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Especially adapted for treating semiconductor wafers
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CPC
F27B17/0025
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
F
MECHANICAL ENGINEERING LIGHTING HEATING WEAPONS BLASTING ENGINES OR PUMPS
F27
Furnaces
F27B
FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL OPEN SINTERING OR LIKE APPARATUS
F27B17/00
Furnaces of a kind not covered by any preceding group
Current Industry
F27B17/0025
Especially adapted for treating semiconductor wafers
Industries
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Patents Grants
last 30 patents
Information
Patent Grant
Wafer boat handling device, vertical batch furnace and method
Patent number
11,996,309
Issue date
May 28, 2024
ASM IP Holding B.V.
Christianus G. M. de Ridder
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
11,967,513
Issue date
Apr 23, 2024
Kokusai Electric Corporation
Teruo Yoshino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor substrate manufacturing device applicable to large-di...
Patent number
11,955,354
Issue date
Apr 9, 2024
Kwansei Gakuin Educational Foundation
Tadaaki Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heat treatment apparatus and heat treatment method
Patent number
11,927,394
Issue date
Mar 12, 2024
Tokyo Electron Limited
Tatsuya Yamaguchi
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Substrate processing apparatus, substrate support, and method of ma...
Patent number
11,929,272
Issue date
Mar 12, 2024
Kokusai Electric Corporation
Kenichi Suzaki
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Apparatus and method for treating substrate
Patent number
11,923,212
Issue date
Mar 5, 2024
Semes Co., Ltd.
Kyungsik Shin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vertical batch furnace assembly
Patent number
11,915,960
Issue date
Feb 27, 2024
ASM IP Holding B.V.
Jeroen Fluit
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Diffusion furnace
Patent number
11,862,490
Issue date
Jan 2, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Pengfei Gao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate heat treatment apparatus
Patent number
11,854,842
Issue date
Dec 26, 2023
ACM RESEARCH (SHANGHAI), INC.
Hui Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Displacement control device for seismic events
Patent number
11,852,291
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chuan-Chieh Chiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Spot heating by moving a beam with horizontal rotary motion
Patent number
11,842,907
Issue date
Dec 12, 2023
Applied Materials, Inc.
Shu-Kwan Danny Lau
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Semiconductor processing chamber with filament lamps having nonunif...
Patent number
11,842,908
Issue date
Dec 12, 2023
ASM IP Holding B.V.
Shiva K. T. Rajavelu Muralidhar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Rapid thermal processing method and rapid thermal processing device
Patent number
11,815,312
Issue date
Nov 14, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC.
Wei Li
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Substrate processing apparatus and method
Patent number
11,804,388
Issue date
Oct 31, 2023
ASM IP Holding B.V.
Theodorus Oosterlaken
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Substrate processing apparatus, substrate processing method, and st...
Patent number
11,798,821
Issue date
Oct 24, 2023
Tokyo Electron Limited
Yukinobu Otsuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for processing a workpiece using a multi-cycle thermal treat...
Patent number
11,764,072
Issue date
Sep 19, 2023
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Michael X. Yang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Batch processing oven and operating methods
Patent number
11,688,621
Issue date
Jun 27, 2023
YIELD ENGINEERING SYSTEMS, INC.
Mark William Curry
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Semiconductor burn-in oven chamber sealing
Patent number
11,680,980
Issue date
Jun 20, 2023
Micro Control Company
Tom Alan Tremmel
G01 - MEASURING TESTING
Information
Patent Grant
Method and system for doping semiconductor materials
Patent number
11,621,168
Issue date
Apr 4, 2023
Gyrotron Technology, Inc.
Vladislav Sklyarevich
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Load lock fast pump vent
Patent number
11,610,787
Issue date
Mar 21, 2023
BROOKS AUTOMATION US, LLC
Christopher Hofmeister
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Vertical batch furnace assembly
Patent number
11,587,815
Issue date
Feb 21, 2023
ASM IP Holding B.V.
Chris G. M. de Ridder
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Vertical batch furnace assembly
Patent number
11,587,814
Issue date
Feb 21, 2023
ASM IP Holding B.V.
Chris G. M. de Ridder
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Uninhibited cooling path solution for active thermal control in dev...
Patent number
11,495,478
Issue date
Nov 8, 2022
Advanced Micro Devices, Inc.
Travis Oneal Cagle
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus and method for heat-treating substrate
Patent number
11,488,847
Issue date
Nov 1, 2022
Tokyo Electron Limited
Hiroyuki Miyashita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer holder with tapered region
Patent number
11,395,373
Issue date
Jul 19, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Yi-Hung Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heat treatment apparatus and heat treatment method
Patent number
11,393,702
Issue date
Jul 19, 2022
Tokyo Electron Limited
Shinsuke Takaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Baking equipment for use in display panel manufacturing process
Patent number
11,366,482
Issue date
Jun 21, 2022
TCL China Star Optoelectronics Technology Co., Ltd.
Xiaolong Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heater lift assembly spring damper
Patent number
11,367,632
Issue date
Jun 21, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Kai-Wen Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for treating substrate
Patent number
11,282,720
Issue date
Mar 22, 2022
Semes Co., Ltd.
Jong Seok Seo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Gas flow control for millisecond anneal system
Patent number
11,255,606
Issue date
Feb 22, 2022
Mattson Technology, Inc.
Christian Pfahler
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
LIGHT IRRADIATION TYPE HEAT TREATMENT APPARATUS
Publication number
20240105474
Publication date
Mar 28, 2024
SCREEN Holdings Co., Ltd.
Takahiro KITAZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DISPLACEMENT CONTROL DEVICE FOR SEISMIC EVENTS
Publication number
20240084954
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chuan-Chieh Chiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER HEATING APPARATUS
Publication number
20240068748
Publication date
Feb 29, 2024
Samsung Electronics Co., Ltd.
Joohee KIM
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Application
SUBSTRATE HEAT-TREATING APPARATUS USING LASER LIGHT-EMITTING DEVICE
Publication number
20240071787
Publication date
Feb 29, 2024
Viatron Co., Ltd.
Hyoung June Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING CHAMBER WITH FILAMENT LAMPS HAVING NONUNIF...
Publication number
20240055279
Publication date
Feb 15, 2024
ASM IP HOLDING B.V.
Shiva K.T. Rajavelu Muralidhar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR LAMP HOUSING CRACK DETECTION
Publication number
20240027295
Publication date
Jan 25, 2024
Philip MATHEW
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
Publication number
20240030049
Publication date
Jan 25, 2024
TOKYO ELECTRON LIMITED
Yukinobu OTSUKA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SPOT HEATING BY MOVING A BEAM WITH HORIZONTAL ROTARY MOTION
Publication number
20230369077
Publication date
Nov 16, 2023
Applied Materials, Inc.
Shu-Kwan Danny LAU
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LOAD LOCK FAST PUMP VENT
Publication number
20230335414
Publication date
Oct 19, 2023
BROOKS AUTOMATION US, LLC
Christopher HOFMEISTER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Magnetic Annealing Equipment and Method
Publication number
20230304741
Publication date
Sep 28, 2023
TOKYO ELECTRON LIMITED
Ian Colgan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIGHT-EMISSION HEAT TREATMENT APPARATUS
Publication number
20230290654
Publication date
Sep 14, 2023
SCREEN Holdings Co., Ltd.
Ryuta TOBE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20230282505
Publication date
Sep 7, 2023
Kokusai Electric Corporation
Atsushi MORIYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEATING UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME
Publication number
20230268203
Publication date
Aug 24, 2023
SEMES CO., LTD.
Jin Taek Oh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DISPLACEMENT CONTROL DEVICE FOR SEISMIC EVENTS
Publication number
20230265961
Publication date
Aug 24, 2023
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Chuan-Chieh Chiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PURGE CLEAN OF LOW PRESSURE FURNACE
Publication number
20230265557
Publication date
Aug 24, 2023
SHANGHAI HUALI MICROELECTRONICS CORPORATION
Yuhong LANG
B08 - CLEANING
Information
Patent Application
CONTINUOUS PRODUCTION OF NANOFORESTS
Publication number
20230264960
Publication date
Aug 24, 2023
University of Hawai'i
Mohammad Naghi Ghasemi-Nejhad
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
RAPID THERMAL PROCESSING METHOD AND RAPID THERMAL PROCESSING DEVICE
Publication number
20230235960
Publication date
Jul 27, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC
Wei LI
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Application
HEATING APPARATUS FOR A SEMICONDUCTOR DEVICE, HEATING SYSTEM, AND S...
Publication number
20230223283
Publication date
Jul 13, 2023
ALIBABA GROUP HOLDING LIMITED
Chengchun TANG
G05 - CONTROLLING REGULATING
Information
Patent Application
DYNAMIC AND LOCALIZED TEMPERATURE CONTROL FOR EPITAXIAL DEPOSITION...
Publication number
20230223284
Publication date
Jul 13, 2023
Applied Materials, Inc.
Sathya Shrinivas CHARY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20230213283
Publication date
Jul 6, 2023
SEMES CO., LTD.
Juyeon CHO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH PRESSURE HEAT TREATMENT APPARATUS
Publication number
20230204288
Publication date
Jun 29, 2023
HPSP Co., Ltd.
Kun Young LIM
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Application
WAFER BAKING APPARATUS
Publication number
20230187236
Publication date
Jun 15, 2023
Samsung Electronics Co., Ltd.
Wonguk Seo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
Publication number
20230106341
Publication date
Apr 6, 2023
Kokusai Electric Corporation
Aiko UMEDA
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Application
FURNACE OPENING STRUCTURE, SUBSTRATE PROCESSING APPARATUS AND METHO...
Publication number
20230089509
Publication date
Mar 23, 2023
Kokusai Electric Corporation
Shinya MORITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR PROCESSING A SUBSTRATE AND METHOD OF OPERATING THE SAME
Publication number
20230082802
Publication date
Mar 16, 2023
SK HYNIX INC.
Min Jin JUNG
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Application
SYSTEM, METHOD AND DEVICE FOR TEMPERATURE CONTROL
Publication number
20230029782
Publication date
Feb 2, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC
Guoqing ZHANG
G05 - CONTROLLING REGULATING
Information
Patent Application
DIFFUSION FURNACE
Publication number
20230031706
Publication date
Feb 2, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC
Pengfei GAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LAMP FILAMENT HAVING A PITCH GRADIENT AND METHOD OF MAKING
Publication number
20230017852
Publication date
Jan 19, 2023
Applied Materials, Inc.
Vilen K. NESTOROV
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR PROCESSING A PLURALITY OF SUBSTRATES PROVIDED WITH AN...
Publication number
20230008684
Publication date
Jan 12, 2023
ASM IP HOLDING B.V.
Theodorus G.M. Oosterlaken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIGHT IRRADIATION TYPE HEAT TREATMENT METHOD AND HEAT TREATMENT APP...
Publication number
20220390175
Publication date
Dec 8, 2022
SCREEN Holdings Co., Ltd.
Ryuta TOBE
H01 - BASIC ELECTRIC ELEMENTS