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H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Current Industry
H01L21/67034
for drying
Industries
Overview
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for parts cleaning
Patent number
11,967,491
Issue date
Apr 23, 2024
Semes Co., Ltd.
Soon-Cheon Cho
B08 - CLEANING
Information
Patent Grant
Damper control system and damper control method
Patent number
11,967,508
Issue date
Apr 23, 2024
Ebara Corporation
Akira Imamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, substrate processing method, and st...
Patent number
11,967,509
Issue date
Apr 23, 2024
Tokyo Electron Limited
Osamu Miyahara
B08 - CLEANING
Information
Patent Grant
Cleaning nozzle and cleaning method
Patent number
11,937,763
Issue date
Mar 26, 2024
Disco Corporation
Fumiaki Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cleaning machine and cleaning method
Patent number
11,935,737
Issue date
Mar 19, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Ning Xi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer drying system
Patent number
11,927,392
Issue date
Mar 12, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Wei-Chun Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, substrate processing method and a s...
Patent number
11,929,250
Issue date
Mar 12, 2024
Kioxia Corporation
Katsuhiro Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for in-situ Marangoni cleaning
Patent number
11,923,210
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Wei-Chun Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer processing method
Patent number
11,915,965
Issue date
Feb 27, 2024
ZEUS CO., LTD.
Seung Dae Baek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,901,197
Issue date
Feb 13, 2024
Tokyo Electron Limited
Masataka Gosho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and apparatus for manufacturing inte...
Patent number
11,887,868
Issue date
Jan 30, 2024
Samsung Electronics Co., Ltd.
Young-hoo Kim
B08 - CLEANING
Information
Patent Grant
Vacuum arrangement and method
Patent number
11,887,867
Issue date
Jan 30, 2024
VON ARDENNE Asset GmbH & Co. KG
Torsten Dsaak
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,881,417
Issue date
Jan 23, 2024
SCREEN Holdings Co., Ltd.
Shuichi Yasuda
B08 - CLEANING
Information
Patent Grant
Method for the rapid processing of polymer layers in support of imi...
Patent number
RE49802
Issue date
Jan 16, 2024
YIELD ENGINEERING SYSTEMS, INC.
William Moffat
Information
Patent Grant
Polishing apparatus
Patent number
11,865,665
Issue date
Jan 9, 2024
Ebara Corporation
Kenichi Kobayashi
B24 - GRINDING POLISHING
Information
Patent Grant
Semiconductor manufacturing apparatus and manufacturing method of s...
Patent number
11,862,484
Issue date
Jan 2, 2024
Kioxia Corporation
Tatsuhiko Koide
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for treating substrate
Patent number
11,862,491
Issue date
Jan 2, 2024
Semes Co., Ltd.
Dohyeon Yoon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing system and substrate processing method
Patent number
11,854,840
Issue date
Dec 26, 2023
Tokyo Electron Limited
Yuji Takimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,833,550
Issue date
Dec 5, 2023
Kioxia Corporation
Minako Inukai
B08 - CLEANING
Information
Patent Grant
Apparatus for attaching semiconductor parts
Patent number
11,823,920
Issue date
Nov 21, 2023
JMJ KOREA CO., LTD.
Yun Hwa Choi
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Residue removal during semiconductor device formation
Patent number
11,791,152
Issue date
Oct 17, 2023
Micron Technology, Inc.
Matthew S. Thorum
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Processing apparatus and processing method, and gas cluster generat...
Patent number
11,772,138
Issue date
Oct 3, 2023
Tokyo Electron Limited
Kazuya Dobashi
B08 - CLEANING
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,769,663
Issue date
Sep 26, 2023
SCREEN Holdings Co., Ltd.
Masayuki Otsuji
B08 - CLEANING
Information
Patent Grant
Wafer processing apparatus
Patent number
11,749,557
Issue date
Sep 5, 2023
ZEUS CO., LTD.
Jiho Park
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Dry cleaning apparatus and dry cleaning method
Patent number
11,742,221
Issue date
Aug 29, 2023
Samsung Electronics Co., Ltd.
Seung-Min Shin
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Substrate processing system and method for supplying processing fluid
Patent number
11,735,439
Issue date
Aug 22, 2023
Tokyo Electron Limited
Yasuo Kiyohara
B08 - CLEANING
Information
Patent Grant
Methods and apparatus for Marangoni drying
Patent number
11,735,438
Issue date
Aug 22, 2023
Applied Materials, Inc.
Edwin Velazquez
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for treating substrate
Patent number
11,735,437
Issue date
Aug 22, 2023
Semes Co., Ltd.
Boong Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Drying module, substrate processing module and method of drying sub...
Patent number
11,728,184
Issue date
Aug 15, 2023
Ebara Corporation
Sho Tamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-chamber apparatus
Patent number
11,721,565
Issue date
Aug 8, 2023
Samsung Electronics Co., Ltd.
Yong Jun Choi
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE TREATING APPARATUS
Publication number
20240145263
Publication date
May 2, 2024
SEMES CO., LTD.
Seung Hoon OH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE DRYING APPARATUS, SUBSTRATE...
Publication number
20240145276
Publication date
May 2, 2024
EBARA CORPORATION
Yosuke HIMORI
B08 - CLEANING
Information
Patent Application
APPARATUS FOR PROCESSING A SUBSTRATE
Publication number
20240145264
Publication date
May 2, 2024
SEMES CO., LTD.
Sungho KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND FLUID HEATING DEVICE
Publication number
20240136206
Publication date
Apr 25, 2024
TOKYO ELECTRON LIMITED
Takahiro HAYASHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REPLACEMENT END TIME DETERMINATION METHOD, SUBSTRATE PROCESSING MET...
Publication number
20240105442
Publication date
Mar 28, 2024
SCREEN Holdings Co., Ltd.
Noritake SUMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POLISHING APPARATUS
Publication number
20240091899
Publication date
Mar 21, 2024
EBARA CORPORATION
Kenichi KOBAYASHI
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
Publication number
20240096652
Publication date
Mar 21, 2024
KIOXIA Corporation
Mana TANABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240096651
Publication date
Mar 21, 2024
SCREEN Holdings Co., Ltd.
Shuichi YASUDA
B08 - CLEANING
Information
Patent Application
SUBSTRATE TREATING APPARATUS
Publication number
20240030047
Publication date
Jan 25, 2024
SCREEN Holdings Co., Ltd.
Tadashi MAEGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20230408194
Publication date
Dec 21, 2023
SEMES CO., LTD.
Haewon Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20230402303
Publication date
Dec 14, 2023
TOKYO ELECTRON LIMITED
Tsunenaga Nakashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus and system including the same
Publication number
20230402297
Publication date
Dec 14, 2023
KCTECH CO., LTD.
Hyung Chul KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20230395407
Publication date
Dec 7, 2023
TOKYO ELECTRON LIMITED
Tomofumi EMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER DRYING SYSTEM
Publication number
20230384030
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Wei-Chun HSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR SUPPLYING GAS, FACILITY FOR PROCESSING SUB...
Publication number
20230369074
Publication date
Nov 16, 2023
SEMES CO., LTD.
Hae Won CHOI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-CHAMBER APPARATUS
Publication number
20230343613
Publication date
Oct 26, 2023
Samsung Electronics Co., Ltd.
Yong Jun CHOI
B08 - CLEANING
Information
Patent Application
DRYING DEVICE AND METHOD FOR DRYING A SUBSTRATE
Publication number
20230314072
Publication date
Oct 5, 2023
RENA TECHNOLOGIES GMBH
MARKUS UIHLEIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR FABRICATION SYSTEM
Publication number
20230306146
Publication date
Sep 28, 2023
Samsung Electronics Co., Ltd.
SEORA PARK
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DRYING DEVICE AND METHOD FOR DRYING A SUBSTRATE
Publication number
20230304735
Publication date
Sep 28, 2023
RENA TECHNOLOGIES GMBH
MARKUS UIHLEIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
Publication number
20230290632
Publication date
Sep 14, 2023
TOKYO ELECTRON LIMITED
Gentaro GOSHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20230260807
Publication date
Aug 17, 2023
TOKYO ELECTRON LIMITED
Yasuo KIYOHARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM WITH VERTICAL ARRANGEMENT STRUCTURE
Publication number
20230260806
Publication date
Aug 17, 2023
KCTECH CO., LTD.
Dong Hwa LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR PROCESSING WAFER AND METHOD FOR CONTROLLING PROCESSIN...
Publication number
20230238256
Publication date
Jul 27, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC
Jianzhong DING
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, COMPUTER-READABLE STORAGE MEDIUM ST...
Publication number
20230230857
Publication date
Jul 20, 2023
EBARA CORPORATION
Masayoshi IMAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20230187230
Publication date
Jun 15, 2023
SEMES CO., LTD.
Eui Sang LIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE DRYING DEVICE AND METHOD OF DRYING SUBSTRATE USING THE SAME
Publication number
20230187231
Publication date
Jun 15, 2023
Samsung Electronics Co., Ltd.
Ansook Sul
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND SEMICONDUCTOR MANUFACTURING EQUIPM...
Publication number
20230144896
Publication date
May 11, 2023
SEMES CO., LTD.
Young Je UM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD THEREOF
Publication number
20230131222
Publication date
Apr 27, 2023
Samsung Electronics Co., Ltd.
Hae Won CHOI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FLOW RESISTANCE GENERATING UNIT AND SUBSTRATE TREATING APPARATUS IN...
Publication number
20230113184
Publication date
Apr 13, 2023
SEMES CO., LTD.
Jae Won SHIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE AND APPARATUS FOR MEASURING CONCEN...
Publication number
20230111149
Publication date
Apr 13, 2023
SEMES CO., LTD.
Sang Min LEE
H01 - BASIC ELECTRIC ELEMENTS