for applying thin layers on objects

Industry

CPC
H01J37/3178

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/3178for applying thin layers on objects

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Methods and structures for semiconductor device testing
- Patent number 11,982,709
- Issue date May 14, 2024
- Yangtze Memory Technologies Co., Ltd.
- Lin Qi
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for examining a beam of charged particles
- Patent number 11,961,705
- Issue date Apr 16, 2024
- Carl Zeiss SMT GmbH
- Daniel Rhinow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Physical analysis method, sample for physical analysis and preparin...
- Patent number 11,955,312
- Issue date Apr 9, 2024
- Materials Analysis Technology Inc.
- Chien-Wei Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask defect repair apparatus and mask defect repair method
- Patent number 11,906,899
- Issue date Feb 20, 2024
- Hitachi High-Tech Science Corporation
- Yoshitomo Nakagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for analyzing a defect of a photolithographic mas...
- Patent number 11,733,186
- Issue date Aug 22, 2023
- Carl Zeiss SMT GmbH
- Gabriel Baralia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optically transmissive devices and fabrication
- Patent number 11,635,546
- Issue date Apr 25, 2023
- University of Massachusetts
- Hualiang Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal plating of grids for ion beam sputtering
- Patent number 11,581,164
- Issue date Feb 14, 2023
- Excelitas Technologies Corp.
- Eric Baltz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nanofabrication using a new class of electron beam induced surface...
- Patent number 11,377,740
- Issue date Jul 5, 2022
- FEI Company
- James Bishop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fixture for vapor deposition system
- Patent number 11,276,556
- Issue date Mar 15, 2022
- Raytheon Technologies Corporation
- James W. Neal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for repairing a photolithographic mask
- Patent number 11,256,168
- Issue date Feb 22, 2022
- Carl Zeiss SMT GmbH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for determining, using, and indicating ion be...
- Patent number 11,004,656
- Issue date May 11, 2021
- Gatan, Inc.
- John Andrew Hunt
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for analysing a defect of a photolithographic mas...
- Patent number 10,983,075
- Issue date Apr 20, 2021
- Carl Zeiss SMT GmbH
- Gabriel Baralia
- G01 - MEASURING TESTING
Information Patent Grant
Image-forming device, and dimension measurement device
- Patent number 10,976,536
- Issue date Apr 13, 2021
- HITACHI HIGH-TECH CORPORATION
- Yasunori Takasugi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle device and wiring method
- Patent number 10,808,312
- Issue date Oct 20, 2020
- HITACHI HIGH-TECH CORPORATION
- Yoichiro Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor workpiece temperature measurement system
- Patent number 10,739,208
- Issue date Aug 11, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Klaus Petry
- G01 - MEASURING TESTING
Information Patent Grant
Ion beam sample preparation and coating apparatus and methods
- Patent number 10,731,246
- Issue date Aug 4, 2020
- Gatan, Inc.
- John Andrew Hunt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for permanently repairing defects of absent mater...
- Patent number 10,732,501
- Issue date Aug 4, 2020
- Carl Zeiss SMT GmbH
- Jens Oster
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Part temperature measurement device
- Patent number 10,643,821
- Issue date May 5, 2020
- United Technologies Corporation
- James W. Neal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Image-forming device, and dimension measurement device
- Patent number 10,620,421
- Issue date Apr 14, 2020
- Hitachi High-Technologies Corporation
- Yasunori Takasugi
- G01 - MEASURING TESTING
Information Patent Grant
Patterned atomic layer etching and deposition using miniature-colum...
- Patent number 10,607,845
- Issue date Mar 31, 2020
- Kevin M. Monahan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Radical generator and molecular beam epitaxy apparatus
- Patent number 10,577,719
- Issue date Mar 3, 2020
- National University Corporation Nagoya University
- Masaru Hori
- C30 - CRYSTAL GROWTH
Information Patent Grant
Chamber with flow-through source
- Patent number 10,541,113
- Issue date Jan 21, 2020
- Applied Materials, Inc.
- Dmitry Lubomirsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for monitoring environmental states of a microscope sample w...
- Patent number 10,460,906
- Issue date Oct 29, 2019
- PROTOCHIPS, INC.
- Daniel Stephen Gardiner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Production method for magnetic inductor
- Patent number 10,449,625
- Issue date Oct 22, 2019
- GH Electrotermia, S.A.
- Pedro Moratalla Martinez
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Embedded mask patterning process for fabricating magnetic media and...
- Patent number 10,347,467
- Issue date Jul 9, 2019
- Regents of The University of Minnesota
- Jian-Ping Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultra broad band continuously tunable electron beam pulser
- Patent number 10,319,556
- Issue date Jun 11, 2019
- Euclid Techlabs, LLC
- Chunguang Jing
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion generator and method of controlling ion generator
- Patent number 10,283,326
- Issue date May 7, 2019
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Hiroshi Kawaguchi
- B08 - CLEANING
Information Patent Grant
Composite charged particle beam apparatus and control method thereof
- Patent number 10,249,471
- Issue date Apr 2, 2019
- Hitachi High-Technologies Corporation
- Toshihide Agemura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for cross-section processing and observation and apparatus t...
- Patent number 10,242,842
- Issue date Mar 26, 2019
- Hitachi High-Tech Science Corporation
- Xin Man
- G02 - OPTICS
Information Patent Grant
Chamber with flow-through source
- Patent number 10,224,180
- Issue date Mar 5, 2019
- Applied Materials, Inc.
- Dmitry Lubomirsky
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
GROUNDING DEVICE FOR THIN FILM FORMATION USING PLASMA
- Publication number 20240420937
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Yu Cheng LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Air Gap Formation by Physical Vapor Deposition
- Publication number 20240271266
- Publication date Aug 15, 2024
- Applied Materials, Inc.
- Chengyu LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRON-ENHANCED ATOMIC LAYER DEPOSITION (EE-ALD) METHODS AND DEVI...
- Publication number 20240240317
- Publication date Jul 18, 2024
- The Regents of the University of Colorado, a Body Corporate
- Steven George
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENHANCED DEPOSITION RATE BY APPLYING A NEGATIVE VOLTAGE TO A GAS IN...
- Publication number 20240105421
- Publication date Mar 28, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OPTIMIZED SADDLE NOZZLE DESIGN FOR GAS INJECTION SYSTEM
- Publication number 20240096592
- Publication date Mar 21, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM DEPOSITION APPARATUS AND ION BEAM DEPOSITION METHOD USING...
- Publication number 20240071712
- Publication date Feb 29, 2024
- Samsung Electronics Co., Ltd.
- SeungWan YOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR PREPARING A SPECIMEN
- Publication number 20240071720
- Publication date Feb 29, 2024
- FEI Company
- Jamie Dee Gravell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCED DEPOSITION RATE BY THERMAL ISOLATION COVER FOR GIS MANIPUL...
- Publication number 20240062990
- Publication date Feb 22, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Sean Kashy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING COATING FILMS AND SUBSTRATE PROCESSING APPARATU...
- Publication number 20240011146
- Publication date Jan 11, 2024
- Seoul National University R&DB Foundation
- Seungjun LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND STRUCTURES FOR SEMICONDUCTOR DEVICE TESTING
- Publication number 20230375616
- Publication date Nov 23, 2023
- Yangtze Memory Technologies Co., Ltd.
- Lin QI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL PATTERN INSPECTION METHOD AND FOCUSED ION BEAM APPARATUS
- Publication number 20230326714
- Publication date Oct 12, 2023
- V Technology Co., LTD.
- Michinobu MIZUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR MASK REPAIR
- Publication number 20230280647
- Publication date Sep 7, 2023
- Carl Zeiss SMT GMBH
- Daniel Rhinow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FAILURE ANALYSIS FOR DEFECT LOCATIONS
- Publication number 20230273101
- Publication date Aug 31, 2023
- Shanghai Huali Integrated Circuit Corporation
- Qiang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Preparing TEM Sample
- Publication number 20230268159
- Publication date Aug 24, 2023
- Shanghai Huali Integrated Circuit Corporation
- Qiang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LAMINATED BODY AND LAMINATED BODY MANUFACTURING METHOD
- Publication number 20230187338
- Publication date Jun 15, 2023
- CANON ANELVA CORPORATION
- HIROSHI YAKUSHIJI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE-CONTROLLED SURFACE WITH A CRYO-NANOMANIPULATOR FOR IMPR...
- Publication number 20230023396
- Publication date Jan 26, 2023
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHYSICAL ANALYSIS METHOD, SAMPLE FOR PHYSICAL ANALYSIS AND PREPARIN...
- Publication number 20220223373
- Publication date Jul 14, 2022
- Materials Analysis Technology Inc.
- CHIEN-WEI WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR SELECTIVE MOLECULAR ION DEPOSITION
- Publication number 20210351003
- Publication date Nov 11, 2021
- Battelle Memorial Institute
- Sandilya V.B. Garimella
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR ANALYSING A DEFECT OF A PHOTOLITHOGRAPHIC MAS...
- Publication number 20210247336
- Publication date Aug 12, 2021
- Carl Zeiss SMT GMBH
- Gabriel Baralia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR EXAMINING A BEAM OF CHARGED PARTICLES
- Publication number 20210110996
- Publication date Apr 15, 2021
- Carl Zeiss SMT GMBH
- Daniel Rhinow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM SPUTTERING APPARATUS AND METHOD
- Publication number 20210104380
- Publication date Apr 8, 2021
- Institute Of Geological And Nuclear Sciences Limited
- Richard John Futter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MASK DEFECT REPAIR APPARATUS AND MASK DEFECT REPAIR METHOD
- Publication number 20200310246
- Publication date Oct 1, 2020
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Yoshitomo NAKAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FIXTURE FOR VAPOR DEPOSITION SYSTEM
- Publication number 20200227234
- Publication date Jul 16, 2020
- United Technologies Corporation
- James W. Neal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Image-Forming Device, and Dimension Measurement Device
- Publication number 20200201019
- Publication date Jun 25, 2020
- Hitachi High-Technologies Corporation
- Yasunori TAKASUGI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
NANOFABRICATION USING A NEW CLASS OF ELECTRON BEAM INDUCED SURFACE...
- Publication number 20200190669
- Publication date Jun 18, 2020
- FEI Company
- James Bishop
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OPTICALLY TRANSMISSIVE DEVICES AND FABRICATION
- Publication number 20200150311
- Publication date May 14, 2020
- University of Massachusetts
- Hualiang Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Metal Plating of Grids for Ion Beam Sputtering
- Publication number 20200051783
- Publication date Feb 13, 2020
- Research Electro-Optics Inc.
- Eric Baltz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER WITH FLOW-THROUGH SOURCE
- Publication number 20190198291
- Publication date Jun 27, 2019
- Applied Materials, Inc.
- Dmitry LUBOMIRSKY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM SOURCE AND THE USE OF THE SAME
- Publication number 20190193193
- Publication date Jun 27, 2019
- ARCAM AB
- Mattias Fager
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Semiconductor Workpiece Temperature Measurement System
- Publication number 20190170591
- Publication date Jun 6, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Klaus Petry
- G01 - MEASURING TESTING

for applying thin layers on objects

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods and structures for semiconductor device testing

Method and apparatus for examining a beam of charged particles

Physical analysis method, sample for physical analysis and preparin...

Mask defect repair apparatus and mask defect repair method

Device and method for analyzing a defect of a photolithographic mas...

Optically transmissive devices and fabrication

Metal plating of grids for ion beam sputtering

Nanofabrication using a new class of electron beam induced surface...

Fixture for vapor deposition system

Apparatus and method for repairing a photolithographic mask

Methods and apparatus for determining, using, and indicating ion be...

Device and method for analysing a defect of a photolithographic mas...

Image-forming device, and dimension measurement device

Charged particle device and wiring method

Semiconductor workpiece temperature measurement system

Ion beam sample preparation and coating apparatus and methods

Method and device for permanently repairing defects of absent mater...

Part temperature measurement device

Image-forming device, and dimension measurement device

Patterned atomic layer etching and deposition using miniature-colum...

Radical generator and molecular beam epitaxy apparatus

Chamber with flow-through source

Method for monitoring environmental states of a microscope sample w...

Production method for magnetic inductor

Embedded mask patterning process for fabricating magnetic media and...

Ultra broad band continuously tunable electron beam pulser

Ion generator and method of controlling ion generator

Composite charged particle beam apparatus and control method thereof

Method for cross-section processing and observation and apparatus t...

Chamber with flow-through source

Patents Applicationslast 30 patents

GROUNDING DEVICE FOR THIN FILM FORMATION USING PLASMA

Air Gap Formation by Physical Vapor Deposition

ELECTRON-ENHANCED ATOMIC LAYER DEPOSITION (EE-ALD) METHODS AND DEVI...

ENHANCED DEPOSITION RATE BY APPLYING A NEGATIVE VOLTAGE TO A GAS IN...

OPTIMIZED SADDLE NOZZLE DESIGN FOR GAS INJECTION SYSTEM

ION BEAM DEPOSITION APPARATUS AND ION BEAM DEPOSITION METHOD USING...

METHOD AND SYSTEM FOR PREPARING A SPECIMEN

ENHANCED DEPOSITION RATE BY THERMAL ISOLATION COVER FOR GIS MANIPUL...

METHODS FOR FORMING COATING FILMS AND SUBSTRATE PROCESSING APPARATU...

METHODS AND STRUCTURES FOR SEMICONDUCTOR DEVICE TESTING

METAL PATTERN INSPECTION METHOD AND FOCUSED ION BEAM APPARATUS

METHOD AND APPARATUS FOR MASK REPAIR

METHOD OF FAILURE ANALYSIS FOR DEFECT LOCATIONS

Method for Preparing TEM Sample

LAMINATED BODY AND LAMINATED BODY MANUFACTURING METHOD

TEMPERATURE-CONTROLLED SURFACE WITH A CRYO-NANOMANIPULATOR FOR IMPR...

PHYSICAL ANALYSIS METHOD, SAMPLE FOR PHYSICAL ANALYSIS AND PREPARIN...

SYSTEMS AND METHODS FOR SELECTIVE MOLECULAR ION DEPOSITION

DEVICE AND METHOD FOR ANALYSING A DEFECT OF A PHOTOLITHOGRAPHIC MAS...

METHOD AND APPARATUS FOR EXAMINING A BEAM OF CHARGED PARTICLES

ION BEAM SPUTTERING APPARATUS AND METHOD

MASK DEFECT REPAIR APPARATUS AND MASK DEFECT REPAIR METHOD

FIXTURE FOR VAPOR DEPOSITION SYSTEM

Image-Forming Device, and Dimension Measurement Device

NANOFABRICATION USING A NEW CLASS OF ELECTRON BEAM INDUCED SURFACE...

OPTICALLY TRANSMISSIVE DEVICES AND FABRICATION

Metal Plating of Grids for Ion Beam Sputtering

CHAMBER WITH FLOW-THROUGH SOURCE

ELECTRON BEAM SOURCE AND THE USE OF THE SAME

Semiconductor Workpiece Temperature Measurement System