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Industry
CPC
B24B57/02
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Parent Industries
B
PERFORMING OPERATIONS TRANSPORTING
B24
Grinding technology
B24B
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
B24B57/00
Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
Current Industry
B24B57/02
for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
Industries
Overview
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Flow divider with internal vane
Patent number
11,971,127
Issue date
Apr 30, 2024
Cummins Inc.
George Martin Tolhurst
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing tool for narrow part, method of manufacturing polishing t...
Patent number
11,951,594
Issue date
Apr 9, 2024
Mitsubishi Heavy Industries Compressor Corporation
Kosei Kawahara
B24 - GRINDING POLISHING
Information
Patent Grant
Slurry monitoring device, CMP system and method of in-line monitori...
Patent number
11,938,586
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Chwen Yu
G01 - MEASURING TESTING
Information
Patent Grant
Control method of grinding water flow rate during double side grind...
Patent number
11,938,588
Issue date
Mar 26, 2024
Zhonghuan Advanced Semiconductor Technology Co., Ltd.
Chien-Ming Chen
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for polishing and method of polishing
Patent number
11,926,018
Issue date
Mar 12, 2024
Ebara Corporation
Masayoshi Ito
B24 - GRINDING POLISHING
Information
Patent Grant
Fluid processing systems including a plurality of material tanks, a...
Patent number
11,925,912
Issue date
Mar 12, 2024
Fujifilm Electronic Materials U.S.A., Inc.
Shih-Pin Chou
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Blasting system with dual dispensers from single chamber
Patent number
11,884,480
Issue date
Jan 30, 2024
Benjamin LeCompte
B24 - GRINDING POLISHING
Information
Patent Grant
Temperature-based in-situ edge assymetry correction during CMP
Patent number
11,865,671
Issue date
Jan 9, 2024
Applied Materials, Inc.
Haosheng Wu
B24 - GRINDING POLISHING
Information
Patent Grant
High-throughput, precise semiconductor slurry blending tool
Patent number
11,858,086
Issue date
Jan 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chi-Wei Chiu
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Polishing apparatus
Patent number
11,858,088
Issue date
Jan 2, 2024
Disco Corporation
Toshiyuki Moriya
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus and method for recirculating fluids
Patent number
11,858,091
Issue date
Jan 2, 2024
Mega Fluid Systems, Inc.
Robert Eiseler
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Magnetic slurry for highly efficiency CMP
Patent number
11,854,827
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yen-Ting Chen
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,850,697
Issue date
Dec 26, 2023
Tokyo Electron Limited
Osamu Miyahara
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus
Patent number
11,839,948
Issue date
Dec 12, 2023
Ebara Corporation
Takashi Yamazaki
B24 - GRINDING POLISHING
Information
Patent Grant
On-demand in-line-blending and supply of chemicals
Patent number
11,839,860
Issue date
Dec 12, 2023
DIVERSIFIED FLUID SOLUTIONS, LLC
Darren Willey
B24 - GRINDING POLISHING
Information
Patent Grant
Temperature and slurry flow rate control in CMP
Patent number
11,826,872
Issue date
Nov 28, 2023
Applied Materials, Inc.
Haosheng Wu
B24 - GRINDING POLISHING
Information
Patent Grant
Slurry distribution device for chemical mechanical polishing
Patent number
11,806,835
Issue date
Nov 7, 2023
Applied Materials, Inc.
Yen-Chu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical mechanical polishing with applied magnetic field
Patent number
11,787,008
Issue date
Oct 17, 2023
Applied Materials, Inc.
Xingfeng Wang
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polishing apparatus including a multi-zone platen
Patent number
11,772,228
Issue date
Oct 3, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Ting-Hsun Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Small batch polishing fluid delivery for CMP
Patent number
11,772,234
Issue date
Oct 3, 2023
Applied Materials, Inc.
Robert D. Tolles
B24 - GRINDING POLISHING
Information
Patent Grant
Slurry enhancement for polishing system
Patent number
11,752,592
Issue date
Sep 12, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Hung Liao
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate processing apparatus with an air curtain in a loading/unl...
Patent number
11,749,549
Issue date
Sep 5, 2023
KCTECH CO., LTD.
Dong Min Kim
B24 - GRINDING POLISHING
Information
Patent Grant
Automatic wet sanding apparatus
Patent number
11,745,308
Issue date
Sep 5, 2023
Toyota Jidosha Kabushiki Kaisha
Ryuji Hayashi
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate polish edge uniformity control with secondary fluid dispense
Patent number
11,724,355
Issue date
Aug 15, 2023
Applied Materials, Inc.
Justin H. Wong
B24 - GRINDING POLISHING
Information
Patent Grant
Floor treatment apparatus
Patent number
11,717,929
Issue date
Aug 8, 2023
Edward Johannes Lagerwaard
B24 - GRINDING POLISHING
Information
Patent Grant
Rotor polishing device
Patent number
11,712,776
Issue date
Aug 1, 2023
Terry Sullivan
B24 - GRINDING POLISHING
Information
Patent Grant
Automatic wet sanding apparatus
Patent number
11,701,752
Issue date
Jul 18, 2023
Toyota Jidosha Kabushiki Kaisha
Ryuji Hayashi
B24 - GRINDING POLISHING
Information
Patent Grant
Temperature-based assymetry correction during CMP and nozzle for me...
Patent number
11,697,187
Issue date
Jul 11, 2023
Applied Materials, Inc.
Haosheng Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical-mechanical polishing apparatus
Patent number
11,679,467
Issue date
Jun 20, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Hsi Huang
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus and polishing method
Patent number
11,667,007
Issue date
Jun 6, 2023
Ebara Corporation
Mitsunori Sugiyama
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
POLISHING PAD AND POLISHING METHOD
Publication number
20240131654
Publication date
Apr 25, 2024
FUJIMI INCORPORATED
Kyosuke Tenko
B24 - GRINDING POLISHING
Information
Patent Application
MAGNET-DRIVEN CHEMICAL-MECHANICAL POLISHING
Publication number
20240123561
Publication date
Apr 18, 2024
Intel Corporation
Yosef KORNBLUTH
B24 - GRINDING POLISHING
Information
Patent Application
METHOD FOR CMP TEMPERATURE CONTROL
Publication number
20240109163
Publication date
Apr 4, 2024
Applied Materials, Inc.
Haosheng Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ABRASIVE SLURRY REGENERATION METHOD AND ABRASIVE SLURRY REGENERATIO...
Publication number
20240091905
Publication date
Mar 21, 2024
Konica Minolta, Inc.
Shin NAKAYAMA
B24 - GRINDING POLISHING
Information
Patent Application
RETAINER RING, CHEMICAL MECHANICAL POLISHING APPARATUS, AND SUBSTRA...
Publication number
20240091902
Publication date
Mar 21, 2024
Samsung Electronics Co., Ltd.
Sangyun LEE
B24 - GRINDING POLISHING
Information
Patent Application
SLURRY ARM AND CHEMICAL MECHANICAL POLISHING APPARATUS INCLUDING TH...
Publication number
20240075581
Publication date
Mar 7, 2024
Samsung Electronics Co., Ltd.
DONGHOON KWON
B24 - GRINDING POLISHING
Information
Patent Application
PAD SURFACE CLEANING DEVICE AROUND PAD CONDITIONER TO ENABLE INSITU...
Publication number
20240066664
Publication date
Feb 29, 2024
Applied Materials, Inc.
Shou-Sung CHANG
B08 - CLEANING
Information
Patent Application
WORKPIECE PROCESSING METHOD
Publication number
20240058922
Publication date
Feb 22, 2024
Disco Corporation
Minoru MATSUZAWA
B24 - GRINDING POLISHING
Information
Patent Application
ELECTRICAL CLEANING TOOL FOR WAFER POLISHING TOOL SYSTEM
Publication number
20240050995
Publication date
Feb 15, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Wen Liu
B08 - CLEANING
Information
Patent Application
POLISHING PAD
Publication number
20240042573
Publication date
Feb 8, 2024
Disco Corporation
Norihisa ARIFUKU
B24 - GRINDING POLISHING
Information
Patent Application
TEMPERATURE AND SLURRY FLOW RATE CONTROL IN CMP
Publication number
20240025006
Publication date
Jan 25, 2024
Applied Materials, Inc.
Haosheng Wu
B24 - GRINDING POLISHING
Information
Patent Application
APPARATUS AND METHOD FOR POLISHING OBJECTS USING THIN FILM OF SLURRY
Publication number
20240025013
Publication date
Jan 25, 2024
Biz Mohammed
B24 - GRINDING POLISHING
Information
Patent Application
MONITORING THICKNESS IN FACE-UP POLISHING WITH ROLLER
Publication number
20240017376
Publication date
Jan 18, 2024
Applied Materials, Inc.
Brian J. Brown
B24 - GRINDING POLISHING
Information
Patent Application
HIGH-THROUGHPUT, PRECISE SEMICONDUCTOR SLURRY BLENDING TOOL
Publication number
20240017372
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Company Limited
Chi-Wei CHIU
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
GRINDING LIQUID MIXING AND SUPPLYING SYSTEM
Publication number
20230405534
Publication date
Dec 21, 2023
Creative System Technology Ltd.
Huo Lung Cheng
B24 - GRINDING POLISHING
Information
Patent Application
FACE-UP WAFER ELECTROCHEMICAL PLANARIZATION APPARATUS
Publication number
20230390887
Publication date
Dec 7, 2023
Applied Materials, Inc.
Kevin H. Song
B24 - GRINDING POLISHING
Information
Patent Application
GROUNDING TECHNIQUES FOR ESD POLYMERIC FLUID LINES
Publication number
20230381922
Publication date
Nov 30, 2023
Applied Materials, Inc.
Chad Pollard
B24 - GRINDING POLISHING
Information
Patent Application
SYSTEM AND METHOD FOR REMOVING DEBRIS DURING CHEMICAL MECHANICAL PL...
Publication number
20230381923
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Wei HSU
B24 - GRINDING POLISHING
Information
Patent Application
CHEMICAL MECHANICAL POLISHING APPARATUS WITH INTEGRATED SLURRY MIXE...
Publication number
20230373062
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Company Limited
Yu-Chen Wei
B24 - GRINDING POLISHING
Information
Patent Application
Chemical Mechanical Polishing Apparatus Including a Multi-Zone Platen
Publication number
20230364733
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Ting-Hsun Chang
B24 - GRINDING POLISHING
Information
Patent Application
GRINDING APPARATUS
Publication number
20230364740
Publication date
Nov 16, 2023
TOKYO ELECTRON LIMITED
Munehisa KODAMA
B24 - GRINDING POLISHING
Information
Patent Application
SLURRY ENHANCEMENT FOR POLISHING SYSTEM
Publication number
20230356356
Publication date
Nov 9, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Hung LIAO
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE POLISH EDGE UNIFORMITY CONTROL WITH SECONDARY FLUID DISPENSE
Publication number
20230339066
Publication date
Oct 26, 2023
Applied Materials, Inc.
Justin H. WONG
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
Publication number
20230321696
Publication date
Oct 12, 2023
EBARA CORPORATION
Hiroki TAKAHASHI
B08 - CLEANING
Information
Patent Application
POLISHING METHOD AND POLISHING APPARATUS FOR WORKPIECE
Publication number
20230311267
Publication date
Oct 5, 2023
EBARA CORPORATION
Toshifumi KIMBA
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE POLISHING APPARATUS AND POLISHING LIQUID DISCHARGE METHOD...
Publication number
20230302604
Publication date
Sep 28, 2023
EBARA CORPORATION
Tetsuji TOGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTERNAL HEATING SYSTEM FOR USE IN CHEMICAL MECHANICAL POLISHING SY...
Publication number
20230294237
Publication date
Sep 21, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Yi-Sheng LIN
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING METHOD AND POLISHING APPARATUS
Publication number
20230294241
Publication date
Sep 21, 2023
EBARA CORPORATION
Ban ITO
B24 - GRINDING POLISHING
Information
Patent Application
NOVEL CHEMICAL-MECHANICAL POLISHING APPARATUS
Publication number
20230286106
Publication date
Sep 14, 2023
Taiwan Semiconductor Manufacturing Co., LTD
Chun-Hsi Huang
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING APPARATUS FOR SUBSTRATE AND POLISHING METHOD FOR SUBSTRAT...
Publication number
20230286108
Publication date
Sep 14, 2023
SAMSUNG ELECTRONICS CO., LTD.
Donghoon Kwon
B24 - GRINDING POLISHING