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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/3171
for ion implantation
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Patents Grants
last 30 patents
Information
Patent Grant
Linear accelerator coil including multiple fluid channels
Patent number
11,985,756
Issue date
May 14, 2024
Applied Materials, Inc.
Robert B. Vopat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion generation device and ion generation method
Patent number
11,978,608
Issue date
May 7, 2024
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Yuuji Ishida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer positioning method and apparatus
Patent number
11,978,677
Issue date
May 7, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chia-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treating apparatus, ion implantation apparatus, and ion i...
Patent number
11,961,695
Issue date
Apr 16, 2024
Semes Co., Ltd.
Doyeon Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion source cathode
Patent number
11,961,696
Issue date
Apr 16, 2024
Ion Technology Solutions, LLC
Manuel A. Jerez
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implantation gas supply system
Patent number
11,961,707
Issue date
Apr 16, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Hsing-Piao Hsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ion beam irradiation apparatus and program therefor
Patent number
11,955,311
Issue date
Apr 9, 2024
NISSIN ION EQUIPMENT CO., LTD.
Shinya Takemura
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Semiconductor wafer
Patent number
11,929,229
Issue date
Mar 12, 2024
MI2-FACTORY GMBH
Florian Krippendorf
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wafer supporting device
Patent number
11,929,266
Issue date
Mar 12, 2024
NISSIN ION EQUIPMENT CO., LTD.
Takashi Sakamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for metal contamination control in an ion impl...
Patent number
11,923,169
Issue date
Mar 5, 2024
Axcelis Technologies, Inc.
Causon Ko-Chuan Jen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implanter and ion implantation method
Patent number
11,923,167
Issue date
Mar 5, 2024
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Hiroshi Matsushita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam implantation method and semiconductor device
Patent number
11,908,694
Issue date
Feb 20, 2024
Infineon Technologies AG
Moriz Jelinek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Toxic outgas control post process
Patent number
11,901,198
Issue date
Feb 13, 2024
Axcelis Technologies, Inc.
John F. Baggett
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hybrid high-temperature electrostatic clamp for improved workpiece...
Patent number
11,887,808
Issue date
Jan 30, 2024
Axcelis Technologies, Inc.
Atul Gupta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Composite ion source based upon heterogeneous metal-metal fluoride...
Patent number
11,887,806
Issue date
Jan 30, 2024
Applied Materials, Inc.
Graham Wright
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and systems useful for producing aluminum ions
Patent number
11,881,376
Issue date
Jan 23, 2024
Entegris, Inc.
Ying Tang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System apparatus and method for enhancing electrical clamping of su...
Patent number
11,875,967
Issue date
Jan 16, 2024
Applied Materials, Inc.
Qin Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Techniques and apparatus for anisotropic stress compensation in sub...
Patent number
11,875,995
Issue date
Jan 16, 2024
Applied Materials, Inc.
Scott Falk
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implantation method and device
Patent number
11,862,429
Issue date
Jan 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yi-Hsiung Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Correcting component failures in ion implant semiconductor manufact...
Patent number
11,862,493
Issue date
Jan 2, 2024
Applied Materials, Inc.
Tianqing Liao
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Ion generator and ion implanter
Patent number
11,848,170
Issue date
Dec 19, 2023
SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO, LTD.
Syuta Ochi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Energy filter element for ion implantation systems for the use in t...
Patent number
11,837,430
Issue date
Dec 5, 2023
MI2-FACTORY GMBH
Florian Krippendorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Repellent electrode for electron repelling
Patent number
11,830,700
Issue date
Nov 28, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Ching-Heng Yen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Germanium tetraflouride and hydrogen mixtures for an ion implantati...
Patent number
11,827,973
Issue date
Nov 28, 2023
Entegris, Inc.
Oleg Byl
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ion implantation method and ion implanter
Patent number
11,830,703
Issue date
Nov 28, 2023
SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO, LTD.
Yoji Kawasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dual source injector with switchable analyzing magnet
Patent number
11,823,858
Issue date
Nov 21, 2023
Axcelis Technologies, Inc.
Wilhelm Platow
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Ion implanter and model generation method
Patent number
11,823,863
Issue date
Nov 21, 2023
SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO, LTD.
Kazuhisa Ishibashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photoresist layers of semiconductor components including electric f...
Patent number
11,817,293
Issue date
Nov 14, 2023
The Research Foundation for the State University of New York
Gregory Denbeaux
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
RF quadrupole particle accelerator
Patent number
11,818,830
Issue date
Nov 14, 2023
Applied Materials, Inc.
Frank Sinclair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Extended lifetime dual indirectly-heated cathode ion source
Patent number
11,798,775
Issue date
Oct 24, 2023
Axcelis Technologies, Inc.
Wilhelm Platow
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PLASMA ASSISTED DAMAGE ENGINEERING DURING ION IMPLANTATION
Publication number
20240153775
Publication date
May 9, 2024
Applied Materials, Inc.
Christopher R. Hatem
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VOLUME FILLING CASSETTE FOR LOAD LOCK
Publication number
20240153733
Publication date
May 9, 2024
Applied Materials, Inc.
Michael Mason Carrell
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Ion Source Cathode
Publication number
20240145207
Publication date
May 2, 2024
Ion Technology Solutions, LLC
Manuel A. Jerez
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WIRE OR ROD SHAPED EXTRACTION ELECTRODE OPTICS
Publication number
20240145213
Publication date
May 2, 2024
Axcelis Technologies, Inc.
Neil Colvin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM IMPLANTATION METHOD AND SEMICONDUCTOR DEVICE
Publication number
20240145247
Publication date
May 2, 2024
INFINEON TECHNOLOGIES AG
Moriz JELINEK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEMS USEFUL FOR PRODUCING ALUMINUM IONS
Publication number
20240136145
Publication date
Apr 25, 2024
Entegris, Inc.
Ying TANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion source structure of ion implanter and its operation method
Publication number
20240136144
Publication date
Apr 25, 2024
United Semiconductor (Xiamen) Co., Ltd.
Wen Shuo Cui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
A Method for the Simulation of an Energy-Filtered Ion Implantation...
Publication number
20240135066
Publication date
Apr 25, 2024
mi2-factory GmbH
Florian KRIPPENDORF
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
HELICAL VOLTAGE STANDOFF
Publication number
20240112883
Publication date
Apr 4, 2024
Applied Materials, Inc.
Diana C. Gronski
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANAGING BEAM POWER EFFECTS BY VARYING BASE EMISSIVITY
Publication number
20240087839
Publication date
Mar 14, 2024
Applied Materials, Inc.
Dawei Sun
G02 - OPTICS
Information
Patent Application
ION GENERATOR AND ION IMPLANTER
Publication number
20240079199
Publication date
Mar 7, 2024
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Syuta Ochi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLOSED LOOP FARADAY CORRECTION OF A HORIZONTAL BEAM CURRENT PROFILE...
Publication number
20240071719
Publication date
Feb 29, 2024
Applied Materials, Inc.
Tyler Wills
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RESONATOR, LINEAR ACCELERATOR, AND ION IMPLANTER HAVING DIELECTRIC-...
Publication number
20240064888
Publication date
Feb 22, 2024
Applied Materials, Inc.
Robert B. Vopat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CALIBRATION HARDWARE FOR ION IMPLANTER
Publication number
20240063045
Publication date
Feb 22, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Lung-Yin Tang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHLORINE-CONTAINING PRECURSORS FOR ION IMPLANTATION SYSTEMS AND REL...
Publication number
20240062987
Publication date
Feb 22, 2024
Entegris, Inc.
Joseph R. Despres
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENERGY FILTER ELEMENT FOR ION IMPLANTATION SYSTEMS FOR THE USE IN T...
Publication number
20240055217
Publication date
Feb 15, 2024
mi2-factory GmbH
Florian KRIPPENDORF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTER
Publication number
20240047176
Publication date
Feb 8, 2024
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Yoji Kawasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Energy Filter Assembly for Ion Implantation System with at least on...
Publication number
20240047168
Publication date
Feb 8, 2024
mi2-factory GmbH
Constantin Csato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR SETTING GAP BETWEEN CATHODE AND FILAMENT
Publication number
20240038490
Publication date
Feb 1, 2024
Axcelis Technologies, Inc.
Steven T. Drummond
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion implantation device with an energy filter and a support element...
Publication number
20240038491
Publication date
Feb 1, 2024
mi2-factory GmbH
Constantin Csato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ION IMPLANTATION SYSTEM AND METHOD FOR IMPLANTING ALUMINUM USING NO...
Publication number
20240035148
Publication date
Feb 1, 2024
Axcelis Technologies, Inc.
Neil Colvin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS, SYSTEM AND METHOD FOR ENERGY SPREAD ION BEAM
Publication number
20240029997
Publication date
Jan 25, 2024
Applied Materials, Inc.
Paul J. Murphy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DUAL SOURCE INJECTOR WITH SWITCHABLE ANALYZING MAGNET
Publication number
20240029998
Publication date
Jan 25, 2024
Axcelis Technologies, Inc.
Wilhelm Platow
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
REPELLER ASSEMBLY FOR MOUNTING INTO AN ARC CHAMBER OF AN ION IMPLAN...
Publication number
20240029991
Publication date
Jan 25, 2024
PLANSEE USA LLC
Nam Ngo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INDUCTIVELY COUPLED PLASMA TYPE ION IMPLANTER
Publication number
20240021409
Publication date
Jan 18, 2024
SK hynix Inc.
Jong Jin HWANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GA IMPLANT PROCESS CONTROL FOR ENHANCED PARTICLE PERFORMANCE
Publication number
20230386786
Publication date
Nov 30, 2023
Applied Materials, Inc.
Frank Sinclair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REPELLENT ELECTRODE FOR ELECTRON REPELLING
Publication number
20230386778
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Ching-Heng YEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR OPTIMIZING FULL HORIZONTAL SCANNED BEAM DIS...
Publication number
20230386785
Publication date
Nov 30, 2023
Applied Materials, Inc.
Tyler Wills
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION IMPLANTATION SYSTEM
Publication number
20230369009
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Company Limited
Kai-Yun Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FLUORINE BASED MOLECULAR CO-GAS WHEN RUNNING DIMETHYLALUMINUM CHLOR...
Publication number
20230352265
Publication date
Nov 2, 2023
Axcelis Technologies, Inc.
Neil K. Colvin
H01 - BASIC ELECTRIC ELEMENTS