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Feeding, loading or unloading work specially adapted to lapping
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Industry
CPC
B24B37/345
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Parent Industries
B
PERFORMING OPERATIONS TRANSPORTING
B24
Grinding technology
B24B
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
B24B37/00
Lapping machines or devices Accessories
Current Industry
B24B37/345
Feeding, loading or unloading work specially adapted to lapping
Industries
Overview
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Channel cut polishing machine
Patent number
12,134,164
Issue date
Nov 5, 2024
UChicago Argonne, LLC
Elina Kasman
B24 - GRINDING POLISHING
Information
Patent Grant
Automated dry-in dry-out dual side polishing of silicon substrates...
Patent number
12,094,740
Issue date
Sep 17, 2024
Applied Materials, Inc.
Manoj A. Gajendra
B08 - CLEANING
Information
Patent Grant
Processing method of workpiece
Patent number
12,064,847
Issue date
Aug 20, 2024
Disco Corporation
Yoshikazu Suzuki
B24 - GRINDING POLISHING
Information
Patent Grant
Cleaning module, substrate processing apparatus including cleaning...
Patent number
12,033,847
Issue date
Jul 9, 2024
Ebara Corporation
Toshio Mizuno
B24 - GRINDING POLISHING
Information
Patent Grant
CMP wafer cleaning equipment, wafer transfer robot and wafer flippi...
Patent number
11,908,720
Issue date
Feb 20, 2024
HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
Linghan Shen
B08 - CLEANING
Information
Patent Grant
Cover to vacuum debris while grinding
Patent number
11,872,669
Issue date
Jan 16, 2024
Disco Corporation
Toshiyuki Moriya
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate processing device
Patent number
11,869,788
Issue date
Jan 9, 2024
Ebara Corporation
Koji Maeda
B08 - CLEANING
Information
Patent Grant
Workpiece processing apparatus including a resin coater and a resin...
Patent number
11,819,975
Issue date
Nov 21, 2023
Disco Corporation
Shinya Watanabe
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method of manufacturing wafer holder
Patent number
11,759,910
Issue date
Sep 19, 2023
P.R. Hoffman Machine Products, Inc.
David Melville Hutton
B24 - GRINDING POLISHING
Information
Patent Grant
Rotor polishing device
Patent number
11,712,776
Issue date
Aug 1, 2023
Terry Sullivan
B24 - GRINDING POLISHING
Information
Patent Grant
Grinding apparatus
Patent number
11,654,525
Issue date
May 23, 2023
Disco Corporation
Jiro Genozono
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing-pad laminated structure, polishing-pad positioning instru...
Patent number
11,642,753
Issue date
May 9, 2023
Ebara Corporation
Toshikazu Nomura
B24 - GRINDING POLISHING
Information
Patent Grant
Workpiece processing and resin grinding apparatus
Patent number
11,574,804
Issue date
Feb 7, 2023
Disco Corporation
Shinya Watanabe
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method and apparatus for polishing a substrate
Patent number
11,548,113
Issue date
Jan 10, 2023
Ebara Corporation
Makoto Fukushima
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate processing apparatus, substrate processing method, substr...
Patent number
11,426,834
Issue date
Aug 30, 2022
Ebara Corporation
Mitsuru Miyazaki
B24 - GRINDING POLISHING
Information
Patent Grant
Device and method for processing brake linings mounted on carriers
Patent number
11,305,396
Issue date
Apr 19, 2022
Erlmann GmbH & Co. KG
Gerd Schorn
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
High throughput polishing system for workpieces
Patent number
11,267,095
Issue date
Mar 8, 2022
UTICA LEASECO, LLC
Stephen M. Fisher
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate processing apparatus
Patent number
11,173,523
Issue date
Nov 16, 2021
Ebara Corporation
Hidetatsu Isokawa
B08 - CLEANING
Information
Patent Grant
Substrate polishing system and substrate polishing method
Patent number
11,148,247
Issue date
Oct 19, 2021
Samsung Display Co., Ltd.
Hyun Jin Cho
B24 - GRINDING POLISHING
Information
Patent Grant
Load cup and chemical mechanical polishing apparatus and method of...
Patent number
11,027,394
Issue date
Jun 8, 2021
Samsung Electronics Co., Ltd.
Jieun Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and method for detecting abnormality...
Patent number
10,903,101
Issue date
Jan 26, 2021
Ebara Corporation
Mitsunori Komatsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for chemical-mechanical polishing
Patent number
10,857,646
Issue date
Dec 8, 2020
Tsinghua University
Zhenjie Xu
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Substrate treatment device providing improved detachment mechanism...
Patent number
10,840,123
Issue date
Nov 17, 2020
Samsung Display Co., Ltd.
Heungyeol Na
B24 - GRINDING POLISHING
Information
Patent Grant
Wafer centering device for measurement apparatus
Patent number
10,818,533
Issue date
Oct 27, 2020
COMET CO., LTD.
Gyu-Seong Lee
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Wafer polishing chamber and wafer polishing system including same
Patent number
10,784,112
Issue date
Sep 22, 2020
SK SILTRON CO., LTD.
Sang Ho Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
10,688,622
Issue date
Jun 23, 2020
Ebara Corporation
Hiroshi Aono
B08 - CLEANING
Information
Patent Grant
Substrate cleaning apparatus and substrate processing apparatus
Patent number
10,575,697
Issue date
Mar 3, 2020
Ebara Corporation
Akira Imamura
A47 - FURNITURE DOMESTIC ARTICLES OR APPLIANCES COFFEE MILLS SPICE MILLS SUCT...
Information
Patent Grant
Polishing apparatus
Patent number
10,562,150
Issue date
Feb 18, 2020
Disco Corporation
Satoshi Yamanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Polishing machine wafer holder
Patent number
10,556,317
Issue date
Feb 11, 2020
P.R. HOFFMAN MACHINE PRODUCTS INC.
David Melville Hutton
B24 - GRINDING POLISHING
Information
Patent Grant
Method and device for polishing semiconductor wafer
Patent number
10,553,420
Issue date
Feb 4, 2020
Sumco Techxiv Corporation
Kenji Yamashita
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
WAFER POLISHING SYSTEM
Publication number
20240367283
Publication date
Nov 7, 2024
HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
Xiaoyu XU
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING METHOD AND POLISHING APPARATUS
Publication number
20240367282
Publication date
Nov 7, 2024
EBARA CORPORATION
Hisashi SARUWATARI
B24 - GRINDING POLISHING
Information
Patent Application
DETERMINING THE ORIENTATION OF A SUBSTRATE IN-SITU
Publication number
20240359291
Publication date
Oct 31, 2024
Applied Materials, Inc.
Wei LU
B24 - GRINDING POLISHING
Information
Patent Application
CLEANING MEMBER ATTACHING PART, CLEANING MEMBER ASSEMBLY AND SUBSTR...
Publication number
20230356267
Publication date
Nov 9, 2023
EBARA CORPORATION
Shuji UOZUMI
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD
Publication number
20230352326
Publication date
Nov 2, 2023
EBARA CORPORATION
Kuniaki YAMAGUCHI
B24 - GRINDING POLISHING
Information
Patent Application
AUTOMATIC ABRASION COMPENSATION SYSTEM OF LOWER PLATE AND WAFER LAP...
Publication number
20230211457
Publication date
Jul 6, 2023
SK SILTRON CO., LTD.
Jae Pyo LEE
B24 - GRINDING POLISHING
Information
Patent Application
WAFER CONVEYING DEVICE, CHEMICAL MECHANICAL PLANARIZATION APPARATUS...
Publication number
20230201995
Publication date
Jun 29, 2023
HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
Yuansi YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF TRANSFERRING SEMICONDUCTOR WAFER TO POLISHING APPARATUS A...
Publication number
20230033545
Publication date
Feb 2, 2023
SUMCO CORPORATION
Ryoya TERAKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING METHOD OF WORKPIECE
Publication number
20220324082
Publication date
Oct 13, 2022
Disco Corporation
Yoshikazu SUZUKI
B24 - GRINDING POLISHING
Information
Patent Application
AUTOMATED DRY-IN DRY-OUT DUAL SIDE POLISHING OF SILICON SUBSTRATES...
Publication number
20220310424
Publication date
Sep 29, 2022
Applied Materials, Inc.
Manoj A. GAJENDRA
B08 - CLEANING
Information
Patent Application
SUBSTRATE POLISHING SYSTEM
Publication number
20220274228
Publication date
Sep 1, 2022
KCTECH CO., LTD.
Hee Sung CHAE
B24 - GRINDING POLISHING
Information
Patent Application
INSTALLATION AND METHOD FOR POLISHING SEMICONDUCTOR WAFERS
Publication number
20220258303
Publication date
Aug 18, 2022
Siltronic AG
Jonny FRANKE
B24 - GRINDING POLISHING
Information
Patent Application
PROCESSING MACHINE
Publication number
20220143772
Publication date
May 12, 2022
Disco Corporation
Toshiyuki MORIYA
B24 - GRINDING POLISHING
Information
Patent Application
HORIZONTAL BUFFING MODULE
Publication number
20220134505
Publication date
May 5, 2022
Applied Materials, Inc.
Edward GOLUBOVSKY
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM
Publication number
20220111486
Publication date
Apr 14, 2022
KCTECH CO., LTD.
Hee Sung CHAE
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM
Publication number
20220111485
Publication date
Apr 14, 2022
KCTECH CO., LTD.
Hee Sung CHAE
B24 - GRINDING POLISHING
Information
Patent Application
CMP WAFER CLEANING EQUIPMENT, WAFER TRANSFER ROBOT AND WAFER FLIPPI...
Publication number
20210398834
Publication date
Dec 23, 2021
HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
Linghan Shen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING APPARATUS, PROCESSING METHOD AND COMPUTER- READABLE RECO...
Publication number
20210362290
Publication date
Nov 25, 2021
TOKYO ELECTRON LIMITED
Tomohiro KANEKO
B24 - GRINDING POLISHING
Information
Patent Application
HIGH THROUGHPUT POLISHING MODULES AND MODULAR POLISHING SYSTEMS
Publication number
20210323118
Publication date
Oct 21, 2021
Applied Materials, Inc.
Jagan RANGARAJAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH THROUGHPUT POLISHING MODULES AND MODULAR POLISHING SYSTEMS
Publication number
20210323117
Publication date
Oct 21, 2021
Applied Materials, Inc.
Jagan RANGARAJAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH THROUGHPUT POLISHING MODULES AND MODULAR POLISHING SYSTEMS
Publication number
20210323119
Publication date
Oct 21, 2021
Applied Materials, Inc.
Jagan RANGARAJAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHEMICAL MECHANICAL PLANARIZATION EQUIPMENT, WAFER TRANSFER METHOD,...
Publication number
20210260716
Publication date
Aug 26, 2021
HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
EdwardLiCang LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POLISHING AND LOADING/UNLOADING COMPONENT MODULE
Publication number
20210205952
Publication date
Jul 8, 2021
HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
Linghan Shen
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD
Publication number
20210013071
Publication date
Jan 14, 2021
EBARA CORPORATION
Kuniaki YAMAGUCHI
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE TRANSFER DEVICE, SUBSTRATE PROCESSING SYSTEM, SUBSTRATE P...
Publication number
20200306925
Publication date
Oct 1, 2020
TOKYO ELECTRON LIMITED
Munehisa KODAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING MEMBER ATTACHING PART, CLEANING MEMBER ASSEMBLY AND SUBSTR...
Publication number
20200276619
Publication date
Sep 3, 2020
EBARA CORPORATION
Shuji UOZUMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SUBSTR...
Publication number
20200047309
Publication date
Feb 13, 2020
Mitsuru MIYAZAKI
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING-PAD LAMINATED STRUCTURE, POLISHING-PAD POSITIONING INSTRU...
Publication number
20200023489
Publication date
Jan 23, 2020
EBARA CORPORATION
Toshikazu Nomura
B24 - GRINDING POLISHING
Information
Patent Application
CLEANING SECTION TRANSFER ROBOT FOR TRANSFERRING SUBSTRATE, SUBSTRA...
Publication number
20190393071
Publication date
Dec 26, 2019
EBARA CORPORATION
Junji KUNISAWA
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20190355594
Publication date
Nov 21, 2019
EBARA CORPORATION
Hidetatsu ISOKAWA
B08 - CLEANING