TREA

for semiconductor wafers Not used, see H01L21/677

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Industry

  • CPC
  • B65G49/07
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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B65Thin material handling B65GTRANSPORT OR STORAGE DEVICES B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for

Current Industry

B65G49/07for semiconductor wafers Not used, see H01L21/677
Industries