Filament heating power supply or regulation circuits

Industry

CPC
H01J37/242

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/242Filament heating power supply or regulation circuits

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam device
- Patent number 11,348,758
- Issue date May 31, 2022
- HITACHI HIGH-TECH CORPORATION
- Anoru Suga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning device
- Patent number 11,244,806
- Issue date Feb 8, 2022
- HITACHI HIGH-TECH CORPORATION
- Ryuju Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-ray system and method of inspecting X-ray tube
- Patent number 10,614,996
- Issue date Apr 7, 2020
- Canon Electron Tubes & Devices Co., Ltd.
- Tetsuya Yonezawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sterilization machine and method for sterilizing packaging containers
- Patent number 10,226,540
- Issue date Mar 12, 2019
- Tetra Laval Holdings & Finance S.A.
- Jonas Dickner
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Apparatus and method for minimizing thermal distortion in electrode...
- Patent number 10,062,544
- Issue date Aug 28, 2018
- Varian Semiconductor Equipment Associates, Inc.
- James P. Buonodono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for minimizing thermal distortion in electrode...
- Patent number 9,916,966
- Issue date Mar 13, 2018
- Varian Semiconductor Equipment Associates, Inc.
- James P. Buonodono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sterilization device and an electron beam emitter
- Patent number 9,878,060
- Issue date Jan 30, 2018
- Tetra Laval Holdings & Finance S.A.
- Håkan Mellbin
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Charged particle source with light monitoring for tip temperature d...
- Patent number 8,993,981
- Issue date Mar 31, 2015
- Carl Zeiss Microscopy, LLC
- John Notte
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and system for in-situ monitoring of cathode erosion and pre...
- Patent number 8,756,021
- Issue date Jun 17, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Arrangement for the regulation of the electron beam power of an ele...
- Patent number 7,808,183
- Issue date Oct 5, 2010
- Applied Materials GmbH & Co. KG
- Günter Klemm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus and device manufacturing method using the same
- Patent number 7,479,634
- Issue date Jan 20, 2009
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Radiantly heated cathode for an electron gun and heating assembly
- Patent number 7,250,618
- Issue date Jul 31, 2007
- Nikon Corporation
- Michael Sogard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus and device manufacturing method using same
- Patent number 7,205,540
- Issue date Apr 17, 2007
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Method of predicting a lifetime of filament in ion source and ion s...
- Patent number 7,034,543
- Issue date Apr 25, 2006
- Nissin Electric Co., Ltd.
- Koji Iwasawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus and device manufacturing method using same
- Patent number 6,998,611
- Issue date Feb 14, 2006
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Servo control for high emittance electron source
- Patent number 6,590,216
- Issue date Jul 8, 2003
- Nikon Corporation
- Samuel K. Doran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Programmed control of electron beam power
- Patent number 4,594,554
- Issue date Jun 10, 1986
- International Business Machines Corporation
- Jerome D. Schick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Setting the electron gun cathode heating current of an electron bea...
- Patent number 4,317,983
- Issue date Mar 2, 1982
- Steigerwald Strahltechnik GmbH
- Wilhelm Scheffels
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3885194
- Patent number 3,885,194
- Issue date May 20, 1975
- G05 - CONTROLLING REGULATING
Information Patent Grant
3868541
- Patent number 3,868,541
- Issue date Feb 25, 1975
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
3699381
- Patent number 3,699,381
- Issue date Oct 17, 1972
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3689798
- Patent number 3,689,798
- Issue date Sep 5, 1972
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
Ion source structure of ion implanter and its operation method
- Publication number 20240234079
- Publication date Jul 11, 2024
- United Semiconductor (Xiamen) Co., Ltd.
- Wen Shuo Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion source structure of ion implanter and its operation method
- Publication number 20240136144
- Publication date Apr 25, 2024
- United Semiconductor (Xiamen) Co., Ltd.
- Wen Shuo Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM GENERATION
- Publication number 20230178326
- Publication date Jun 8, 2023
- MICROCHIP TECHNOLOGY INCORPORATED
- Hyunwook Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cleaning Device
- Publication number 20210043414
- Publication date Feb 11, 2021
- Hitachi High-Tech Corporation
- Ryuju SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON MICROSCOPE EQUIPPED WITH AUTOMATIC BEAM ALIGNMENT
- Publication number 20200161086
- Publication date May 21, 2020
- EMCRAFTS CO., LTD.
- Jung Bum CHUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
X-RAY SYSTEM AND METHOD OF INSPECTING X-RAY TUBE
- Publication number 20180315579
- Publication date Nov 1, 2018
- Toshiba Electron Tubes & Devices Co., Ltd.
- Tetsuya YONEZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus And Method For Minimizing Thermal Distortion In Electrode...
- Publication number 20180211816
- Publication date Jul 26, 2018
- Varian Semiconductor Equipment Associates, Inc.
- James P. Buonodono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STERILIZATION DEVICE AND AN ELECTRON BEAM EMITTER
- Publication number 20170056539
- Publication date Mar 2, 2017
- Tetra Laval Holdings & Finance S.A.
- Håkan MELLBIN
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
STERILIZATION MACHINE AND METHOD FOR STERILIZING PACKAGING CONTAINERS
- Publication number 20170049914
- Publication date Feb 23, 2017
- TETRA LAVAL HOLDINGS & FINANCE S.A.
- Jonas DICKNER
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
METHOD AND SYSTEM FOR IN-SITU MONITORING OF CATHODE ERSOSION AND PR...
- Publication number 20120101742
- Publication date Apr 26, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR HEATING A TIP APEX OF A CHARGED PARTICLE SO...
- Publication number 20120074318
- Publication date Mar 29, 2012
- CARL ZEISS NTS, LLC.
- John Notte, IV
- G05 - CONTROLLING REGULATING
Information Patent Application
POWER SUPPLY FOR ELECTRON GUN AND ELECTRON MICROSCOPE HAVING THE SAME
- Publication number 20100252734
- Publication date Oct 7, 2010
- SEC CO , LTD.
- Heung-Bok Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron beam apparatus and device manufacturing method using the same
- Publication number 20070158565
- Publication date Jul 12, 2007
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Arrangement for the regulation of the electron beam power of an ele...
- Publication number 20060250092
- Publication date Nov 9, 2006
- Gunter Klemm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Stabilized emitter and method for stabilizing same
- Publication number 20060226753
- Publication date Oct 12, 2006
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Radiantly heated cathode for an electron gun and heating assembly
- Publication number 20060169928
- Publication date Aug 3, 2006
- NIKON CORPORATION
- Michael Sogard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron beam apparatus and device manufacturing method using same
- Publication number 20060054819
- Publication date Mar 16, 2006
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Method of predicting a lifetime of filament in ion source and ion s...
- Publication number 20040149927
- Publication date Aug 5, 2004
- NISSIN ELECTRIC CO., LTD.
- Koji Iwasawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron beam apparatus and device manufacturing method using same
- Publication number 20030042417
- Publication date Mar 6, 2003
- EBARA CORPORATION
- Mamoru Nakasuji
- B82 - NANO-TECHNOLOGY

Filament heating power supply or regulation circuits

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Charged particle beam device

Cleaning device

X-ray system and method of inspecting X-ray tube

Sterilization machine and method for sterilizing packaging containers

Apparatus and method for minimizing thermal distortion in electrode...

Apparatus and method for minimizing thermal distortion in electrode...

Sterilization device and an electron beam emitter

Charged particle source with light monitoring for tip temperature d...

Method and system for in-situ monitoring of cathode erosion and pre...

Arrangement for the regulation of the electron beam power of an ele...

Electron beam apparatus and device manufacturing method using the same

Radiantly heated cathode for an electron gun and heating assembly

Electron beam apparatus and device manufacturing method using same

Method of predicting a lifetime of filament in ion source and ion s...

Electron beam apparatus and device manufacturing method using same

Servo control for high emittance electron source

Programmed control of electron beam power

Setting the electron gun cathode heating current of an electron bea...

3885194

3868541

3699381

3689798

Patents Applicationslast 30 patents

Ion source structure of ion implanter and its operation method

Ion source structure of ion implanter and its operation method

CHARGED PARTICLE BEAM GENERATION

Cleaning Device

ELECTRON MICROSCOPE EQUIPPED WITH AUTOMATIC BEAM ALIGNMENT

X-RAY SYSTEM AND METHOD OF INSPECTING X-RAY TUBE

Apparatus And Method For Minimizing Thermal Distortion In Electrode...

STERILIZATION DEVICE AND AN ELECTRON BEAM EMITTER

STERILIZATION MACHINE AND METHOD FOR STERILIZING PACKAGING CONTAINERS

METHOD AND SYSTEM FOR IN-SITU MONITORING OF CATHODE ERSOSION AND PR...

METHODS AND SYSTEMS FOR HEATING A TIP APEX OF A CHARGED PARTICLE SO...

POWER SUPPLY FOR ELECTRON GUN AND ELECTRON MICROSCOPE HAVING THE SAME

Electron beam apparatus and device manufacturing method using the same

Arrangement for the regulation of the electron beam power of an ele...

Stabilized emitter and method for stabilizing same

Radiantly heated cathode for an electron gun and heating assembly

Electron beam apparatus and device manufacturing method using same

Method of predicting a lifetime of filament in ion source and ion s...

Electron beam apparatus and device manufacturing method using same