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H01J2237/201
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ELECTRICITY
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Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/201
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Patents Grants
last 30 patents
Information
Patent Grant
Device and method for substrate transport in vacuum processing systems
Patent number
12,142,463
Issue date
Nov 12, 2024
VON ARDENNE Asset GmbH & Co. KG
Falk Milde
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and techniques for substrate processing using independent...
Patent number
11,996,266
Issue date
May 28, 2024
Applied Materials, Inc.
Anthony Renau
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method of sample collection component
Patent number
11,959,834
Issue date
Apr 16, 2024
Materials Analysis Technology Inc.
Pin Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate joining method, substrate joining system and method for c...
Patent number
11,837,444
Issue date
Dec 5, 2023
BONDTECH CO., LTD.
Akira Yamauchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for imaging a multi-pillar sample
Patent number
11,476,079
Issue date
Oct 18, 2022
FEI Company
Jakub Kuba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Positioning samples for microscopy, inspection, or analysis
Patent number
11,398,365
Issue date
Jul 26, 2022
Mochii, Inc.
Christopher Su-Yan Own
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Planetary gear assembly for sputtering multiple balloon catheter di...
Patent number
10,758,716
Issue date
Sep 1, 2020
BIOSENSE WEBSTER (ISRAEL) LTD.
Assaf Govari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implant system having grid assembly
Patent number
10,636,935
Issue date
Apr 28, 2020
Intevac, Inc.
Babak Adibi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Workpiece transport and positioning apparatus
Patent number
10,361,060
Issue date
Jul 23, 2019
Howard Hughes Medical Institute
John H. Price
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Workpiece holder for workpiece transport apparatus
Patent number
10,186,397
Issue date
Jan 22, 2019
Howard Hughes Medical Institute
John H. Price
G01 - MEASURING TESTING
Information
Patent Grant
Multi-platen ion implanter and method for implanting multiple subst...
Patent number
10,121,637
Issue date
Nov 6, 2018
Taiwan Semiconductor Manufacturing Co., Ltd.
Shao-Hua Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Protein layers and their use in electron microscopy
Patent number
9,934,937
Issue date
Apr 3, 2018
Oxford University Innovation Limited
John Charles Sinclair
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Methods, apparatus and systems for production, collection, handling...
Patent number
9,927,327
Issue date
Mar 27, 2018
President and Fellows of Harvard College
Kenneth Jeffrey Hayworth
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged Particle Beam System With Receptacle Chamber For Cleaning S...
Patent number
9,881,768
Issue date
Jan 30, 2018
Jeol Ltd.
Shuji Kawai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implant system having grid assembly
Patent number
9,741,894
Issue date
Aug 22, 2017
Intevac, Inc.
Babak Adibi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Specimen sample holder for workpiece transport apparatus
Patent number
9,601,305
Issue date
Mar 21, 2017
Howard Hughes Medical Institute
John H. Price
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sample holder for electron microscope
Patent number
9,558,910
Issue date
Jan 31, 2017
Hitachi High-Technologies Corporation
Shohei Terada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sample base, charged particle beam device and sample observation me...
Patent number
9,508,527
Issue date
Nov 29, 2016
Hitachi High-Technologies Corporation
Yusuke Ominami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automated sample preparation
Patent number
9,476,810
Issue date
Oct 25, 2016
FEI Company
Paul Gottlieb
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Workpiece transport and positioning apparatus
Patent number
9,449,785
Issue date
Sep 20, 2016
Howard Hughes Medical Institute
John H. Price
G01 - MEASURING TESTING
Information
Patent Grant
Ion implant system having grid assembly
Patent number
9,303,314
Issue date
Apr 5, 2016
Intevac, Inc.
Babak Adibi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods, apparatus and systems for production, collection, handling...
Patent number
9,304,067
Issue date
Apr 5, 2016
President and Fellows of Harvard College
Kenneth Jeffrey Hayworth
G01 - MEASURING TESTING
Information
Patent Grant
High capacity TEM grid
Patent number
9,281,163
Issue date
Mar 8, 2016
FEI Company
Brian Roberts Routh
G01 - MEASURING TESTING
Information
Patent Grant
In-vacuum high speed pre-chill and post-heat stations
Patent number
9,236,216
Issue date
Jan 12, 2016
Axcelis Technologies, Inc.
William D. Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam device having a sample holder
Patent number
9,190,242
Issue date
Nov 17, 2015
Carl Zeiss NTS GmbH
Josef Biberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sample carrier for an electron microscope
Patent number
9,159,531
Issue date
Oct 13, 2015
FEI Company
Frank Nederlof
G01 - MEASURING TESTING
Information
Patent Grant
TEM-lamella, process for its manufacture, and apparatus for executi...
Patent number
9,103,753
Issue date
Aug 11, 2015
Carl Zeiss Microscopy GmbH
Lorenz Lechner
G01 - MEASURING TESTING
Information
Patent Grant
Sample block holder
Patent number
9,087,673
Issue date
Jul 21, 2015
FEI Company
Matthew Barrett
G01 - MEASURING TESTING
Information
Patent Grant
Workpiece carrier
Patent number
9,064,673
Issue date
Jun 23, 2015
Axcelis Technologies, Inc.
William Davis Lee
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Film deposition method
Patent number
8,932,963
Issue date
Jan 13, 2015
Tokyo Electron Limited
Hitoshi Kato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240412958
Publication date
Dec 12, 2024
Samsung Electronics Co., Ltd.
Jeongil MUN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT
Publication number
20240395514
Publication date
Nov 28, 2024
Prashant AGARWAL
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND TECHNIQUES FOR SUBSTRATE PROCESSING USING INDEPENDENT...
Publication number
20240297016
Publication date
Sep 5, 2024
Applied Materials, Inc.
Anthony Renau
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IN-SITU FOCUS RING COATING
Publication number
20240249921
Publication date
Jul 25, 2024
TOKYO ELECTRON LIMITED
Minjoon Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CALCULATE WAFERS THICKNESS OUT OF WAFER MAPPING PROCESS
Publication number
20240178022
Publication date
May 30, 2024
APPLIED MATERIALS ISRAEL LTD.
Ofer Dudovitch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VOLUME FILLING CASSETTE FOR LOAD LOCK
Publication number
20240153733
Publication date
May 9, 2024
Applied Materials, Inc.
Michael Mason Carrell
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ION BEAM DEPOSITION APPARATUS AND ION BEAM DEPOSITION METHOD USING...
Publication number
20240071712
Publication date
Feb 29, 2024
Samsung Electronics Co., Ltd.
SeungWan YOO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20240014013
Publication date
Jan 11, 2024
TOKYO ELECTRON LIMITED
Nobuo MATSUKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230402256
Publication date
Dec 14, 2023
TOKYO ELECTRON LIMITED
Takashi CHIBA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEVICE AND METHOD FOR SUBSTRATE TRANSPORT IN VACUUM PROCESSING SYSTEMS
Publication number
20230402266
Publication date
Dec 14, 2023
VON ARDENNE Asset GmbH & Co. KG
Falk MILDE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS
Publication number
20230395358
Publication date
Dec 7, 2023
Samsung Electronics Co., Ltd.
Daewoong Heo
B08 - CLEANING
Information
Patent Application
MANUFACTURING METHOD OF SAMPLE COLLECTION COMPONENT
Publication number
20230332985
Publication date
Oct 19, 2023
Materials Analysis Technology Inc.
Pin Chang
G01 - MEASURING TESTING
Information
Patent Application
ULTRATHIN ATOMIC LAYER DEPOSITION FILM ACCURACY THICKNESS CONTROL
Publication number
20230298884
Publication date
Sep 21, 2023
LAM RESEARCH CORPORATION
Jun Qian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEM FOR DEPOSITING PIEZOELECTRIC MATERIALS, METHODS FOR USING TH...
Publication number
20230257869
Publication date
Aug 17, 2023
QORVO BIOTECHNOLOGIES, LLC
Derya Deniz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20230260760
Publication date
Aug 17, 2023
TOKYO ELECTRON LIMITED
Ibuki HAYASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HOLDING DEVICE, AND USE OF THE HOLDING DEVICE
Publication number
20230245868
Publication date
Aug 3, 2023
HANWHA Q CELLS GMBH
Martin SCHAPER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20230245870
Publication date
Aug 3, 2023
TOKYO ELECTRON LIMITED
Taro IKEDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD
Publication number
20230215754
Publication date
Jul 6, 2023
Tokyo Electron Limited
Satoru KAWAKAMI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Storage Cassette for Replaceable Parts for Plasma Processing Apparatus
Publication number
20230142778
Publication date
May 11, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Kin Pong Lo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE
Publication number
20230133714
Publication date
May 4, 2023
SEMES CO., LTD.
Dong Uk KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE JOINING METHOD, SUBSTRATE JOINING SYSTEM AND METHOD FOR C...
Publication number
20230136771
Publication date
May 4, 2023
BONDTECH CO., LTD.
Akira YAMAUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CONDITIONING A PLASMA PROCESSING CHAMBER
Publication number
20230122167
Publication date
Apr 20, 2023
LAM RESEARCH CORPORATION
Neil Marshall WILSON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20230085592
Publication date
Mar 16, 2023
Jusung Engineering Co., Ltd.
Ji Hun LEE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BATCH-TYPE APPARATUS FOR ATOMIC LAYER ETCHING (ALE), AND ALE METHOD...
Publication number
20230062485
Publication date
Mar 2, 2023
Samsung Electronics Co., Ltd.
Hanjin LIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND MANUFACTURING METHOD FOR...
Publication number
20230054452
Publication date
Feb 23, 2023
TOKYO ELECTRON LIMITED
Taro IKEDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
Publication number
20230049118
Publication date
Feb 16, 2023
Jusung Engineering Co., Ltd.
InSeo YOO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FABRICATING THIN FILM LIQUID CELLS
Publication number
20230025535
Publication date
Jan 26, 2023
Universiteit Leiden
Pauline Marthe Gerardina VAN DEURSEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON MICROSCOPE IMAGING ADAPTOR
Publication number
20220344123
Publication date
Oct 27, 2022
The University of Kansas
Eduardo Rosa-Molinar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BATCH TYPE SUBSTRATE PROCESSING APPARATUS
Publication number
20220130647
Publication date
Apr 28, 2022
EUGENE TECHNOLOGY CO., LTD.
Jeong Hee JO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND TECHNIQUES FOR SUBSTRATE PROCESSING USING INDEPENDENT...
Publication number
20210166946
Publication date
Jun 3, 2021
Applied Materials, Inc.
Anthony Renau
H01 - BASIC ELECTRIC ELEMENTS