for conveying

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CPC
H01L21/677

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/677for conveying

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Wafer treatment device
- Patent number 12,368,058
- Issue date Jul 22, 2025
- PICO & TERA CO., LTD.
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Loader device and substrate transport system
- Patent number 12,365,095
- Issue date Jul 22, 2025
- Samsung Electronics Co., Ltd.
- Hyun Jae Kang
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Information processing apparatus for teaching transfer position of...
- Patent number 12,367,602
- Issue date Jul 22, 2025
- Tokyo Electron Limited
- Tadashi Enomoto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate transfer device including housing provided with fan
- Patent number 12,368,069
- Issue date Jul 22, 2025
- Tokyo Electron Limited
- Kousei Ide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus, substrate processing apparatus, subst...
- Patent number 12,368,059
- Issue date Jul 22, 2025
- Ebara Corporation
- Shuji Uozumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated material handling system (AMHS) rail methodology
- Patent number 12,358,729
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Guancyun Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
OHT vehicle and method of controlling operation of same
- Patent number 12,362,214
- Issue date Jul 15, 2025
- Semes Co., Ltd.
- Sung Hyun Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tray carrier and corresponding method
- Patent number 12,362,213
- Issue date Jul 15, 2025
- STMicroelectronics (Malta) Ltd.
- Silvio Spiteri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for spindle mechanism monitoring and maintenance in process...
- Patent number 12,362,157
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Hsiang Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Interface tool and methods of operation
- Patent number 12,362,198
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Syuan Cai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Foreline assembly for quad station process module
- Patent number 12,362,206
- Issue date Jul 15, 2025
- Lam Research Corporation
- Miguel Benjamin Vasquez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,362,210
- Issue date Jul 15, 2025
- Kokusai Electric Corporation
- Keita Okubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for transferring substrate and method for transferring su...
- Patent number 12,362,215
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage, testing apparatus, and stage operating method
- Patent number 12,354,898
- Issue date Jul 8, 2025
- Tokyo Electron Limited
- Masahito Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alignment apparatus, deposition apparatus, electronic device manufa...
- Patent number 12,354,894
- Issue date Jul 8, 2025
- CANON TOKKI CORPORATION
- Toshiaki Himeji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SOT deform lead-retract removal track
- Patent number 12,347,705
- Issue date Jul 1, 2025
- Texas Instruments Incorporated
- Sunday Hirro Rey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, heat insulator assembly and method...
- Patent number 12,344,935
- Issue date Jul 1, 2025
- Kokusai Electric Corporation
- Akihiro Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wet processing system and system and method for manufacturing semic...
- Patent number 12,347,702
- Issue date Jul 1, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ying-Chieh Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer conveyance unit and wafer conveyance method
- Patent number 12,347,718
- Issue date Jul 1, 2025
- Hamamatsu Photonics K.K.
- Akira Shimase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Equipment front end module and destructive analysis automation appa...
- Patent number 12,343,881
- Issue date Jul 1, 2025
- Samsung Electronics Co., Ltd.
- Youn Gon Oh
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Light irradiation type heat treatment method and heat treatment app...
- Patent number 12,341,031
- Issue date Jun 24, 2025
- SCREEN Holdings Co., Ltd.
- Akitsugu Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular material handling robot platform
- Patent number 12,341,043
- Issue date Jun 24, 2025
- Persimmon Technologies Corporation
- Martin Hosek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer apparatus and transfer method
- Patent number 12,341,046
- Issue date Jun 24, 2025
- Tokyo Electron Limited
- Norihiko Amikura
- G01 - MEASURING TESTING
Information Patent Grant
Resin shaping device
- Patent number 12,341,036
- Issue date Jun 24, 2025
- BONDTECH CO., LTD.
- Akira Yamauchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Parallel transfer apparatus
- Patent number 12,341,045
- Issue date Jun 24, 2025
- Samsung Electronics Co., Ltd.
- Hyunjae Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Material handling system and monitoring system and monitoring metho...
- Patent number 12,339,208
- Issue date Jun 24, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Yuanzhang Qin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate conveyance method, substrate conveyance apparatus, moldin...
- Patent number 12,339,584
- Issue date Jun 24, 2025
- Canon Kabushiki Kaisha
- Osamu Yasunobe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exhaust piping for a semiconductor processing tool
- Patent number 12,334,365
- Issue date Jun 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuo-Sheng Lien
- B08 - CLEANING
Information Patent Grant
Boat transfer method and heat treatment apparatus
- Patent number 12,334,380
- Issue date Jun 17, 2025
- Tokyo Electron Limited
- Shingo Hishiya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Purge controlling system
- Patent number 12,334,363
- Issue date Jun 17, 2025
- Brillian Network & Automation Integrated System Co., Ltd.
- Chen-Wei Ku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ACCOMMODATION DEVICE AND AUTOMATED TRANSPORT CARRIER AND OPERATION...
- Publication number 20250236158
- Publication date Jul 24, 2025
- Innolux Corporation
- Chien-Wei Chen
- B60 - VEHICLES IN GENERAL
Information Patent Application
WAFER CLEANING SYSTEM
- Publication number 20250239466
- Publication date Jul 24, 2025
- Samsung Electronics Co., Ltd.
- Tae Ha YOON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER APPARATUS AND WAFER STORAGE CONTAINER CLEANING APPARATUS
- Publication number 20250236470
- Publication date Jul 24, 2025
- SHIBAURA MECHATRONICS CORPORATION
- Yukinobu NISHIBE
- B08 - CLEANING
Information Patent Application
LOAD LOCK DEVICE
- Publication number 20250239465
- Publication date Jul 24, 2025
- Canon ANELVA Corporation
- Jun MIURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONVEYANCE APPARATUS, TRANSFER METHOD, CONVEYANCE METHOD, AND SEMIC...
- Publication number 20250239475
- Publication date Jul 24, 2025
- JSW Aktina System Co., Ltd.
- Takahiro FUJI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Transfer Module and Method for Manufacturing Substrate Tr...
- Publication number 20250232994
- Publication date Jul 17, 2025
- TOKYO ELECTRON LIMITED
- Akinori SHIMAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transfer System and Semiconductor Manufacturing Method
- Publication number 20250232995
- Publication date Jul 17, 2025
- TOKYO ELECTRON LIMITED
- Hikaru OZONE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONVEYANCE APPARATUS, CONVEYANCE METHOD, AND SEMICONDUCTOR APPARATU...
- Publication number 20250232996
- Publication date Jul 17, 2025
- JSW Aktina System Co., Ltd.
- Teruaki SHIMOJI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OVERHEAD CARRIER VEHICLE
- Publication number 20250229810
- Publication date Jul 17, 2025
- MURATA MACHINERY, LTD.
- Makoto Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING SYSTEM AND PROCESSING METHOD
- Publication number 20250232967
- Publication date Jul 17, 2025
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OVERHEAD TRANSPORT SYSTEM
- Publication number 20250223114
- Publication date Jul 10, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chieh HSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20250226245
- Publication date Jul 10, 2025
- Samsung Electronics Co., Ltd.
- Tae Kun KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND FI...
- Publication number 20250223694
- Publication date Jul 10, 2025
- TOKYO ELECTRON LIMITED
- Tomoya ONITSUKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Semiconductor Fabrication
- Publication number 20250226250
- Publication date Jul 10, 2025
- Nanoverse Technologies Inc.
- Jeffrey Albelo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BATCH-TYPE SUBSTRATE PROCESSING APPARATUS
- Publication number 20250226252
- Publication date Jul 10, 2025
- Samsung Electronics Co., Ltd.
- Sekeun KWAK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PURGE SYSTEM
- Publication number 20250226254
- Publication date Jul 10, 2025
- MURATA MACHINERY, LTD.
- Yoshiya WADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER EQUIPMENT AND SUBSTRATE PROCESSING SYSTEM USING...
- Publication number 20250214786
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- Ha Neul YOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TOWER LIFT AND CONTROL METHOD THEREOF
- Publication number 20250218835
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- Chong Whan LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD OF PROCESSING A SUBSTRATE
- Publication number 20250218838
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- Jun Hyun LIM
- B08 - CLEANING
Information Patent Application
SEMICONDUCTOR DIE AND METHODS OF FORMATION
- Publication number 20250218793
- Publication date Jul 3, 2025
- Taiwan Semiconductor Manufactacturing Company, Ltd.
- I-Chun WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING SUBSTRATE
- Publication number 20250218815
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- Seul Gi CHOI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250218821
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- Jong Wha KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND PROCESS FOR POST-CHEMICAL MECHANICAL POLISHING CLEANING
- Publication number 20250218837
- Publication date Jul 3, 2025
- Applied Materials, Inc.
- Clinton SAKATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HUMIDITY CONTROL DEVICE FOR EQUIPMENT FRONT END MODULE OF SEMICONDU...
- Publication number 20250218834
- Publication date Jul 3, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ren-Hau Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTAINER TRANSPORTING APPARATUS AND LOGISTICS PROCESSING SYSTEM IN...
- Publication number 20250218836
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- Geo Chul JEONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER POLISHING SYSTEM, LOADING METHOD AND USING METHOD THEREOF
- Publication number 20250214196
- Publication date Jul 3, 2025
- HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
- Xiaoyu XU
- B24 - GRINDING POLISHING
Information Patent Application
STOCKER DEVICE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250218839
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- Chang Suk OH
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20250210391
- Publication date Jun 26, 2025
- TOKYO ELECTRON LIMITED
- Yukiyoshi SAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR PRESSURIZED WORKSTATION
- Publication number 20250210389
- Publication date Jun 26, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Jung HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250210390
- Publication date Jun 26, 2025
- SCREEN Holdings Co., Ltd.
- Takahiro YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS

for conveying

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Wafer treatment device

Loader device and substrate transport system

Information processing apparatus for teaching transfer position of...

Substrate transfer device including housing provided with fan

Substrate cleaning apparatus, substrate processing apparatus, subst...

Automated material handling system (AMHS) rail methodology

OHT vehicle and method of controlling operation of same

Tray carrier and corresponding method

Methods for spindle mechanism monitoring and maintenance in process...

Interface tool and methods of operation

Foreline assembly for quad station process module

Substrate processing apparatus, method of manufacturing semiconduct...

Apparatus for transferring substrate and method for transferring su...

Stage, testing apparatus, and stage operating method

Alignment apparatus, deposition apparatus, electronic device manufa...

SOT deform lead-retract removal track

Substrate processing apparatus, heat insulator assembly and method...

Wet processing system and system and method for manufacturing semic...

Wafer conveyance unit and wafer conveyance method

Equipment front end module and destructive analysis automation appa...

Light irradiation type heat treatment method and heat treatment app...

Modular material handling robot platform

Transfer apparatus and transfer method

Resin shaping device

Parallel transfer apparatus

Material handling system and monitoring system and monitoring metho...

Substrate conveyance method, substrate conveyance apparatus, moldin...

Exhaust piping for a semiconductor processing tool

Boat transfer method and heat treatment apparatus

Purge controlling system

Patents Applicationslast 30 patents

ACCOMMODATION DEVICE AND AUTOMATED TRANSPORT CARRIER AND OPERATION...

WAFER CLEANING SYSTEM

TRANSFER APPARATUS AND WAFER STORAGE CONTAINER CLEANING APPARATUS

LOAD LOCK DEVICE

CONVEYANCE APPARATUS, TRANSFER METHOD, CONVEYANCE METHOD, AND SEMIC...

Substrate Transfer Module and Method for Manufacturing Substrate Tr...

Transfer System and Semiconductor Manufacturing Method

CONVEYANCE APPARATUS, CONVEYANCE METHOD, AND SEMICONDUCTOR APPARATU...

OVERHEAD CARRIER VEHICLE

PROCESSING SYSTEM AND PROCESSING METHOD

OVERHEAD TRANSPORT SYSTEM

SUBSTRATE PROCESSING SYSTEM

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND FI...

Method of Semiconductor Fabrication

BATCH-TYPE SUBSTRATE PROCESSING APPARATUS

PURGE SYSTEM

SUBSTRATE TRANSFER EQUIPMENT AND SUBSTRATE PROCESSING SYSTEM USING...

TOWER LIFT AND CONTROL METHOD THEREOF

APPARATUS AND METHOD OF PROCESSING A SUBSTRATE

SEMICONDUCTOR DIE AND METHODS OF FORMATION

APPARATUS FOR TREATING SUBSTRATE

SUBSTRATE PROCESSING APPARATUS

SYSTEM AND PROCESS FOR POST-CHEMICAL MECHANICAL POLISHING CLEANING

HUMIDITY CONTROL DEVICE FOR EQUIPMENT FRONT END MODULE OF SEMICONDU...

CONTAINER TRANSPORTING APPARATUS AND LOGISTICS PROCESSING SYSTEM IN...

WAFER POLISHING SYSTEM, LOADING METHOD AND USING METHOD THEREOF

STOCKER DEVICE AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

MODULAR PRESSURIZED WORKSTATION

SUBSTRATE PROCESSING APPARATUS