for general liquid treatment

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CPC
H01L21/67023

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67023for general liquid treatment

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Cleaning method of cup of substrate processing apparatus and substr...
- Patent number 12,368,041
- Issue date Jul 22, 2025
- Tokyo Electron Limited
- Motohiro Okamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,362,199
- Issue date Jul 15, 2025
- SCREEN Holdings Co., Ltd.
- Kei Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cup, liquid processing apparatus, and liquid processing method
- Patent number 12,358,016
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Ryunosuke Higashi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Particle removal apparatus
- Patent number 12,354,867
- Issue date Jul 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Siao-Chian Huang
- B08 - CLEANING
Information Patent Grant
Liquid processing apparatus and liquid processing method
- Patent number 12,347,698
- Issue date Jul 1, 2025
- Tokyo Electron Limited
- Koki Yoshimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exhaust piping for a semiconductor processing tool
- Patent number 12,334,365
- Issue date Jun 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuo-Sheng Lien
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,334,366
- Issue date Jun 17, 2025
- SCREEN Holdings Co., Ltd.
- Sei Negoro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus
- Patent number 12,327,737
- Issue date Jun 10, 2025
- SCREEN Holdings Co., Ltd.
- Jun Sawashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device and substrate processing method
- Patent number 12,311,414
- Issue date May 27, 2025
- SCREEN Holdings Co., Ltd.
- Kenji Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,308,261
- Issue date May 20, 2025
- SCREEN Holdings Co., Ltd.
- Akira Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Subfab area installation apparatus
- Patent number 12,300,520
- Issue date May 13, 2025
- Ebara Corporation
- Motoshi Kohaku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method havi...
- Patent number 12,300,518
- Issue date May 13, 2025
- Tokyo Electron Limited
- Kazuki Kosai
- B08 - CLEANING
Information Patent Grant
Apparatus and method for treating substrate
- Patent number 12,293,928
- Issue date May 6, 2025
- Semes Co., Ltd.
- Eui Sang Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection layer to improve the detection of defects through optica...
- Patent number 12,281,991
- Issue date Apr 22, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- I-Che Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing apparatus and substrate processing method incl...
- Patent number 12,278,118
- Issue date Apr 15, 2025
- Semes Co., Ltd.
- Seung Tae Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for transferring substrate, and apparatus and method for...
- Patent number 12,278,128
- Issue date Apr 15, 2025
- Semes Co., Ltd.
- Jinwoo Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control device and control method for single-wafer processing epita...
- Patent number 12,261,065
- Issue date Mar 25, 2025
- Sumco Corporation
- Naoyuki Wada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and stage cleaning method
- Patent number 12,261,060
- Issue date Mar 25, 2025
- Tokyo Electron Limited
- Tsutomu Hiroki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treating apparatus and method for the same
- Patent number 12,230,510
- Issue date Feb 18, 2025
- Semes Co., Ltd.
- Byoung Doo Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,211,716
- Issue date Jan 28, 2025
- Semes Co., Ltd.
- Jaeseong Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device capable of controlling...
- Patent number 12,211,689
- Issue date Jan 28, 2025
- Kokusai Electric Corporation
- Keigo Nishida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,211,708
- Issue date Jan 28, 2025
- SCREEN Holdings Co., Ltd.
- Shuichi Yasuda
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 12,198,948
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Jun Nonaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning pipe of single-wafer processing wafer cleaning a...
- Patent number 12,186,785
- Issue date Jan 7, 2025
- Sumco Corporation
- Ryoichi Yanai
- B08 - CLEANING
Information Patent Grant
Fixture
- Patent number 12,191,184
- Issue date Jan 7, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Zhongyang Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing system and sub...
- Patent number 12,191,153
- Issue date Jan 7, 2025
- Tokyo Electron Limited
- Munehisa Kodama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing method, method of manufacturing semiconductor, and subst...
- Patent number 12,165,894
- Issue date Dec 10, 2024
- Kokusai Electric Corporation
- Yasuhiro Mizuguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of restoring collapsed pattern, substrate processing method,...
- Patent number 12,159,783
- Issue date Dec 3, 2024
- SCREEN Holdings Co., Ltd.
- Masayuki Otsuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,159,784
- Issue date Dec 3, 2024
- SCREEN Holdings Co., Ltd.
- Yuji Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus having exhaust structure
- Patent number 12,146,216
- Issue date Nov 19, 2024
- DEVICEENG CO., LTD
- Taek Youb Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250232990
- Publication date Jul 17, 2025
- SCREEN Holdings Co., Ltd.
- Akira ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250232988
- Publication date Jul 17, 2025
- TOKYO ELECTRON LIMITED
- Kazuki KOSAI
- B08 - CLEANING
Information Patent Application
METALLIZATION STRUCTURE FOR COUPLING BOILING ENHANCED LAYER TO SUBS...
- Publication number 20250226216
- Publication date Jul 10, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chihting Lai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inspection Layer to Improve The Detection of Defects Through Optica...
- Publication number 20250216342
- Publication date Jul 3, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- I-Che Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
BOWL UNIT AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250218805
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- In Ki JUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250210373
- Publication date Jun 26, 2025
- SCREEN Holdings Co., Ltd.
- Keisuke TAKAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAINLESS STEEL MEMBER FOR APPARATUS FOR MANUFACTURING SEMICONDUCTO...
- Publication number 20250174472
- Publication date May 29, 2025
- ORORU inc.
- Kazuyoshi KAWAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ASSISTANCE DEVICE, ASSISTANCE METHOD AND NON-TRANSITORY COMPUTER-RE...
- Publication number 20250172926
- Publication date May 29, 2025
- SCREEN Holdings Co., Ltd.
- Hiroakira MATSUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250174471
- Publication date May 29, 2025
- SEMES CO., LTD.
- Jung Eun PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING STATUS MONITORING DEVICE AND SUBSTRATE PROCESS...
- Publication number 20250167020
- Publication date May 22, 2025
- Kurashiki Boseki Kabushiki Kaisha
- Noboru HIGASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...
- Publication number 20250157836
- Publication date May 15, 2025
- SCREEN Holdings Co., Ltd.
- Shinji SHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250149353
- Publication date May 8, 2025
- TOKYO ELECTRON LIMITED
- Gentaro GOSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR SUPPLYING LIQUID FOR SEMICONDUCTOR MANUFACTURING
- Publication number 20250140575
- Publication date May 1, 2025
- KURITA WATER INDUSTRIES LTD.
- Hideaki IINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID SUPPLY DEVICE, LIQUID SUPPLY METHOD, AND STORAGE MEDIUM
- Publication number 20250132171
- Publication date Apr 24, 2025
- TOKYO ELECTRON LIMITED
- So OSADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE CAPABLE OF CONTROLLING...
- Publication number 20250125143
- Publication date Apr 17, 2025
- Kokusai Electric Corporation
- Keigo NISHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE CAPABLE OF CONTROLLING...
- Publication number 20250118549
- Publication date Apr 10, 2025
- Kokusai Electric Corporation
- Keigo NISHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIQUID PROCESSING METHOD, LIQUID PROCESSING APPARATUS, AND STORAGE...
- Publication number 20250105029
- Publication date Mar 27, 2025
- TOKYO ELECTRON LIMITED
- Takahiro TAKUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
- Publication number 20250105049
- Publication date Mar 27, 2025
- SEMES CO., LTD.
- Seung Eun NA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SU...
- Publication number 20250054794
- Publication date Feb 13, 2025
- Kokusai Electric Corporation
- Yasuhiro MIZUGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20250046631
- Publication date Feb 6, 2025
- SEMES CO., LTD.
- Young Hun LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL CHANNEL FLOW PLATE FOR WET PROCESSING
- Publication number 20250038013
- Publication date Jan 30, 2025
- Yield Engineering Systems, Inc.
- Vladimir Kudriavtsev
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20250038028
- Publication date Jan 30, 2025
- SCREEN Holdings Co., Ltd.
- Akihiro IWASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR SEPARATING WAFER SLICES
- Publication number 20250029846
- Publication date Jan 23, 2025
- Yield Engineering Systems, Inc.
- Al Stone
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND MONITORING METHOD
- Publication number 20250024155
- Publication date Jan 16, 2025
- SCREEN Holdings Co., Ltd.
- Shinji SHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR DETERMINING A LOCALIZED FLUID VELOCITY OF A...
- Publication number 20240420974
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...
- Publication number 20240404854
- Publication date Dec 5, 2024
- Samsung Electronics Co., Ltd.
- Jaeho Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID STORAGE FOR FACILITY CHEMICAL SUPPLY SYSTEM
- Publication number 20240395582
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tzu-Yang LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS, SEMICONDUCTOR FABRICATION SYSTEM INCLUDING THE...
- Publication number 20240383012
- Publication date Nov 21, 2024
- Samsung Electronics Co., Ltd.
- Youngon OH
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHOD OF MANUFACTURING INTERCONNECT STRUCTURES
- Publication number 20240384408
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Ting TSAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM ASSEMBLY FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20240383100
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Chen Wei
- H01 - BASIC ELECTRIC ELEMENTS

for general liquid treatment

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Cleaning method of cup of substrate processing apparatus and substr...

Substrate processing method and substrate processing apparatus

Cup, liquid processing apparatus, and liquid processing method

Particle removal apparatus

Liquid processing apparatus and liquid processing method

Exhaust piping for a semiconductor processing tool

Substrate processing apparatus and substrate processing method

Substrate treating apparatus

Substrate processing device and substrate processing method

Substrate processing apparatus and substrate processing method

Subfab area installation apparatus

Substrate processing apparatus and substrate processing method havi...

Apparatus and method for treating substrate

Inspection layer to improve the detection of defects through optica...

Substrate processing apparatus and substrate processing method incl...

Apparatus for transferring substrate, and apparatus and method for...

Control device and control method for single-wafer processing epita...

Substrate processing apparatus and stage cleaning method

Substrate treating apparatus and method for the same

Substrate processing apparatus and substrate processing method

Method of manufacturing semiconductor device capable of controlling...

Substrate processing apparatus and substrate processing method

Substrate processing apparatus

Method of cleaning pipe of single-wafer processing wafer cleaning a...

Fixture

Substrate processing apparatus, substrate processing system and sub...

Processing method, method of manufacturing semiconductor, and subst...

Method of restoring collapsed pattern, substrate processing method,...

Substrate processing apparatus and substrate processing method

Substrate treatment apparatus having exhaust structure

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

METALLIZATION STRUCTURE FOR COUPLING BOILING ENHANCED LAYER TO SUBS...

Inspection Layer to Improve The Detection of Defects Through Optica...

BOWL UNIT AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

STAINLESS STEEL MEMBER FOR APPARATUS FOR MANUFACTURING SEMICONDUCTO...

ASSISTANCE DEVICE, ASSISTANCE METHOD AND NON-TRANSITORY COMPUTER-RE...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING STATUS MONITORING DEVICE AND SUBSTRATE PROCESS...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

DEVICE FOR SUPPLYING LIQUID FOR SEMICONDUCTOR MANUFACTURING

LIQUID SUPPLY DEVICE, LIQUID SUPPLY METHOD, AND STORAGE MEDIUM

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE CAPABLE OF CONTROLLING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE CAPABLE OF CONTROLLING...

LIQUID PROCESSING METHOD, LIQUID PROCESSING APPARATUS, AND STORAGE...

SUBSTRATE PROCESSING APPARATUS AND METHOD

PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SU...

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

DUAL CHANNEL FLOW PLATE FOR WET PROCESSING

SUBSTRATE PROCESSING SYSTEM

APPARATUS AND METHOD FOR SEPARATING WAFER SLICES

SUBSTRATE PROCESSING APPARATUS AND MONITORING METHOD

SYSTEMS AND METHODS FOR DETERMINING A LOCALIZED FLUID VELOCITY OF A...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...

LIQUID STORAGE FOR FACILITY CHEMICAL SUPPLY SYSTEM

CLEANING APPARATUS, SEMICONDUCTOR FABRICATION SYSTEM INCLUDING THE...

APPARATUS AND METHOD OF MANUFACTURING INTERCONNECT STRUCTURES

VACUUM ASSEMBLY FOR CHEMICAL MECHANICAL POLISHING