Exposing sequentially with the same light pattern different positions of the same surface

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G03F7/22

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GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/22Exposing sequentially with the same light pattern different positions of the same surface

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Patents Grantslast 30 patents

Information Patent Grant
Mask, exposure method and touch panel
- Patent number 12,050,397
- Issue date Jul 30, 2024
- Hefei Xinsheng Optoelectronics Technology Co., Ltd.
- Jie Lei
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Digital exposure machine and exposure control method thereof
- Patent number 11,971,662
- Issue date Apr 30, 2024
- BOE Technology Group Co., Ltd.
- Zhichong Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for dynamic lithographic exposure
- Patent number 11,880,140
- Issue date Jan 23, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jun-Yih Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Determination method and apparatus, program, information recording...
- Patent number 11,742,299
- Issue date Aug 29, 2023
- Nikon Corporation
- Yuichi Shibazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Custom photolithography masking via precision dispense process
- Patent number 11,626,286
- Issue date Apr 11, 2023
- Rockwell Collins, Inc.
- Jenny Calubayan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for dynamic lithographic exposure
- Patent number 11,520,237
- Issue date Dec 6, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jun-Yih Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Movable body apparatus, moving method, exposure apparatus, exposure...
- Patent number 11,187,999
- Issue date Nov 30, 2021
- Nikon Corporation
- Yasuo Aoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask, exposure method and touch display panel
- Patent number 11,169,438
- Issue date Nov 9, 2021
- Hefei Xinsheng Optoelectronics Technology Co., Ltd.
- Qitao Zheng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for collecting information used in image-error...
- Patent number 11,150,561
- Issue date Oct 19, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hung-Wen Cho
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for producing a structure with spatial encoded functionality
- Patent number 11,084,718
- Issue date Aug 10, 2021
- Max-Planck-Gesellschaft zur Forderung der Wissenschaften E.V.
- Metin Sitti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Exposure apparatus and exposure method, and flat panel display manu...
- Patent number 11,086,236
- Issue date Aug 10, 2021
- Nikon Corporation
- Akinori Shirato
- G02 - OPTICS
Information Patent Grant
Inspection apparatus and methods, substrates having metrology targe...
- Patent number 11,022,900
- Issue date Jun 1, 2021
- ASML Netherlands B.V.
- Simon Gijsbert Josephus Mathijssen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for dynamic lithographic exposure
- Patent number 11,003,089
- Issue date May 11, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jun-Yih Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask and fabrication method thereof, display panel and touch panel
- Patent number 10,859,920
- Issue date Dec 8, 2020
- BOE Technology Group Co., Ltd.
- Liqing Liao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection apparatus and methods, substrates having metrology targe...
- Patent number 10,761,432
- Issue date Sep 1, 2020
- ASML Netherlands B.V.
- Simon Gijsbert Josephus Mathijssen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and exposure method, and flat panel display manu...
- Patent number 10,732,517
- Issue date Aug 4, 2020
- Nikon Corporation
- Akinori Shirato
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for collecting information used in image-error...
- Patent number 10,712,651
- Issue date Jul 14, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hung-Wen Cho
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Movable body apparatus, moving method, exposure apparatus, exposure...
- Patent number 10,670,977
- Issue date Jun 2, 2020
- Nikon Corporation
- Yasuo Aoki
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for dynamic lithographic exposure
- Patent number 10,663,868
- Issue date May 26, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jun-Yih Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, surface position control method, exposure metho...
- Patent number 10,488,761
- Issue date Nov 26, 2019
- TOSHIBA MEMORY CORPORATION
- Yoshimitsu Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase shift mask
- Patent number 10,474,034
- Issue date Nov 12, 2019
- Samsung Electronics Co., Ltd.
- Il-yong Jang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of calibrating a reluctance actuator assembly, reluctance ac...
- Patent number 10,372,045
- Issue date Aug 6, 2019
- ASML Netherlands B.V.
- Johannes Antonius Gerardus Akkermans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing imprint master template
- Patent number 10,281,817
- Issue date May 7, 2019
- Samsung Display Co., Ltd.
- Taewoo Kim
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, method of fabricating periodic microstructure, met...
- Patent number 10,101,652
- Issue date Oct 16, 2018
- Ushio Denki Kabushiki Kaisha
- Daisuke Yajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photomask and method of forming the same and methods of manufacturi...
- Patent number 9,989,857
- Issue date Jun 5, 2018
- Samsung Electronics Co., Ltd.
- Il-yong Jang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing a structure on a substrate
- Patent number 9,983,480
- Issue date May 29, 2018
- Ushio Denki Kabushiki Kaisha
- Daisuke Yajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection apparatus and methods, substrates having metrology targe...
- Patent number 9,958,791
- Issue date May 1, 2018
- ASML Netherlands B.V.
- Simon Gijsbert Josephus Mathijssen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Roll to roll light exposure system
- Patent number 9,835,951
- Issue date Dec 5, 2017
- Samsung Display Co., Ltd.
- Jae Hyuk Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment exposure method and method of fabricating display substrate
- Patent number 9,715,173
- Issue date Jul 25, 2017
- BOE Technology Group Co., Ltd.
- Xuequan Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Production of a volume object by lithography, having improved spati...
- Patent number 9,632,420
- Issue date Apr 25, 2017
- PRODWAYS
- André-Luc Allanic
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
Radiation-Sensitive Composition, Pattern Formation Method, and Phot...
- Publication number 20250004375
- Publication date Jan 2, 2025
- JSR Corporation
- Ryuichi NEMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MONITOR STRUCTURE FOR PHOTORESIST THICKNESS IN TRENCH
- Publication number 20240361699
- Publication date Oct 31, 2024
- TEXAS INSTRUMENTS INCORPORATED
- Yunlong Liu
- G01 - MEASURING TESTING
Information Patent Application
MASK, EXPOSURE METHOD AND TOUCH PANEL
- Publication number 20240345470
- Publication date Oct 17, 2024
- HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Jie LEI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PHOTOLITHOGRAPHY PATTERNING METHOD
- Publication number 20240176245
- Publication date May 30, 2024
- Korea Advanced Institute of Science and Technology
- Jungchul SONG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POLYMER, COMPOSITION, METHOD FOR PRODUCING POLYMER, COMPOSITION FOR...
- Publication number 20240117102
- Publication date Apr 11, 2024
- Mitsubishi Gas Chemical Company, Inc.
- Kodai MATSUURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY SYSTEM AND METHODS
- Publication number 20230400763
- Publication date Dec 14, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Cheng Hung TSAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR SELECTING PHOTOSENSITI...
- Publication number 20230104391
- Publication date Apr 6, 2023
- Kazuyuki MITSUKURA
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR DYNAMIC LITHOGRAPHIC EXPOSURE
- Publication number 20230075146
- Publication date Mar 9, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jun-Yih Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK, EXPOSURE METHOD AND TOUCH PANEL
- Publication number 20220342295
- Publication date Oct 27, 2022
- HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Jie LEI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LITHOGRAPHY SYSTEM AND METHODS
- Publication number 20220334472
- Publication date Oct 20, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Cheng Hung TSAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETERMINATION METHOD AND APPARATUS, PROGRAM, INFORMATION RECORDING...
- Publication number 20210313278
- Publication date Oct 7, 2021
- Nikon Corporation
- Yuichi Shibazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR DYNAMIC LITHOGRAPHIC EXPOSURE
- Publication number 20210255549
- Publication date Aug 19, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Jun-Yih Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DIGITAL EXPOSURE MACHINE AND EXPOSURE CONTROL METHOD THEREOF
- Publication number 20210132501
- Publication date May 6, 2021
- BOE TECHNOLOGY GROUP CO., LTD.
- Zhichong Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Fabricating Devices with Reduced Isolation Regions
- Publication number 20200409273
- Publication date Dec 31, 2020
- Spin Memory, Inc.
- Amitay Levi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Inspection Apparatus and Methods, Substrates Having Metrology Targe...
- Publication number 20200348605
- Publication date Nov 5, 2020
- ASML NETHERLANDS B.V.
- Simon Gijsbert Josephus MATHIJSSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR COLLECTING INFORMATION USED IN IMAGE-ERROR...
- Publication number 20200348586
- Publication date Nov 5, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hung-Wen CHO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Method, Lithographic Product and Lithographic Material
- Publication number 20200341373
- Publication date Oct 29, 2020
- Shanghai Bixiufu Enterprise Management Co., Ltd.
- Lijiang WANG
- G02 - OPTICS
Information Patent Application
EXPOSURE APPARATUS AND EXPOSURE METHOD, AND FLAT PANEL DISPLAY MANU...
- Publication number 20200326638
- Publication date Oct 15, 2020
- Nikon Corporation
- Akinori SHIRATO
- G01 - MEASURING TESTING
Information Patent Application
MOVABLE BODY APPARATUS, MOVING METHOD, EXPOSURE APPARATUS, EXPOSURE...
- Publication number 20200264523
- Publication date Aug 20, 2020
- Nikon Corporation
- Yasuo AOKI
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR DYNAMIC LITHOGRAPHIC EXPOSURE
- Publication number 20200241427
- Publication date Jul 30, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Jun-Yih Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK, EXPOSURE METHOD AND TOUCH DISPLAY PANEL
- Publication number 20200103750
- Publication date Apr 2, 2020
- HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Qitao Zheng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MOVABLE BODY APPARATUS, MOVING METHOD, EXPOSURE APPARATUS, EXPOSURE...
- Publication number 20190384179
- Publication date Dec 19, 2019
- Nikon Corporation
- Yasuo AOKI
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR COLLECTING INFORMATION USED IN IMAGE-ERROR...
- Publication number 20190137866
- Publication date May 9, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hung-Wen CHO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EXPOSURE APPARATUS, SURFACE POSITION CONTROL METHOD, EXPOSURE METHO...
- Publication number 20190079402
- Publication date Mar 14, 2019
- Toshiba Memory Corporation
- Yoshimitsu Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND EXPOSURE METHOD, AND FLAT PANEL DISPLAY MANU...
- Publication number 20180275533
- Publication date Sep 27, 2018
- Nikon Corporation
- Akinori SHIRATO
- G01 - MEASURING TESTING
Information Patent Application
Inspection Apparatus and Methods, Substrates Having Metrology Targe...
- Publication number 20180239263
- Publication date Aug 23, 2018
- ASML NETHERLANDS B.V.
- Simon Gijsbert Josephus Mathijssen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHASE SHIFT MASK
- Publication number 20180196348
- Publication date Jul 12, 2018
- Samsung Electronics Co., Ltd.
- Il-yong JANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MANUFACTURING IMPRINT MASTER TEMPLATE
- Publication number 20180088461
- Publication date Mar 29, 2018
- SAMSUNG DISPLAY CO., LTD.
- Taewoo KIM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR DYNAMIC LITHOGRAPHIC EXPOSURE
- Publication number 20170212423
- Publication date Jul 27, 2017
- Taiwan Semiconductor Manufacturing Co., LTD
- Jun-Yih Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Inspection Apparatus and Methods, Substrates Having Metrology Targe...
- Publication number 20160274472
- Publication date Sep 22, 2016
- ASML NETHERLANDS B.V.
- Simon Gijsbert Josephus MATHIJSSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Exposing sequentially with the same light pattern different positions of the same surface

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Mask, exposure method and touch panel

Digital exposure machine and exposure control method thereof

Method and apparatus for dynamic lithographic exposure

Determination method and apparatus, program, information recording...

Custom photolithography masking via precision dispense process

Method and apparatus for dynamic lithographic exposure

Movable body apparatus, moving method, exposure apparatus, exposure...

Mask, exposure method and touch display panel

Method and apparatus for collecting information used in image-error...

Method for producing a structure with spatial encoded functionality

Exposure apparatus and exposure method, and flat panel display manu...

Inspection apparatus and methods, substrates having metrology targe...

Method and apparatus for dynamic lithographic exposure

Mask and fabrication method thereof, display panel and touch panel

Inspection apparatus and methods, substrates having metrology targe...

Exposure apparatus and exposure method, and flat panel display manu...

Method and apparatus for collecting information used in image-error...

Movable body apparatus, moving method, exposure apparatus, exposure...

Method and apparatus for dynamic lithographic exposure

Exposure apparatus, surface position control method, exposure metho...

Phase shift mask

Method of calibrating a reluctance actuator assembly, reluctance ac...

Method of manufacturing imprint master template

Exposure method, method of fabricating periodic microstructure, met...

Photomask and method of forming the same and methods of manufacturi...

Method of manufacturing a structure on a substrate

Inspection apparatus and methods, substrates having metrology targe...

Roll to roll light exposure system

Alignment exposure method and method of fabricating display substrate

Production of a volume object by lithography, having improved spati...

Patents Applicationslast 30 patents

Radiation-Sensitive Composition, Pattern Formation Method, and Phot...

MONITOR STRUCTURE FOR PHOTORESIST THICKNESS IN TRENCH

MASK, EXPOSURE METHOD AND TOUCH PANEL

PHOTOLITHOGRAPHY PATTERNING METHOD

POLYMER, COMPOSITION, METHOD FOR PRODUCING POLYMER, COMPOSITION FOR...

LITHOGRAPHY SYSTEM AND METHODS

PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR SELECTING PHOTOSENSITI...

METHOD AND APPARATUS FOR DYNAMIC LITHOGRAPHIC EXPOSURE

MASK, EXPOSURE METHOD AND TOUCH PANEL

LITHOGRAPHY SYSTEM AND METHODS

DETERMINATION METHOD AND APPARATUS, PROGRAM, INFORMATION RECORDING...

METHOD AND APPARATUS FOR DYNAMIC LITHOGRAPHIC EXPOSURE

DIGITAL EXPOSURE MACHINE AND EXPOSURE CONTROL METHOD THEREOF

Fabricating Devices with Reduced Isolation Regions

Inspection Apparatus and Methods, Substrates Having Metrology Targe...

METHOD AND APPARATUS FOR COLLECTING INFORMATION USED IN IMAGE-ERROR...

Lithographic Method, Lithographic Product and Lithographic Material

EXPOSURE APPARATUS AND EXPOSURE METHOD, AND FLAT PANEL DISPLAY MANU...

MOVABLE BODY APPARATUS, MOVING METHOD, EXPOSURE APPARATUS, EXPOSURE...

METHOD AND APPARATUS FOR DYNAMIC LITHOGRAPHIC EXPOSURE

MASK, EXPOSURE METHOD AND TOUCH DISPLAY PANEL

MOVABLE BODY APPARATUS, MOVING METHOD, EXPOSURE APPARATUS, EXPOSURE...

METHOD AND APPARATUS FOR COLLECTING INFORMATION USED IN IMAGE-ERROR...

EXPOSURE APPARATUS, SURFACE POSITION CONTROL METHOD, EXPOSURE METHO...

EXPOSURE APPARATUS AND EXPOSURE METHOD, AND FLAT PANEL DISPLAY MANU...

Inspection Apparatus and Methods, Substrates Having Metrology Targe...

PHASE SHIFT MASK

METHOD OF MANUFACTURING IMPRINT MASTER TEMPLATE

METHOD AND APPARATUS FOR DYNAMIC LITHOGRAPHIC EXPOSURE

Inspection Apparatus and Methods, Substrates Having Metrology Targe...