for semiconductor wafers Not used, see H01L21/677

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    CONVEYING SYSTEM AND METHOD FOR OPERATING THE SAME

    • Publication number 20240222166
    • Publication date Jul 4, 2024
    • Taiwan Semiconductor Manufacturing company Ltd.
    • FU-HSIEN LI
    • B66 - HOISTING LIFTING HAULING
  • Information Patent Application

    TRANSFER CHAMBER

    • Publication number 20240038554
    • Publication date Feb 1, 2024
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    CEILING STORAGE SYSTEM AND CONTROL METHOD THEREOF

    • Publication number 20230406623
    • Publication date Dec 21, 2023
    • Samsung Electronics Co., Ltd.
    • Young Wook Kim
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Application

    ULTRATHIN CONFORMAL COATINGS FOR ELECTROSTATIC DISSIPATION IN SEMIC...

    • Publication number 20230077895
    • Publication date Mar 16, 2023
    • Applied Materials, Inc.
    • Gayatri Natu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TRANSFER CHAMBER

    • Publication number 20220344182
    • Publication date Oct 27, 2022
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    OVERHEAD BUFFER DOUBLE-ENTRY DETECTION SYSTEM AND METHOD THEREOF

    • Publication number 20220344188
    • Publication date Oct 27, 2022
    • ChangXin Memory Technologies, Inc.
    • Yuanzhang QIN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CONVEYING SYSTEM AND METHOD FOR OPERATING THE SAME

    • Publication number 20210384052
    • Publication date Dec 9, 2021
    • Taiwan Semiconductor Manufacturing company Ltd.
    • FU-HSIEN LI
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Application

    CONVEYING MECHANISM

    • Publication number 20210305065
    • Publication date Sep 30, 2021
    • Disco Corporation
    • Yoshinori KAKINUMA
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR TRANSFERRING W...

    • Publication number 20210287920
    • Publication date Sep 16, 2021
    • TOKYO ELECTRON LIMITED
    • Rintaro TAKAO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CARRIER SPACER AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

    • Publication number 20210166961
    • Publication date Jun 3, 2021
    • Mitsubishi Electric Corporation
    • Masashi OSAKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CONVEYING SYSTEM AND METHOD FOR OPERATING THE SAME

    • Publication number 20200381277
    • Publication date Dec 3, 2020
    • Taiwan Semiconductor Manufacturing company Ltd.
    • FU-HSIEN LI
    • G05 - CONTROLLING REGULATING
  • Information Patent Application

    SUBSTRATE HOLDING HAND AND SUBSTRATE CONVEYING APPARATUS

    • Publication number 20200335372
    • Publication date Oct 22, 2020
    • KAWASAKI JUKOGYO KABUSHIKI KAISHA
    • Tetsuya YOSHIDA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TRANSFER CHAMBER

    • Publication number 20200312686
    • Publication date Oct 1, 2020
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD

    • Publication number 20200234961
    • Publication date Jul 23, 2020
    • TOKYO ELECTRON LIMITED
    • Takeshi TAMURA
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Application

    OVERHEAD CONVEYANCE VEHICLE

    • Publication number 20200223640
    • Publication date Jul 16, 2020
    • DAIFUKU CO., LTD.
    • Takeshi SHIN
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Application

    Substrate Transfer Device and Substrate Transfer Method

    • Publication number 20200172351
    • Publication date Jun 4, 2020
    • TOKYO ELECTRON LIMITED
    • Katsuhiro MORIKAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    INDUSTRIAL ROBOT

    • Publication number 20200061807
    • Publication date Feb 27, 2020
    • NIDEC SANKYO CORPORATION
    • Takahiro SHIRAKI
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Application

    CONVEYANCE SYSTEM

    • Publication number 20190352099
    • Publication date Nov 21, 2019
    • Disco Corporation
    • Kazuma SEKIYA
    • B28 - WORKING CEMENT, CLAY, OR STONE
  • Information Patent Application

    SUBSTRATE GRIPPING HAND AND SUBSTRATE TRANSFER DEVICE INCLUDING THI...

    • Publication number 20190263003
    • Publication date Aug 29, 2019
    • KAWASAKI JUKOGYO KABUSHIKI KAISHA
    • Takayuki FUKUSHIMA
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Application

    TEACHING METHOD OF TRANSFER DEVICE

    • Publication number 20190181031
    • Publication date Jun 13, 2019
    • TOKYO ELECTRON LIMITED
    • Toshiyuki KOBAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING DEVICE

    • Publication number 20190152722
    • Publication date May 23, 2019
    • TOKYO ELECTRON LIMITED
    • Shinji WAKABAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CONVEYING PAD, CONVEYING APPARATUS USING THE CONVEYING PAD, AND CON...

    • Publication number 20190084778
    • Publication date Mar 21, 2019
    • NANO TEM CO., LTD.
    • Atsushi TAKATA
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Application

    Robot Diagnosing Method

    • Publication number 20190077013
    • Publication date Mar 14, 2019
    • KAWASAKI JUKOGYO KABUSHIKI KAISHA
    • Tetsuya YOSHIDA
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Application

    TRANSPORT FIXING JIG

    • Publication number 20190071265
    • Publication date Mar 7, 2019
    • NITTO DENKO CORPORATION
    • Shotaro MASUDA
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Application

    SUBSTRATE CONVEYANCE ROBOT AND SUBSTRATE CONVEYANCE APPARATUS

    • Publication number 20190054613
    • Publication date Feb 21, 2019
    • KAWASAKI JUKOGYO KABUSHIKI KAISHA
    • Takeshi SHIBATA
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Application

    BAFFLE PLATE

    • Publication number 20190027393
    • Publication date Jan 24, 2019
    • HARMOTEC CO., LTD.
    • Hitoshi IWASAKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ROBOT TRANSPORT DEVICE

    • Publication number 20180323086
    • Publication date Nov 8, 2018
    • SINFONIA TECHNOLOGY CO., LTD.
    • Takashi SHIGETA
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Application

    FLOATING CONVEYOR AND SUBSTRATE PROCESSING APPARATUS

    • Publication number 20180178993
    • Publication date Jun 28, 2018
    • SHIBAURA MECHATRONICS CORPORATION
    • Yuichi IMAOKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE TREATING SYSTEM

    • Publication number 20180033661
    • Publication date Feb 1, 2018
    • SEMES CO., LTD.
    • JUNGHWAN LEE
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Application

    WORKPIECE ALIGNMENT DEVICE

    • Publication number 20140366358
    • Publication date Dec 18, 2014
    • Malcolm N. Daniel
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL