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H01J37/3056
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/3056
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Patents Grants
last 30 patents
Information
Patent Grant
Systems and methods for pre-aligning samples for more efficient pro...
Patent number
12,106,931
Issue date
Oct 1, 2024
FEI Company
Michal Hrouzek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Modulation of rolling k vectors of angled gratings
Patent number
12,106,935
Issue date
Oct 1, 2024
Applied Materials, Inc.
Joseph C. Olson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Perimeter trench formation and delineation etch delayering
Patent number
12,040,196
Issue date
Jul 16, 2024
FEI Company
James Clarke
G11 - INFORMATION STORAGE
Information
Patent Grant
Method and system for cross-sectioning a sample with a preset thick...
Patent number
RE50001
Issue date
Jun 4, 2024
FIBICS INCORPORATED
Michael William Phaneuf
Information
Patent Grant
Temperature-tuned ultrafast X-ray shutter using optics-on-a-chip
Patent number
11,996,210
Issue date
May 28, 2024
UChicago Argonne, LLC
Jin Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Analysis device, analysis method, and storage medium
Patent number
11,977,009
Issue date
May 7, 2024
Honda Motor Co., Ltd.
Atsushi Sakurai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for performing sample lift-out for highly react...
Patent number
11,972,923
Issue date
Apr 30, 2024
FEI Company
Christopher Thompson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam irradiation apparatus and program therefor
Patent number
11,955,311
Issue date
Apr 9, 2024
NISSIN ION EQUIPMENT CO., LTD.
Shinya Takemura
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Microscopy imaging method for 3D tomography with predictive drift t...
Patent number
11,923,168
Issue date
Mar 5, 2024
FIBICS INCORPORATED
Michael William Phaneuf
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for manufacturing semiconductor structure
Patent number
11,908,700
Issue date
Feb 20, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Nai-Han Cheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of preparing and analyzing thin films
Patent number
11,894,216
Issue date
Feb 6, 2024
Yangtze Memory Technologies Co., Ltd.
Jing Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Textured surfaces for breast implants
Patent number
11,890,179
Issue date
Feb 6, 2024
Establishment Labs S.A.
Ardeshir Bayat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reduced charging by low negative voltage in FIB systems
Patent number
11,887,810
Issue date
Jan 30, 2024
Applied Materials Israel Ltd.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing an object using a material processing device
Patent number
11,862,428
Issue date
Jan 2, 2024
Carl Zeiss Microscopy GmbH
Fabian Perez-Willard
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etch improvement
Patent number
11,852,853
Issue date
Dec 26, 2023
Applied Materials, Inc.
Rutger Meyer Timmerman Thijssen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of material deposition
Patent number
11,798,804
Issue date
Oct 24, 2023
FEI Company
Brian Roberts Routh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Integral sweep in ion beam system
Patent number
11,784,025
Issue date
Oct 10, 2023
Plasma-Therm NES LLC
Sarpangala Hariharakeshava Hegde
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion milling device and milling processing method using same
Patent number
11,742,178
Issue date
Aug 29, 2023
HITACHI HIGH-TECH CORPORATION
Hitoshi Kamoshida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
3D metrology from 3D datacube created from stack of registered imag...
Patent number
11,728,126
Issue date
Aug 15, 2023
Applied Materials Israel Ltd.
Ilya Blayvas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
FIB delayering endpoint detection by monitoring sputtered materials...
Patent number
11,694,934
Issue date
Jul 4, 2023
Applied Materials Israel Ltd.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Modulation of rolling k vectors of angled gratings
Patent number
11,670,482
Issue date
Jun 6, 2023
Applied Materials, Inc.
Joseph C. Olson
G02 - OPTICS
Information
Patent Grant
Method for reducing line-end space in integrated circuit patterning
Patent number
11,635,695
Issue date
Apr 25, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Jing-Huei Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fabricating non-uniform diffraction gratings
Patent number
11,609,365
Issue date
Mar 21, 2023
Magic Leap, Inc.
Mauro Melli
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method of preparing integrated circuits for backside pro...
Patent number
11,605,525
Issue date
Mar 14, 2023
FEI Company
James Vickers
G01 - MEASURING TESTING
Information
Patent Grant
Substrate processing system, switching timing creation support devi...
Patent number
11,587,763
Issue date
Feb 21, 2023
Tokyo Electron Limited
Takeshi Akimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gratings with variable depths formed using planarization for wavegu...
Patent number
11,579,364
Issue date
Feb 14, 2023
Meta Platforms Technologies, LLC
Matthew E. Colburn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Imaging method and imaging system
Patent number
11,532,454
Issue date
Dec 20, 2022
HITACHI HIGH-TECH CORPORATION
Hiroshi Fukuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor structure
Patent number
11,482,422
Issue date
Oct 25, 2022
Nai-Han Cheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for iteratively cross-sectioning a sample to corr...
Patent number
11,462,383
Issue date
Oct 4, 2022
Fibics Incorporated
Michael William Phaneuf
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Modulation of rolling K vectors of angled gratings
Patent number
11,456,152
Issue date
Sep 27, 2022
Applied Materials, Inc.
Joseph C. Olson
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD TO INVESTIGATE A SEMICONDUCTOR SAMPLE LAYER BY LAYER AND INV...
Publication number
20240404786
Publication date
Dec 5, 2024
Carl Zeiss SMT GMBH
Ivo IHRKE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Reducing Line-End Space in Integrated Circuit Patterning
Publication number
20240385526
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Co., LTD
Jing-Huei Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FOCUSED ION BEAM DEVICE
Publication number
20240355574
Publication date
Oct 24, 2024
HITACHI HIGH-TECH SCIENCE CORPORATION
Koji NAGAHARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Integrated Circuit with FIB-Ready Structures
Publication number
20240321548
Publication date
Sep 26, 2024
Nuvoton Technology Corporation
Yuval Kirschner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR PERFORMING SAMPLE LIFT-OUT FOR HIGHLY REACT...
Publication number
20240266142
Publication date
Aug 8, 2024
FEI Company
Christopher THOMPSON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILLING EMPTY STRUCTURES BY DEPOSITION UNDER SEM - BALANCING PARAME...
Publication number
20240249909
Publication date
Jul 25, 2024
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IN-LINE DEPTH MEASUREMENTS BY AFM
Publication number
20240212976
Publication date
Jun 27, 2024
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROSCOPY IMAGING METHOD AND SYSTEM
Publication number
20240177966
Publication date
May 30, 2024
Fibics Incorporated
Michael William Phaneuf
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR MICROMACHINING A BIOLOGICAL SAMPLE FOR CREATING A LAMELL...
Publication number
20240177967
Publication date
May 30, 2024
FEI Company
Matej Dolník
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEXTURED SURFACES FOR BREAST IMPLANTS
Publication number
20240130846
Publication date
Apr 25, 2024
Establishment Labs S.A.
Ardeshir BAYAT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PREPARING A MICROSCOPIC SAMPLE FOR FIB/SEM TOMOGRAPHY
Publication number
20240120175
Publication date
Apr 11, 2024
CARL ZEISS MICROSCOPY GMBH
Lorenz Lechner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion Milling Device
Publication number
20240120174
Publication date
Apr 11, 2024
Hitachi High-Tech Corporation
Shota AIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ALTERING OPERATIONAL CHARACTERISTICS OF A SEMICONDUCTOR DEVICE USIN...
Publication number
20240105419
Publication date
Mar 28, 2024
Intel Corporation
Shida TAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE FOR IMAGING AND PROCESSING A SAMPLE USING A FOCUSED PARTICLE...
Publication number
20240062989
Publication date
Feb 22, 2024
Carl Zeiss SMT GMBH
Daniel Schwarz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Device
Publication number
20240055220
Publication date
Feb 15, 2024
Hitachi High-Tech Corporation
Yuka II
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PROCESSING A SAMPLE, PARTICLE BEAM SYSTEM, AND COMPUTER P...
Publication number
20240029996
Publication date
Jan 25, 2024
CARL ZEISS MICROSCOPY GMBH
Andreas Schmaunz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMBINED LASER AND BROAD ION BEAM (BIB) SYSTEMS FOR MORE EFFICIENT...
Publication number
20230420216
Publication date
Dec 28, 2023
FEI Company
Krishna Kanth NEELISETTY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MAKING CELL REGIONS OF INTEGRATED CIRCUITS
Publication number
20230409798
Publication date
Dec 21, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Jia-Hong GAO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
BROAD ION BEAM (BIB) SYSTEMS FOR MORE EFFICIENT PROCESSING OF MULTI...
Publication number
20230375445
Publication date
Nov 23, 2023
FEI Company
Michal HROUZEK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR PRE-ALIGNING SAMPLES FOR MORE EFFICIENT PRO...
Publication number
20230377834
Publication date
Nov 23, 2023
FEI Company
Michal HROUZEK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DUAL-WALL MULTI-STRUCTURE QUARTZ CYLINDER DEVICE
Publication number
20230352267
Publication date
Nov 2, 2023
JIANGSU LEUVEN INSTRUMENTS CO. LTD
Haiyang LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REDUCED CHARGING BY LOW NEGATIVE VOLTAGE IN FIB SYSTEMS
Publication number
20230343545
Publication date
Oct 26, 2023
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
END POINT DETERMINATION BY MEANS OF CONTRAST GAS
Publication number
20230341766
Publication date
Oct 26, 2023
Carl Zeiss SMT GMBH
Daniel Rhinow
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE-TUNED ULTRAFAST X-RAY SHUTTER USING OPTICS-ON-A-CHIP
Publication number
20230343479
Publication date
Oct 26, 2023
UChicago Argonne, LLC
Jin Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
3D METROLOGY FROM 3D DATACUBE CREATED FROM STACK OF REGISTERED IMAG...
Publication number
20230335370
Publication date
Oct 19, 2023
APPLIED MATERIALS ISRAEL LTD.
Ilya Blayvas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING APPARATUS AND METHOD OF MANUFACTURE
Publication number
20230326705
Publication date
Oct 12, 2023
Taiwan Semiconductor Manufacturing Company Limited
Chansyun David YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and system for analyzing three-dimensional features
Publication number
20230317410
Publication date
Oct 5, 2023
FEI Company
Bingxing Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENDPOINTING WITH DETERMINATION OF REMAINING DISTANCE
Publication number
20230307209
Publication date
Sep 28, 2023
FEI Company
Zoltán Orémus
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR MICROMACHINING A SAMPLE USING A FOCUSED IO...
Publication number
20230298855
Publication date
Sep 21, 2023
DELMIC IP B.V.
Andries Pieter Johan EFFTING
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Reducing Line-End Space in Integrated Circuit Patterning
Publication number
20230259036
Publication date
Aug 17, 2023
Taiwan Semiconductor Manufacturing Co., LTD
Jing-Huei Huang
H01 - BASIC ELECTRIC ELEMENTS