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CPC
B24B57/02
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Parent Industries
B
PERFORMING OPERATIONS TRANSPORTING
B24
Grinding technology
B24B
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
B24B57/00
Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
Current Industry
B24B57/02
for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
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Patents Grants
last 30 patents
Information
Patent Grant
Liquid feeder and polishing apparatus
Patent number
12,358,098
Issue date
Jul 15, 2025
Ebara Corporation
Kuniaki Yamaguchi
B24 - GRINDING POLISHING
Information
Patent Grant
High-throughput, precise semiconductor slurry blending tool
Patent number
12,343,841
Issue date
Jul 1, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Chi-Wei Chiu
B24 - GRINDING POLISHING
Information
Patent Grant
Buffer and self-feeding compound apparatus
Patent number
12,337,435
Issue date
Jun 24, 2025
Timothy Edward Thompson
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for polishing a wafer and method for fabricating a semico...
Patent number
12,341,015
Issue date
Jun 24, 2025
Samsung Electronics Co., Ltd.
Dong Hoon Kwon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Break-in processing apparatus and break-in processing method
Patent number
12,337,438
Issue date
Jun 24, 2025
Ebara Corporation
Osamu Nabeya
B24 - GRINDING POLISHING
Information
Patent Grant
Grinding method of workpiece
Patent number
12,325,104
Issue date
Jun 10, 2025
Disco Corporation
Daisuke Akita
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing liquid supply system, polishing apparatus, exhausting met...
Patent number
12,311,500
Issue date
May 27, 2025
CHANGXIN MEMORY TECHNOLOGIES, INC.
Peng Zhang
B24 - GRINDING POLISHING
Information
Patent Grant
System and method for removing debris during chemical mechanical pl...
Patent number
12,311,501
Issue date
May 27, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Wei Hsu
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus and method for CMP temperature control
Patent number
12,296,427
Issue date
May 13, 2025
Applied Materials, Inc.
Haosheng Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fluid-tight electrical connection techniques for semiconductor proc...
Patent number
12,290,897
Issue date
May 6, 2025
Applied Materials, Inc.
Chad Pollard
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cleaning system for polishing liquid delivery arm
Patent number
12,240,078
Issue date
Mar 4, 2025
Applied Materials, Inc.
Roy C. Nangoy
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate transporter and substrate processing apparatus including...
Patent number
12,237,194
Issue date
Feb 25, 2025
EBARA CORPORATION
Akihiro Yazawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature control of chemical mechanical polishing
Patent number
12,214,468
Issue date
Feb 4, 2025
Applied Materials, Inc.
Haosheng Wu
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for polishing, processing system, and method of polishing
Patent number
12,179,312
Issue date
Dec 31, 2024
Ebara Corporation
Takuya Moriura
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus, systems and methods for cleaning and polishing accessories
Patent number
12,179,313
Issue date
Dec 31, 2024
Clinton D. Nelson
B08 - CLEANING
Information
Patent Grant
Polishing liquid supply system
Patent number
12,179,314
Issue date
Dec 31, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Fuyou Jiang
B24 - GRINDING POLISHING
Information
Patent Grant
Containment and exhaust system for substrate polishing components
Patent number
12,145,236
Issue date
Nov 19, 2024
Axus Technology, LLC
Daniel Ray Trojan
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing fluid collection apparatus and methods related thereto
Patent number
12,138,741
Issue date
Nov 12, 2024
Applied Materials, Inc.
Lizhong Sun
B24 - GRINDING POLISHING
Information
Patent Grant
Methods and apparatus for processing a substrate
Patent number
12,138,742
Issue date
Nov 12, 2024
Applied Materials, Inc.
Prayudi Lianto
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing system apparatus and methods for defect reduction at a su...
Patent number
12,138,732
Issue date
Nov 12, 2024
Applied Materials, Inc.
Asheesh Jain
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate polishing apparatus and polishing liquid discharge method...
Patent number
12,138,734
Issue date
Nov 12, 2024
Ebara Corporation
Tetsuji Togawa
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing head, chemical-mechanical polishing system and method for...
Patent number
12,128,522
Issue date
Oct 29, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Shu-Bin Hsu
B24 - GRINDING POLISHING
Information
Patent Grant
Electrical cleaning tool for wafer polishing tool system
Patent number
12,128,455
Issue date
Oct 29, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Wen Liu
B08 - CLEANING
Information
Patent Grant
Polishing device
Patent number
12,115,620
Issue date
Oct 15, 2024
Rud. Starcke GmbH & Co. KG
Werner Unnerstall
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical-mechanical polishing apparatus
Patent number
12,103,133
Issue date
Oct 1, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Hsi Huang
B24 - GRINDING POLISHING
Information
Patent Grant
Face-up wafer electrochemical planarization apparatus
Patent number
12,090,600
Issue date
Sep 17, 2024
Applied Materials, Inc.
Kevin H. Song
B24 - GRINDING POLISHING
Information
Patent Grant
Manufacturing method for grinding wheel and grinding method for gri...
Patent number
12,048,986
Issue date
Jul 30, 2024
GUILIN CHAMPION UNION DIAMOND Co., Ltd.
Jingxin Song
B24 - GRINDING POLISHING
Information
Patent Grant
System and method for removing debris during chemical mechanical pl...
Patent number
12,017,325
Issue date
Jun 25, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Wei Hsu
B24 - GRINDING POLISHING
Information
Patent Grant
Manufacturing apparatus and method of manufacturing display apparat...
Patent number
12,010,902
Issue date
Jun 11, 2024
Samsung Display Co., Ltd.
Seungbae Kang
B24 - GRINDING POLISHING
Information
Patent Grant
Method for polishing semiconductor substrate
Patent number
11,999,027
Issue date
Jun 4, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
James Jeng-Jyi Hwang
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE LAPPING APPARATUS AND SUBSTRATE LAPPING METHOD USING THE...
Publication number
20250235980
Publication date
Jul 24, 2025
Samsung Electronics Co., Ltd.
SUKHOON JEONG
B24 - GRINDING POLISHING
Information
Patent Application
GRINDING APPARATUS, METHOD OF GRINDING WORKPIECE, AND METHOD OF MAN...
Publication number
20250235983
Publication date
Jul 24, 2025
Disco Corporation
Keiichiro NIITSU
B24 - GRINDING POLISHING
Information
Patent Application
CMP Polisher Head Over-Rotation Restrictor with Vertical Lift Force
Publication number
20250235981
Publication date
Jul 24, 2025
TEXAS INSTRUMENTS INCORPORATED
Christopher Schutte
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING SUBSTRATE U...
Publication number
20250214198
Publication date
Jul 3, 2025
Samsung Electronics Co., Ltd.
Imbi YEO
B24 - GRINDING POLISHING
Information
Patent Application
SEMICONDUCTOR PROCESSING DEVICE AND POLISHING DEVICE
Publication number
20250205851
Publication date
Jun 26, 2025
EBARA CORPORATION
MAKOTO TAKAYAMA
B24 - GRINDING POLISHING
Information
Patent Application
METHOD FOR CMP TEMPERATURE CONTROL
Publication number
20250205847
Publication date
Jun 26, 2025
Applied Materials, Inc.
Haosheng Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POLISHING PAD AND CHEMICAL MECHANICAL POLISHING APPARATUS
Publication number
20250196286
Publication date
Jun 19, 2025
WINBOND ELECTRONICS CORP.
Min-Hsun Lin
B24 - GRINDING POLISHING
Information
Patent Application
APPARATUS AND METHOD FOR IN-SITU CHEMICAL SEPARATION AND RECIRCULAT...
Publication number
20250187141
Publication date
Jun 12, 2025
AXUS TECHNOLOGY, LLC
Daniel Ray Trojan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POLISHING APPARATUS AND METHOD FOR POLISHING SUBSTRATE
Publication number
20250178159
Publication date
Jun 5, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Shi-Ting Wu
B24 - GRINDING POLISHING
Information
Patent Application
FLEXIBLE SPINDLE POLISHING
Publication number
20250153307
Publication date
May 15, 2025
Worcester Polytechnic Institute
Yihao Zheng
B24 - GRINDING POLISHING
Information
Patent Application
BRUSH AGING PAD, CHEMICAL MECHANICAL POLISHING CLEANING APPARATUS,...
Publication number
20250144768
Publication date
May 8, 2025
Samsung Electronics Co., Ltd.
Heesung KIM
B24 - GRINDING POLISHING
Information
Patent Application
HIGH SPEED INJECTION NOZZLE FOR PRE-POLISH MODIFICATION OF SUBSTRAT...
Publication number
20250114910
Publication date
Apr 10, 2025
Applied Materials, Inc.
Priscilla Diep LaRosa
B24 - GRINDING POLISHING
Information
Patent Application
RETAINING RING FOR EDGE COMPENSATION BY SLURRY FLOW CONTROL
Publication number
20250114898
Publication date
Apr 10, 2025
Applied Materials, Inc.
Zhize Zhu
B24 - GRINDING POLISHING
Information
Patent Application
TEMPERATURE CONTROL OF CHEMICAL MECHANICAL POLISHING
Publication number
20250108476
Publication date
Apr 3, 2025
Applied Materials, Inc.
Haosheng Wu
B24 - GRINDING POLISHING
Information
Patent Application
Buffer and Self-Feeding Compound Apparatus
Publication number
20250108472
Publication date
Apr 3, 2025
Timothy Edward Thompson
B24 - GRINDING POLISHING
Information
Patent Application
CHEMICAL MECHANICAL POLISHING EDGE CONTROL WITH PAD RECESSES
Publication number
20250108477
Publication date
Apr 3, 2025
Applied Materials, Inc.
Huanbo Zhang
B24 - GRINDING POLISHING
Information
Patent Application
CHEMICAL MECHANICAL POLISHING PROCESS USING STEAM FOR POLISHING FLU...
Publication number
20250083282
Publication date
Mar 13, 2025
WESTERN DIGITAL TECHNOLOGIES, INC.,
Yohei YAMADA
B24 - GRINDING POLISHING
Information
Patent Application
CONTAINMENT AND EXHAUST SYSTEM FOR SUBSTRATE POLISHING COMPONENTS
Publication number
20250065473
Publication date
Feb 27, 2025
AXUS TECHNOLOGY, LLC
Daniel Ray Trojan
B24 - GRINDING POLISHING
Information
Patent Application
APPARATUS FOR POLISHING, PROCESSING SYSTEM, AND METHOD OF POLISHING
Publication number
20250058431
Publication date
Feb 20, 2025
EBARA CORPORATION
Takuya MORIURA
B24 - GRINDING POLISHING
Information
Patent Application
SLURRY COMPOSITION FOR CHEMICAL MECHANICAL POLISHING AND CHEMICAL M...
Publication number
20250043149
Publication date
Feb 6, 2025
Samsung Electronics Co., Ltd.
DONGHOON KWON
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20250033164
Publication date
Jan 30, 2025
EBARA CORPORATION
Hirotaka OHASHI
B24 - GRINDING POLISHING
Information
Patent Application
CHEMICAL MECHANICAL POLISHING (CMP) APPARATUS
Publication number
20250025982
Publication date
Jan 23, 2025
Samsung Electronics Co., Ltd.
Donghoon Kwon
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING FLUID RECOVERY AND REUSE SYSTEM FOR SEMICONDUCTOR SUBSTRA...
Publication number
20250010431
Publication date
Jan 9, 2025
Applied Materials, Inc.
Jianjun HU
B24 - GRINDING POLISHING
Information
Patent Application
METHOD FOR POLISHING A SUBSTRATE
Publication number
20250001542
Publication date
Jan 2, 2025
Illumina, Inc.
Alisina BAZRAFSHAN
B24 - GRINDING POLISHING
Information
Patent Application
FACE-UP WAFER ELECTROCHEMICAL PLANARIZATION APPARATUS
Publication number
20250001547
Publication date
Jan 2, 2025
Applied Materials, Inc.
Kevin H. Song
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE SUCTION MEMBER, ELASTIC SEAL ASSEMBLY, TOP RING, AND SUBS...
Publication number
20240416480
Publication date
Dec 19, 2024
EBARA CORPORATION
Kazuhiro TAJIMA
B24 - GRINDING POLISHING
Information
Patent Application
METHOD AND DISK CARRIER FOR USE IN POLISHING GLASS SUBSTRATE DISKS
Publication number
20240408719
Publication date
Dec 12, 2024
Western Digital Technologies, Inc.
Stefano Ching Kiat Boon
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING APPARATUS AND POLISHING METHOD
Publication number
20240391054
Publication date
Nov 28, 2024
EBARA CORPORATION
Osamu NABEYA
B24 - GRINDING POLISHING
Information
Patent Application
METHOD AND SYSTEM FOR SLURRY QUALITY MONITORING
Publication number
20240375238
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing company Ltd.
CHIH-CHIANG TSENG
B24 - GRINDING POLISHING
Information
Patent Application
CHEMICAL MECHANICAL PLANARIZATION SLURRY PROCESSING TECHNIQUES AND...
Publication number
20240379371
Publication date
Nov 14, 2024
Ara PHILIPOSSIAN
B24 - GRINDING POLISHING