Etch and refill

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CPC
Y10S148/05

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YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10USPC classification Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10S148/00Metal treatment

Current Industry

Y10S148/05Etch and refill

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method for dry etching compound materials
- Patent number 11,605,542
- Issue date Mar 14, 2023
- Tokyo Electron Limited
- Peter Ventzek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etch-resistant inkjet inks for manufacturing printed circuit boards
- Patent number 11,466,166
- Issue date Oct 11, 2022
- Agfa-Gevaert N.V.
- Johan Loccufier
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Method for dry etching compound materials
- Patent number 11,056,347
- Issue date Jul 6, 2021
- Tokyo Electron Limited
- Peter Ventzek
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Batch-processing method for super-high aspect ratio diffractive optics
- Patent number 10,183,375
- Issue date Jan 22, 2019
- Alcorix Co.
- Nicolaie A. Moldovan
- B24 - GRINDING POLISHING
Information Patent Grant
Hydride compounds with silicon and germanium core atoms and method...
- Patent number 8,568,681
- Issue date Oct 29, 2013
- Arizona Board of Regents, a Body Corporate of the State of Arizona acting for...
- John Kouvetakis
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Hydride compounds with silicon and germanium core atoms and method...
- Patent number 7,981,392
- Issue date Jul 19, 2011
- The Arizona Board of Regents, a body corporate of the state of Arizona acting...
- John Kouvetakis
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Low-temperature metal-induced crystallization of silicon-germanium...
- Patent number 7,501,331
- Issue date Mar 10, 2009
- Sandisk 3D LLC
- S. Brad Herner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Recessed shallow trench isolation structure nitride liner and metho...
- Patent number 6,960,818
- Issue date Nov 1, 2005
- Siemens Aktiengesellschaft
- Rajesh Rengarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Isolation structure having trench structures formed on both side of...
- Patent number 6,809,395
- Issue date Oct 26, 2004
- Micron Technology, Inc.
- Fernando Gonzales
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for processing a stent processed with tools containing magne...
- Patent number 6,780,338
- Issue date Aug 24, 2004
- MRI Devices Daum GmbH
- Wolfgang Daum
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Silicon dioxide etch process which protects metals
- Patent number 6,638,445
- Issue date Oct 28, 2003
- Micron Technology, Inc.
- Robert T. Rasmussen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having trenches and process for same
- Patent number 6,518,144
- Issue date Feb 11, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Tetsuya Nitta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Trench isolation for semiconductor device with lateral projections...
- Patent number 6,501,148
- Issue date Dec 31, 2002
- United Microelectronics Corporation
- Nobuyuki Tsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon shallow trench etching with round top corner by photoresist...
- Patent number 6,500,727
- Issue date Dec 31, 2002
- Taiwan Semiconductor Manufacturing Company
- Cheng-Ku Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 6,403,446
- Issue date Jun 11, 2002
- Hitachi, Ltd.
- Norio Ishitsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gettering regions and methods of forming gettering regions within a...
- Patent number 6,391,746
- Issue date May 21, 2002
- Micron Technology, Inc.
- Fernando Gonzalez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fuse in top level metal and in a step, process of making and proces...
- Patent number 6,331,739
- Issue date Dec 18, 2001
- Texas Instruments Incorporated
- Hideyuki Fukuhara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacture of an integrated circuit isolation structure
- Patent number 6,319,796
- Issue date Nov 20, 2001
- VLSI Technology, Inc.
- Olivier Laparra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon-on-insulator islands
- Patent number 6,319,333
- Issue date Nov 20, 2001
- Micron Technology, Inc.
- Wendell P. Noble
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated circuit insulator and method
- Patent number 6,313,010
- Issue date Nov 6, 2001
- Texas Instruments Incorporated
- Somnath S. Nag
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of jointly forming stacked capacitors and antifuses, method...
- Patent number 6,291,871
- Issue date Sep 18, 2001
- Micron Technology, Inc.
- Charles H. Dennison
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having a fuse
- Patent number 6,285,540
- Issue date Sep 4, 2001
- Samsung Electronics Co., Ltd.
- Dong-Hun Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fuse window guard ring structure for nitride capped self aligned co...
- Patent number 6,255,715
- Issue date Jul 3, 2001
- Taiwan Semiconductor Manufacturing Company
- Jhon-Jhy Liaw
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Trench and gate dielectric formation for semiconductor devices
- Patent number 6,245,638
- Issue date Jun 12, 2001
- Advanced Micro Devices
- Mark I. Gardner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduction of mechanical stress in shallow trench isolation process
- Patent number 6,221,733
- Issue date Apr 24, 2001
- Lattice Semiconductor Corporation
- Xiao-Yu Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to enhance global planarization of silicon oxide surface for...
- Patent number 6,221,560
- Issue date Apr 24, 2001
- Chartered Semiconductor Manufacturing Ltd.
- Choi Pheng Soo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of jointly forming stacked capacitors and antifuses, method...
- Patent number 6,221,729
- Issue date Apr 24, 2001
- Micron Technology, Inc.
- Charles H. Dennison
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for forming polysilicon/germanium thin films without german...
- Patent number 6,214,681
- Issue date Apr 10, 2001
- Advanced Micro Devices, Inc.
- Bin Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon-on-insulator islands and method for their formation
- Patent number 6,211,039
- Issue date Apr 3, 2001
- Micron Technology, Inc.
- Wendell P. Noble
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming shallow trench isolation
- Patent number 6,207,535
- Issue date Mar 27, 2001
- United Microelectronics Corp.
- Kan-Yuan Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method for Dry Etching Compound Materials
- Publication number 20210296132
- Publication date Sep 23, 2021
- TOKYO ELECTRON LIMITED
- Peter Ventzek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Hydride Compounds with Silicon and Germanium Core Atoms and method...
- Publication number 20120020864
- Publication date Jan 26, 2012
- Arizona State
- John Kouvetakis
- C01 - INORGANIC CHEMISTRY
Information Patent Application
Hydride Compounds With Silicon And Germanium Core Atoms And Method...
- Publication number 20070297967
- Publication date Dec 27, 2007
- Arizona Board of Regents
- Jonh Kouvetakis
- C01 - INORGANIC CHEMISTRY
Information Patent Application
Low-temperature metal-induced crystallization of silicon-germanium...
- Publication number 20070246764
- Publication date Oct 25, 2007
- SanDisk 3D, LLC
- S. Brad Herner
- C30 - CRYSTAL GROWTH
Information Patent Application
Stent, method for processing stent, and method of stenting a patient
- Publication number 20060276876
- Publication date Dec 7, 2006
- Wolfgang Daum
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
LOCOS trench isolation structures
- Publication number 20060231902
- Publication date Oct 19, 2006
- Fernando Gonzalez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Locos trench isolation structure
- Publication number 20050012158
- Publication date Jan 20, 2005
- Micron Technology, Inc.
- Fernando Gonzalez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Stent, method for processing stent, and method of stenting a patient
- Publication number 20040211491
- Publication date Oct 28, 2004
- Wolfgang Daum
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
Semiconductor device and process for producing the same
- Publication number 20030119276
- Publication date Jun 26, 2003
- Norio Ishitsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Material for nuclear spin tomography MRI or magnetic resonance imag...
- Publication number 20030078675
- Publication date Apr 24, 2003
- Wolfgang Daum
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
Silicon-germanium-carbon compositions and processes thereof
- Publication number 20020081861
- Publication date Jun 27, 2002
- McDonald Robinson
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF
- Publication number 20020053709
- Publication date May 9, 2002
- NOBUYUKI TSUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device having trenches and process for same
- Publication number 20020040994
- Publication date Apr 11, 2002
- Mitsubishi Denki Kabushiki Kaisha
- Tetsuya Nitta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gettering regions and methods of forming gettering regions within a...
- Publication number 20020022346
- Publication date Feb 21, 2002
- Fernando Gonzalez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON-ON-INSULATOR ISLANDS
- Publication number 20010042871
- Publication date Nov 22, 2001
- WENDELL P NOBLE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON DIOXIDE ETCH PROCESS WHICH PROTECTS METALS
- Publication number 20010038090
- Publication date Nov 8, 2001
- ROBERT T. RASMUSSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE HAVING A SHALLOW TRENCH ISOLATION STRUCTURE AN...
- Publication number 20010011759
- Publication date Aug 9, 2001
- KWANG MYOUNG RHO
- H01 - BASIC ELECTRIC ELEMENTS

Etch and refill

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for dry etching compound materials

Etch-resistant inkjet inks for manufacturing printed circuit boards

Method for dry etching compound materials

Batch-processing method for super-high aspect ratio diffractive optics

Hydride compounds with silicon and germanium core atoms and method...

Hydride compounds with silicon and germanium core atoms and method...

Low-temperature metal-induced crystallization of silicon-germanium...

Recessed shallow trench isolation structure nitride liner and metho...

Isolation structure having trench structures formed on both side of...

Method for processing a stent processed with tools containing magne...

Silicon dioxide etch process which protects metals

Semiconductor device having trenches and process for same

Trench isolation for semiconductor device with lateral projections...

Silicon shallow trench etching with round top corner by photoresist...

Method for manufacturing semiconductor device

Gettering regions and methods of forming gettering regions within a...

Fuse in top level metal and in a step, process of making and proces...

Manufacture of an integrated circuit isolation structure

Silicon-on-insulator islands

Integrated circuit insulator and method

Method of jointly forming stacked capacitors and antifuses, method...

Semiconductor device having a fuse

Fuse window guard ring structure for nitride capped self aligned co...

Trench and gate dielectric formation for semiconductor devices

Reduction of mechanical stress in shallow trench isolation process

Method to enhance global planarization of silicon oxide surface for...

Method of jointly forming stacked capacitors and antifuses, method...

Process for forming polysilicon/germanium thin films without german...

Silicon-on-insulator islands and method for their formation

Method of forming shallow trench isolation

Patents Applicationslast 30 patents

Method for Dry Etching Compound Materials

Hydride Compounds with Silicon and Germanium Core Atoms and method...

Hydride Compounds With Silicon And Germanium Core Atoms And Method...

Low-temperature metal-induced crystallization of silicon-germanium...

Stent, method for processing stent, and method of stenting a patient

LOCOS trench isolation structures

Locos trench isolation structure

Stent, method for processing stent, and method of stenting a patient

Semiconductor device and process for producing the same

Material for nuclear spin tomography MRI or magnetic resonance imag...

Silicon-germanium-carbon compositions and processes thereof

SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF

Semiconductor device having trenches and process for same

Gettering regions and methods of forming gettering regions within a...

SILICON-ON-INSULATOR ISLANDS

SILICON DIOXIDE ETCH PROCESS WHICH PROTECTS METALS

SEMICONDUCTOR DEVICE HAVING A SHALLOW TRENCH ISOLATION STRUCTURE AN...