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CPC
H03H9/02362

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Parent Industries

HELECTRICITY H03Electronic circuits H03HIMPEDANCE NETWORKS H03H9/00Networks comprising electromechanical or electro-acoustic devices Electromechanical resonators

Current Industry

H03H9/02362Folded-flexure

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Piezo-actuated MEMS resonator with reduced nonlinear tcf
- Patent number 12,166,464
- Issue date Dec 10, 2024
- SiTime Corporation
- Joseph C. Doll
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Resonant microelectromechanical sensor with improved operation
- Patent number 12,000,859
- Issue date Jun 4, 2024
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Marc Sansa Perna
- G01 - MEASURING TESTING
Information Patent Grant
Piezo-actuated MEMS resonator
- Patent number 11,909,376
- Issue date Feb 20, 2024
- SiTime Corporation
- Joseph C. Doll
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Piezo-actuated MEMS resonator with surface electrodes
- Patent number 10,892,733
- Issue date Jan 12, 2021
- SiTime Corporation
- Joseph C. Doll
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Piezoelectric rotational MEMS resonator
- Patent number 10,884,018
- Issue date Jan 5, 2021
- Murata Manufacturing Co., Ltd.
- Heikki Kuisma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Micromechanical resonator having reduced size
- Patent number 10,812,046
- Issue date Oct 20, 2020
- MURATA MANUFACTURING CO., LTD.
- Ville Kaajakari
- G01 - MEASURING TESTING
Information Patent Grant
Stacked balanced resonators
- Patent number 10,598,491
- Issue date Mar 24, 2020
- The Regents of the University of Michigan
- Khalil Najafi
- G01 - MEASURING TESTING
Information Patent Grant
Temperature-engineered MEMS resonator
- Patent number 10,263,596
- Issue date Apr 16, 2019
- SiTime Corporation
- Joseph C. Doll
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Micromechanical resonator device and micromechanical device utilizi...
- Patent number 6,856,217
- Issue date Feb 15, 2005
- The Regents of the University of Michigan
- John R. Clark
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Method for making micromechanical structures having at least one la...
- Patent number 6,846,691
- Issue date Jan 25, 2005
- The Regents of the University of Michigan
- Wan-Thai Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical resonator device
- Patent number 6,739,190
- Issue date May 25, 2004
- The Regents of the University of Michigan
- Wan-Thai Hsu
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Micromechanical resonator device and micromechanical device utilizi...
- Patent number 6,628,177
- Issue date Sep 30, 2003
- The Regents of the University of Michigan
- John R. Clark
- H03 - BASIC ELECTRONIC CIRCUITRY

Patents Applicationslast 30 patents

Information Patent Application
Piezo-actuated MEMS Resonator
- Publication number 20240223151
- Publication date Jul 4, 2024
- SiTime Coporation
- Joseph C. Doll
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
PIEZO-ACTUATED MEMS RESONATOR
- Publication number 20210159875
- Publication date May 27, 2021
- SiTime Coporation
- Joseph C. Doll
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PIEZO-ACTUATED MEMS RESONATOR WITH SURFACE ELECTRODES
- Publication number 20180226942
- Publication date Aug 9, 2018
- SiTime Coporation
- Joseph C. Doll
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
TEMPERATURE-ENGINEERED MEMS RESONATOR
- Publication number 20180019724
- Publication date Jan 18, 2018
- SiTime Coporation
- Joseph C. Doll
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OSCILLATING STRUCTURE AND OSCILLATOR DEVICE USING THE SAME
- Publication number 20100302612
- Publication date Dec 2, 2010
- Canon Kabushiki Kaisha
- Takashi Ushijima
- G02 - OPTICS
Information Patent Application
Method for making micromechanical structures having at least one la...
- Publication number 20040150057
- Publication date Aug 5, 2004
- The Regents of the University of Michigan
- Wan-Thai Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical resonator device and micromechanical device utilizi...
- Publication number 20020105393
- Publication date Aug 8, 2002
- John R. Clark
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Method for making micromechanical structures having at least one la...
- Publication number 20020070816
- Publication date Jun 13, 2002
- Wan-Thai Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical resonator device
- Publication number 20020069701
- Publication date Jun 13, 2002
- Wan-Thai Hsu
- H03 - BASIC ELECTRONIC CIRCUITRY

Folded-flexure

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Piezo-actuated MEMS resonator with reduced nonlinear tcf

Resonant microelectromechanical sensor with improved operation

Piezo-actuated MEMS resonator

Piezo-actuated MEMS resonator with surface electrodes

Piezoelectric rotational MEMS resonator

Micromechanical resonator having reduced size

Stacked balanced resonators

Temperature-engineered MEMS resonator

Micromechanical resonator device and micromechanical device utilizi...

Method for making micromechanical structures having at least one la...

Micromechanical resonator device

Micromechanical resonator device and micromechanical device utilizi...

Patents Applicationslast 30 patents

Piezo-actuated MEMS Resonator

PIEZO-ACTUATED MEMS RESONATOR

PIEZO-ACTUATED MEMS RESONATOR WITH SURFACE ELECTRODES

TEMPERATURE-ENGINEERED MEMS RESONATOR

OSCILLATING STRUCTURE AND OSCILLATOR DEVICE USING THE SAME

Method for making micromechanical structures having at least one la...

Micromechanical resonator device and micromechanical device utilizi...

Method for making micromechanical structures having at least one la...

Micromechanical resonator device