TREA

for rotation of the substrates

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  • CPC
  • C23C14/505
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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/505for rotation of the substrates
Industries

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    FILM FORMING APPARATUS AND FILM FORMING METHOD
    • Publication number 20240117486
    • Publication date Apr 11, 2024
    • TOKYO ELECTRON LIMITED
    • Yasunobu SUZUKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VACUUM PROCESSING APPARATUS
    • Publication number 20240120233
    • Publication date Apr 11, 2024
    • Ulvac, Inc.
    • Tetsushi Fujinaga
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD AND DEVICE FOR CHANGING TEST SUBSTRATES IN A CONTINUOUS-FLOW...
    • Publication number 20240102155
    • Publication date Mar 28, 2024
    • Solayer GmbH
    • Jens HERGENRÖTHER
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE ROTATING APPARATUS
    • Publication number 20240093358
    • Publication date Mar 21, 2024
    • SANTEC CORPORATION
    • Noboru UEHARA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MOLECULAR BEAM EPITAXY THIN FILM GROWTH APPARATUS
    • Publication number 20240084442
    • Publication date Mar 14, 2024
    • University of Ulsan Foundation for Industry Cooperation
    • Eun Jung PARK
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR IMPROVING RESISTANCE OF CERAMIC PTC THERMAL ELEMENT TO R...
    • Publication number 20240068088
    • Publication date Feb 29, 2024
    • JIANGSU NEW LINZHI ELECTRONIC TECHNOLOGY CO., LTD.
    • QIUYUN FU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Deposition Apparatus and Methods for Sequential Coating
    • Publication number 20240068102
    • Publication date Feb 29, 2024
    • RTX Corporation
    • James W. Neal
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SURFACE TREATMENT APPARATUS AND SURFACE TREATMENT METHOD
    • Publication number 20240060171
    • Publication date Feb 22, 2024
    • SHIBAURA MACHINE CO., LTD.
    • Kazuhiro FUKADA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD
    • Publication number 20240060170
    • Publication date Feb 22, 2024
    • TOKYO ELECTRON LIMITED
    • MANABU HONMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE SUPPORT UNIT, AND APPARATUS AND METHOD FOR DEPOSITING A L...
    • Publication number 20240063051
    • Publication date Feb 22, 2024
    • Evatec AG
    • Florian Hagmann
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Deposition Apparatus and Methods
    • Publication number 20240052476
    • Publication date Feb 15, 2024
    • RTX Corporation
    • Brian T. Hazel
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION APPARATUS
    • Publication number 20240052477
    • Publication date Feb 15, 2024
    • Canon ANELVA Corporation
    • Masahiro ATSUMI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DIAPHRAGM ASSEMBLY FOR DELIMITING THE COATING REGION OF A SPUTTER S...
    • Publication number 20240035142
    • Publication date Feb 1, 2024
    • Solayer GmbH
    • Dzmitry HRUNSKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ROTARY ELECTRICAL FEEDTHROUGH INTEGRATION FOR PROCESS CHAMBER
    • Publication number 20240018646
    • Publication date Jan 18, 2024
    • Applied Materials, Inc.
    • ANANTHA SUBRAMANI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS AND METHOD OF CONTROLLING FILM FORMING APPAR...
    • Publication number 20240021423
    • Publication date Jan 18, 2024
    • TOKYO ELECTRON LIMITED
    • Yasuhiko KOJIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method of Insignia Application to Brake Rotors
    • Publication number 20240011535
    • Publication date Jan 11, 2024
    • Tech M3
    • Nathan K. Meckel
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TRANSPORT DEVICE AND METHOD
    • Publication number 20240011149
    • Publication date Jan 11, 2024
    • VON ARDENNE Asset GmbH & Co. KG
    • Christoph KAISER
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMATION APPARATUS
    • Publication number 20230407458
    • Publication date Dec 21, 2023
    • SHIBAURA MECHATRONICS CORPORATION
    • Yoji TAKIZAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CUTTING TOOL
    • Publication number 20230405686
    • Publication date Dec 21, 2023
    • SUMITOMO ELECTRIC HARDMETAL CORP.
    • Yuta SUZUKI
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    MICROCHANNEL PLATE AND METHOD OF MAKING THE MICROCHANNEL PLATE WITH...
    • Publication number 20230386810
    • Publication date Nov 30, 2023
    • Elbit Systems of America, LLC
    • Stephen Carroll
    • C03 - GLASS MINERAL OR SLAG WOOL
  • Information Patent Application

    MANUFACTURING METHOD OF DISPLAY DEVICE AND EVAPORATION DEVICE
    • Publication number 20230380216
    • Publication date Nov 23, 2023
    • Japan Display Inc.
    • Hirofumi MIZUKOSHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR CLEANING ELECTROSTATIC CHUCK
    • Publication number 20230343628
    • Publication date Oct 26, 2023
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Yueh-Lin YANG
    • B08 - CLEANING
  • Information Patent Application

    FILM-FORMING DEVICE, FILM-FORMING UNIT, AND FILM-FORMING METHOD
    • Publication number 20230304140
    • Publication date Sep 28, 2023
    • Takashi IIZUKA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SURFACE TREATMENT APPARATUS AND SURFACE TREATMENT METHOD
    • Publication number 20230304143
    • Publication date Sep 28, 2023
    • Shibaura Machine CO., LTD.
    • Mitsunori KOKUBO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Variable Rotation Rate Batch Implanter
    • Publication number 20230287561
    • Publication date Sep 14, 2023
    • Applied Materials, Inc.
    • Stanislav S. Todorov
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTER DESPOSITION SYSTEM
    • Publication number 20230287558
    • Publication date Sep 14, 2023
    • FOX BIOSYSTEMS NV
    • Filip DELPORT
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    BIASABLE ROTATING PEDESTAL
    • Publication number 20230282506
    • Publication date Sep 7, 2023
    • Applied Materials, Inc.
    • Anantha Subramani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    COATING FILM, TOOL, AND MACHINE TOOL
    • Publication number 20230279535
    • Publication date Sep 7, 2023
    • NIDEC MACHINE TOOL CORPORATION
    • Takuma KATO
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    COATING INSTALLATION, CLAMPING RING AND MAGAZINE FOR SPECTACLE LENS...
    • Publication number 20230279537
    • Publication date Sep 7, 2023
    • SCHNEIDER GMBH & CO. KG
    • Gunter SCHNEIDER
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TETRAHEDRAL AMORPHOUS HYDROGENATED CARBON AND AMORPHOUS SILOXANE DI...
    • Publication number 20230243029
    • Publication date Aug 3, 2023
    • Thin Film Service, Inc.
    • Ollivier Lefevre
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...