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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/677
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Patents Grants
last 30 patents
Information
Patent Grant
Multiple process semiconductor processing system
Patent number
12,266,550
Issue date
Apr 1, 2025
Applied Materials, Inc.
Nitin Pathak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetic transfer apparatus and fabrication method of the same
Patent number
12,266,555
Issue date
Apr 1, 2025
Korea University Research and Business Foundation
Tae-Yeon Seong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
12,266,562
Issue date
Apr 1, 2025
Tokyo Electron Limited
Hajime Naito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
12,266,554
Issue date
Apr 1, 2025
Brooks Automation US, LLC
Jairo T. Moura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bonding system and bonding method
Patent number
12,261,147
Issue date
Mar 25, 2025
BONDTECH CO., LTD.
Akira Yamauchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and furnace opening closer
Patent number
12,261,066
Issue date
Mar 25, 2025
Kokusai Electric Corporation
Takashi Nogami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate handling device for a wafer
Patent number
12,261,075
Issue date
Mar 25, 2025
SEMSYSCO GMBH
Andreas Gleissner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple semiconductor die container load port
Patent number
12,261,069
Issue date
Mar 25, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Hung Huang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus for transferring substrate in vacuum chamber
Patent number
12,255,090
Issue date
Mar 18, 2025
T-Robotics Co., Ltd.
Soo Jong Lee
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Printing system assemblies and methods
Patent number
12,251,946
Issue date
Mar 18, 2025
Kateeva, Inc.
Robert B. Lowrance
B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
12,255,081
Issue date
Mar 18, 2025
Tokyo Electron Limited
Shinichi Hayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor processing apparatus and method utilizing electrostat...
Patent number
12,255,091
Issue date
Mar 18, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Tsai-Hao Hung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device for shifting at least one sub-assembly between a provisionin...
Patent number
12,246,387
Issue date
Mar 11, 2025
SIEGFRIED HOFMANN GMBH
Daniel Feseker
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Substrate transport apparatus and substrate transport method
Patent number
12,249,527
Issue date
Mar 11, 2025
Tokyo Electron Limited
Isamu Taoda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device maintenance in semiconductor manufacturing environment
Patent number
12,246,404
Issue date
Mar 11, 2025
Taiwan Semiconductor Manufacturing Company Limited
Vincent Chien
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Substrate processing apparatus and method
Patent number
12,247,288
Issue date
Mar 11, 2025
Picosun Oy
Väinö Kilpi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for transporting container and system for storing contain...
Patent number
12,240,701
Issue date
Mar 4, 2025
Semes Co., Ltd.
Jun Sang Ahn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transportation method
Patent number
12,241,782
Issue date
Mar 4, 2025
Hamamatsu Photonics K.K.
Hiroki Oyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tower lift
Patent number
12,240,709
Issue date
Mar 4, 2025
Semes Co., Ltd.
Hee Jae Byun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Supporting shelf module and wafer container using same
Patent number
12,237,190
Issue date
Feb 25, 2025
Gudeng Precision Industrial Co., Ltd.
Ming-Chien Chiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas-inlet module and gas-inlet nozzle
Patent number
12,237,193
Issue date
Feb 25, 2025
Brillian Network & Automation Integrated System Co., Ltd.
Yi-Jun Gu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer storage devices configured to measure physical properties of...
Patent number
12,237,189
Issue date
Feb 25, 2025
Micron Technology, Inc.
Nagasubramaniyan Chandrasekaran
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cassette lid opening device
Patent number
12,237,195
Issue date
Feb 25, 2025
ASM IP Holding B.V.
Theodorus G. M. Oosterlaken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate transporter and substrate processing apparatus including...
Patent number
12,237,194
Issue date
Feb 25, 2025
EBARA CORPORATION
Akihiro Yazawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Docking device with moveable frame and sealing component
Patent number
12,237,196
Issue date
Feb 25, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Hung Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
12,230,515
Issue date
Feb 18, 2025
Tokyo Electron Limited
Nobuhiko Mouri
B08 - CLEANING
Information
Patent Grant
Substrate processing system and substrate processing method
Patent number
12,230,540
Issue date
Feb 18, 2025
Tokyo Electron Limited
Yoshihiro Kawaguchi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Track-guided cart system
Patent number
12,227,110
Issue date
Feb 18, 2025
Murata Machinery, Ltd.
Mitsuya Tokumoto
B60 - VEHICLES IN GENERAL
Information
Patent Grant
Control system for wafer transport vehicle and method for operating...
Patent number
12,230,524
Issue date
Feb 18, 2025
Taiwan Semiconductor Manufacturing Company Ltd.
Kai Ping Chan
B60 - VEHICLES IN GENERAL
Information
Patent Grant
Method for actuating a bonding head
Patent number
12,230,599
Issue date
Feb 18, 2025
BESI Switzerland AG
Markus Aebischer
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
WAFER CASSETTE LOADING AND UNLOADING SYSTEM FOR AN EPITAXIAL REACT...
Publication number
20250112074
Publication date
Apr 3, 2025
LPE S.p.A.
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate Transfer Device and Power Supply Method for Substrate Tra...
Publication number
20250112072
Publication date
Apr 3, 2025
TOKYO ELECTRON LIMITED
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MAINTENANCE DEVICE, VACUUM PROCESSING SYSTEM, AND MAINTENANCE METHOD
Publication number
20250112073
Publication date
Apr 3, 2025
TOKYO ELECTRON LIMITED
B08 - CLEANING
Information
Patent Application
AIRBORNE CONTAMINANT MANAGEMENT METHOD AND SYSTEM
Publication number
20250108417
Publication date
Apr 3, 2025
Taiwan Semiconductor Manufacturing Co., Ltd.
B08 - CLEANING
Information
Patent Application
SUBSTRATE CARRIER DETERIORATION DETECTION AND REPAIR
Publication number
20250100161
Publication date
Mar 27, 2025
Taiwan Semiconductor Manufacturing Co., LTD
Jen-Ti WANG
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Transport Vehicle
Publication number
20250105042
Publication date
Mar 27, 2025
DAIFUKU CO., LTD.
Tadashi Nishikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20250096018
Publication date
Mar 20, 2025
SEMES CO., LTD.
Changhwa JEONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20250096020
Publication date
Mar 20, 2025
TOKYO ELECTRON LIMITED
Masahiro Dogome
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRANSPORT APPARATUS AND ADAPTER PENDANT
Publication number
20250096029
Publication date
Mar 20, 2025
BROOKS AUTOMATION US, LLC
Dana L. ATWOOD
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE
Publication number
20250096023
Publication date
Mar 20, 2025
SCREEN Holdings Co., Ltd.
Joji KUWAHARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS
Publication number
20250087513
Publication date
Mar 13, 2025
EBARA CORPORATION
Masaya SEKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ROBOT, SYSTEM, CONTROL METHOD, AND COMPUTER-READABLE STORAGE MEDIUM
Publication number
20250087523
Publication date
Mar 13, 2025
Kabushiki Kaisha Yaskawa Denki
Hiroki SANEMASA
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
PROCESS KIT ENCLOSURE SYSTEM
Publication number
20250087524
Publication date
Mar 13, 2025
Applied Materials, Inc.
Helder Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PRINTING SYSTEM ASSEMBLIES AND METHODS
Publication number
20250083457
Publication date
Mar 13, 2025
Kateeva, Inc.
Robert B. Lowrance
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ROBOT, SYSTEM, CONTROL METHOD, AND COMPUTER-READABLE STORAGE MEDIUM
Publication number
20250087522
Publication date
Mar 13, 2025
Kabushiki Kaisha Yaskawa Denki
Hiroki SANEMASA
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
SUBSTRATE TRANSPORT APPARATUS
Publication number
20250087514
Publication date
Mar 13, 2025
BROOKS AUTOMATION US, LLC
Robert T. Caveney
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
SEMICONDUCTOR PACKAGE CUTTING SYSTEM AND METHOD
Publication number
20250087503
Publication date
Mar 13, 2025
SEMES CO., LTD.
Changhoon OK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
Publication number
20250087515
Publication date
Mar 13, 2025
TOKYO ELECTRON LIMITED
Kouzou KANAGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING...
Publication number
20250087502
Publication date
Mar 13, 2025
KIOXIA Corporation
Kohei YUKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DISPLAY PROCESSING APPARATUS, SUBSTRATE PROCESSING APPARATUS, DISPL...
Publication number
20250079210
Publication date
Mar 6, 2025
Kokusai Electric Corporation
Shinichiro MORI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SILICON WAFER TRANSFER AUXILIARY DEVICE AND SLICING MACHINE USING S...
Publication number
20250079219
Publication date
Mar 6, 2025
TCL ZHONGHUAN RENEWABLE ENERGY TECHNOLOGY CO., LTD.
Lihui JIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE TRANSPORT UNIT AND CHAMBER INCLUDING SEMICONDU...
Publication number
20250073915
Publication date
Mar 6, 2025
ATECO INC.
Taek Seon LEE
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20250079220
Publication date
Mar 6, 2025
SCREEN Holdings Co., Ltd.
Satoshi KAKINOKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INFORMATION PROCESSING APPARATUS, SUBSTRATE PROCESSING APPARATUS, A...
Publication number
20250079206
Publication date
Mar 6, 2025
EBARA CORPORATION
Yoshimasa OZONE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20250079215
Publication date
Mar 6, 2025
TOKYO ELECTRON LIMITED
Tsuyoshi WATANABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM FOR MONITORING WAFER CARRIER AND METHOD OF MANUFACTURING SEM...
Publication number
20250076230
Publication date
Mar 6, 2025
Taiwan Semiconductor Manufacturing company Ltd.
HSU TUNG YEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CARRIER DETECTION USING CONTACTLESS COMMUNICATION
Publication number
20250079209
Publication date
Mar 6, 2025
Applied Materials, Inc.
Nithiyanantham Balasubramaniam
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH DENSITY SEMICONDUCTOR STORAGE SYSTEM
Publication number
20250079212
Publication date
Mar 6, 2025
Taiwan Semiconductor Manufacturing Co., Ltd.
Rong Syuan FAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THREE-SIDE CONVEYOR EQUIPMENT FOR SILICON WAFERS
Publication number
20250079214
Publication date
Mar 6, 2025
TCL ZHONGHUAN RENEWABLE ENERGY TECHNOLOGY CO., LTD.
Mengcheng QU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE HOLDER, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE TRANSF...
Publication number
20250079217
Publication date
Mar 6, 2025
TOKYO ELECTRON LIMITED
Yukiyoshi Saito
H01 - BASIC ELECTRIC ELEMENTS