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H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Current Industry
H01L21/2633
for etching
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Patents Grants
last 30 patents
Information
Patent Grant
Etching platinum-containing thin film using protective cap layer
Patent number
11,929,423
Issue date
Mar 12, 2024
Texas Instruments Incorporated
Sebastian Meier
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Method for extreme ultraviolet lithography mask treatment
Patent number
11,906,897
Issue date
Feb 20, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Pei-Cheng Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Artificial intelligence-enabled preparation end-pointing
Patent number
11,847,813
Issue date
Dec 19, 2023
FEI Company
Thomas Gary Miller
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Optical image capturing system, image capturing device and electron...
Patent number
11,815,667
Issue date
Nov 14, 2023
LARGAN PRECISION CO., LTD
Lin-Yao Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Depositive shielding for fiducial protection from redeposition
Patent number
11,817,395
Issue date
Nov 14, 2023
FEI Company
Sean Morgan-Jones
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus including laser heating for etching thin layer
Patent number
11,772,198
Issue date
Oct 3, 2023
Semes Co., Ltd.
Won Geun Kim
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
RF capacitive coupled etch reactor
Patent number
11,742,187
Issue date
Aug 29, 2023
EVATEC AG
Johannes Weichart
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming a semiconductor device
Patent number
11,735,469
Issue date
Aug 22, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yi-Nien Su
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for removing re-sputtered material from patterned sidewalls
Patent number
11,615,960
Issue date
Mar 28, 2023
Cornell University
David G. Lishan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Controlled hardmask shaping to create tapered slanted fins
Patent number
11,581,189
Issue date
Feb 14, 2023
Applied Materials, Inc.
Ludovic Godet
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical image capturing system, image capturing device and electron...
Patent number
11,555,987
Issue date
Jan 17, 2023
LARGAN PRECISION CO., LTD
Lin-Yao Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Phosphorus fugitive emission control
Patent number
11,545,368
Issue date
Jan 3, 2023
Applied Materials, Inc.
Cuiyang Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum plasma workpiece treatment apparatus
Patent number
11,469,085
Issue date
Oct 11, 2022
EVATEC AG
Jurgen Weichart
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Epitaxy-free nanowire cell process for the manufacture of photovolt...
Patent number
11,362,229
Issue date
Jun 14, 2022
California Institute of Technology
Phillip R. Jahelka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming a semiconductor device
Patent number
11,322,393
Issue date
May 3, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Yi-Nien Su
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer processing method
Patent number
11,322,404
Issue date
May 3, 2022
Disco Corporation
Masaru Nakamura
B28 - WORKING CEMENT, CLAY, OR STONE
Information
Patent Grant
RF capacitive coupled dual frequency etch reactor
Patent number
11,217,434
Issue date
Jan 4, 2022
EVATEC AG
Jurgen Weichart
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for ion beam delayering of a sample and control t...
Patent number
11,214,874
Issue date
Jan 4, 2022
Techinsights Inc.
Robert K. Foster
G01 - MEASURING TESTING
Information
Patent Grant
Artificial intelligence-enabled preparation end-pointing
Patent number
11,176,656
Issue date
Nov 16, 2021
FEI Company
Thomas Gary Miller
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Controlled hardmask shaping to create tapered slanted fins
Patent number
11,171,010
Issue date
Nov 9, 2021
Applied Materials, Inc.
Ludovic Godet
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Phosphorus fugitive emission control
Patent number
11,127,601
Issue date
Sep 21, 2021
Applied Materials, Inc.
Cuiyang Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Preserving underlying dielectric layer during MRAM device formation
Patent number
11,121,173
Issue date
Sep 14, 2021
International Business Machines Corporation
Ashim Dutta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern decomposition lithography techniques
Patent number
11,107,786
Issue date
Aug 31, 2021
Intel Corporation
Charles H. Wallace
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus to eliminate contaminant particles from an acc...
Patent number
11,101,134
Issue date
Aug 24, 2021
Exogenesis Corporation
Allen R. Kirkpatrick
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal line structure and method
Patent number
11,101,216
Issue date
Aug 24, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Hsiang-Lun Kao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus with doped surfaces, and related methods with in situ doping
Patent number
11,088,147
Issue date
Aug 10, 2021
Micron Technology, Inc.
Jaydip Guha
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Die singulation and stacked device structures
Patent number
11,075,117
Issue date
Jul 27, 2021
Xilinx, Inc.
Ganesh Hariharan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching platinum-containing thin film using protective cap layer
Patent number
11,069,530
Issue date
Jul 20, 2021
Texas Instruments Incorporated
Sebastian Meier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Face-on, gas-assisted etching for plan-view lamellae preparation
Patent number
11,062,879
Issue date
Jul 13, 2021
FEI Company
Noel Thomas Franco
G01 - MEASURING TESTING
Information
Patent Grant
Method for extreme ultraviolet lithography mask treatment
Patent number
11,048,158
Issue date
Jun 29, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Pei-Cheng Hsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
ARTIFICIAL INTELLIGENCE-ENABLED PREPARATION END-POINTING
Publication number
20240071040
Publication date
Feb 29, 2024
FEI Company
Thomas Gary Miller
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
OPTICAL IMAGE CAPTURING SYSTEM, IMAGE CAPTURING DEVICE AND ELECTRON...
Publication number
20240027738
Publication date
Jan 25, 2024
LARGAN PRECISION CO., LTD.
Lin-Yao Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of Forming a Semiconductor Device
Publication number
20230343636
Publication date
Oct 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Yi-Nien Su
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dynamic Laser-Assisted Etching
Publication number
20230253207
Publication date
Aug 10, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Han-Yu Tang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
COMBINING FOCUSED ION BEAM MILLING AND SCANNING ELECTRON MICROSCOPE...
Publication number
20230245933
Publication date
Aug 3, 2023
KLA Corporation
Youfei JIANG
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
OPTICAL IMAGE CAPTURING SYSTEM, IMAGE CAPTURING DEVICE AND ELECTRON...
Publication number
20230112466
Publication date
Apr 13, 2023
LARGAN PRECISION CO., LTD.
Lin-Yao Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM ETCHING APPARATUS AND METHOD
Publication number
20230050650
Publication date
Feb 16, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Jung-Hao CHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE
Publication number
20220416114
Publication date
Dec 29, 2022
ENKRIS SEMICONDUCTOR, INC.
Kai Cheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND ION BEAM IRRADIATI...
Publication number
20220301809
Publication date
Sep 22, 2022
KIOXIA Corporation
Junichi HASHIMOTO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING A SEMICONDUCTOR DEVICE
Publication number
20220262674
Publication date
Aug 18, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Yi-Nien Su
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS TO ELIMINATE CONTAMINANT PARTICLES FROM AN ACC...
Publication number
20220115236
Publication date
Apr 14, 2022
Exogenesis Corporation
Allen R. Kirkpatrick
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITIVE SHIELDING FOR FIDUCIAL PROTECTION FROM REDEPOSITION
Publication number
20220102284
Publication date
Mar 31, 2022
FEI Company
Sean Morgan-Jones
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ARTIFICIAL INTELLIGENCE-ENABLED PREPARATION END-POINTING
Publication number
20220067915
Publication date
Mar 3, 2022
FEI Company
Thomas Gary Miller
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Phosphorus Fugitive Emission Control
Publication number
20210384041
Publication date
Dec 9, 2021
Applied Materials, Inc.
Cuiyang Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Metal Line Structure and Method
Publication number
20210375760
Publication date
Dec 2, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Hsiang-Lun Kao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERN DECOMPOSITION LITHOGRAPHY TECHNIQUES
Publication number
20210375807
Publication date
Dec 2, 2021
Intel Corporation
CHARLES H. WALLACE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Extreme Ultraviolet Lithography Mask Treatment
Publication number
20210311383
Publication date
Oct 7, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Pei-Cheng Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING PLATINUM-CONTAINING THIN FILM USING PROTECTIVE CAP LAYER
Publication number
20210313179
Publication date
Oct 7, 2021
TEXAS INSTRUMENTS INCORPORATED
Sebastian Meier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROLLED HARDMASK SHAPING TO CREATE TAPERED SLANTED FINS
Publication number
20210305055
Publication date
Sep 30, 2021
Applied Materials, Inc.
Ludovic GODET
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR REMOVING RE-SPUTTERED MATERIAL FROM PATTERNED SIDEWALLS
Publication number
20210193466
Publication date
Jun 24, 2021
Cornell University
David G. Lishan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS FOR ETCHING THIN LAYER
Publication number
20210178522
Publication date
Jun 17, 2021
SEMES CO., LTD.
Won Geun KIM
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method of Forming a Semiconductor Device
Publication number
20210134657
Publication date
May 6, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Yi-Nien Su
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Preserving Underlying Dielectric Layer During MRAM Device Formation
Publication number
20210126051
Publication date
Apr 29, 2021
International Business Machines Corporation
Ashim Dutta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTICAL IMAGE CAPTURING SYSTEM, IMAGE CAPTURING DEVICE AND ELECTRON...
Publication number
20200344391
Publication date
Oct 29, 2020
LARGAN PRECISION CO., LTD.
Lin-Yao Liao
G02 - OPTICS
Information
Patent Application
METHOD AND SYSTEM FOR ION BEAM DELAYERING OF A SAMPLE AND CONTROL T...
Publication number
20200318242
Publication date
Oct 8, 2020
TECHINSIGHTS INC.
Robert K. Foster
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ARTIFICIAL INTELLIGENCE-ENABLED PREPARATION END-POINTING
Publication number
20200279362
Publication date
Sep 3, 2020
FEI Company
Thomas Gary Miller
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ETCHING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20200168468
Publication date
May 28, 2020
TOKYO ELECTRON LIMITED
Takayuki ISHII
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROLLED HARDMASK SHAPING TO CREATE TAPERED SLANTED FINS
Publication number
20200135482
Publication date
Apr 30, 2020
Applied Materials, Inc.
Ludovic GODET
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FACE-ON, GAS-ASSISTED ETCHING FOR PLAN-VIEW LAMELLAE PREPARATION
Publication number
20200126756
Publication date
Apr 23, 2020
FEI Company
Noel Thomas Franco
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20200126801
Publication date
Apr 23, 2020
TOKYO ELECTRON LIMITED
Maju TOMURA
H01 - BASIC ELECTRIC ELEMENTS