TREA

for semiconductor wafers Not used, see H01L21/677

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  • CPC
  • B65G49/07
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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B65Thin material handling B65GTRANSPORT OR STORAGE DEVICES B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for

Current Industry

B65G49/07for semiconductor wafers Not used, see H01L21/677
Industries

Patents Grantslast 30 patents

  • Information Patent Grant

    Conveying system and method for operating the same
    • Patent number 11,942,342
    • Issue date Mar 26, 2024
    • Taiwan Semiconductor Manufacturing Company Ltd.
    • Fu-Hsien Li
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate holding hand and substrate conveying apparatus
    • Patent number 11,837,485
    • Issue date Dec 5, 2023
    • Kawasaki Jukogyo Kabushiki Kaisha
    • Tetsuya Yoshida
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Transfer chamber
    • Patent number 11,823,923
    • Issue date Nov 21, 2023
    • Sinfonia Technology Co., Ltd.
    • Toshihiro Kawai
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Grant

    Semiconductor manufacturing apparatus and method for transferring w...
    • Patent number 11,621,185
    • Issue date Apr 4, 2023
    • Tokyo Electron Limited
    • Rintaro Takao
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Ultrathin conformal coatings for electrostatic dissipation in semic...
    • Patent number 11,547,030
    • Issue date Jan 3, 2023
    • Applied Materials, Inc.
    • Gayatri Natu
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Grant

    Ultrathin conformal coatings for electrostatic dissipation in semic...
    • Patent number 11,540,432
    • Issue date Dec 27, 2022
    • Applied Materials, Inc.
    • Gayatri Natu
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Grant

    Carrier spacer and method of manufacturing semiconductor device
    • Patent number 11,521,875
    • Issue date Dec 6, 2022
    • Mitsubishi Electric Corporation
    • Masashi Osaka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Transfer chamber
    • Patent number 11,424,145
    • Issue date Aug 23, 2022
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Transport fixing jig
    • Patent number 11,420,832
    • Issue date Aug 23, 2022
    • Nitto Denko Corporation
    • Shotaro Masuda
    • B32 - LAYERED PRODUCTS
  • Information Patent Grant

    Substrate gripping hand and substrate transfer device including thi...
    • Patent number 11,338,448
    • Issue date May 24, 2022
    • Kawasaki Jukogyo Kabushiki Kaisha
    • Takayuki Fukushima
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Grant

    Conveying mechanism
    • Patent number 11,289,354
    • Issue date Mar 29, 2022
    • Disco Corporation
    • Yoshinori Kakinuma
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Conveying system and method for operating the same
    • Patent number 11,107,713
    • Issue date Aug 31, 2021
    • Taiwan Semiconductor Manufacturing Company Ltd.
    • Fu-Hsien Li
    • B66 - HOISTING LIFTING HAULING
  • Information Patent Grant

    Substrate transfer device and substrate transfer method
    • Patent number 11,097,907
    • Issue date Aug 24, 2021
    • Tokyo Electron Limited
    • Katsuhiro Morikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing system
    • Patent number 11,081,377
    • Issue date Aug 3, 2021
    • Tokyo Electron Limited
    • Ryota Goto
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Overhead conveyance vehicle
    • Patent number 10,926,960
    • Issue date Feb 23, 2021
    • Daifuku Co., Ltd.
    • Takeshi Shin
    • B61 - RAILWAYS
  • Information Patent Grant

    Substrate processing device
    • Patent number 10,906,756
    • Issue date Feb 2, 2021
    • Tokyo Electron Limited
    • Shinji Wakabayashi
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Grant

    Substrate conveyance robot and substrate conveyance apparatus
    • Patent number 10,867,826
    • Issue date Dec 15, 2020
    • Kawasaki Jukogyo Kabushiki Kaisha
    • Takeshi Shibata
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Teaching method of transfer device
    • Patent number 10,840,122
    • Issue date Nov 17, 2020
    • Tokyo Electron Limited
    • Toshiyuki Kobayashi
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Grant

    Mounting member
    • Patent number 10,777,446
    • Issue date Sep 15, 2020
    • Nitto Denko Corporation
    • Shotaro Masuda
    • B82 - NANO-TECHNOLOGY
  • Information Patent Grant

    Conveyance system
    • Patent number 10,717,605
    • Issue date Jul 21, 2020
    • Disco Corporation
    • Kazuma Sekiya
    • B28 - WORKING CEMENT, CLAY, OR STONE
  • Information Patent Grant

    Transfer chamber
    • Patent number 10,672,632
    • Issue date Jun 2, 2020
    • Sinfonia Technology Co., Ltd.
    • Toshihiro Kawai
    • C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
  • Information Patent Grant

    Baffle plate
    • Patent number 10,643,881
    • Issue date May 5, 2020
    • HARMOTEC CO., LTD.
    • Hitoshi Iwasaka
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Grant

    Robot transport device
    • Patent number 10,636,680
    • Issue date Apr 28, 2020
    • SINFONIA TECHNOLOGY CO., LTD.
    • Takashi Shigeta
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate treating system
    • Patent number 10,446,425
    • Issue date Oct 15, 2019
    • Semes Co., Ltd.
    • Junghwan Lee
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Grant

    Floating conveyor and substrate processing apparatus
    • Patent number 10,421,622
    • Issue date Sep 24, 2019
    • Shibaura Mechatronics Corporation
    • Yuichi Imaoka
    • C03 - GLASS MINERAL OR SLAG WOOL
  • Information Patent Grant

    Substrate-processing apparatus and method of manufacturing semicond...
    • Patent number 10,403,528
    • Issue date Sep 3, 2019
    • Kokusai Electric Corporation
    • Yasuaki Komae
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Grant

    Robot diagnosing method
    • Patent number 10,020,216
    • Issue date Jul 10, 2018
    • Kawasaki Jukogyo Kabushiki Kaisha
    • Kazuo Fujimori
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Grant

    Substrate heat treatment device
    • Patent number 9,463,938
    • Issue date Oct 11, 2016
    • Tokyo Electron Limited
    • Akihiro Toyozawa
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Grant

    Workpiece alignment device
    • Patent number 9,240,338
    • Issue date Jan 19, 2016
    • Varian Semiconductor Equipment Associates, Inc.
    • Malcolm N. Daniel
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Grant

    Overhead buffer device and wafer transport system
    • Patent number 9,209,056
    • Issue date Dec 8, 2015
    • Inotera Memories, Inc.
    • Hang-Hao Feng
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL

Patents Applicationslast 30 patents

  • Information Patent Application

    TRANSFER CHAMBER
    • Publication number 20240038554
    • Publication date Feb 1, 2024
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    CEILING STORAGE SYSTEM AND CONTROL METHOD THEREOF
    • Publication number 20230406623
    • Publication date Dec 21, 2023
    • Samsung Electronics Co., Ltd.
    • Young Wook Kim
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Application

    ULTRATHIN CONFORMAL COATINGS FOR ELECTROSTATIC DISSIPATION IN SEMIC...
    • Publication number 20230077895
    • Publication date Mar 16, 2023
    • Applied Materials, Inc.
    • Gayatri Natu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TRANSFER CHAMBER
    • Publication number 20220344182
    • Publication date Oct 27, 2022
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    OVERHEAD BUFFER DOUBLE-ENTRY DETECTION SYSTEM AND METHOD THEREOF
    • Publication number 20220344188
    • Publication date Oct 27, 2022
    • ChangXin Memory Technologies, Inc.
    • Yuanzhang QIN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CONVEYING SYSTEM AND METHOD FOR OPERATING THE SAME
    • Publication number 20210384052
    • Publication date Dec 9, 2021
    • Taiwan Semiconductor Manufacturing company Ltd.
    • FU-HSIEN LI
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Application

    CONVEYING MECHANISM
    • Publication number 20210305065
    • Publication date Sep 30, 2021
    • Disco Corporation
    • Yoshinori KAKINUMA
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR TRANSFERRING W...
    • Publication number 20210287920
    • Publication date Sep 16, 2021
    • TOKYO ELECTRON LIMITED
    • Rintaro TAKAO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CARRIER SPACER AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    • Publication number 20210166961
    • Publication date Jun 3, 2021
    • Mitsubishi Electric Corporation
    • Masashi OSAKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CONVEYING SYSTEM AND METHOD FOR OPERATING THE SAME
    • Publication number 20200381277
    • Publication date Dec 3, 2020
    • Taiwan Semiconductor Manufacturing company Ltd.
    • FU-HSIEN LI
    • G05 - CONTROLLING REGULATING
  • Information Patent Application

    SUBSTRATE HOLDING HAND AND SUBSTRATE CONVEYING APPARATUS
    • Publication number 20200335372
    • Publication date Oct 22, 2020
    • KAWASAKI JUKOGYO KABUSHIKI KAISHA
    • Tetsuya YOSHIDA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TRANSFER CHAMBER
    • Publication number 20200312686
    • Publication date Oct 1, 2020
    • SINFONIA TECHNOLOGY CO., LTD.
    • Toshihiro Kawai
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD
    • Publication number 20200234961
    • Publication date Jul 23, 2020
    • TOKYO ELECTRON LIMITED
    • Takeshi TAMURA
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Application

    OVERHEAD CONVEYANCE VEHICLE
    • Publication number 20200223640
    • Publication date Jul 16, 2020
    • DAIFUKU CO., LTD.
    • Takeshi SHIN
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Application

    Substrate Transfer Device and Substrate Transfer Method
    • Publication number 20200172351
    • Publication date Jun 4, 2020
    • TOKYO ELECTRON LIMITED
    • Katsuhiro MORIKAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    INDUSTRIAL ROBOT
    • Publication number 20200061807
    • Publication date Feb 27, 2020
    • NIDEC SANKYO CORPORATION
    • Takahiro SHIRAKI
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Application

    CONVEYANCE SYSTEM
    • Publication number 20190352099
    • Publication date Nov 21, 2019
    • Disco Corporation
    • Kazuma SEKIYA
    • B28 - WORKING CEMENT, CLAY, OR STONE
  • Information Patent Application

    SUBSTRATE GRIPPING HAND AND SUBSTRATE TRANSFER DEVICE INCLUDING THI...
    • Publication number 20190263003
    • Publication date Aug 29, 2019
    • KAWASAKI JUKOGYO KABUSHIKI KAISHA
    • Takayuki FUKUSHIMA
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Application

    TEACHING METHOD OF TRANSFER DEVICE
    • Publication number 20190181031
    • Publication date Jun 13, 2019
    • TOKYO ELECTRON LIMITED
    • Toshiyuki KOBAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING DEVICE
    • Publication number 20190152722
    • Publication date May 23, 2019
    • TOKYO ELECTRON LIMITED
    • Shinji WAKABAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CONVEYING PAD, CONVEYING APPARATUS USING THE CONVEYING PAD, AND CON...
    • Publication number 20190084778
    • Publication date Mar 21, 2019
    • NANO TEM CO., LTD.
    • Atsushi TAKATA
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Application

    Robot Diagnosing Method
    • Publication number 20190077013
    • Publication date Mar 14, 2019
    • KAWASAKI JUKOGYO KABUSHIKI KAISHA
    • Tetsuya YOSHIDA
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Application

    TRANSPORT FIXING JIG
    • Publication number 20190071265
    • Publication date Mar 7, 2019
    • NITTO DENKO CORPORATION
    • Shotaro MASUDA
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Application

    SUBSTRATE CONVEYANCE ROBOT AND SUBSTRATE CONVEYANCE APPARATUS
    • Publication number 20190054613
    • Publication date Feb 21, 2019
    • KAWASAKI JUKOGYO KABUSHIKI KAISHA
    • Takeshi SHIBATA
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Application

    BAFFLE PLATE
    • Publication number 20190027393
    • Publication date Jan 24, 2019
    • HARMOTEC CO., LTD.
    • Hitoshi IWASAKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ROBOT TRANSPORT DEVICE
    • Publication number 20180323086
    • Publication date Nov 8, 2018
    • SINFONIA TECHNOLOGY CO., LTD.
    • Takashi SHIGETA
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Application

    FLOATING CONVEYOR AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20180178993
    • Publication date Jun 28, 2018
    • SHIBAURA MECHATRONICS CORPORATION
    • Yuichi IMAOKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE TREATING SYSTEM
    • Publication number 20180033661
    • Publication date Feb 1, 2018
    • SEMES CO., LTD.
    • JUNGHWAN LEE
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Application

    WORKPIECE ALIGNMENT DEVICE
    • Publication number 20140366358
    • Publication date Dec 18, 2014
    • Malcolm N. Daniel
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Application

    ELECTRIC ACTUATOR
    • Publication number 20140110224
    • Publication date Apr 24, 2014
    • TOKYO ELECTRON LIMITED
    • Shinji Wakabayashi
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL