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H01L21/677

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/677for conveying

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Load port and methods of operation
- Patent number 12,272,573
- Issue date Apr 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Fam Shiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular pressurized workstation
- Patent number 12,272,580
- Issue date Apr 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Jung Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Overhead conveyance system
- Patent number 12,272,582
- Issue date Apr 8, 2025
- Murata Machinery, Ltd.
- Yasuhisa Ito
- B66 - HOISTING LIFTING HAULING
Information Patent Grant
Steering devices for OHT
- Patent number 12,272,581
- Issue date Apr 8, 2025
- Samsung Electronics Co., Ltd.
- Sangjune Bae
- B66 - HOISTING LIFTING HAULING
Information Patent Grant
Reduced footprint wafer handling platform
- Patent number 12,272,583
- Issue date Apr 8, 2025
- Lam Research Corporation
- Christopher W. Burkhart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple process semiconductor processing system
- Patent number 12,266,550
- Issue date Apr 1, 2025
- Applied Materials, Inc.
- Nitin Pathak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic transfer apparatus and fabrication method of the same
- Patent number 12,266,555
- Issue date Apr 1, 2025
- Korea University Research and Business Foundation
- Tae-Yeon Seong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,266,554
- Issue date Apr 1, 2025
- Brooks Automation US, LLC
- Jairo T. Moura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,266,562
- Issue date Apr 1, 2025
- Tokyo Electron Limited
- Hajime Naito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and furnace opening closer
- Patent number 12,261,066
- Issue date Mar 25, 2025
- Kokusai Electric Corporation
- Takashi Nogami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bonding system and bonding method
- Patent number 12,261,147
- Issue date Mar 25, 2025
- BONDTECH CO., LTD.
- Akira Yamauchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate handling device for a wafer
- Patent number 12,261,075
- Issue date Mar 25, 2025
- SEMSYSCO GMBH
- Andreas Gleissner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple semiconductor die container load port
- Patent number 12,261,069
- Issue date Mar 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Hung Huang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for transferring substrate in vacuum chamber
- Patent number 12,255,090
- Issue date Mar 18, 2025
- T-Robotics Co., Ltd.
- Soo Jong Lee
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Printing system assemblies and methods
- Patent number 12,251,946
- Issue date Mar 18, 2025
- Kateeva, Inc.
- Robert B. Lowrance
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,255,081
- Issue date Mar 18, 2025
- Tokyo Electron Limited
- Shinichi Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing apparatus and method utilizing electrostat...
- Patent number 12,255,091
- Issue date Mar 18, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsai-Hao Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for shifting at least one sub-assembly between a provisionin...
- Patent number 12,246,387
- Issue date Mar 11, 2025
- SIEGFRIED HOFMANN GMBH
- Daniel Feseker
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate transport apparatus and substrate transport method
- Patent number 12,249,527
- Issue date Mar 11, 2025
- Tokyo Electron Limited
- Isamu Taoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device maintenance in semiconductor manufacturing environment
- Patent number 12,246,404
- Issue date Mar 11, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Vincent Chien
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus and method
- Patent number 12,247,288
- Issue date Mar 11, 2025
- Picosun Oy
- Väinö Kilpi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transportation method
- Patent number 12,241,782
- Issue date Mar 4, 2025
- Hamamatsu Photonics K.K.
- Hiroki Oyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for transporting container and system for storing contain...
- Patent number 12,240,701
- Issue date Mar 4, 2025
- Semes Co., Ltd.
- Jun Sang Ahn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tower lift
- Patent number 12,240,709
- Issue date Mar 4, 2025
- Semes Co., Ltd.
- Hee Jae Byun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Supporting shelf module and wafer container using same
- Patent number 12,237,190
- Issue date Feb 25, 2025
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas-inlet module and gas-inlet nozzle
- Patent number 12,237,193
- Issue date Feb 25, 2025
- Brillian Network & Automation Integrated System Co., Ltd.
- Yi-Jun Gu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer storage devices configured to measure physical properties of...
- Patent number 12,237,189
- Issue date Feb 25, 2025
- Micron Technology, Inc.
- Nagasubramaniyan Chandrasekaran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cassette lid opening device
- Patent number 12,237,195
- Issue date Feb 25, 2025
- ASM IP Holding B.V.
- Theodorus G. M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transporter and substrate processing apparatus including...
- Patent number 12,237,194
- Issue date Feb 25, 2025
- EBARA CORPORATION
- Akihiro Yazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Docking device with moveable frame and sealing component
- Patent number 12,237,196
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Hung Huang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE MEASUREMENT ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, M...
- Publication number 20250118579
- Publication date Apr 10, 2025
- Kokusai Electric Corporation
- Tokunobu AKAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC RF RETURN KIT DESIGN
- Publication number 20250118577
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Vellaichamy Nagappan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOW MODIFICATION FIXTURE FOR AN EQUIPMENT FRONT END MODULE
- Publication number 20250118582
- Publication date Apr 10, 2025
- Entegris, Inc.
- Seong Chan Kim
- G05 - CONTROLLING REGULATING
Information Patent Application
COMMON RESOURCE SHARING AND MANAGEMENT FOR SUBSTRATE PROCESSING SYS...
- Publication number 20250118583
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Kirankumar Neelasandra SAVANDAIAH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DEVICE, NOTCH POSITION CORRECTION METHOD, SUBSTR...
- Publication number 20250118584
- Publication date Apr 10, 2025
- ASM IP HOLDING B.V.
- Masashi Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METROLOGY SYSTEM WITH TWIN PLANAR MOTOR STAGE
- Publication number 20250118602
- Publication date Apr 10, 2025
- KLA Corporation
- Michel Pharand
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Detecting a Substrate in a Chamber of a Sub...
- Publication number 20250118580
- Publication date Apr 10, 2025
- Mingle TONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Positional Relationship Detection System
- Publication number 20250118581
- Publication date Apr 10, 2025
- DAIFUKU CO., LTD.
- Tomotaka Kinugawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CASSETTE LOADING AND UNLOADING SYSTEM FOR AN EPITAXIAL REACT...
- Publication number 20250112074
- Publication date Apr 3, 2025
- LPE S.p.A.
- Francesco Corea
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Transfer Device and Power Supply Method for Substrate Tra...
- Publication number 20250112072
- Publication date Apr 3, 2025
- TOKYO ELECTRON LIMITED
- Lingxin JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAINTENANCE DEVICE, VACUUM PROCESSING SYSTEM, AND MAINTENANCE METHOD
- Publication number 20250112073
- Publication date Apr 3, 2025
- TOKYO ELECTRON LIMITED
- Takashi DOKAN
- B08 - CLEANING
Information Patent Application
AIRBORNE CONTAMINANT MANAGEMENT METHOD AND SYSTEM
- Publication number 20250108417
- Publication date Apr 3, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Ming TSAO
- B08 - CLEANING
Information Patent Application
SUBSTRATE CARRIER DETERIORATION DETECTION AND REPAIR
- Publication number 20250100161
- Publication date Mar 27, 2025
- Taiwan Semiconductor Manufacturing Co., LTD
- Jen-Ti WANG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Transport Vehicle
- Publication number 20250105042
- Publication date Mar 27, 2025
- DAIFUKU CO., LTD.
- Tadashi Nishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250096018
- Publication date Mar 20, 2025
- SEMES CO., LTD.
- Changhwa JEONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250096020
- Publication date Mar 20, 2025
- TOKYO ELECTRON LIMITED
- Masahiro Dogome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPORT APPARATUS AND ADAPTER PENDANT
- Publication number 20250096029
- Publication date Mar 20, 2025
- BROOKS AUTOMATION US, LLC
- Dana L. ATWOOD
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE
- Publication number 20250096023
- Publication date Mar 20, 2025
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250087513
- Publication date Mar 13, 2025
- EBARA CORPORATION
- Masaya SEKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROBOT, SYSTEM, CONTROL METHOD, AND COMPUTER-READABLE STORAGE MEDIUM
- Publication number 20250087523
- Publication date Mar 13, 2025
- Kabushiki Kaisha Yaskawa Denki
- Hiroki SANEMASA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
PROCESS KIT ENCLOSURE SYSTEM
- Publication number 20250087524
- Publication date Mar 13, 2025
- Applied Materials, Inc.
- Helder Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRINTING SYSTEM ASSEMBLIES AND METHODS
- Publication number 20250083457
- Publication date Mar 13, 2025
- Kateeva, Inc.
- Robert B. Lowrance
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROBOT, SYSTEM, CONTROL METHOD, AND COMPUTER-READABLE STORAGE MEDIUM
- Publication number 20250087522
- Publication date Mar 13, 2025
- Kabushiki Kaisha Yaskawa Denki
- Hiroki SANEMASA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS
- Publication number 20250087514
- Publication date Mar 13, 2025
- BROOKS AUTOMATION US, LLC
- Robert T. Caveney
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SEMICONDUCTOR PACKAGE CUTTING SYSTEM AND METHOD
- Publication number 20250087503
- Publication date Mar 13, 2025
- SEMES CO., LTD.
- Changhoon OK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20250087515
- Publication date Mar 13, 2025
- TOKYO ELECTRON LIMITED
- Kouzou KANAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING...
- Publication number 20250087502
- Publication date Mar 13, 2025
- KIOXIA Corporation
- Kohei YUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISPLAY PROCESSING APPARATUS, SUBSTRATE PROCESSING APPARATUS, DISPL...
- Publication number 20250079210
- Publication date Mar 6, 2025
- Kokusai Electric Corporation
- Shinichiro MORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON WAFER TRANSFER AUXILIARY DEVICE AND SLICING MACHINE USING S...
- Publication number 20250079219
- Publication date Mar 6, 2025
- TCL ZHONGHUAN RENEWABLE ENERGY TECHNOLOGY CO., LTD.
- Lihui JIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE TRANSPORT UNIT AND CHAMBER INCLUDING SEMICONDU...
- Publication number 20250073915
- Publication date Mar 6, 2025
- ATECO INC.
- Taek Seon LEE
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

for conveying

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Load port and methods of operation

Modular pressurized workstation

Overhead conveyance system

Steering devices for OHT

Reduced footprint wafer handling platform

Multiple process semiconductor processing system

Magnetic transfer apparatus and fabrication method of the same

Substrate processing apparatus

Substrate processing method and substrate processing apparatus

Substrate processing apparatus and furnace opening closer

Bonding system and bonding method

Substrate handling device for a wafer

Multiple semiconductor die container load port

Apparatus for transferring substrate in vacuum chamber

Printing system assemblies and methods

Substrate processing apparatus and substrate processing method

Semiconductor processing apparatus and method utilizing electrostat...

Device for shifting at least one sub-assembly between a provisionin...

Substrate transport apparatus and substrate transport method

Device maintenance in semiconductor manufacturing environment

Substrate processing apparatus and method

Transportation method

Apparatus for transporting container and system for storing contain...

Tower lift

Supporting shelf module and wafer container using same

Gas-inlet module and gas-inlet nozzle

Wafer storage devices configured to measure physical properties of...

Cassette lid opening device

Substrate transporter and substrate processing apparatus including...

Docking device with moveable frame and sealing component

Patents Applicationslast 30 patents

TEMPERATURE MEASUREMENT ASSEMBLY, SUBSTRATE PROCESSING APPARATUS, M...

CERAMIC RF RETURN KIT DESIGN

FLOW MODIFICATION FIXTURE FOR AN EQUIPMENT FRONT END MODULE

COMMON RESOURCE SHARING AND MANAGEMENT FOR SUBSTRATE PROCESSING SYS...

SUBSTRATE TRANSFER DEVICE, NOTCH POSITION CORRECTION METHOD, SUBSTR...

METROLOGY SYSTEM WITH TWIN PLANAR MOTOR STAGE

Systems and Methods for Detecting a Substrate in a Chamber of a Sub...

Positional Relationship Detection System

WAFER CASSETTE LOADING AND UNLOADING SYSTEM FOR AN EPITAXIAL REACT...

Substrate Transfer Device and Power Supply Method for Substrate Tra...

MAINTENANCE DEVICE, VACUUM PROCESSING SYSTEM, AND MAINTENANCE METHOD

AIRBORNE CONTAMINANT MANAGEMENT METHOD AND SYSTEM

SUBSTRATE CARRIER DETERIORATION DETECTION AND REPAIR

Transport Vehicle

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

TRANSPORT APPARATUS AND ADAPTER PENDANT

APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE

TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS

ROBOT, SYSTEM, CONTROL METHOD, AND COMPUTER-READABLE STORAGE MEDIUM

PROCESS KIT ENCLOSURE SYSTEM

PRINTING SYSTEM ASSEMBLIES AND METHODS

ROBOT, SYSTEM, CONTROL METHOD, AND COMPUTER-READABLE STORAGE MEDIUM

SUBSTRATE TRANSPORT APPARATUS

SEMICONDUCTOR PACKAGE CUTTING SYSTEM AND METHOD

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING...

DISPLAY PROCESSING APPARATUS, SUBSTRATE PROCESSING APPARATUS, DISPL...

SILICON WAFER TRANSFER AUXILIARY DEVICE AND SLICING MACHINE USING S...

SEMICONDUCTOR DEVICE TRANSPORT UNIT AND CHAMBER INCLUDING SEMICONDU...