for conveying

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CPC
H01L21/677

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/677for conveying

Industries

Patents Grantslast 30 patents

Information Patent Grant
Transfer device, processing system, and transfer method
- Patent number 12,170,216
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Shinya Okano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Test management module and vehicle test system having the same
- Patent number 12,169,156
- Issue date Dec 17, 2024
- Semes Co., Ltd.
- Seung Wan An
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Component manufacturing device and component manufacturing method
- Patent number 12,165,904
- Issue date Dec 10, 2024
- Mitsui Chemicals Tohcello, Inc.
- Eiji Hayashishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process kit enclosure system
- Patent number 12,165,905
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Helder Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus and method of controlling vacuum proces...
- Patent number 12,165,908
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Kiyoshi Mori
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
System with substrate carrier deterioration detection and repair
- Patent number 12,162,134
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jen-Ti Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate conveying robot and substrate conveying robot system
- Patent number 12,162,145
- Issue date Dec 10, 2024
- Kawasaki Jukogyo Kabushiki Kaisha
- Haruhiko Tan
- G05 - CONTROLLING REGULATING
Information Patent Grant
Processing method, method of manufacturing semiconductor, and subst...
- Patent number 12,165,894
- Issue date Dec 10, 2024
- Kokusai Electric Corporation
- Yasuhiro Mizuguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatuses for executing a direct transfer of a semiconductor devi...
- Patent number 12,165,895
- Issue date Dec 10, 2024
- Cowles Semi, LLC
- Andrew Huska
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Display panel, jig, and method of manufacturing display panel with...
- Patent number 12,167,620
- Issue date Dec 10, 2024
- BEIJING BOE TECHNOLOGY DEVELOPMENT CO., LTD.
- Shuquan Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and transfer method
- Patent number 12,165,893
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Norihiko Amikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer detection method and substrate processing apparatus
- Patent number 12,159,798
- Issue date Dec 3, 2024
- Tokyo Electron Limited
- Akira Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for integrating load locks into a factory inter...
- Patent number 12,159,796
- Issue date Dec 3, 2024
- Applied Materials, Inc.
- Jacob Newman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for self-assembling semiconductor light-emitting diodes
- Patent number 12,159,800
- Issue date Dec 3, 2024
- LG Electronics Inc.
- Inbum Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Storage device
- Patent number 12,159,801
- Issue date Dec 3, 2024
- Murata Machinery, Ltd.
- Kokai Jo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enclosure system having walls comprising sidewalls and radio-freque...
- Patent number 12,159,795
- Issue date Dec 3, 2024
- Applied Materials, Inc.
- John C. Menk
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Shortened load port for factory interface
- Patent number 12,159,802
- Issue date Dec 3, 2024
- Applied Materials, Inc.
- Srinivas Poshatrahalli Gopalakrishna
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,154,797
- Issue date Nov 26, 2024
- Ebara Corporation
- Itsuki Kobata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Article transport facility
- Patent number 12,154,807
- Issue date Nov 26, 2024
- Daifuku Co., Ltd.
- Hiroshi Otsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated material handling systems
- Patent number 12,154,809
- Issue date Nov 26, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yen Le Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for manufacturing organic light emitting diode...
- Patent number 12,156,460
- Issue date Nov 26, 2024
- LOTI CO., LTD.
- Woo-Bin Im
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for wafer manufacturing process management
- Patent number 12,154,808
- Issue date Nov 26, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Mei-Hsuan Lin
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Automated semiconductor substrate polishing and cleaning
- Patent number 12,154,810
- Issue date Nov 26, 2024
- GlobalWafers Co., Ltd.
- ShinBae Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,148,637
- Issue date Nov 19, 2024
- Tokyo Electron Limited
- Kiyoshi Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thickness measurement of substrate using color metrology
- Patent number 12,148,148
- Issue date Nov 19, 2024
- Applied Materials, Inc.
- Dominic J. Benvegnu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Container and substrate treating apparatus
- Patent number 12,148,641
- Issue date Nov 19, 2024
- Semes Co., Ltd.
- Dukhyun Son
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser irradiation apparatus
- Patent number 12,148,644
- Issue date Nov 19, 2024
- JSW AKTINA SYSTEM CO., LTD.
- Yuki Suzuki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Carrier vehicle system
- Patent number 12,148,643
- Issue date Nov 19, 2024
- Murata Machinery, Ltd.
- Yasuhisa Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensor-based correction of robot-held object
- Patent number 12,142,503
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Nicholas Michael Kopec
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Transport apparatus with linear bearing
- Patent number 12,142,505
- Issue date Nov 12, 2024
- BROOKS AUTOMATION US, LLC
- Daniel Babbs
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Patents Applicationslast 30 patents

Information Patent Application
EQUIPMENT FRONT END MODULE
- Publication number 20240420979
- Publication date Dec 19, 2024
- PICO & TERA CO., LTD.
- Bum Je WOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER SYSTEMS AND METHODS OF USE THEREOF
- Publication number 20240420981
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Jeffrey C. Hudgens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-SPEED LAYOUT METHOD AND LAYOUT DEVICE FOR PHOTOVOLTAIC MODULES
- Publication number 20240421244
- Publication date Dec 19, 2024
- SUZHOU SC-SOLAR EQUIPMENT CO., LTD
- Jiliang Mao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING CHAMBER, SEMICONDUCTOR PROCESSING EQUIPMENT, AND SEMICON...
- Publication number 20240420982
- Publication date Dec 19, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Wenkai CHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING LINE FOR PROCESSING A SUBSTRATE USED FOR THE MANUFACTURE...
- Publication number 20240416645
- Publication date Dec 19, 2024
- Applied Materials Italia S.R.L.
- Davide COLLA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
CHILLER MAKE-BREAK CONNECTOR FOR SUBSTRATE PROCESSING SYSTEMS
- Publication number 20240412983
- Publication date Dec 12, 2024
- LAM RESEARCH CORPORATION
- Alexander Charles MARCACCI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORTING STRUCTURE AND INSPECTION EQUIPMENT THEREFOF AND CALIBRAT...
- Publication number 20240412996
- Publication date Dec 12, 2024
- GUDENG PRECISION INDUSTRIAL CO., LTD.
- MING-CHIEN CHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ALIGNING A WAFER TO A CHUCK
- Publication number 20240412992
- Publication date Dec 12, 2024
- KLA Corporation
- Jaime Poris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR III-V/SILICON HYBRID INTEGRATION
- Publication number 20240402427
- Publication date Dec 5, 2024
- ROCKLEY PHOTONICS LIMITED
- Guomin Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transfer Apparatus And Processing System
- Publication number 20240404858
- Publication date Dec 5, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Mengyang Xin
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SYSTEMS AND METHODS FOR MANAGING SEISMIC FORCES
- Publication number 20240404857
- Publication date Dec 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Hao LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR CLEANING A PACKAGE
- Publication number 20240395571
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ying-Hao Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FIREPROOF DOOR APPARATUS, FIREPROOF STRUCTURE AND SUBSTRATE TREATIN...
- Publication number 20240392622
- Publication date Nov 28, 2024
- SEMES CO., LTD.
- Min Beom KIM
- B66 - HOISTING LIFTING HAULING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20240395585
- Publication date Nov 28, 2024
- TOKYO ELECTRON LIMITED
- Manabu HONMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20240391706
- Publication date Nov 28, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi HASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF ADJUSTING SUBSTRATE TR...
- Publication number 20240395589
- Publication date Nov 28, 2024
- TOKYO ELECTRON LIMITED
- Shota UMEZAKI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND ART...
- Publication number 20240393702
- Publication date Nov 28, 2024
- Canon Kabushiki Kaisha
- RYOTA MAKINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, LOAD DEVICE AND METHOD
- Publication number 20240387213
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chuang LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR AUTOMATED MATERIAL HANDLING MANAGEMENT
- Publication number 20240387214
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chieh Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD PORT AND METHODS OF OPERATION
- Publication number 20240387208
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Fam SHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR AIR FLOW OPTIMIZATION IN ENVIRONMENT FOR SE...
- Publication number 20240387221
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Fam SHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DEVICE
- Publication number 20240383127
- Publication date Nov 21, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- Masatoshi ONODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240387207
- Publication date Nov 21, 2024
- SEMES CO., LTD.
- Ki Won HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR APPARATUS AND METHOD OF COLLECTING RESIDUES
- Publication number 20240387215
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ping-Cheng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR DETERMINING WAFER CHARACTERS
- Publication number 20240387223
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., LTD
- Wei-Da KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL DEVICE, SEMICONDUCTOR MANUFACTURING SYSTEM, AND CONTROL MET...
- Publication number 20240385582
- Publication date Nov 21, 2024
- TOKYO ELECTRON LIMITED
- Kiminari SAKAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EQUIPMENT FRONT END MODULE
- Publication number 20240387217
- Publication date Nov 21, 2024
- ASM IP HOLDING B.V.
- Hsuan Te Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TRANSFER SYSTEM AND A METHOD FOR TRANSPORTING WAFERS
- Publication number 20240387218
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ren-Hau Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED MATERIAL HANDLING SYSTEMS
- Publication number 20240387219
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yen Le LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING MODULE AND SUBSTRATE PROCESSING DEVICE PROVIDE...
- Publication number 20240387220
- Publication date Nov 21, 2024
- DAIKIN FINETECH, LTD.
- Yasunori DEGUCHI
- H01 - BASIC ELECTRIC ELEMENTS

for conveying

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Transfer device, processing system, and transfer method

Test management module and vehicle test system having the same

Component manufacturing device and component manufacturing method

Process kit enclosure system

Vacuum processing apparatus and method of controlling vacuum proces...

System with substrate carrier deterioration detection and repair

Substrate conveying robot and substrate conveying robot system

Processing method, method of manufacturing semiconductor, and subst...

Apparatuses for executing a direct transfer of a semiconductor devi...

Display panel, jig, and method of manufacturing display panel with...

Substrate processing system and transfer method

Transfer detection method and substrate processing apparatus

Systems and methods for integrating load locks into a factory inter...

Device for self-assembling semiconductor light-emitting diodes

Storage device

Enclosure system having walls comprising sidewalls and radio-freque...

Shortened load port for factory interface

Substrate processing method and substrate processing apparatus

Article transport facility

Automated material handling systems

Method and apparatus for manufacturing organic light emitting diode...

System and method for wafer manufacturing process management

Automated semiconductor substrate polishing and cleaning

Substrate processing apparatus

Thickness measurement of substrate using color metrology

Container and substrate treating apparatus

Laser irradiation apparatus

Carrier vehicle system

Sensor-based correction of robot-held object

Transport apparatus with linear bearing

Patents Applicationslast 30 patents

EQUIPMENT FRONT END MODULE

SUBSTRATE TRANSFER SYSTEMS AND METHODS OF USE THEREOF

HIGH-SPEED LAYOUT METHOD AND LAYOUT DEVICE FOR PHOTOVOLTAIC MODULES

PROCESSING CHAMBER, SEMICONDUCTOR PROCESSING EQUIPMENT, AND SEMICON...

PROCESSING LINE FOR PROCESSING A SUBSTRATE USED FOR THE MANUFACTURE...

CHILLER MAKE-BREAK CONNECTOR FOR SUBSTRATE PROCESSING SYSTEMS

SUPPORTING STRUCTURE AND INSPECTION EQUIPMENT THEREFOF AND CALIBRAT...

SYSTEM AND METHOD FOR ALIGNING A WAFER TO A CHUCK

METHOD FOR III-V/SILICON HYBRID INTEGRATION

Transfer Apparatus And Processing System

SYSTEMS AND METHODS FOR MANAGING SEISMIC FORCES

APPARATUS AND METHODS FOR CLEANING A PACKAGE

FIREPROOF DOOR APPARATUS, FIREPROOF STRUCTURE AND SUBSTRATE TREATIN...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD

SUBSTRATE PROCESSING APPARATUS AND METHOD OF ADJUSTING SUBSTRATE TR...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND ART...

SUBSTRATE PROCESSING SYSTEM, LOAD DEVICE AND METHOD

SYSTEM AND METHOD FOR AUTOMATED MATERIAL HANDLING MANAGEMENT

LOAD PORT AND METHODS OF OPERATION

SYSTEMS AND METHODS FOR AIR FLOW OPTIMIZATION IN ENVIRONMENT FOR SE...

SUBSTRATE TRANSFER DEVICE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SEMICONDUCTOR APPARATUS AND METHOD OF COLLECTING RESIDUES

APPARATUS AND METHODS FOR DETERMINING WAFER CHARACTERS

CONTROL DEVICE, SEMICONDUCTOR MANUFACTURING SYSTEM, AND CONTROL MET...

EQUIPMENT FRONT END MODULE

WAFER TRANSFER SYSTEM AND A METHOD FOR TRANSPORTING WAFERS

AUTOMATED MATERIAL HANDLING SYSTEMS

SUBSTRATE PROCESSING MODULE AND SUBSTRATE PROCESSING DEVICE PROVIDE...