Membership
Tour
Register
Log in
Feedback systems
Follow
Industry
CPC
H01J37/3299
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
Current Industry
H01J37/3299
Feedback systems
Industries
Overview
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Apparatus with switches to produce a waveform
Patent number
11,978,611
Issue date
May 7, 2024
Advanced Energy Industries, Inc.
Daniel Carter
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Glow plasma gas measurement signal processing
Patent number
11,948,774
Issue date
Apr 2, 2024
Servomex Group Limited
Bahram Alizadeh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Calibration jig and calibration method
Patent number
11,935,773
Issue date
Mar 19, 2024
Applied Materials, Inc.
Andrew Myles
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus, plasma state detection method, and pla...
Patent number
11,935,731
Issue date
Mar 19, 2024
Tokyo Electron Limited
Daisuke Hayashi
G08 - SIGNALLING
Information
Patent Grant
Plasma processing system and method of supporting plasma ignition
Patent number
11,923,174
Issue date
Mar 5, 2024
Tokyo Electron Limited
Yuji Kitamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method
Patent number
11,915,951
Issue date
Feb 27, 2024
HITACHI HIGH-TECH CORPORATION
Hiroyuki Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate support with real time force and film stress control
Patent number
11,915,913
Issue date
Feb 27, 2024
Applied Materials, Inc.
Wendell Glenn Boyd
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and methods for controlling ion energy distribution
Patent number
11,901,157
Issue date
Feb 13, 2024
Applied Materials, Inc.
Linying Cui
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for controlling a processing reactor
Patent number
11,894,220
Issue date
Feb 6, 2024
Applied Materials, Inc.
Michael Nichols
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Capacitance measurement without disconnecting from high power circuit
Patent number
11,881,381
Issue date
Jan 23, 2024
Lam Research Corporation
Sunil Kapoor
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Feedback system
Patent number
11,875,979
Issue date
Jan 16, 2024
SOLERAS ADVANCED COATINGS BV
Wilmert De Bosscher
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for microwave plasma assisted chemical vapor...
Patent number
11,854,775
Issue date
Dec 26, 2023
Board of Trustees of Michigan State University
Timothy A. Grotjohn
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Advanced temperature control for wafer carrier in plasma processing...
Patent number
11,837,479
Issue date
Dec 5, 2023
Applied Materials, Inc.
Fernando M. Silveira
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Broadband plasma processing systems and methods
Patent number
11,830,709
Issue date
Nov 28, 2023
Tokyo Electron Limited
Jianping Zhao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Real-time control of temperature in a plasma chamber
Patent number
11,823,875
Issue date
Nov 21, 2023
Lam Research Corporation
Changyou Jing
G05 - CONTROLLING REGULATING
Information
Patent Grant
Methods and apparatus for photomask processing
Patent number
11,803,118
Issue date
Oct 31, 2023
Applied Materials, Inc.
Banqiu Wu
B08 - CLEANING
Information
Patent Grant
Method of detecting radicals using mass spectrometry
Patent number
11,784,031
Issue date
Oct 10, 2023
Inficon, Inc.
Norbert Mueller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature control using temperature control element coupled to fa...
Patent number
11,749,509
Issue date
Sep 5, 2023
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Yorkman Ma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
RF power generator with analogue and digital detectors
Patent number
11,705,314
Issue date
Jul 18, 2023
Comet AG
Anton Labanc
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Feedback loop for controlling a pulsed voltage waveform
Patent number
11,699,572
Issue date
Jul 11, 2023
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for metastable activated radical selective stri...
Patent number
11,694,911
Issue date
Jul 4, 2023
Lam Research Corporation
Dengliang Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate support with real time force and film stress control
Patent number
11,676,802
Issue date
Jun 13, 2023
Applied Materials, Inc.
Wendell Glenn Boyd
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Nitride capping of titanium material to improve barrier properties
Patent number
11,664,229
Issue date
May 30, 2023
Applied Materials, Inc.
Yiyang Wan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for plasma processing
Patent number
11,646,178
Issue date
May 9, 2023
Tokyo Electron Limited
Yuji Onuma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System, method, and apparatus for controlling ion energy distributi...
Patent number
11,615,941
Issue date
Mar 28, 2023
Advanced Energy Industries, Inc.
Victor Brouk
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Synchronization between an excitation source and a substrate bias s...
Patent number
11,610,761
Issue date
Mar 21, 2023
Advanced Energy Industries, Inc.
Kevin Fairbairn
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus, data processing apparatus and data pro...
Patent number
11,605,530
Issue date
Mar 14, 2023
HITACHI HIGH-TECH CORPORATION
Seiichi Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and processing method
Patent number
11,581,170
Issue date
Feb 14, 2023
Tokyo Electron Limited
Shinji Kubota
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Impedance matching network and method with reduced memory requirements
Patent number
11,538,662
Issue date
Dec 27, 2022
RENO TECHNOLOGIES, INC.
Michael Gilliam Ulrich
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Impedance matching network and method with reduced memory requirements
Patent number
11,521,831
Issue date
Dec 6, 2022
RENO TECHNOLOGIES, INC.
Michael Gilliam Ulrich
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
BROADBAND SUPPLY CIRCUITRY FOR A PLASMA PROCESSING SYSTEM
Publication number
20240112886
Publication date
Apr 4, 2024
Applied Materials, Inc.
Tiefeng SHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROFILE TWISTING CONTROL IN DIELECTRIC ETCH
Publication number
20240105432
Publication date
Mar 28, 2024
LAM RESEARCH CORPORATION
Neil Macaraeg Mackie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SIGNAL PROCESSING SYSTEM AND POWER SUPPLY DEVICE HAVING A SIGNAL PR...
Publication number
20240105431
Publication date
Mar 28, 2024
TRUMPF Huettinger GmbH + Co. KG
Florian A. Maier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CAPACITANCE MEASUREMENT WITHOUT DISCONNECTING FROM HIGH POWER CIRCUIT
Publication number
20240096598
Publication date
Mar 21, 2024
LAM RESEARCH CORPORATION
Sunil Kapoor
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING DEVICE, PLASMA PROCESSING METHOD, AND SEMICONDUCT...
Publication number
20240096593
Publication date
Mar 21, 2024
KIOXIA Corporation
Toshiyuki SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM, METHOD, AND APPARATUS FOR CONTROLLING ION ENERGY DISTRIBUTI...
Publication number
20240071721
Publication date
Feb 29, 2024
Advanced Energy Industries, Inc.
Victor Brouk
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PULSED VOLTAGE COMPENSATION FOR PLASMA PROCESSING APPLICATIONS
Publication number
20240055244
Publication date
Feb 15, 2024
Applied Materials, Inc.
Shreeram Jyoti DASH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS TO CONTROL ION ENERGY
Publication number
20240055225
Publication date
Feb 15, 2024
Advanced Energy Industries, Inc.
Victor Brouk
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADVANCED TEMPERATURE CONTROL FOR WAFER CARRIER IN PLASMA PROCESSING...
Publication number
20240047246
Publication date
Feb 8, 2024
Applied Materials, Inc.
Fernando M. Silveira
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
REAL-TIME CONTROL OF TEMPERATURE IN A PLASMA CHAMBER
Publication number
20240047183
Publication date
Feb 8, 2024
LAM RESEARCH CORPORATION
Changyou Jing
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEASONING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20240030014
Publication date
Jan 25, 2024
TOKYO ELECTRON LIMITED
Yusuke SHIMIZU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA STATE ESTIMATION METHOD
Publication number
20240030015
Publication date
Jan 25, 2024
TOKYO ELECTRON LIMITED
Eiki KAMATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR PHOTOMASK PROCESSING
Publication number
20240027894
Publication date
Jan 25, 2024
Applied Materials, Inc.
Banqiu WU
B08 - CLEANING
Information
Patent Application
Plasma Processing with Broadband RF Waveforms
Publication number
20240021410
Publication date
Jan 18, 2024
TOKYO ELECTRON LIMITED
Jianping Zhao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTOR AND COMBINER FOR CONTROL LAW MODULES OF AN ADAPTIVE ENGINE
Publication number
20240014017
Publication date
Jan 11, 2024
Advanced Energy Industries, Inc.
Chad S. Samuels
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESS APPARATUS AND POWER CONTROL METHOD
Publication number
20240006170
Publication date
Jan 4, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jing WEI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADAPTIVE ENGINE WITH IDENTITY MAPPING MODULES
Publication number
20240006169
Publication date
Jan 4, 2024
Advanced Energy Industries, Inc.
Chad S. Samuels
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Temperature Control Using Temperature Control Element Coupled to Fa...
Publication number
20230411125
Publication date
Dec 21, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Yorkman Ma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REACTION CELL FOR SPECIES SENSING
Publication number
20230411130
Publication date
Dec 21, 2023
Applied Materials, Inc.
Abdullah Zafar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Systems and Methods for Plasma Process
Publication number
20230386789
Publication date
Nov 30, 2023
TOKYO ELECTRON LIMITED
Charles Schlechte
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS WITH SWITCHES TO PRODUCE A WAVEFORM
Publication number
20230377840
Publication date
Nov 23, 2023
Advanced Energy Industries, Inc.
Daniel Carter
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS TO PRODUCE A WAVEFORM
Publication number
20230377839
Publication date
Nov 23, 2023
Advanced Energy Industries, Inc.
Daniel Carter
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND METHOD FOR CONTROLLING SOURCE FREQU...
Publication number
20230369019
Publication date
Nov 16, 2023
TOKYO ELECTRON LIMITED
Gen TAMAMUSHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS TO CONTROL A WAVEFORM
Publication number
20230369016
Publication date
Nov 16, 2023
Advanced Energy Industries, Inc.
Daniel Carter
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods and Systems for Feedback Control in Plasma Processing Using...
Publication number
20230369033
Publication date
Nov 16, 2023
MKS Instruments, Inc.
Keith K. Koai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...
Publication number
20230369076
Publication date
Nov 16, 2023
LAM RESEARCH CORPORATION
Dengliang Yang
B08 - CLEANING
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20230360893
Publication date
Nov 9, 2023
SEMES CO., LTD.
DUKHYUN SON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR DETECTING EXCURSION IN PLASMA PROCESSING
Publication number
20230352284
Publication date
Nov 2, 2023
FORTH-RITE TECHNOLOGIES, LLC
Terry R. Turner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20230343567
Publication date
Oct 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Liang Yu CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NON-INVASIVE MEASUREMENT OF PLASMA SYSTEMS
Publication number
20230335382
Publication date
Oct 19, 2023
Dublin City University
Patrick McNally
H01 - BASIC ELECTRIC ELEMENTS