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Industry

CPC
H01S3/2258

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Parent Industries

HELECTRICITY H01Electric elements H01SDEVICES USING STIMULATED EMISSION H01S3/00Lasers

Current Industry

H01S3/2258F2

Industries

Patents Grantslast 30 patents

Information Patent Grant
Electrode for a discharge chamber
- Patent number 11,749,520
- Issue date Sep 5, 2023
- Cymer, LLC
- Leyla Ramin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrode for a discharge chamber
- Patent number 11,127,582
- Issue date Sep 21, 2021
- Cymer, LLC
- Leyla Ramin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser gas regeneration system and laser system
- Patent number 10,879,664
- Issue date Dec 29, 2020
- Gigaphoton Inc.
- Masanori Yashiro
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Laser unit and non-transitory computer-readable storage medium
- Patent number 10,164,396
- Issue date Dec 25, 2018
- Gigaphoton Inc.
- Akihiko Kurosu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas mixture control in a gas discharge light source
- Patent number 10,090,629
- Issue date Oct 2, 2018
- Cymer, LLC
- Rahul Ahlawat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Excimer laser apparatus and excimer laser system
- Patent number 9,954,340
- Issue date Apr 24, 2018
- Gigaphoton Inc.
- Tooru Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser unit and non-transitory computer-readable storage medium
- Patent number 9,825,417
- Issue date Nov 21, 2017
- Gigaphoton Inc.
- Akihiko Kurosu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas mixture control in a gas discharge light source
- Patent number 9,819,136
- Issue date Nov 14, 2017
- Cymer, LLC
- Rahul Ahlawat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser chamber
- Patent number 9,722,385
- Issue date Aug 1, 2017
- Gigaphoton Inc.
- Hiroyuki Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Excimer laser apparatus and excimer laser system
- Patent number 9,425,576
- Issue date Aug 23, 2016
- Gigaphoton Inc.
- Tooru Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of controlling laser apparatus and laser apparatus
- Patent number 9,350,133
- Issue date May 24, 2016
- Gigaphoton Inc.
- Osamu Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Discharge-pumped gas laser device
- Patent number 9,225,139
- Issue date Dec 29, 2015
- Gigaphoton Inc.
- Akihiko Kurosu
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Discharge-pumped gas laser device
- Patent number 9,059,554
- Issue date Jun 16, 2015
- Gigaphoton Inc.
- Akihiko Kurosu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser system
- Patent number 8,908,735
- Issue date Dec 9, 2014
- Cymer, LLC
- Alexander I. Ershov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser system
- Patent number 8,170,078
- Issue date May 1, 2012
- Cymer, Inc.
- Alexander I. Ershov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser system
- Patent number 7,885,309
- Issue date Feb 8, 2011
- Cymer, Inc.
- Alexander I. Ershov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Timing control for two-chamber gas discharge laser system
- Patent number 7,852,899
- Issue date Dec 14, 2010
- Cymer, Inc.
- Alexander I. Ershov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Line narrowed laser apparatus
- Patent number 7,756,183
- Issue date Jul 13, 2010
- Komatsu Ltd.
- Osamu Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and compositions for diagnosing carcinomas
- Patent number 7,745,159
- Issue date Jun 29, 2010
- Nathalie B Scholler
- G01 - MEASURING TESTING
Information Patent Grant
Laser system
- Patent number 7,643,529
- Issue date Jan 5, 2010
- Cymer, Inc.
- Daniel J. W. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Very narrow band, two chamber, high rep-rate gas discharge laser sy...
- Patent number 7,567,607
- Issue date Jul 28, 2009
- Cymer, Inc.
- David S. Knowles
- G01 - MEASURING TESTING
Information Patent Grant
Cathodes for fluorine gas discharge lasers
- Patent number 7,535,948
- Issue date May 19, 2009
- Cymer, Inc.
- Thomas D. Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser spectral engineering for lithographic process
- Patent number 7,382,815
- Issue date Jun 3, 2008
- Cymer, Inc.
- Ronald L. Spangler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser output light pulse stretcher
- Patent number 7,369,597
- Issue date May 6, 2008
- Cymer, Inc.
- Scot T. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
DUV light source optical element improvements
- Patent number 7,346,093
- Issue date Mar 18, 2008
- Cymer, Inc.
- Richard L. Sandstrom
- G01 - MEASURING TESTING
Information Patent Grant
Excimer or molecular fluorine laser system with precision timing
- Patent number 7,308,013
- Issue date Dec 11, 2007
- Lambda Physik AG
- Dirk Basting
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser spectral engineering for lithographic process
- Patent number 7,298,770
- Issue date Nov 20, 2007
- Cymer, Inc.
- Ronald L. Spangler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas discharge MOPA laser spectral analysis module
- Patent number 7,292,343
- Issue date Nov 6, 2007
- Cymer, Inc.
- Rajasekhar M Rao
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for controlling the output of a gas discharge...
- Patent number 7,277,464
- Issue date Oct 2, 2007
- Cymer, Inc.
- John A. Rule
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Line selected F2 two chamber laser system
- Patent number 7,218,661
- Issue date May 15, 2007
- Cymer, Inc.
- David S. Knowles
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
ELECTRODE FOR A DISCHARGE CHAMBER
- Publication number 20210384027
- Publication date Dec 9, 2021
- CYMER, LLC
- Leyla Ramin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRODE FOR A DISCHARGE CHAMBER
- Publication number 20200328074
- Publication date Oct 15, 2020
- CYMER, LLC
- Leyla Ramin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER GAS REGENERATION SYSTEM AND LASER SYSTEM
- Publication number 20190237928
- Publication date Aug 1, 2019
- Gigaphoton Inc.
- Masanori YASHIRO
- C01 - INORGANIC CHEMISTRY
Information Patent Application
LASER UNIT AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM
- Publication number 20190081451
- Publication date Mar 14, 2019
- Gigaphoton Inc.
- Akihiko KUROSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER UNIT AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM
- Publication number 20180026414
- Publication date Jan 25, 2018
- Gigaphoton Inc.
- Akihiko KUROSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER CHAMBER
- Publication number 20160308324
- Publication date Oct 20, 2016
- GIGAPHOTON INC.
- Hiroyuki IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISCHARGE-PUMPED GAS LASER DEVICE
- Publication number 20140105238
- Publication date Apr 17, 2014
- Gigaphoton Inc.
- Akihiko KUROSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXCIMER LASER APPARATUS AND EXCIMER LASER SYSTEM
- Publication number 20130100980
- Publication date Apr 25, 2013
- Gigaphoton Inc.
- Tooru ABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser System
- Publication number 20120002687
- Publication date Jan 5, 2012
- Cymer, Inc.
- Alexander I. Ershov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and Compositions for Diagnosing Carcinomas
- Publication number 20110104675
- Publication date May 5, 2011
- Pacific Northwest Research Institute
- Nathalie Scholler
- C07 - ORGANIC CHEMISTRY
Information Patent Application
Laser System
- Publication number 20110102759
- Publication date May 5, 2011
- Cymer, Inc.
- Alexander I. Ershov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser system
- Publication number 20100108913
- Publication date May 6, 2010
- Cymer, Inc.
- Alexander I. Ershov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser system
- Publication number 20090296755
- Publication date Dec 3, 2009
- Cymer, Inc.
- Daniel J.W. Brown
- G02 - OPTICS
Information Patent Application
Laser system
- Publication number 20080225904
- Publication date Sep 18, 2008
- Cymer, Inc.
- Daniel J.W. Brown
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Gas discharge laser light source beam delivery unit
- Publication number 20070160103
- Publication date Jul 12, 2007
- Cymer, Inc.
- Palash P. Das
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Line narrowed laser apparatus
- Publication number 20070014326
- Publication date Jan 18, 2007
- KOMATSU LTD. and USHIO INC.
- Osamu Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cathodes for fluorine gas discharge lasers
- Publication number 20060274809
- Publication date Dec 7, 2006
- Thomas D. Steiger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Timing control for two-chamber gas discharge laser system
- Publication number 20060251135
- Publication date Nov 9, 2006
- Alexander I. Ershov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Very narrow band, two chamber, high rep-rate gas discharge laser sy...
- Publication number 20060126697
- Publication date Jun 15, 2006
- Cymer, Inc.
- David S. Knowles
- G01 - MEASURING TESTING
Information Patent Application
VERY NARROW BAND, TWO CHAMBER, HIGH REP-RATE GAS DISCHARGE LASER SY...
- Publication number 20050271109
- Publication date Dec 8, 2005
- Cymer, Inc.
- David S. Knowles
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for controlling the output of a gas discharge...
- Publication number 20050238077
- Publication date Oct 27, 2005
- John A. Rule
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for controlling the output of a gas discharge...
- Publication number 20050185690
- Publication date Aug 25, 2005
- John A. Rule
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas discharge MOPA laser spectral analysis module
- Publication number 20050174576
- Publication date Aug 11, 2005
- Cymer, Inc.
- Rajasekhar M. Rao
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for controlling the output of a gas discharge...
- Publication number 20050135451
- Publication date Jun 23, 2005
- John A. Rule
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser output light pulse stretcher
- Publication number 20050105579
- Publication date May 19, 2005
- Scot T. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Laser spectral engineering for lithographic process
- Publication number 20050068997
- Publication date Mar 31, 2005
- Cymer, Inc.
- Ronald L. Spangler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GAS DISCHARGE MOPA LASER SPECTRAL ANALYSIS MODULE
- Publication number 20050046856
- Publication date Mar 3, 2005
- Rajasekhar M. Rao
- G01 - MEASURING TESTING
Information Patent Application
Laser spectral engineering for lithographic process
- Publication number 20050041701
- Publication date Feb 24, 2005
- Ronald L. Spangler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Excimer or molecular fluorine laser system with precision timing
- Publication number 20050031004
- Publication date Feb 10, 2005
- Dirk Basting
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optical elements with protective undercoating
- Publication number 20050025882
- Publication date Feb 3, 2005
- William N. Partlo
- G02 - OPTICS

F2

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Electrode for a discharge chamber

Electrode for a discharge chamber

Laser gas regeneration system and laser system

Laser unit and non-transitory computer-readable storage medium

Gas mixture control in a gas discharge light source

Excimer laser apparatus and excimer laser system

Laser unit and non-transitory computer-readable storage medium

Gas mixture control in a gas discharge light source

Laser chamber

Excimer laser apparatus and excimer laser system

Method of controlling laser apparatus and laser apparatus

Discharge-pumped gas laser device

Discharge-pumped gas laser device

Laser system

Laser system

Laser system

Timing control for two-chamber gas discharge laser system

Line narrowed laser apparatus

Methods and compositions for diagnosing carcinomas

Laser system

Very narrow band, two chamber, high rep-rate gas discharge laser sy...

Cathodes for fluorine gas discharge lasers

Laser spectral engineering for lithographic process

Laser output light pulse stretcher

DUV light source optical element improvements

Excimer or molecular fluorine laser system with precision timing

Laser spectral engineering for lithographic process

Gas discharge MOPA laser spectral analysis module

Method and apparatus for controlling the output of a gas discharge...

Line selected F2 two chamber laser system

Patents Applicationslast 30 patents

ELECTRODE FOR A DISCHARGE CHAMBER

ELECTRODE FOR A DISCHARGE CHAMBER

LASER GAS REGENERATION SYSTEM AND LASER SYSTEM

LASER UNIT AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM

LASER UNIT AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM

LASER CHAMBER

DISCHARGE-PUMPED GAS LASER DEVICE

EXCIMER LASER APPARATUS AND EXCIMER LASER SYSTEM

Laser System

Methods and Compositions for Diagnosing Carcinomas

Laser System

Laser system

Laser system

Laser system

Gas discharge laser light source beam delivery unit

Line narrowed laser apparatus

Cathodes for fluorine gas discharge lasers

Timing control for two-chamber gas discharge laser system

Very narrow band, two chamber, high rep-rate gas discharge laser sy...

VERY NARROW BAND, TWO CHAMBER, HIGH REP-RATE GAS DISCHARGE LASER SY...

Method and apparatus for controlling the output of a gas discharge...

Method and apparatus for controlling the output of a gas discharge...

Gas discharge MOPA laser spectral analysis module

Method and apparatus for controlling the output of a gas discharge...

Laser output light pulse stretcher

Laser spectral engineering for lithographic process

GAS DISCHARGE MOPA LASER SPECTRAL ANALYSIS MODULE

Laser spectral engineering for lithographic process

Excimer or molecular fluorine laser system with precision timing

Optical elements with protective undercoating