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GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F9/00Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces

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Patents Grantslast 30 patents

Information Patent Grant
Exposure control in photolithographic direct exposure methods for m...
- Patent number 12,169,370
- Issue date Dec 17, 2024
- Laser Imaging Systems GmbH
- Christian Schwarz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography process monitoring method
- Patent number 12,085,867
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Jie Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Assembly for collimating broadband radiation
- Patent number 12,050,409
- Issue date Jul 30, 2024
- ASML Netherlands B.V.
- Yongfeng Ni
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for determining a center of a radiation spot, sensor and sta...
- Patent number 11,982,948
- Issue date May 14, 2024
- ASML Netherlands B.V.
- Mihaita Popinciuc
- G01 - MEASURING TESTING
Information Patent Grant
Autofocusing method for an imaging device
- Patent number 11,947,185
- Issue date Apr 2, 2024
- Carl Zeiss SMT GmbH
- Dirk Seidel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography process monitoring method
- Patent number 11,782,352
- Issue date Oct 10, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Jie Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Intelligent correction device control system for super-resolution l...
- Patent number 11,714,358
- Issue date Aug 1, 2023
- The Institute of Optics and Electronics, the Chinese Academy of Sciences
- Xiangang Luo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Selecting a set of locations associated with a measurement or featu...
- Patent number 11,681,231
- Issue date Jun 20, 2023
- ASML Netherlands B.V.
- Pierluigi Frisco
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for pattern fidelity control
- Patent number 11,669,020
- Issue date Jun 6, 2023
- ASML Netherlands B.V.
- Tanbir Hasan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for measuring substrate height
- Patent number 11,662,669
- Issue date May 30, 2023
- ASML Netherlands B.V.
- Andrey Valerievich Rogachevskiy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Assembly for collimating broadband radiation
- Patent number 11,619,887
- Issue date Apr 4, 2023
- ASML Netherlands B.V.
- Yongfeng Ni
- G02 - OPTICS
Information Patent Grant
Laser processing method and laser processing system
- Patent number 11,604,416
- Issue date Mar 14, 2023
- Gigaphoton Inc.
- Koji Kakizaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic process and apparatus and inspection process and appar...
- Patent number 11,599,027
- Issue date Mar 7, 2023
- ASML Netherlands B.V.
- Wim Tjibbo Tel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Focused light beam alignment apparatus for aligning fixture relativ...
- Patent number 11,591,033
- Issue date Feb 28, 2023
- Snap-on Incorporated
- Craig F. Govekar
- B62 - LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
Information Patent Grant
Displacement detection device
- Patent number 11,512,942
- Issue date Nov 29, 2022
- DMG MORI CO., LTD.
- Akinori Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure method and exposure apparatus
- Patent number 11,500,299
- Issue date Nov 15, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yung-Yao Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Height sensor, lithographic apparatus and method for manufacturing...
- Patent number 11,467,505
- Issue date Oct 11, 2022
- ASML Netherlands B.V.
- Hans Butler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithography process monitoring method
- Patent number 11,467,509
- Issue date Oct 11, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Jie Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and apparatus for monitoring a lithographic manufacturing p...
- Patent number 11,422,476
- Issue date Aug 23, 2022
- ASML Netherlands B.V.
- Emil Peter Schmitt-Weaver
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment apparatus, alignment method, lithography apparatus, and m...
- Patent number 11,360,401
- Issue date Jun 14, 2022
- Canon Kabushiki Kaisha
- Shinichi Egashira
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Topography measurement system
- Patent number 11,327,412
- Issue date May 10, 2022
- ASML Netherlands B.V.
- Ronald Franciscus Herman Hugers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithography improvement based on defect probability distributions a...
- Patent number 11,314,171
- Issue date Apr 26, 2022
- Synopsys, Inc.
- Lawrence S. Melvin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Selecting a set of locations associated with a measurement or featu...
- Patent number 11,294,289
- Issue date Apr 5, 2022
- ASML Netherlands B.V.
- Pierluigi Frisco
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus, determination method, and method of manufact...
- Patent number 11,275,319
- Issue date Mar 15, 2022
- Canon Kabushiki Kaisha
- Koshiro Arahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for measurement of alignment
- Patent number 11,249,404
- Issue date Feb 15, 2022
- ASML Netherlands B.V.
- Emil Peter Schmitt-Weaver
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Level sensor and lithographic apparatus
- Patent number 11,221,565
- Issue date Jan 11, 2022
- ASML Netherlands B.V.
- Simon Reinald Huisman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic process and apparatus and inspection process and appar...
- Patent number 11,199,782
- Issue date Dec 14, 2021
- ASML Netherlands B.V.
- Wim Tjibbo Tel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, exposure apparatus, method of manufacturing articl...
- Patent number 11,194,257
- Issue date Dec 7, 2021
- Canon Kabushiki Kaisha
- Masaki Tai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Laser processing method and laser processing system
- Patent number 11,194,255
- Issue date Dec 7, 2021
- Gigaphoton Inc.
- Koji Kakizaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus, device manufacturing method and associated...
- Patent number 11,169,447
- Issue date Nov 9, 2021
- ASML Netherlands B.V.
- Erik Willem Bogaart
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHY SYSTEM AND METHODS
- Publication number 20240385509
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chi YANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY PROCESS MONITORING METHOD
- Publication number 20240385545
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Jie Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FIRST HOLDING APPARATUS, THIRD HOLDING APPARATUS, FIFTH HOLDING APP...
- Publication number 20240377763
- Publication date Nov 14, 2024
- Nikon Corporation
- Arata OCHINO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR DETERMINING A FOCUS ACTUATION PROFILE FOR ONE OR MORE AC...
- Publication number 20240061353
- Publication date Feb 22, 2024
- ASML NETHERLANDS B.V.
- Simon Hendrik Celine VAN GORP
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MULTIBEAM 3-D FOCUS GENERATOR
- Publication number 20230367134
- Publication date Nov 16, 2023
- Carl Zeiss SMT GMBH
- Markus Seesselberg
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHY PROCESS MONITORING METHOD
- Publication number 20230367234
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Jie LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR IDENTIFYING CONTAMINATION IN A SEMICONDUCT...
- Publication number 20230341784
- Publication date Oct 26, 2023
- ASML NETHERLANDS B.V.
- Tijmen Pieter COLLIGNON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE CONTROL IN PHOTOLITHOGRAPHIC DIRECT EXPOSURE METHODS FOR M...
- Publication number 20230333492
- Publication date Oct 19, 2023
- Laser Imaging Systems GmbH
- Christian SCHWARZ
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HEIGHT MEASUREMENT METHOD AND HEIGHT MEASUREMENT SYSTEM
- Publication number 20230244153
- Publication date Aug 3, 2023
- ASML NETHERLANDS B.V.
- Andrey Valerievich ROGACHEVSKIY
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE, PATTERNING DEVICE AND METROLOGY APPARATUSES
- Publication number 20230205097
- Publication date Jun 29, 2023
- ASML NETHERLANDS B.V.
- Mattia MARELLI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INTELLIGENT CORRECTION DEVICE CONTROL SYSTEM FOR SUPER-RESOLUTION L...
- Publication number 20230126995
- Publication date Apr 27, 2023
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EXPOSURE METHOD AND EXPOSURE APPARATUS
- Publication number 20230076566
- Publication date Mar 9, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yung-Yao LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY PROCESS MONITORING METHOD
- Publication number 20220365452
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Jie LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR DETERMINING A CENTER OF A RADIATION SPOT, SENSOR AND STA...
- Publication number 20220308468
- Publication date Sep 29, 2022
- ASML NETHERLANDS B.V.
- Mihaita POPINCIUC
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR MEASURING SUBSTRATE HEIGHT
- Publication number 20220244651
- Publication date Aug 4, 2022
- ASML NETHERLANDS B.V.
- Andrey Valerievich ROGACHEVSKIY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SURFACE POSITION DETECTION DEVICE, EXPOSURE APPARATUS, SUBSTRATE-PR...
- Publication number 20220216119
- Publication date Jul 7, 2022
- Nikon Corporation
- Satoshi TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTING A SET OF LOCATIONS ASSOCIATED WITH A MEASUREMENT OR FEATU...
- Publication number 20220187714
- Publication date Jun 16, 2022
- ASML NETHERLANDS B.V.
- Pierluigi FRISCO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC PROCESS & APPARATUS AND INSPECTION PROCESS AND APPARATUS
- Publication number 20220057719
- Publication date Feb 24, 2022
- ASML NETHERLANDS B.V.
- Wim Tjibbo TEL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
AUTOFOCUSING METHOD FOR AN IMAGING DEVICE
- Publication number 20220057598
- Publication date Feb 24, 2022
- Carl Zeiss SMT GMBH
- Dirk Seidel
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
LASER PROCESSING METHOD AND LASER PROCESSING SYSTEM
- Publication number 20220050382
- Publication date Feb 17, 2022
- Gigaphoton Inc.
- Koji KAKIZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR ESTIMATING SUBSTRATE SHAPE
- Publication number 20220050391
- Publication date Feb 17, 2022
- ASML NETHERLANDS B.V.
- Hermanus Adrianus DILLEN
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHY PROCESS MONITORING METHOD
- Publication number 20210286274
- Publication date Sep 16, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Jie LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC PROCESS & APPARATUS AND INSPECTION PROCESS AND APPARATUS
- Publication number 20210208511
- Publication date Jul 8, 2021
- ASML NETHERLANDS B.V.
- Wim Tjibbo TEL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR PATTERN FIDELITY CONTROL
- Publication number 20210181642
- Publication date Jun 17, 2021
- ASML NETHERLANDS B.V.
- Tanbir HASAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY IMPROVEMENT BASED ON DEFECT PROBABILITY DISTRIBUTIONS A...
- Publication number 20210088913
- Publication date Mar 25, 2021
- Synopsys, Inc.
- Lawrence S. Melvin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Level Sensor and Lithographic Apparatus
- Publication number 20210072652
- Publication date Mar 11, 2021
- ASML NETHERLANDS B.V.
- Simon Reinald HUISMAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ASSEMBLY FOR COLLIMATING BROADBAND RADIATION
- Publication number 20210063900
- Publication date Mar 4, 2021
- ASML NETHERLANDS B.V.
- Yongfeng NI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS & APPARATUS FOR MONITORING A LITHOGRAPHIC MANUFACTURING PRO...
- Publication number 20210018847
- Publication date Jan 21, 2021
- ASML NETHERLANDS B.V.
- Emil Peter SCHMITT-WEAVER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTION APPARATUS, EXPOSURE APPARATUS, AND ARTICLE MANUFACTURING...
- Publication number 20210003930
- Publication date Jan 7, 2021
- Canon Kabushiki Kaisha
- Wataru Yamaguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND ASSOCIATED...
- Publication number 20200379358
- Publication date Dec 3, 2020
- ASML NETHERLANDS B.V.
- Erik Willem BOGAART
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Exposure control in photolithographic direct exposure methods for m...

Lithography process monitoring method

Assembly for collimating broadband radiation

Method for determining a center of a radiation spot, sensor and sta...

Autofocusing method for an imaging device

Lithography process monitoring method

Intelligent correction device control system for super-resolution l...

Selecting a set of locations associated with a measurement or featu...

Method and apparatus for pattern fidelity control

Apparatus and method for measuring substrate height

Assembly for collimating broadband radiation

Laser processing method and laser processing system

Lithographic process and apparatus and inspection process and appar...

Focused light beam alignment apparatus for aligning fixture relativ...

Displacement detection device

Exposure method and exposure apparatus

Height sensor, lithographic apparatus and method for manufacturing...

Lithography process monitoring method

Methods and apparatus for monitoring a lithographic manufacturing p...

Alignment apparatus, alignment method, lithography apparatus, and m...

Topography measurement system

Lithography improvement based on defect probability distributions a...

Selecting a set of locations associated with a measurement or featu...

Lithography apparatus, determination method, and method of manufact...

System and method for measurement of alignment

Level sensor and lithographic apparatus

Lithographic process and apparatus and inspection process and appar...

Exposure method, exposure apparatus, method of manufacturing articl...

Laser processing method and laser processing system

Lithographic apparatus, device manufacturing method and associated...

Patents Applicationslast 30 patents

LITHOGRAPHY SYSTEM AND METHODS

LITHOGRAPHY PROCESS MONITORING METHOD

FIRST HOLDING APPARATUS, THIRD HOLDING APPARATUS, FIFTH HOLDING APP...

METHOD FOR DETERMINING A FOCUS ACTUATION PROFILE FOR ONE OR MORE AC...

MULTIBEAM 3-D FOCUS GENERATOR

LITHOGRAPHY PROCESS MONITORING METHOD

METHOD AND APPARATUS FOR IDENTIFYING CONTAMINATION IN A SEMICONDUCT...

EXPOSURE CONTROL IN PHOTOLITHOGRAPHIC DIRECT EXPOSURE METHODS FOR M...

HEIGHT MEASUREMENT METHOD AND HEIGHT MEASUREMENT SYSTEM

SUBSTRATE, PATTERNING DEVICE AND METROLOGY APPARATUSES

INTELLIGENT CORRECTION DEVICE CONTROL SYSTEM FOR SUPER-RESOLUTION L...

EXPOSURE METHOD AND EXPOSURE APPARATUS

LITHOGRAPHY PROCESS MONITORING METHOD

METHOD FOR DETERMINING A CENTER OF A RADIATION SPOT, SENSOR AND STA...

APPARATUS AND METHOD FOR MEASURING SUBSTRATE HEIGHT

SURFACE POSITION DETECTION DEVICE, EXPOSURE APPARATUS, SUBSTRATE-PR...

SELECTING A SET OF LOCATIONS ASSOCIATED WITH A MEASUREMENT OR FEATU...

LITHOGRAPHIC PROCESS & APPARATUS AND INSPECTION PROCESS AND APPARATUS

AUTOFOCUSING METHOD FOR AN IMAGING DEVICE

LASER PROCESSING METHOD AND LASER PROCESSING SYSTEM

METHODS AND APPARATUS FOR ESTIMATING SUBSTRATE SHAPE

LITHOGRAPHY PROCESS MONITORING METHOD

LITHOGRAPHIC PROCESS & APPARATUS AND INSPECTION PROCESS AND APPARATUS

METHOD AND APPARATUS FOR PATTERN FIDELITY CONTROL

LITHOGRAPHY IMPROVEMENT BASED ON DEFECT PROBABILITY DISTRIBUTIONS A...

Level Sensor and Lithographic Apparatus

ASSEMBLY FOR COLLIMATING BROADBAND RADIATION

METHODS & APPARATUS FOR MONITORING A LITHOGRAPHIC MANUFACTURING PRO...

DETECTION APPARATUS, EXPOSURE APPARATUS, AND ARTICLE MANUFACTURING...

LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND ASSOCIATED...