for general liquid treatment

Industry

CPC
H01L21/67023

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67023for general liquid treatment

Industries

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 12,198,948
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Jun Nonaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning pipe of single-wafer processing wafer cleaning a...
- Patent number 12,186,785
- Issue date Jan 7, 2025
- Sumco Corporation
- Ryoichi Yanai
- B08 - CLEANING
Information Patent Grant
Fixture
- Patent number 12,191,184
- Issue date Jan 7, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Zhongyang Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing system and sub...
- Patent number 12,191,153
- Issue date Jan 7, 2025
- Tokyo Electron Limited
- Munehisa Kodama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing method, method of manufacturing semiconductor, and subst...
- Patent number 12,165,894
- Issue date Dec 10, 2024
- Kokusai Electric Corporation
- Yasuhiro Mizuguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of restoring collapsed pattern, substrate processing method,...
- Patent number 12,159,783
- Issue date Dec 3, 2024
- SCREEN Holdings Co., Ltd.
- Masayuki Otsuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,159,784
- Issue date Dec 3, 2024
- SCREEN Holdings Co., Ltd.
- Yuji Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus having exhaust structure
- Patent number 12,146,216
- Issue date Nov 19, 2024
- DEVICEENG CO., LTD
- Taek Youb Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 12,131,918
- Issue date Oct 29, 2024
- Semes Co., Ltd.
- Sang Min Lee
- B08 - CLEANING
Information Patent Grant
Light treating member, substrate treating apparatus including the s...
- Patent number 12,125,720
- Issue date Oct 22, 2024
- Semes Co., Ltd.
- Oh Jin Kwon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer cup
- Patent number 12,116,434
- Issue date Oct 15, 2024
- Daikin Industries, Ltd.
- Hitoshi Imamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wet etching control system, wet etching machine and wet etching con...
- Patent number 12,094,734
- Issue date Sep 17, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Hsin-Hung Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and substrate treating method
- Patent number 12,094,706
- Issue date Sep 17, 2024
- Semes Co., Ltd.
- Myung Chan Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method of manufacturing interconnect structures
- Patent number 12,091,752
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Ting Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treating apparatus and substrate treating method
- Patent number 12,080,566
- Issue date Sep 3, 2024
- SCREEN Holdings Co., Ltd.
- Taiki Hinode
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method of processing substrate, method of manufacturing semiconduct...
- Patent number 12,080,546
- Issue date Sep 3, 2024
- Kokusai Electric Corporation
- Kimihiko Nakatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid processing apparatus and liquid processing method
- Patent number 12,070,769
- Issue date Aug 27, 2024
- Tokyo Electron Limited
- Chikara Nobukuni
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Nozzle assembly for use with liquid dispensing system
- Patent number 12,059,692
- Issue date Aug 13, 2024
- TAIWAN SEMICONDUCOTR MANUFACTURING COMPANY, LTD.
- Channing Chan
- B08 - CLEANING
Information Patent Grant
System for storing chemical liquid and method for adjusting gas con...
- Patent number 12,053,745
- Issue date Aug 6, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Yu Kuo
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Material supply system and material supply method
- Patent number 12,051,597
- Issue date Jul 30, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Zhiguo Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing system, semiconductor device ins...
- Patent number 12,051,629
- Issue date Jul 30, 2024
- Samsung Electronics Co., Ltd.
- Seunghwa Hyun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate supporting member, substrate treating apparatus including...
- Patent number 12,040,216
- Issue date Jul 16, 2024
- Semes Co., Ltd.
- Yong Hoon Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,027,394
- Issue date Jul 2, 2024
- Tokyo Electron Limited
- Hiroki Sakurai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treating substrate and method for treating substrate
- Patent number 12,027,381
- Issue date Jul 2, 2024
- Semes Co., Ltd.
- Youngseop Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for fracturing a plurality of wafer assemblies
- Patent number 12,002,690
- Issue date Jun 4, 2024
- Soitec
- Didier Landru
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,996,302
- Issue date May 28, 2024
- SCREEN Holdings Co., Ltd.
- Tomoaki Aihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamfer-less via integration scheme
- Patent number 11,987,876
- Issue date May 21, 2024
- Lam Research Corporation
- Sivananda Krishnan Kanakasabapathy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for heating a liquid
- Patent number 11,988,316
- Issue date May 21, 2024
- ASM IP Holding B.V.
- Andrew Michael Yednak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning apparatus
- Patent number 11,986,864
- Issue date May 21, 2024
- Disco Corporation
- Yukiyasu Masuda
- B08 - CLEANING
Information Patent Grant
Particle removal method
- Patent number 11,984,314
- Issue date May 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Siao-Chian Huang
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND MONITORING METHOD
- Publication number 20250024155
- Publication date Jan 16, 2025
- SCREEN Holdings Co., Ltd.
- Shinji SHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR DETERMINING A LOCALIZED FLUID VELOCITY OF A...
- Publication number 20240420974
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Michael Carcasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...
- Publication number 20240404854
- Publication date Dec 5, 2024
- Samsung Electronics Co., Ltd.
- Jaeho Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID STORAGE FOR FACILITY CHEMICAL SUPPLY SYSTEM
- Publication number 20240395582
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tzu-Yang LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS, SEMICONDUCTOR FABRICATION SYSTEM INCLUDING THE...
- Publication number 20240383012
- Publication date Nov 21, 2024
- Samsung Electronics Co., Ltd.
- Youngon OH
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHOD OF MANUFACTURING INTERCONNECT STRUCTURES
- Publication number 20240384408
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Ting TSAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM ASSEMBLY FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20240383100
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Chen Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID DISPENSING SYSTEM AND METHODS
- Publication number 20240359194
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Channing CHAN
- B08 - CLEANING
Information Patent Application
MODULAR ELECTRONICS FOR FLOW CONTROL
- Publication number 20240363369
- Publication date Oct 31, 2024
- ICHOR SYSTEMS, INC.
- Philip Ryan Barros
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR STORING CHEMICAL LIQUID AND METHOD FOR ADJUSTING GAS CON...
- Publication number 20240350985
- Publication date Oct 24, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Yu KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE DELIVERY APPARATUS AND SUBSTRATE DELIVERY METHOD
- Publication number 20240347364
- Publication date Oct 17, 2024
- SHIBAURA MECHATRONICS CORPORATION
- Rie ARAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICON...
- Publication number 20240312800
- Publication date Sep 19, 2024
- KIOXIA Corporation
- Hakuba KITAGAWA
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHODS AND APPARATUS FOR HEATING A LIQUID
- Publication number 20240301980
- Publication date Sep 12, 2024
- ASM IP HOLDING B.V.
- Andrew Michael Yednak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240290639
- Publication date Aug 29, 2024
- TOKYO ELECTRON LIMITED
- Hiroki SAKURAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF ESTIMATING FLOW RATE O...
- Publication number 20240282603
- Publication date Aug 22, 2024
- TOKYO ELECTRON LIMITED
- Hiroshi MARUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMFER-LESS VIA INTEGRATION SCHEME
- Publication number 20240263301
- Publication date Aug 8, 2024
- LAM RESEARCH CORPORATION
- Sivananda Krishnan Kanakasabapathy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATMENT APPARATUS
- Publication number 20240266192
- Publication date Aug 8, 2024
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TREATMENTS TO ENHANCE MATERIAL STRUCTURES
- Publication number 20240266163
- Publication date Aug 8, 2024
- Applied Materials, Inc.
- Srinivas GANDIKOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE REMOVAL APPARATUS
- Publication number 20240258095
- Publication date Aug 1, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Siao-Chian HUANG
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20240258147
- Publication date Aug 1, 2024
- SCREEN Holdings Co., Ltd.
- Kenji AMAHISA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TREATMENT DEVICE AND METHOD FOR THE TREATMENT OF SEMICONDUCTOR OBJECTS
- Publication number 20240258124
- Publication date Aug 1, 2024
- SICONNEX CUSTOMIZED SOLUTIONS GMBH
- Moritz MITTERMAYR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240242977
- Publication date Jul 18, 2024
- TOKYO ELECTRON LIMITED
- Shota Umezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEGRADABLE SUBSTRATE FOR ELECTRONIC DEVICE, DEGRADABLE SUBSTRATE AS...
- Publication number 20240242973
- Publication date Jul 18, 2024
- Korea University Research and Business Foundation
- Suk Won HWANG
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
PROCESSING LIQUID SUPPLY SYSTEM AND OPERATION METHOD THEREOF
- Publication number 20240234169
- Publication date Jul 11, 2024
- TOKYO ELECTRON LIMITED
- Masatoshi KASAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240234170
- Publication date Jul 11, 2024
- TOKYO ELECTRON LIMITED
- Kenji FUKUSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR FRACTURING A PLURALITY OF WAFER ASSEMBLIES
- Publication number 20240222158
- Publication date Jul 4, 2024
- SOITEC
- Didier Landru
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
- Publication number 20240213059
- Publication date Jun 27, 2024
- Semes Co., Ltd.
- Hee Man AHN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240207906
- Publication date Jun 27, 2024
- SEMES CO., LTD.
- Sang Gun LEE
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240194496
- Publication date Jun 13, 2024
- TOKYO ELECTRON LIMITED
- Shota UMEZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND DR...
- Publication number 20240194475
- Publication date Jun 13, 2024
- SCREEN Holdings Co., Ltd.
- Takaaki ISHIZU
- H01 - BASIC ELECTRIC ELEMENTS

for general liquid treatment

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing apparatus

Method of cleaning pipe of single-wafer processing wafer cleaning a...

Fixture

Substrate processing apparatus, substrate processing system and sub...

Processing method, method of manufacturing semiconductor, and subst...

Method of restoring collapsed pattern, substrate processing method,...

Substrate processing apparatus and substrate processing method

Substrate treatment apparatus having exhaust structure

Substrate processing apparatus

Light treating member, substrate treating apparatus including the s...

Wafer cup

Wet etching control system, wet etching machine and wet etching con...

Substrate treating apparatus and substrate treating method

Apparatus and method of manufacturing interconnect structures

Substrate treating apparatus and substrate treating method

Method of processing substrate, method of manufacturing semiconduct...

Liquid processing apparatus and liquid processing method

Nozzle assembly for use with liquid dispensing system

System for storing chemical liquid and method for adjusting gas con...

Material supply system and material supply method

Semiconductor device manufacturing system, semiconductor device ins...

Substrate supporting member, substrate treating apparatus including...

Substrate processing method and substrate processing apparatus

Apparatus for treating substrate and method for treating substrate

System for fracturing a plurality of wafer assemblies

Substrate processing apparatus and substrate processing method

Chamfer-less via integration scheme

Methods and apparatus for heating a liquid

Cleaning apparatus

Particle removal method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND MONITORING METHOD

SYSTEMS AND METHODS FOR DETERMINING A LOCALIZED FLUID VELOCITY OF A...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...

LIQUID STORAGE FOR FACILITY CHEMICAL SUPPLY SYSTEM

CLEANING APPARATUS, SEMICONDUCTOR FABRICATION SYSTEM INCLUDING THE...

APPARATUS AND METHOD OF MANUFACTURING INTERCONNECT STRUCTURES

VACUUM ASSEMBLY FOR CHEMICAL MECHANICAL POLISHING

LIQUID DISPENSING SYSTEM AND METHODS

MODULAR ELECTRONICS FOR FLOW CONTROL

SYSTEM FOR STORING CHEMICAL LIQUID AND METHOD FOR ADJUSTING GAS CON...

SUBSTRATE DELIVERY APPARATUS AND SUBSTRATE DELIVERY METHOD

SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICON...

METHODS AND APPARATUS FOR HEATING A LIQUID

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND METHOD OF ESTIMATING FLOW RATE O...

CHAMFER-LESS VIA INTEGRATION SCHEME

SUBSTRATE TREATMENT APPARATUS

TREATMENTS TO ENHANCE MATERIAL STRUCTURES

PARTICLE REMOVAL APPARATUS

SUBSTRATE PROCESSING SYSTEM

TREATMENT DEVICE AND METHOD FOR THE TREATMENT OF SEMICONDUCTOR OBJECTS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

DEGRADABLE SUBSTRATE FOR ELECTRONIC DEVICE, DEGRADABLE SUBSTRATE AS...

PROCESSING LIQUID SUPPLY SYSTEM AND OPERATION METHOD THEREOF

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SYSTEM FOR FRACTURING A PLURALITY OF WAFER ASSEMBLIES

SUBSTRATE PROCESSING APPARATUS AND METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND DR...