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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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Industries

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Patents Grantslast 30 patents

Information Patent Grant
Process tool and method for handling semiconductor substrate
- Patent number 12,327,743
- Issue date Jun 10, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrier chuck and methods of forming and using thereof
- Patent number 12,327,749
- Issue date Jun 10, 2025
- Intel Corporation
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device and substrate processing system
- Patent number 12,327,744
- Issue date Jun 10, 2025
- Tokyo Electron Limited
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
FOUP transfer device
- Patent number 12,327,746
- Issue date Jun 10, 2025
- Rorze Corporation
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Grip-based transport speeds for transporting objects at a manufactu...
- Patent number 12,325,140
- Issue date Jun 10, 2025
- Applied Materials, Inc.
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Method of processing substrate, substrate processing apparatus, rec...
- Patent number 12,327,720
- Issue date Jun 10, 2025
- Kokusai Electric Corporation
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport apparatus
- Patent number 12,327,745
- Issue date Jun 10, 2025
- Semes Co., Ltd.
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Transport carrier docking device
- Patent number 12,327,747
- Issue date Jun 10, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for managing chip manufacturing equipment, apparatus, electr...
- Patent number 12,327,769
- Issue date Jun 10, 2025
- Saimeite Technology Co, Ltd.
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate inspection system and method of use thereof
- Patent number 12,322,616
- Issue date Jun 3, 2025
- JNK TECH
- Youngjin Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mechanical indexer for multi-station process module
- Patent number 12,322,641
- Issue date Jun 3, 2025
- Lam Research Corporation
- Michael Nordin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,322,606
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Shota Umezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for cleaning a package
- Patent number 12,322,608
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ying-Hao Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for automated wafer carrier handling
- Patent number 12,322,628
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ren-Hau Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus
- Patent number 12,322,638
- Issue date Jun 3, 2025
- Disco Corporation
- Yoshinori Kakinuma
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Transfer apparatus and transfer method
- Patent number 12,322,629
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Tomonori Horiuchi
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing system, substrate processing method, and recor...
- Patent number 12,322,631
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Takafumi Tsuchiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of processing substrate, substrate processing apparatus, met...
- Patent number 12,320,778
- Issue date Jun 3, 2025
- Kokusai Electric Corporation
- Teruo Yoshino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of heat-treating silicon wafer using lateral heat treatment...
- Patent number 12,320,034
- Issue date Jun 3, 2025
- Sumco Corporation
- Yoshihiro Kuwano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exhaust assembly, and liquid processing apparatus and substrate pro...
- Patent number 12,318,819
- Issue date Jun 3, 2025
- Semes Co., Ltd.
- Kyung Min Kim
- B08 - CLEANING
Information Patent Grant
Apparatus for transferring electronic component from flexible carri...
- Patent number 12,322,630
- Issue date Jun 3, 2025
- MICRAFT SYSTEM PLUS CO., LTD.
- Chingju Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece handling architecture for high workpiece throughput
- Patent number 12,315,748
- Issue date May 27, 2025
- Applied Materials, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Monolithic platen
- Patent number 12,311,498
- Issue date May 27, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tsung-Lung Lai
- B24 - GRINDING POLISHING
Information Patent Grant
Eliminating yield impact of stochastics in lithography
- Patent number 12,315,727
- Issue date May 27, 2025
- Lam Research Corporation
- Nader Shamma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece handling architecture for high workpiece throughput
- Patent number 12,315,747
- Issue date May 27, 2025
- Applied Materials, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for a semiconductor fabrication facility and method for oper...
- Patent number 12,315,751
- Issue date May 27, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Fu-Hsien Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus and transfer schedule creation method
- Patent number 12,315,752
- Issue date May 27, 2025
- Tokyo Electron Limited
- Kenichirou Matsuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for measuring the gap
- Patent number 12,313,392
- Issue date May 27, 2025
- Semes Co., Ltd.
- Chung Woo Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Tower lift, tower lift driving method, and machine readable medium
- Patent number 12,312,185
- Issue date May 27, 2025
- Semes Co., Ltd.
- Na Hyun Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor fabrication system and method
- Patent number 12,308,268
- Issue date May 20, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Tsung-Sheng Kuo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DISTANCE MEASUREMENT METHOD, DISTANCE MEASUREMENT SYSTEM, AND SUBST...
- Publication number 20250180381
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Tomohiro YAMANOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING S...
- Publication number 20250183061
- Publication date Jun 5, 2025
- KIOXIA Corporation
- Satoshi NAKAOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSOR SUBSTRATE AND INTEGRATED SENSING SURFACES
- Publication number 20250183074
- Publication date Jun 5, 2025
- Applied Materials, Inc.
- Chuang-Chia Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FURNACE TUBE ASSEMBLY AND DISASSEMBLY AUXILIARY DEVICE
- Publication number 20250183077
- Publication date Jun 5, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Qi WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR HANDLING CARRIER RINGS MOUNTED WITH ELECTR...
- Publication number 20250178845
- Publication date Jun 5, 2025
- ASMPT SINGAPORE PTE. LTD
- Chak Tong SZE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...
- Publication number 20250183084
- Publication date Jun 5, 2025
- SAMSUNG DISPLAY CO., LTD.
- YONGHYUN KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHIP ATTACHING DEVICE, CHIP PROCESSING SYSTEM, AND CHIP PROCESSING...
- Publication number 20250183222
- Publication date Jun 5, 2025
- TOKYO ELECTRON LIMITED
- Yasutaka Mizomoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR EQUIPMENT MAINFRAME FOR SEMICONDUCTOR PROCESS FLOWS
- Publication number 20250183067
- Publication date Jun 5, 2025
- Intel Corporation
- John William Rudolph
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED MATERIAL HANDLING SYSTEM
- Publication number 20250183078
- Publication date Jun 5, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Yu-Zhu LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER METHOD AND SEMICONDUCTOR MANUFACTURING SYSTEM
- Publication number 20250174478
- Publication date May 29, 2025
- TOKYO ELECTRON LIMITED
- Ryota GOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transfer Module, and Substrate Transfer Method in Semiconductor Man...
- Publication number 20250174476
- Publication date May 29, 2025
- TOKYO ELECTRON LIMITED
- Dongwei LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CONTAINER
- Publication number 20250174479
- Publication date May 29, 2025
- Samsung Electronics Co., Ltd.
- Wonguk SEO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20250170619
- Publication date May 29, 2025
- SCREEN Holdings Co., Ltd.
- Shinichi TANIGUCHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS INC...
- Publication number 20250174477
- Publication date May 29, 2025
- SCREEN Holdings Co., Ltd.
- Hiroyuki KAWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20250174480
- Publication date May 29, 2025
- SCREEN Holdings Co., Ltd.
- Shinichi TANIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS INC...
- Publication number 20250174487
- Publication date May 29, 2025
- SCREEN Holdings Co., Ltd.
- Hiroyuki KAWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUSES AND METHODS FOR REDUCING PARTICLE CONTAMINATION OF WAFE...
- Publication number 20250164899
- Publication date May 22, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Zheng-Hao Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS AND VIS...
- Publication number 20250166167
- Publication date May 22, 2025
- TOKYO ELECTRON LIMITED
- Yusuke MIYAKUBO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MULTI-CHAMBER ASSEMBLY FOR HANDLING REMOVABLE EPITAXIAL REACTION UNITS
- Publication number 20250167017
- Publication date May 22, 2025
- LPE S.p.A.
- Maurilio Meschia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250167018
- Publication date May 22, 2025
- TOKYO ELECTRON LIMITED
- Manabu HONMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATION SYSTEM FOR A REMOVABLE REACTION UNIT OF AN EPITAXIAL REA...
- Publication number 20250167028
- Publication date May 22, 2025
- LPE S.p.A.
- Maurilio Meschia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESIN SEALING DEVICE AND RESIN SEALING METHOD
- Publication number 20250167016
- Publication date May 22, 2025
- Apic Yamada Corporation
- Shusaku Tagami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOLAR CELL FABRICATION
- Publication number 20250160038
- Publication date May 15, 2025
- National University of Singapore
- Jai PRAKASH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE TRANSPORT CARRIER DOCKING DEVICE
- Publication number 20250157842
- Publication date May 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Hung HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND TURN-OVER DEVICE THEREOF
- Publication number 20250157841
- Publication date May 15, 2025
- ACM RESEARCH (SHANGHAI), INC.
- Yazhou Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS OF OPTICAL INSPECTION OF ELECTRONIC DEVICE MANU...
- Publication number 20250155234
- Publication date May 15, 2025
- Applied Materials, Inc.
- Mohsin Waqar
- G01 - MEASURING TESTING
Information Patent Application
TRANSPORT SYSTEM
- Publication number 20250157840
- Publication date May 15, 2025
- MURATA MACHINERY, LTD.
- Toma MIYAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250149355
- Publication date May 8, 2025
- TOKYO ELECTRON LIMITED
- Susumu HAYAKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STORAGE APPARATUS WITH INTEGRATED SORTER
- Publication number 20250149360
- Publication date May 8, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Tsung-Sheng KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PROCESSING SYSTEMS, WAFER TRANSPORT DEVICES, AND RELATED METHODS
- Publication number 20250149362
- Publication date May 8, 2025
- Micron Technology, Inc.
- Nagasubramaniyan Chandrasekaran
- H01 - BASIC ELECTRIC ELEMENTS

for conveying

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Process tool and method for handling semiconductor substrate

Carrier chuck and methods of forming and using thereof

Substrate transfer device and substrate processing system

FOUP transfer device

Grip-based transport speeds for transporting objects at a manufactu...

Method of processing substrate, substrate processing apparatus, rec...

Transport apparatus

Transport carrier docking device

Method for managing chip manufacturing equipment, apparatus, electr...

Substrate inspection system and method of use thereof

Mechanical indexer for multi-station process module

Substrate processing apparatus and substrate processing method

Apparatus and methods for cleaning a package

Apparatus and method for automated wafer carrier handling

Processing apparatus

Transfer apparatus and transfer method

Substrate processing system, substrate processing method, and recor...

Method of processing substrate, substrate processing apparatus, met...

Method of heat-treating silicon wafer using lateral heat treatment...

Exhaust assembly, and liquid processing apparatus and substrate pro...

Apparatus for transferring electronic component from flexible carri...

Workpiece handling architecture for high workpiece throughput

Monolithic platen

Eliminating yield impact of stochastics in lithography

Workpiece handling architecture for high workpiece throughput

System for a semiconductor fabrication facility and method for oper...

Substrate treatment apparatus and transfer schedule creation method

Apparatus and method for measuring the gap

Tower lift, tower lift driving method, and machine readable medium

Semiconductor fabrication system and method

Patents Applicationslast 30 patents

DISTANCE MEASUREMENT METHOD, DISTANCE MEASUREMENT SYSTEM, AND SUBST...

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING S...

SENSOR SUBSTRATE AND INTEGRATED SENSING SURFACES

FURNACE TUBE ASSEMBLY AND DISASSEMBLY AUXILIARY DEVICE

APPARATUS AND METHOD FOR HANDLING CARRIER RINGS MOUNTED WITH ELECTR...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...

CHIP ATTACHING DEVICE, CHIP PROCESSING SYSTEM, AND CHIP PROCESSING...

MODULAR EQUIPMENT MAINFRAME FOR SEMICONDUCTOR PROCESS FLOWS

AUTOMATED MATERIAL HANDLING SYSTEM

SUBSTRATE TRANSFER METHOD AND SEMICONDUCTOR MANUFACTURING SYSTEM

Transfer Module, and Substrate Transfer Method in Semiconductor Man...

WAFER CONTAINER

SUBSTRATE PROCESSING SYSTEM

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS INC...

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS INC...

APPARATUSES AND METHODS FOR REDUCING PARTICLE CONTAMINATION OF WAFE...

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS AND VIS...

MULTI-CHAMBER ASSEMBLY FOR HANDLING REMOVABLE EPITAXIAL REACTION UNITS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

AUTOMATION SYSTEM FOR A REMOVABLE REACTION UNIT OF AN EPITAXIAL REA...

RESIN SEALING DEVICE AND RESIN SEALING METHOD

SOLAR CELL FABRICATION

MULTIPLE TRANSPORT CARRIER DOCKING DEVICE

SUBSTRATE CLEANING APPARATUS AND TURN-OVER DEVICE THEREOF

METHODS AND SYSTEMS OF OPTICAL INSPECTION OF ELECTRONIC DEVICE MANU...

TRANSPORT SYSTEM

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SEMICONDUCTOR STORAGE APPARATUS WITH INTEGRATED SORTER

WAFER PROCESSING SYSTEMS, WAFER TRANSPORT DEVICES, AND RELATED METHODS