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H01J37/285
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ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/285
Emission microscopes
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Patents Grants
last 30 patents
Information
Patent Grant
Atom probe tomography specimen preparation
Patent number
11,837,435
Issue date
Dec 5, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Shih-Wei Hung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microscope
Patent number
11,798,781
Issue date
Oct 24, 2023
Focus-eBeam Technology (Beijing) Co., Ltd.
Shuai Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automated tomography field ion microscope
Patent number
11,791,129
Issue date
Oct 17, 2023
Centre National de la Recherche Scientifique
François Vurpillot
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cathodoluminescence focal scans to characterize 3D NAND CH profile
Patent number
11,713,964
Issue date
Aug 1, 2023
Applied Materials Israel Ltd.
David Goldovsky
G01 - MEASURING TESTING
Information
Patent Grant
Multi-beam image acquisition apparatus and multi-beam image acquisi...
Patent number
11,694,868
Issue date
Jul 4, 2023
NuFlare Technology, Inc.
Kazuhiko Inoue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for transmission electron microscopy cathodoluminescence
Patent number
11,688,581
Issue date
Jun 27, 2023
Gatan, Inc.
John Andrew Hunt
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus of plural charged particle beams
Patent number
11,676,793
Issue date
Jun 13, 2023
ASML Netherlands B.V.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Correlation between emission spots utilizing CAD data in combinatio...
Patent number
11,561,256
Issue date
Jan 24, 2023
Synopsys, Inc.
Ankush Bharati Oberai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of imaging a 2D sample with a multi-beam particle microscope
Patent number
11,521,827
Issue date
Dec 6, 2022
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor charged particle detector for microscopy
Patent number
11,508,547
Issue date
Nov 22, 2022
ASML Netherlands B.V.
Yongxin Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
SEM FOV fingerprint in stochastic EPE and placement measurements in...
Patent number
11,435,671
Issue date
Sep 6, 2022
ASML Netherlands B.V.
Marleen Kooiman
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Energy beam input to atom probe specimens from multiple angles
Patent number
11,340,256
Issue date
May 24, 2022
Cameca Instruments, Inc.
Joseph Hale Bunton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for image adjustment and charged particle beam system
Patent number
11,276,552
Issue date
Mar 15, 2022
HITACHI HIGH-TECH CORPORATION
Yuki Tomizawa
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
System and method for performing three-dimensional compositional an...
Patent number
11,217,424
Issue date
Jan 4, 2022
GLOBALFOUNDRIES U.S. Inc.
Jay Mody
G01 - MEASURING TESTING
Information
Patent Grant
Charged particle beam apparatus and sample observation method using...
Patent number
11,183,362
Issue date
Nov 23, 2021
HITACHI HIGH-TECH CORPORATION
Katsura Takaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus and sample observation method using...
Patent number
11,120,967
Issue date
Sep 14, 2021
HITACHI HIGH-TECH CORPORATION
Kunji Shigeto
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Atomic layer deposition of fluoride thin films
Patent number
11,111,578
Issue date
Sep 7, 2021
UChicago Argonne, LLC
Jeffrey W. Elam
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Atom probe tomography specimen preparation
Patent number
11,088,036
Issue date
Aug 10, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Shih-Wei Hung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of imaging a 3D sample with a multi-beam particle microscope
Patent number
11,069,508
Issue date
Jul 20, 2021
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Point-spread-function measurement device and measurement method, im...
Patent number
11,042,017
Issue date
Jun 22, 2021
Olympus Corporation
Atsushi Doi
G02 - OPTICS
Information
Patent Grant
Laminated film and process for manufacturing the same, as well as m...
Patent number
11,038,145
Issue date
Jun 15, 2021
Sumitomo Chemical Company, Limited
Yutaka Ito
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Charged particle beam device, objective lens module, electrode devi...
Patent number
10,991,544
Issue date
Apr 27, 2021
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
Matthias Firnkes
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Field ionization source, ion beam apparatus, and beam irradiation m...
Patent number
10,971,329
Issue date
Apr 6, 2021
HITACHI HIGH-TECH CORPORATION
Shinichi Matsubara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Atom probe inspection device, field ion microscope, and distortion...
Patent number
10,916,405
Issue date
Feb 9, 2021
TOSHIBA MEMORY CORPORATION
Takahiro Ikeda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for atomic probe tomography
Patent number
10,903,045
Issue date
Jan 26, 2021
Imec VZW
Paul van der Heide
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for photocathode illumination inspection
Patent number
10,840,055
Issue date
Nov 17, 2020
KLA Corporation
Gildardo Delgado
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-column scanning electron microscopy system
Patent number
10,840,056
Issue date
Nov 17, 2020
KLA Corporation
Robert Haynes
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automated TEM sample preparation
Patent number
10,825,651
Issue date
Nov 3, 2020
FEI Company
Valerie Brogden
G01 - MEASURING TESTING
Information
Patent Grant
Transmission electron microscope micro-grid and method for making t...
Patent number
10,777,378
Issue date
Sep 15, 2020
Tsinghua University
Lin Cong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for determining the shape of a sample tip for atom probe tom...
Patent number
10,746,759
Issue date
Aug 18, 2020
Imec VZW
Kristof Paredis
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
LUMINESCENCE METHOD FOR THE IN-LINE DETECTION OF ATOMIC SCALE DEFEC...
Publication number
20240128129
Publication date
Apr 18, 2024
The University of Hong Kong
Chi Chung Francis Ling
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON GUN AND ELECTRON BEAM APPLICATION APPARATUS
Publication number
20240120168
Publication date
Apr 11, 2024
Hitachi High-Tech Corporation
Takashi Ohshima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ATOM PROBE TOMOGRAPHY SPECIMEN PREPARATION
Publication number
20230386783
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Shih-Wei HUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron Microscope
Publication number
20230238212
Publication date
Jul 27, 2023
Hitachi High-Tech Corporation
Hiroyasu SHICHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CATHODOLUMINESCENCE FOCAL SCANS TO CHARACTERIZE 3D NAND CH PROFILE
Publication number
20230221112
Publication date
Jul 13, 2023
APPLIED MATERIALS ISRAEL LTD.
David Goldovsky
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY
Publication number
20230123152
Publication date
Apr 20, 2023
ASML NETHERLANDS B.V.
Yongxin Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM APPLICATION APPARATUS AND INSPECTION METHOD
Publication number
20230071801
Publication date
Mar 9, 2023
HITACHI HIGH-TECH CORPORATION
Momoyo ENYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Scanning Electron Microscope
Publication number
20220415609
Publication date
Dec 29, 2022
Hitachi High-Tech Corporation
Takumi UEZONO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD TO PREPARE A SAMPLE FOR ATOM PROBE TOMOGRAPHY (APT), PREPARA...
Publication number
20220349789
Publication date
Nov 3, 2022
Carl Zeiss SMT GMBH
Sascha Christian Mueller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TOMOGRAPHIC ATOM PROBE WITH TERAHERTZ PULSE GENERATOR
Publication number
20220254601
Publication date
Aug 11, 2022
Centre National de la Recherche Scientifique
Angela VELLA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM IMAGE ACQUISITION APPARATUS AND MULTI-BEAM IMAGE ACQUISI...
Publication number
20220230837
Publication date
Jul 21, 2022
NuFlare Technology, Inc.
Kazuhiko INOUE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AUTOMATED TOMOGRAPHY FIELD ION MICROSCOPE
Publication number
20220139666
Publication date
May 5, 2022
Centre National de la Recherche Scientifique
François VURPILLOT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROSCOPE
Publication number
20220108870
Publication date
Apr 7, 2022
Focus-eBeam Technology (Beijing) Co., Ltd.
Shuai Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GRAPHENE BASED SUBSTRATES FOR IMAGING
Publication number
20220068596
Publication date
Mar 3, 2022
The University of Kansas
Eduardo ROSA-MOLINAR
G01 - MEASURING TESTING
Information
Patent Application
ATOM PROBE TOMOGRAPHY SPECIMEN PREPARATION
Publication number
20220059318
Publication date
Feb 24, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Shih-Wei HUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR ANALYZING THE 3D STRUCTURE OF BIOMOLECULES
Publication number
20210364525
Publication date
Nov 25, 2021
Martin Andersson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SYSTEM AND METHOD FOR PERFORMING THREE-DIMENSIONAL COMPOSITIONAL AN...
Publication number
20210356429
Publication date
Nov 18, 2021
GLOBALFOUNDRIES U.S. Inc.
Jay Mody
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF IMAGING A 2D SAMPLE WITH A MULTI-BEAM PARTICLE MICROSCOPE
Publication number
20210351001
Publication date
Nov 11, 2021
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ATOM PROBE TOMOGRAPHY SPECIMEN PREPARATION
Publication number
20210343603
Publication date
Nov 4, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Shih-Wei HUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR TRANSMISSION ELECTRON MICROSCOPY CATHODOLUMINESCENCE
Publication number
20210313141
Publication date
Oct 7, 2021
GATAN, INC.
John Andrew Hunt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ATOMIC LAYER DEPOSITION OF FLUORIDE THIN FILMS
Publication number
20210254209
Publication date
Aug 19, 2021
UChicago Argonne, LLC
Jeffrey W. Elam
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Correlation between Emission Spots Utilizing CAD Data in Combinatio...
Publication number
20210199714
Publication date
Jul 1, 2021
Synopsys, Inc.
Ankush Bharati OBERAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Image Adjustment and Charged Particle Beam System
Publication number
20210183611
Publication date
Jun 17, 2021
HITACHI HIGH-TECH CORPORATION
Yuki TOMIZAWA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DEVICE FOR PROVIDING ELECTRONS AND METHOD FOR MAKING THE SAME
Publication number
20210104376
Publication date
Apr 8, 2021
City University of Hong Kong
Fu-Rong Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-COLUMN SCANNING ELECTRON MICROSCOPY SYSTEM
Publication number
20210090844
Publication date
Mar 25, 2021
Robert Haynes
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCANNING ELECTRON MICROSCOPE
Publication number
20210042943
Publication date
Feb 11, 2021
Shimadzu Corporation
Ryuta MATSUMOTO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE, OBJECTIVE LENS MODULE, ELECTRODE DEVI...
Publication number
20200381208
Publication date
Dec 3, 2020
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
Matthias Firnkes
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CONTROLLING A UNIT OF A PARTICLE BEAM DEVICE AND PARTICL...
Publication number
20200333271
Publication date
Oct 22, 2020
CARL ZEISS MICROSCOPY GMBH
Christian Hendrich
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS AND SAMPLE OBSERVATION METHOD USING...
Publication number
20200294764
Publication date
Sep 17, 2020
Hitachi High-Tech Corporation
Katsura Takaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ATOM PROBE INSPECTION DEVICE, FIELD ION MICROSCOPE, AND DISTORTION...
Publication number
20200286711
Publication date
Sep 10, 2020
Toshiba Memory Corporation
Takahiro IKEDA
H01 - BASIC ELECTRIC ELEMENTS