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H05B1/0233

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HELECTRICITY H05Electric techniques H05BELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR H05B1/00Details of electric heating devices

Current Industry

H05B1/0233for semiconductors manufacturing

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Optical heating device
- Patent number 12,165,889
- Issue date Dec 10, 2024
- Ushio Denki Kabushiki Kaisha
- Yoshiaki Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Identification of and compensation for a failure in a heater array
- Patent number 12,165,891
- Issue date Dec 10, 2024
- Lam Research Corporation
- Changyou Jing
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer placement table
- Patent number 12,150,215
- Issue date Nov 19, 2024
- NGK Insulators, Ltd.
- Seiya Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and temperature control method
- Patent number 12,142,501
- Issue date Nov 12, 2024
- Tokyo Electron Limited
- Kenichiro Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 12,133,297
- Issue date Oct 29, 2024
- Tokyo Electron Limited
- Yoshifumi Amano
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Heat treatment method and heat treatment apparatus
- Patent number 12,125,723
- Issue date Oct 22, 2024
- SCREEN Holdings Co., Ltd.
- Oma Nakajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-zone pedestal heater without vias
- Patent number 12,127,310
- Issue date Oct 22, 2024
- Watlow Electric Manufacturing Company
- Kevin Ptasienski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing holding device, method of manufacturing str...
- Patent number 12,120,781
- Issue date Oct 15, 2024
- NITERRA CO., LTD.
- Hideki Uematsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition system with integrated carrier cleaning modules
- Patent number 12,104,242
- Issue date Oct 1, 2024
- Veeco Instruments Inc.
- Alexander I. Gurary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer placement table
- Patent number 12,108,498
- Issue date Oct 1, 2024
- NGK Insulators, Ltd.
- Yuma Iwata
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Multi-zone temperature control plasma reactor
- Patent number 12,094,695
- Issue date Sep 17, 2024
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater, temperature control system, and processing apparatus
- Patent number 12,085,338
- Issue date Sep 10, 2024
- Kokusai Electric Corporation
- Tetsuya Kosugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems, methods, and apparatus for correcting thermal processing o...
- Patent number 12,085,965
- Issue date Sep 10, 2024
- Applied Materials, Inc.
- Wolfgang R. Aderhold
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Heater assembly and bonding head including same
- Patent number 12,082,313
- Issue date Sep 3, 2024
- Semes Co., Ltd.
- Soon Hyun Kim
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Plasma processing apparatus, and temperature control method
- Patent number 12,063,717
- Issue date Aug 13, 2024
- Tokyo Electron Limited
- Shinsuke Oka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Using cumulative heat amount data to qualify hot plate used for pos...
- Patent number 12,062,542
- Issue date Aug 13, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Cheng Chao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Progressive heating of components of substrate processing systems u...
- Patent number 12,062,554
- Issue date Aug 13, 2024
- Lam Research Corporation
- Ramesh Chandrasekharan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece processing apparatus with thermal processing systems
- Patent number 12,046,489
- Issue date Jul 23, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater component
- Patent number 12,046,459
- Issue date Jul 23, 2024
- Tocalo Co., Ltd.
- Shikou Abukawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal dynamic response sensing systems for heaters
- Patent number 12,040,204
- Issue date Jul 16, 2024
- Watlow Electric Manufacturing Company
- Louis P. Steinhauser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater substrate, probe card substrate, and probe card
- Patent number 12,013,433
- Issue date Jun 18, 2024
- Kyocera Corporation
- Daisuke Jingu
- G01 - MEASURING TESTING
Information Patent Grant
Tunable temperature controlled substrate support assembly
- Patent number 12,009,244
- Issue date Jun 11, 2024
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transferring unit, substrate treating apparatus including the same,...
- Patent number 12,004,268
- Issue date Jun 4, 2024
- Semes Co., Ltd.
- Ji-Hwan Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic heater
- Patent number 11,984,329
- Issue date May 14, 2024
- NGK Insulators, Ltd.
- Masaki Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,978,654
- Issue date May 7, 2024
- Semes Co., Ltd.
- Min Sung Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater and heater system
- Patent number 11,961,747
- Issue date Apr 16, 2024
- Kyocera Corporation
- Yuusaku Ishimine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-zone heater
- Patent number 11,956,863
- Issue date Apr 9, 2024
- NGK Insulators, Ltd.
- Yutaka Unno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic heater and method of forming using transient liquid phase b...
- Patent number 11,943,845
- Issue date Mar 26, 2024
- Watlow Electric Manufacturing Company
- Patrick Margavio
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma processing apparatus, plasma state detection method, and pla...
- Patent number 11,935,731
- Issue date Mar 19, 2024
- Tokyo Electron Limited
- Daisuke Hayashi
- G08 - SIGNALLING
Information Patent Grant
Correction data creating method, substrate processing method, and s...
- Patent number 11,923,211
- Issue date Mar 5, 2024
- Tokyo Electron Limited
- Hiroki Endo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE SENSOR, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUF...
- Publication number 20250004489
- Publication date Jan 2, 2025
- Kokusai Electric Corporation
- Takayuki NAKADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION SYSTEM WITH INTEGRATED CARRIER CLEANING MODULES
- Publication number 20240425973
- Publication date Dec 26, 2024
- VEECO INSTRUMENTS INC.
- Alexander I. Gurary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT APPARATUS AND TEMPERATURE REGULATING METHOD FOR SEMI...
- Publication number 20240430986
- Publication date Dec 26, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Wenyan WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING EQUIPMENT AND CONTROL METHOD THEREOF
- Publication number 20240419199
- Publication date Dec 19, 2024
- LAPLACE RENEWABLE ENERGY TECHNOLOGY CO., LTD.
- Yang Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATER, TEMPERATURE CONTROL SYSTEM, AND PROCESSING APPARATUS
- Publication number 20240393050
- Publication date Nov 28, 2024
- Kokusai Electric Corporation
- Tetsuya KOSUGI
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
PROGRESSIVE HEATING OF COMPONENTS OF SUBSTRATE PROCESSING SYSTEMS U...
- Publication number 20240395569
- Publication date Nov 28, 2024
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL DYNAMIC RESPONSE SENSING SYSTEMS FOR HEATERS
- Publication number 20240371665
- Publication date Nov 7, 2024
- WATLOW ELECTRIC MANUFACTURING COMPANY
- Louis P. STEINHAUSER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USING CUMULATIVE HEAT AMOUNT DATA TO QUALIFY HOT PLATE USED FOR POS...
- Publication number 20240371639
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Cheng Chao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Workpiece Processing Apparatus with Thermal Processing Systems
- Publication number 20240347356
- Publication date Oct 17, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
- Publication number 20240321620
- Publication date Sep 26, 2024
- Applied Materials, Inc.
- Vijay D. PARKHE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE PROCESSING DEVICE, AND MICROWAVE PROCESSING METHOD
- Publication number 20240268004
- Publication date Aug 8, 2024
- Microwave Chemical Co., Ltd.
- Yasunori TSUKAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Measuring Thermal Performance of Substrates u...
- Publication number 20240222168
- Publication date Jul 4, 2024
- Western Digital Technologies, Inc.
- Vishnu Chandar Janakiraman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA STATE DETECTION METHOD, AND PLA...
- Publication number 20240186125
- Publication date Jun 6, 2024
- TOKYO ELECTRON LIMITED
- Daisuke HAYASHI
- G05 - CONTROLLING REGULATING
Information Patent Application
REFLECTOR PLATE FOR SUBSTRATE PROCESSING
- Publication number 20240175753
- Publication date May 30, 2024
- Applied Materials, Inc.
- Wolfgang R. ADERHOLD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20240155737
- Publication date May 9, 2024
- TOKYO ELECTRON LIMITED
- Hiroki ENDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT IRRADIATION TYPE HEAT TREATMENT APPARATUS
- Publication number 20240105474
- Publication date Mar 28, 2024
- SCREEN Holdings Co., Ltd.
- Takahiro KITAZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANAGING BEAM POWER EFFECTS BY VARYING BASE EMISSIVITY
- Publication number 20240087839
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Dawei Sun
- G02 - OPTICS
Information Patent Application
TRANSPARENT HEATERS FOR IMPROVED EPITAXY REACTOR PRODUCTIVITY
- Publication number 20240040672
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Sathya Shrinivas CHARY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACTIVELY CONTROLLED PRE-HEAT RING FOR PROCESS TEMPERATURE CONTROL
- Publication number 20240035161
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20240030049
- Publication date Jan 25, 2024
- TOKYO ELECTRON LIMITED
- Yukinobu OTSUKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PLASMA PROCESSING APPARATUS AND TEMPERATURE CONTROLLING METHOD
- Publication number 20240030009
- Publication date Jan 25, 2024
- TOKYO ELECTRON LIMITED
- Kazuhito YAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20230397303
- Publication date Dec 7, 2023
- Kokusai Electric Corporation
- Hiroyuki YAMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND PROCESSING METHOD THEREFOR, AND METHOD FOR...
- Publication number 20230377920
- Publication date Nov 23, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC
- Meng HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORTING UNIT AND TEMPERATURE CONTROL METHOD THEREOF
- Publication number 20230376055
- Publication date Nov 23, 2023
- TES CO., LTD.
- Kyung-Tae LIM
- G05 - CONTROLLING REGULATING
Information Patent Application
DEVICE AND METHOD FOR TREATING SUBSTRATE
- Publication number 20230352277
- Publication date Nov 2, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Zi-Wei ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT-EMISSION HEAT TREATMENT APPARATUS
- Publication number 20230290654
- Publication date Sep 14, 2023
- SCREEN Holdings Co., Ltd.
- Ryuta TOBE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODEL-BASED CONTROL METHOD, MODEL-BASED CONTROL SYSTEM, AND STORAGE...
- Publication number 20230239966
- Publication date Jul 27, 2023
- TOKYO ELECTRON LIMITED
- Jun TAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING APPARATUS FOR A SEMICONDUCTOR DEVICE, HEATING SYSTEM, AND S...
- Publication number 20230223283
- Publication date Jul 13, 2023
- ALIBABA GROUP HOLDING LIMITED
- Chengchun TANG
- G05 - CONTROLLING REGULATING
Information Patent Application
DYNAMIC AND LOCALIZED TEMPERATURE CONTROL FOR EPITAXIAL DEPOSITION...
- Publication number 20230223284
- Publication date Jul 13, 2023
- Applied Materials, Inc.
- Sathya Shrinivas CHARY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR HEATING AND TEMPERATURE MONITORING
- Publication number 20230217548
- Publication date Jul 6, 2023
- ASM IP HOLDING B.V.
- Ankit Kimtee
- H01 - BASIC ELECTRIC ELEMENTS

for semiconductors manufacturing

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Optical heating device

Identification of and compensation for a failure in a heater array

Wafer placement table

Substrate processing system and temperature control method

Substrate processing apparatus

Heat treatment method and heat treatment apparatus

Multi-zone pedestal heater without vias

Method of manufacturing holding device, method of manufacturing str...

Deposition system with integrated carrier cleaning modules

Wafer placement table

Multi-zone temperature control plasma reactor

Heater, temperature control system, and processing apparatus

Systems, methods, and apparatus for correcting thermal processing o...

Heater assembly and bonding head including same

Plasma processing apparatus, and temperature control method

Using cumulative heat amount data to qualify hot plate used for pos...

Progressive heating of components of substrate processing systems u...

Workpiece processing apparatus with thermal processing systems

Heater component

Thermal dynamic response sensing systems for heaters

Heater substrate, probe card substrate, and probe card

Tunable temperature controlled substrate support assembly

Transferring unit, substrate treating apparatus including the same,...

Ceramic heater

Substrate processing apparatus

Heater and heater system

Multi-zone heater

Ceramic heater and method of forming using transient liquid phase b...

Plasma processing apparatus, plasma state detection method, and pla...

Correction data creating method, substrate processing method, and s...

Patents Applicationslast 30 patents

TEMPERATURE SENSOR, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUF...

DEPOSITION SYSTEM WITH INTEGRATED CARRIER CLEANING MODULES

HEAT TREATMENT APPARATUS AND TEMPERATURE REGULATING METHOD FOR SEMI...

PROCESSING EQUIPMENT AND CONTROL METHOD THEREOF

HEATER, TEMPERATURE CONTROL SYSTEM, AND PROCESSING APPARATUS

PROGRESSIVE HEATING OF COMPONENTS OF SUBSTRATE PROCESSING SYSTEMS U...

THERMAL DYNAMIC RESPONSE SENSING SYSTEMS FOR HEATERS

USING CUMULATIVE HEAT AMOUNT DATA TO QUALIFY HOT PLATE USED FOR POS...

Workpiece Processing Apparatus with Thermal Processing Systems

TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY

MICROWAVE PROCESSING DEVICE, AND MICROWAVE PROCESSING METHOD

System and Method for Measuring Thermal Performance of Substrates u...

PLASMA PROCESSING APPARATUS, PLASMA STATE DETECTION METHOD, AND PLA...

REFLECTOR PLATE FOR SUBSTRATE PROCESSING

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

LIGHT IRRADIATION TYPE HEAT TREATMENT APPARATUS

MANAGING BEAM POWER EFFECTS BY VARYING BASE EMISSIVITY

TRANSPARENT HEATERS FOR IMPROVED EPITAXY REACTOR PRODUCTIVITY

ACTIVELY CONTROLLED PRE-HEAT RING FOR PROCESS TEMPERATURE CONTROL

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

PLASMA PROCESSING APPARATUS AND TEMPERATURE CONTROLLING METHOD

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND PROCESSING METHOD THEREFOR, AND METHOD FOR...

SUBSTRATE SUPPORTING UNIT AND TEMPERATURE CONTROL METHOD THEREOF

DEVICE AND METHOD FOR TREATING SUBSTRATE

LIGHT-EMISSION HEAT TREATMENT APPARATUS

MODEL-BASED CONTROL METHOD, MODEL-BASED CONTROL SYSTEM, AND STORAGE...

HEATING APPARATUS FOR A SEMICONDUCTOR DEVICE, HEATING SYSTEM, AND S...

DYNAMIC AND LOCALIZED TEMPERATURE CONTROL FOR EPITAXIAL DEPOSITION...

METHODS AND APPARATUS FOR HEATING AND TEMPERATURE MONITORING