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Especially adapted for treating semiconductor wafers
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Industry
CPC
F27B17/0025
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
F
MECHANICAL ENGINEERING LIGHTING HEATING WEAPONS BLASTING ENGINES OR PUMPS
F27
Furnaces
F27B
FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL OPEN SINTERING OR LIKE APPARATUS
F27B17/00
Furnaces of a kind not covered by any preceding group
Current Industry
F27B17/0025
Especially adapted for treating semiconductor wafers
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