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H01J37/305
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ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/305
for casting, melting, evaporating or etching
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and method for depositing hard carbon layers
Patent number
12,362,141
Issue date
Jul 15, 2025
Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
Bert Scheffel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor analysis system
Patent number
12,347,707
Issue date
Jul 1, 2025
HITACHI HIGH-TECH CORPORATION
Yudai Kubo
G05 - CONTROLLING REGULATING
Information
Patent Grant
Focused ion beam system and method of correcting deviation of field...
Patent number
12,334,300
Issue date
Jun 17, 2025
Jeol Ltd.
Yuichiro Ohori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage and plasma processing apparatus
Patent number
12,278,131
Issue date
Apr 15, 2025
Tokyo Electron Limited
Naoki Sugawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for performing sample lift-out for highly react...
Patent number
12,278,087
Issue date
Apr 15, 2025
FEI Company
Christopher Thompson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for forming a three-dimensional article
Patent number
12,269,092
Issue date
Apr 8, 2025
Arcam AB
Safdar Ali
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
3D metrology from 3D datacube created from stack of registered imag...
Patent number
12,272,518
Issue date
Apr 8, 2025
Applied Materials Israel Ltd.
Ilya Blayvas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma treatment apparatus, lower electrode assembly and forming me...
Patent number
12,261,012
Issue date
Mar 25, 2025
ADVANCED MICRO-FABRICATION EQUIPMENT INC.
Tuqiang Ni
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fiducial guided cross-sectioning and lamella preparation with tomog...
Patent number
12,255,044
Issue date
Mar 18, 2025
FIBICS INCORPORATED
Michael William Phaneuf
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Microscopy feedback for improved milling accuracy
Patent number
12,249,482
Issue date
Mar 11, 2025
FEI Company
Thomas Gary Miller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Anti-breakdown ion source discharge apparatus
Patent number
12,243,713
Issue date
Mar 4, 2025
JIANGSU LEUVEN INSTRUMENTS CO. LTD
Yaoyao Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion milling device
Patent number
12,230,471
Issue date
Feb 18, 2025
HITACHI HIGH-TECH CORPORATION
Shota Aida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Broad ion beam (BIB) systems for more efficient processing of multi...
Patent number
12,228,484
Issue date
Feb 18, 2025
FEI Company
Michal Hrouzek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion milling device
Patent number
12,224,155
Issue date
Feb 11, 2025
HITACHI HIGH-TECH CORPORATION
Shota Aida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam source, substrate process apparatus including the same, an...
Patent number
12,224,163
Issue date
Feb 11, 2025
Samsung Electronics Co., Ltd.
SeungWan Yoo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charge carrier generation source
Patent number
12,211,663
Issue date
Jan 28, 2025
SCIA SYSTEMS GMBH
Enrico Loos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for anisotropic pattern etching and treatment
Patent number
12,205,793
Issue date
Jan 21, 2025
Lam Research Corporation
Seokmin Yun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for reducing line-end space in integrated circuit patterning
Patent number
12,197,131
Issue date
Jan 14, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Jing-Huei Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reduced spatial/temporal overlaps to increase temporal overlaps to...
Patent number
12,191,110
Issue date
Jan 7, 2025
The University of Liverpool
Nigel D Browning
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ribbon beam plasma enhanced chemical vapor deposition system for an...
Patent number
12,191,156
Issue date
Jan 7, 2025
Applied Materials, Inc.
John Hautala
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Beam bending snout for mobile electron accelerators
Patent number
12,172,367
Issue date
Dec 24, 2024
Fermi Research Alliance, LLC
Aaron Sauers
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Method for producing lamella, analysis system and method for analyz...
Patent number
12,176,180
Issue date
Dec 24, 2024
HITACHI HIGH-TECH CORPORATION
Atsushi Sawada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and methods for automated processing of multiple samples in...
Patent number
12,165,833
Issue date
Dec 10, 2024
FEI Company
Michal Hrouzek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for electron beam focusing in electron beam add...
Patent number
12,148,592
Issue date
Nov 19, 2024
General Electric Company
John Scott Price
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching isolation features and dense features within a substrate
Patent number
12,119,232
Issue date
Oct 15, 2024
Lam Research Corporation
Juline Shoeb
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam processing apparatus, electrode assembly, and method of cl...
Patent number
12,119,203
Issue date
Oct 15, 2024
Canon Anelva Corporation
Yasushi Yasumatsu
B08 - CLEANING
Information
Patent Grant
Systems and methods for pre-aligning samples for more efficient pro...
Patent number
12,106,931
Issue date
Oct 1, 2024
FEI Company
Michal Hrouzek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Modulation of rolling k vectors of angled gratings
Patent number
12,106,935
Issue date
Oct 1, 2024
Applied Materials, Inc.
Joseph C. Olson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanned angled etching apparatus and techniques providing separate...
Patent number
12,106,936
Issue date
Oct 1, 2024
Applied Materials, Inc.
Peter F. Kurunczi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liner, reaction chamber and semiconductor processing equipment
Patent number
12,106,934
Issue date
Oct 1, 2024
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Jinrong Zhao
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Focused Ion Beam System
Publication number
20250239433
Publication date
Jul 24, 2025
JEOL Ltd.
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM PROCESSING SYSTEM
Publication number
20250239432
Publication date
Jul 24, 2025
Samsung Electronics Co., Ltd.
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM REFLECTOR, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SA...
Publication number
20250232948
Publication date
Jul 17, 2025
Samsung Electronics Co., Ltd.
Hoonseop KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MASS FLOW CONTROLLER, FLOW CONTROL METHOD USING THE SAME, AND SUBST...
Publication number
20250216872
Publication date
Jul 3, 2025
Samsung Electronics Co., Ltd.
Seunghun Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE STRESS MANAGEMENT USING DIRECT SELECTIVE AREA PROCESSING
Publication number
20250218788
Publication date
Jul 3, 2025
Applied Materials, Inc.
Morgan EVANS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
3D METROLOGY FROM 3D DATACUBE CREATED FROM STACK OF REGISTERED IMAG...
Publication number
20250210301
Publication date
Jun 26, 2025
APPLIED MATERIALS ISRAEL LTD.
Ilya Blayvas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR REMOVING PARTICLES OF ION BEAM ETCHING SYSTEM, AND ION B...
Publication number
20250183017
Publication date
Jun 5, 2025
JIANGSU LEUVEN INSTRUMENTS CO., LTD.
Xiang WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROSCOPY IMAGING METHOD AND SYSTEM
Publication number
20250166961
Publication date
May 22, 2025
Fibics Incorporated
Michael William Phaneuf
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Ion Milling Device, and Inspection System
Publication number
20250149288
Publication date
May 8, 2025
Hitachi High-Tech Corporation
Naohiro FUJITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION MILLING DEVICE
Publication number
20250149289
Publication date
May 8, 2025
HITACHI HIGH-TECH CORPORATION
Shota AIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM ETCHING MACHINE AND LOWER ELECTRODE STRUCTURE THEREOF
Publication number
20250140512
Publication date
May 1, 2025
JIANGSU LEUVEN INSTRUMENTS CO., LTD.
Huaidong ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION NEUTRALIZATION MODULE
Publication number
20250140509
Publication date
May 1, 2025
Samsung Electronics Co., Ltd.
Dongwan KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MACHINING METHOD AND CHARGED PARTICLE BEAM DEVICE
Publication number
20250140518
Publication date
May 1, 2025
HITACHI HIGH-TECH SCIENCE CORPORATION
Toshiyuki NAGAMINE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Focused Ion Beam System
Publication number
20250109481
Publication date
Apr 3, 2025
JEOL Ltd.
Noriaki Mizuno
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BEAM ANGLE ROTATION AND SAMPLE ROTATION
Publication number
20250104963
Publication date
Mar 27, 2025
Carl Zeiss SMT GMBH
Thomas Korb
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DELAYERING APPARATUS AND METHODS
Publication number
20250095959
Publication date
Mar 20, 2025
FEI Company
Chad Rue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20250096006
Publication date
Mar 20, 2025
TOKYO ELECTRON LIMITED
Rin SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20250087454
Publication date
Mar 13, 2025
TOKYO ELECTRON LIMITED
Sho KUMAKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NANOSCALE FAILURE ANALYSIS METHOD
Publication number
20250087453
Publication date
Mar 13, 2025
Shanghai Huali Microeloctronics Corporation
Yunong Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20250087455
Publication date
Mar 13, 2025
TOKYO ELECTRON LIMITED
Sho KUMAKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MOBILE ACCELERATOR-BASED VOLUMETRIC FABRICATION METHOD FOR IN-SITU...
Publication number
20250083381
Publication date
Mar 13, 2025
FERMI RESEARCH ALLIANCE, LLC
Aaron Sauers
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
DUAL BEAM SYSTEMS AND METHODS FOR DECOUPLING THE WORKING DISTANCE O...
Publication number
20250069958
Publication date
Feb 27, 2025
Carl Zeiss SMT GMBH
Alex Buxbaum
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion Milling Device
Publication number
20250046567
Publication date
Feb 6, 2025
Hitachi High-Tech Corporation
Shota AIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POST-TREATMENT PROCESSES FOR ION BEAM ETCHING OF MAGNETIC TUNNEL JU...
Publication number
20250040442
Publication date
Jan 30, 2025
Taiwan Semiconductor Manufacturing Company Limited
Hung-Yu CHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED THROUGH...
Publication number
20250022680
Publication date
Jan 16, 2025
Carl Zeiss SMT GMBH
Dmitry Klochkov
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...
Publication number
20250014861
Publication date
Jan 9, 2025
Canon ANELVA Corporation
Yasushi Yasumatsu
B08 - CLEANING
Information
Patent Application
FOCUS STACKING APPLICATIONS FOR SAMPLE PREPARATION
Publication number
20250005714
Publication date
Jan 2, 2025
FEI Company
Matej Dolník
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Sample Milling System and Apparatus and Method for Image Generation
Publication number
20250006458
Publication date
Jan 2, 2025
JEOL Ltd.
Munehiro Kozuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD TO INVESTIGATE A SEMICONDUCTOR SAMPLE LAYER BY LAYER AND INV...
Publication number
20240404786
Publication date
Dec 5, 2024
Carl Zeiss SMT GMBH
Ivo IHRKE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Reducing Line-End Space in Integrated Circuit Patterning
Publication number
20240385526
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Co., LTD
Jing-Huei Huang
H01 - BASIC ELECTRIC ELEMENTS