 11,508,547
- Issue date Nov 22, 2022
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
SEM FOV fingerprint in stochastic EPE and placement measurements in...
- Patent number 11,435,671
- Issue date Sep 6, 2022
- ASML Netherlands B.V.
- Marleen Kooiman
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Energy beam input to atom probe specimens from multiple angles
- Patent number 11,340,256
- Issue date May 24, 2022
- Cameca Instruments, Inc.
- Joseph Hale Bunton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for image adjustment and charged particle beam system
- Patent number 11,276,552
- Issue date Mar 15, 2022
- HITACHI HIGH-TECH CORPORATION
- Yuki Tomizawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for performing three-dimensional compositional an...
- Patent number 11,217,424
- Issue date Jan 4, 2022
- GLOBALFOUNDRIES U.S. Inc.
- Jay Mody
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus and sample observation method using...
- Patent number 11,183,362
- Issue date Nov 23, 2021
- HITACHI HIGH-TECH CORPORATION
- Katsura Takaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and sample observation method using...
- Patent number 11,120,967
- Issue date Sep 14, 2021
- HITACHI HIGH-TECH CORPORATION
- Kunji Shigeto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Atomic layer deposition of fluoride thin films
- Patent number 11,111,578
- Issue date Sep 7, 2021
- UChicago Argonne, LLC
- Jeffrey W. Elam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atom probe tomography specimen preparation
- Patent number 11,088,036
- Issue date Aug 10, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shih-Wei Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of imaging a 3D sample with a multi-beam particle microscope
- Patent number 11,069,508
- Issue date Jul 20, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Point-spread-function measurement device and measurement method, im...
- Patent number 11,042,017
- Issue date Jun 22, 2021
- Olympus Corporation
- Atsushi Doi
- G02 - OPTICS
Information Patent Grant
Laminated film and process for manufacturing the same, as well as m...
- Patent number 11,038,145
- Issue date Jun 15, 2021
- Sumitomo Chemical Company, Limited
- Yutaka Ito
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Charged particle beam device, objective lens module, electrode devi...
- Patent number 10,991,544
- Issue date Apr 27, 2021
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Field ionization source, ion beam apparatus, and beam irradiation m...
- Patent number 10,971,329
- Issue date Apr 6, 2021
- HITACHI HIGH-TECH CORPORATION
- Shinichi Matsubara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atom probe inspection device, field ion microscope, and distortion...
- Patent number 10,916,405
- Issue date Feb 9, 2021
- TOSHIBA MEMORY CORPORATION
- Takahiro Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for atomic probe tomography
- Patent number 10,903,045
- Issue date Jan 26, 2021
- Imec VZW
- Paul van der Heide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for photocathode illumination inspection
- Patent number 10,840,055
- Issue date Nov 17, 2020
- KLA Corporation
- Gildardo Delgado
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
AUTOMATIC GRID FINGER DETECTION
- Publication number 20250166964
- Publication date May 22, 2025
- FEI Company
- Tomas Onderlicka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CREATING DETECTION DATA IN ELECTRON BEAM APPLICATION DEV...
- Publication number 20250132117
- Publication date Apr 24, 2025
- PHOTO ELECTRON SOUL INC.
- Tomohiro NISHITANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGING THOUSANDS OF ELECTRON BEAMS DURING WORKPIECE INSPECTION
- Publication number 20250112017
- Publication date Apr 3, 2025
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vacuum Processing Device
- Publication number 20250054724
- Publication date Feb 13, 2025
- Hitachi High-Tech Corporation
- Akito TANOKUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOM PROBE TOMOGRAPHY SPECIMEN PREPARATION
- Publication number 20240395636
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Wei HUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPIN-POLARIZED SCANNING ELECTRON MICROSCOPE
- Publication number 20240249911
- Publication date Jul 25, 2024
- HITACHI HIGH-TECH CORPORATION
- Teruo KOHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processor System, Correction Method, and Correction Program
- Publication number 20240222064
- Publication date Jul 4, 2024
- HITACHI HIGH-TECH CORPORATION
- Mayuka OSAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LUMINESCENCE METHOD FOR THE IN-LINE DETECTION OF ATOMIC SCALE DEFEC...
- Publication number 20240128129
- Publication date Apr 18, 2024
- The University of Hong Kong
- Chi Chung Francis Ling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN AND ELECTRON BEAM APPLICATION APPARATUS
- Publication number 20240120168
- Publication date Apr 11, 2024
- Hitachi High-Tech Corporation
- Takashi Ohshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOM PROBE TOMOGRAPHY SPECIMEN PREPARATION
- Publication number 20230386783
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Wei HUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Microscope
- Publication number 20230238212
- Publication date Jul 27, 2023
- Hitachi High-Tech Corporation
- Hiroyasu SHICHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CATHODOLUMINESCENCE FOCAL SCANS TO CHARACTERIZE 3D NAND CH PROFILE
- Publication number 20230221112
- Publication date Jul 13, 2023
- APPLIED MATERIALS ISRAEL LTD.
- David Goldovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY
- Publication number 20230123152
- Publication date Apr 20, 2023
- ASML NETHERLANDS B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM APPLICATION APPARATUS AND INSPECTION METHOD
- Publication number 20230071801
- Publication date Mar 9, 2023
- HITACHI HIGH-TECH CORPORATION
- Momoyo ENYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning Electron Microscope
- Publication number 20220415609
- Publication date Dec 29, 2022
- Hitachi High-Tech Corporation
- Takumi UEZONO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO PREPARE A SAMPLE FOR ATOM PROBE TOMOGRAPHY (APT), PREPARA...
- Publication number 20220349789
- Publication date Nov 3, 2022
- Carl Zeiss SMT GMBH
- Sascha Christian Mueller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TOMOGRAPHIC ATOM PROBE WITH TERAHERTZ PULSE GENERATOR
- Publication number 20220254601
- Publication date Aug 11, 2022
- Centre National de la Recherche Scientifique
- Angela VELLA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM IMAGE ACQUISITION APPARATUS AND MULTI-BEAM IMAGE ACQUISI...
- Publication number 20220230837
- Publication date Jul 21, 2022
- NuFlare Technology, Inc.
- Kazuhiko INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED TOMOGRAPHY FIELD ION MICROSCOPE
- Publication number 20220139666
- Publication date May 5, 2022
- Centre National de la Recherche Scientifique
- François VURPILLOT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROSCOPE
- Publication number 20220108870
- Publication date Apr 7, 2022
- Focus-eBeam Technology (Beijing) Co., Ltd.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GRAPHENE BASED SUBSTRATES FOR IMAGING
- Publication number 20220068596
- Publication date Mar 3, 2022
- The University of Kansas
- Eduardo ROSA-MOLINAR
- G01 - MEASURING TESTING
Information Patent Application
ATOM PROBE TOMOGRAPHY SPECIMEN PREPARATION
- Publication number 20220059318
- Publication date Feb 24, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Wei HUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ANALYZING THE 3D STRUCTURE OF BIOMOLECULES
- Publication number 20210364525
- Publication date Nov 25, 2021
- Martin Andersson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEM AND METHOD FOR PERFORMING THREE-DIMENSIONAL COMPOSITIONAL AN...
- Publication number 20210356429
- Publication date Nov 18, 2021
- GLOBALFOUNDRIES U.S. Inc.
- Jay Mody
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF IMAGING A 2D SAMPLE WITH A MULTI-BEAM PARTICLE MICROSCOPE
- Publication number 20210351001
- Publication date Nov 11, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOM PROBE TOMOGRAPHY SPECIMEN PREPARATION
- Publication number 20210343603
- Publication date Nov 4, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Wei HUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TRANSMISSION ELECTRON MICROSCOPY CATHODOLUMINESCENCE
- Publication number 20210313141
- Publication date Oct 7, 2021
- GATAN, INC.
- John Andrew Hunt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION OF FLUORIDE THIN FILMS
- Publication number 20210254209
- Publication date Aug 19, 2021
- UChicago Argonne, LLC
- Jeffrey W. Elam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Correlation between Emission Spots Utilizing CAD Data in Combinatio...
- Publication number 20210199714
- Publication date Jul 1, 2021
- Synopsys, Inc.
- Ankush Bharati OBERAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Image Adjustment and Charged Particle Beam System
- Publication number 20210183611
- Publication date Jun 17, 2021
- HITACHI HIGH-TECH CORPORATION
- Yuki TOMIZAWA
- G06 - COMPUTING CALCULATING COUNTING

Emission microscopes

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Graphene based substrates for imaging

Semiconductor charged particle detector for microscopy

Electron gun and electron beam application apparatus

Scanning charged-particle-beam microscopy with energy-dispersive x-...

Atom probe tomography specimen preparation

Microscope

Automated tomography field ion microscope

Cathodoluminescence focal scans to characterize 3D NAND CH profile

Multi-beam image acquisition apparatus and multi-beam image acquisi...

Apparatus for transmission electron microscopy cathodoluminescence

Apparatus of plural charged particle beams

Correlation between emission spots utilizing CAD data in combinatio...

Method of imaging a 2D sample with a multi-beam particle microscope

Semiconductor charged particle detector for microscopy

SEM FOV fingerprint in stochastic EPE and placement measurements in...

Energy beam input to atom probe specimens from multiple angles

Method for image adjustment and charged particle beam system

System and method for performing three-dimensional compositional an...

Charged particle beam apparatus and sample observation method using...

Charged particle beam apparatus and sample observation method using...

Atomic layer deposition of fluoride thin films

Atom probe tomography specimen preparation

Method of imaging a 3D sample with a multi-beam particle microscope

Point-spread-function measurement device and measurement method, im...

Laminated film and process for manufacturing the same, as well as m...

Charged particle beam device, objective lens module, electrode devi...

Field ionization source, ion beam apparatus, and beam irradiation m...

Atom probe inspection device, field ion microscope, and distortion...

Method and apparatus for atomic probe tomography

System and method for photocathode illumination inspection

Patents Applicationslast 30 patents

AUTOMATIC GRID FINGER DETECTION

METHOD FOR CREATING DETECTION DATA IN ELECTRON BEAM APPLICATION DEV...

IMAGING THOUSANDS OF ELECTRON BEAMS DURING WORKPIECE INSPECTION

Vacuum Processing Device

ATOM PROBE TOMOGRAPHY SPECIMEN PREPARATION

SPIN-POLARIZED SCANNING ELECTRON MICROSCOPE

Processor System, Correction Method, and Correction Program

LUMINESCENCE METHOD FOR THE IN-LINE DETECTION OF ATOMIC SCALE DEFEC...

ELECTRON GUN AND ELECTRON BEAM APPLICATION APPARATUS

ATOM PROBE TOMOGRAPHY SPECIMEN PREPARATION

Electron Microscope

CATHODOLUMINESCENCE FOCAL SCANS TO CHARACTERIZE 3D NAND CH PROFILE

SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY

ELECTRON BEAM APPLICATION APPARATUS AND INSPECTION METHOD

Scanning Electron Microscope

METHOD TO PREPARE A SAMPLE FOR ATOM PROBE TOMOGRAPHY (APT), PREPARA...

TOMOGRAPHIC ATOM PROBE WITH TERAHERTZ PULSE GENERATOR

MULTI-BEAM IMAGE ACQUISITION APPARATUS AND MULTI-BEAM IMAGE ACQUISI...

AUTOMATED TOMOGRAPHY FIELD ION MICROSCOPE

MICROSCOPE

GRAPHENE BASED SUBSTRATES FOR IMAGING

ATOM PROBE TOMOGRAPHY SPECIMEN PREPARATION

METHOD FOR ANALYZING THE 3D STRUCTURE OF BIOMOLECULES

SYSTEM AND METHOD FOR PERFORMING THREE-DIMENSIONAL COMPOSITIONAL AN...

METHOD OF IMAGING A 2D SAMPLE WITH A MULTI-BEAM PARTICLE MICROSCOPE

ATOM PROBE TOMOGRAPHY SPECIMEN PREPARATION

APPARATUS FOR TRANSMISSION ELECTRON MICROSCOPY CATHODOLUMINESCENCE

ATOMIC LAYER DEPOSITION OF FLUORIDE THIN FILMS

Correlation between Emission Spots Utilizing CAD Data in Combinatio...

Method for Image Adjustment and Charged Particle Beam System