Energy spectrometers

Industry

CPC
H01J2237/24485

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/24485Energy spectrometers

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam device
- Patent number 12,142,457
- Issue date Nov 12, 2024
- HITACHI HIGH-TECH CORPORATION
- Takahiro Nishihata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for ion energy analysis of plasma processes
- Patent number 12,136,542
- Issue date Nov 5, 2024
- IMPEDANS LTD
- Paul Scullin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Energy spectrometer with dynamic focus
- Patent number 12,100,585
- Issue date Sep 24, 2024
- FEI Company
- Arthur Reinout Hartong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transmission charged particle microscope with an electron energy lo...
- Patent number 11,955,310
- Issue date Apr 9, 2024
- FEI Company
- Peter Christiaan Tiemeijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for detecting or monitoring for a chemical precursor in a...
- Patent number 11,939,673
- Issue date Mar 26, 2024
- ASM IP Holding B.V.
- John Kevin Shugrue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for ion energy analysis of plasma processes
- Patent number 11,908,668
- Issue date Feb 20, 2024
- IMPEDANS LTD
- Paul Scullin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and method for the particle-optical examinatio...
- Patent number 11,657,999
- Issue date May 23, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of examining a sample using a charged particle microscope, w...
- Patent number 11,417,497
- Issue date Aug 16, 2022
- FEI Company
- Remco Schoenmakers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for electron transfer from a sample to an energy...
- Patent number 11,328,918
- Issue date May 10, 2022
- SPECS Surface Nano Analysis GmbH
- Gerd Schoenhense
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for measuring energy spectrum of backscattered...
- Patent number 11,322,332
- Issue date May 3, 2022
- TASMIT, INC.
- Makoto Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Accurate wavelength calibration in cathodoluminescence SEM
- Patent number 11,227,743
- Issue date Jan 18, 2022
- ATTOLIGHT AG
- Julien Vincent Pilet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for simultaneous phase contrast imaging and elect...
- Patent number 11,211,223
- Issue date Dec 28, 2021
- FEI Company
- Ivan Lazić
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 11,189,457
- Issue date Nov 30, 2021
- HITACHI HIGH-TECH CORPORATION
- Hideo Morishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for charged particle microscopy with improved ima...
- Patent number 11,120,969
- Issue date Sep 14, 2021
- KLA Corporation
- Doug K. Masnaghetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High speed/low dose multi-objective autonomous scanning materials i...
- Patent number 11,120,968
- Issue date Sep 14, 2021
- Northwestern University
- Karl A. Hujsak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for acquiring electron backscatter diffraction...
- Patent number 11,114,275
- Issue date Sep 7, 2021
- FEI Company
- Pavel Stejskal
- G01 - MEASURING TESTING
Information Patent Grant
Evaluation method and evaluation apparatus for electronic device
- Patent number 11,062,876
- Issue date Jul 13, 2021
- TOHOKU UNIVERSITY
- Masaaki Niwa
- G01 - MEASURING TESTING
Information Patent Grant
Particle beam system and method for the particle-optical examinatio...
- Patent number 11,049,686
- Issue date Jun 29, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device, and observation method and elemental...
- Patent number 11,031,211
- Issue date Jun 8, 2021
- HITACHI HIGH-TECH CORPORATION
- Naoto Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for high speed EELS spectrum acquisition
- Patent number 11,024,484
- Issue date Jun 1, 2021
- Gatan, Inc.
- Edward Michael James
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transmission charged particle microscope with adjustable beam energ...
- Patent number 11,024,483
- Issue date Jun 1, 2021
- FEI Company
- Peter Christiaan Tiemeijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for detecting or monitoring for a chemical precursor in a...
- Patent number 10,975,470
- Issue date Apr 13, 2021
- ASM IP Holding B.V.
- John Shugrue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for energy resolved chroma imaging
- Patent number 10,923,308
- Issue date Feb 16, 2021
- FEI Company
- Yuchen Deng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and measurement method for obtaining i...
- Patent number 10,879,035
- Issue date Dec 29, 2020
- Jeol Ltd.
- Noriaki Mizuno
- G01 - MEASURING TESTING
Information Patent Grant
Analyzing energy of charged particles
- Patent number 10,665,423
- Issue date May 26, 2020
- Carl Zeiss Microscopy GmbH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for charged particle microscopy with improved ima...
- Patent number 10,643,819
- Issue date May 5, 2020
- KLA-Tencor Corporation
- Doug K. Masnaghetti
- G01 - MEASURING TESTING
Information Patent Grant
Electron spectroscopy system
- Patent number 10,607,807
- Issue date Mar 31, 2020
- Board of Trustees of Michigan State University
- Chong-Yu Ruan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compressive scanning spectroscopy
- Patent number 10,580,614
- Issue date Mar 3, 2020
- Battelle Memorial Institute
- Andrew J. Stevens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transmission charged particle microscope with improved EELS/EFTEM m...
- Patent number 10,559,448
- Issue date Feb 11, 2020
- FEI Company
- Alexander Henstra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Energy filter and charged particle beam system
- Patent number 10,546,714
- Issue date Jan 28, 2020
- Jeol Ltd.
- Kazuya Omoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR CONFIRMING AND FINDING AN IONIZATION EDGE WITHIN A MEASU...
- Publication number 20240379324
- Publication date Nov 14, 2024
- FEI Company
- Wouter Rene J. VAN DEN BROEK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR ELECTRON ENERGY LOSS SPECTROSCOPY AT HIGH ENERGY
- Publication number 20240347314
- Publication date Oct 17, 2024
- FEI Company
- Peter Christiaan Tiemeijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSMISSION CHARGED PARTICLE MICROSCOPE WITH AN ELECTRON ENERGY LO...
- Publication number 20240258067
- Publication date Aug 1, 2024
- FEI Company
- Peter Christiaan TIEMEIJER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optical Emission Spectroscopy for Advanced Process Characterization
- Publication number 20240094056
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Spectrometer and Analytical Method
- Publication number 20230411113
- Publication date Dec 21, 2023
- JEOL Ltd.
- Tatsuya Uchida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON SPECTROMETER CALIBRATION METHOD
- Publication number 20230402250
- Publication date Dec 14, 2023
- ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)
- Paolo CATTANEO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPERATION METHOD OF ETCHING APPARATUS AND METHOD OF MANUFACTURING S...
- Publication number 20230307217
- Publication date Sep 28, 2023
- Samsung Electronics Co., Ltd.
- Dooyoung Gwak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Energy Filter, and Energy Analyzer and Charged Particle Beam Device...
- Publication number 20230298845
- Publication date Sep 21, 2023
- Hitachi High-Tech Corporation
- Kazuhiro HONDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20220367147
- Publication date Nov 17, 2022
- Hitachi High-Tech Corporation
- Takahiro NISHIHATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...
- Publication number 20210313137
- Publication date Oct 7, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSMISSION CHARGED PARTICLE MICROSCOPE WITH AN ELECTRON ENERGY LO...
- Publication number 20210305013
- Publication date Sep 30, 2021
- FEI Company
- Peter Christiaan TIEMEIJER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR DETECTING OR MONITORING FOR A CHEMICAL PRECURSOR IN A...
- Publication number 20210180189
- Publication date Jun 17, 2021
- ASM IP HOLDING B.V.
- John Kevin Shugrue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR HIGH SPEED EELS SPECTRUM ACQUISITION
- Publication number 20210090856
- Publication date Mar 25, 2021
- GATAN, INC.
- Edward Michael JAMES
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACCURATE WAVELENGTH CALIBRATION IN CATHODOLUMINESCENCE SEM
- Publication number 20210057183
- Publication date Feb 25, 2021
- ATTOLIGHT AG
- Julien Vincent Pilet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR MEASURING ENERGY SPECTRUM OF BACKSCATTERED...
- Publication number 20210012999
- Publication date Jan 14, 2021
- TASMIT, INC.
- Makoto KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR ACQUIRING ELECTRON BACKSCATTER DIFFRACTION...
- Publication number 20210005420
- Publication date Jan 7, 2021
- FEI Company
- Pavel Stejskal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF EXAMINING A SAMPLE USING A CHARGED PARTICLE MICROSCOPE, W...
- Publication number 20200395192
- Publication date Dec 17, 2020
- FEI Company
- Remco Schoenmakers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH SPEED/LOW DOSE MULTI-OBJECTIVE AUTONOMOUS SCANNING MATERIALS I...
- Publication number 20200321188
- Publication date Oct 8, 2020
- Northwestern University
- Karl A. HUJSAK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20200273665
- Publication date Aug 27, 2020
- Hitachi High-Technologies Corporation
- Hideo MORISHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Charged Particle Microscopy with Improved Ima...
- Publication number 20200227232
- Publication date Jul 16, 2020
- KLA-Tencor Corporation
- Doug K. Masnaghetti
- G01 - MEASURING TESTING
Information Patent Application
Charged Particle Beam Device, and Observation Method and Elemental...
- Publication number 20200185190
- Publication date Jun 11, 2020
- Hitachi High-Technologies Corporation
- Naoto ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...
- Publication number 20200098541
- Publication date Mar 26, 2020
- CARL ZEISS MICROSCOPY GMBH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSMISSION CHARGED PARTICLE MICROSCOPE WITH ADJUSTABLE BEAM ENERG...
- Publication number 20190378680
- Publication date Dec 12, 2019
- FEI Company
- Peter Christiaan Tiemeijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD OF PRODUCING DIAMOND AND PERFORMING REAL TIME...
- Publication number 20190284716
- Publication date Sep 19, 2019
- Devi Shanker Misra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR DETECTING OR MONITORING FOR A CHEMICAL PRECURSOR IN A...
- Publication number 20190264324
- Publication date Aug 29, 2019
- ASM IP HOLDING B.V.
- John Shugrue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Scanning Electron Microscope and Measurement Method
- Publication number 20190228948
- Publication date Jul 25, 2019
- JEOL Ltd.
- Noriaki Mizuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON SOURCE AND ELECTRON BEAM IRRADIATION DEVICE
- Publication number 20190198284
- Publication date Jun 27, 2019
- Hitachi High-Technologies Corporation
- Soichiro MATSUNAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSMISSION CHARGED PARTICLE MICROSCOPE WITH IMPROVED EELS/EFTEM M...
- Publication number 20190180973
- Publication date Jun 13, 2019
- FEI Company
- Alexander Henstra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...
- Publication number 20190122852
- Publication date Apr 25, 2019
- CARL ZEISS MICROSCOPY GMBH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Microscope
- Publication number 20180240643
- Publication date Aug 23, 2018
- Hitachi High-Technologies Corporation
- Satoshi TAKADA
- H01 - BASIC ELECTRIC ELEMENTS

Energy spectrometers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Charged particle beam device

Apparatus for ion energy analysis of plasma processes

Energy spectrometer with dynamic focus

Transmission charged particle microscope with an electron energy lo...

Apparatus for detecting or monitoring for a chemical precursor in a...

Apparatus for ion energy analysis of plasma processes

Particle beam system and method for the particle-optical examinatio...

Method of examining a sample using a charged particle microscope, w...

Device and method for electron transfer from a sample to an energy...

Apparatus and method for measuring energy spectrum of backscattered...

Accurate wavelength calibration in cathodoluminescence SEM

System and method for simultaneous phase contrast imaging and elect...

Scanning electron microscope

Method and system for charged particle microscopy with improved ima...

High speed/low dose multi-objective autonomous scanning materials i...

Methods and systems for acquiring electron backscatter diffraction...

Evaluation method and evaluation apparatus for electronic device

Particle beam system and method for the particle-optical examinatio...

Charged particle beam device, and observation method and elemental...

Method for high speed EELS spectrum acquisition

Transmission charged particle microscope with adjustable beam energ...

Apparatus for detecting or monitoring for a chemical precursor in a...

Method and system for energy resolved chroma imaging

Scanning electron microscope and measurement method for obtaining i...

Analyzing energy of charged particles

Method and system for charged particle microscopy with improved ima...

Electron spectroscopy system

Compressive scanning spectroscopy

Transmission charged particle microscope with improved EELS/EFTEM m...

Energy filter and charged particle beam system

Patents Applicationslast 30 patents

METHOD FOR CONFIRMING AND FINDING AN IONIZATION EDGE WITHIN A MEASU...

TECHNIQUES FOR ELECTRON ENERGY LOSS SPECTROSCOPY AT HIGH ENERGY

TRANSMISSION CHARGED PARTICLE MICROSCOPE WITH AN ELECTRON ENERGY LO...

Optical Emission Spectroscopy for Advanced Process Characterization

Electron Spectrometer and Analytical Method

ELECTRON SPECTROMETER CALIBRATION METHOD

OPERATION METHOD OF ETCHING APPARATUS AND METHOD OF MANUFACTURING S...

Energy Filter, and Energy Analyzer and Charged Particle Beam Device...

CHARGED PARTICLE BEAM DEVICE

PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...

TRANSMISSION CHARGED PARTICLE MICROSCOPE WITH AN ELECTRON ENERGY LO...

APPARATUS FOR DETECTING OR MONITORING FOR A CHEMICAL PRECURSOR IN A...

METHOD FOR HIGH SPEED EELS SPECTRUM ACQUISITION

ACCURATE WAVELENGTH CALIBRATION IN CATHODOLUMINESCENCE SEM

APPARATUS AND METHOD FOR MEASURING ENERGY SPECTRUM OF BACKSCATTERED...

METHODS AND SYSTEMS FOR ACQUIRING ELECTRON BACKSCATTER DIFFRACTION...

METHOD OF EXAMINING A SAMPLE USING A CHARGED PARTICLE MICROSCOPE, W...

HIGH SPEED/LOW DOSE MULTI-OBJECTIVE AUTONOMOUS SCANNING MATERIALS I...

SCANNING ELECTRON MICROSCOPE

Method and System for Charged Particle Microscopy with Improved Ima...

Charged Particle Beam Device, and Observation Method and Elemental...

PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...

TRANSMISSION CHARGED PARTICLE MICROSCOPE WITH ADJUSTABLE BEAM ENERG...

APPARATUS AND METHOD OF PRODUCING DIAMOND AND PERFORMING REAL TIME...

APPARATUS FOR DETECTING OR MONITORING FOR A CHEMICAL PRECURSOR IN A...

Scanning Electron Microscope and Measurement Method

ELECTRON SOURCE AND ELECTRON BEAM IRRADIATION DEVICE

TRANSMISSION CHARGED PARTICLE MICROSCOPE WITH IMPROVED EELS/EFTEM M...

PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...

Electron Microscope