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H05B1/0233

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HELECTRICITY H05Electric techniques H05BELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR H05B1/00Details of electric heating devices

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H05B1/0233for semiconductors manufacturing

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method and system for providing variable ramp-down control for an e...
- Patent number 12,369,228
- Issue date Jul 22, 2025
- Watlow Electric Manufacturing Company
- Brittany Phillips
- G01 - MEASURING TESTING
Information Patent Grant
Reflector plate for substrate processing
- Patent number 12,366,481
- Issue date Jul 22, 2025
- Applied Materials, Inc.
- Wolfgang R. Aderhold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature control unit
- Patent number 12,354,892
- Issue date Jul 8, 2025
- Tocalo Co., Ltd.
- Ryutaro Kawamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Using cumulative heat amount data to qualify hot plate used for pos...
- Patent number 12,347,682
- Issue date Jul 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Cheng Chao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dynamic and localized temperature control for epitaxial deposition...
- Patent number 12,341,038
- Issue date Jun 24, 2025
- Applied Materials, Inc.
- Sathya Shrinivas Chary
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Temperature control apparatus for semiconductor processing equipmen...
- Patent number 12,341,037
- Issue date Jun 24, 2025
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Kui Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tunable temperature controlled substrate support assembly
- Patent number 12,334,385
- Issue date Jun 17, 2025
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-zone heater control for wafer processing equipment
- Patent number 12,317,378
- Issue date May 27, 2025
- Applied Materials, Inc.
- Uwe P. Haller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heated substrate support
- Patent number 12,309,888
- Issue date May 20, 2025
- Applied Materials, Inc.
- Govinda Raj
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Support unit, heating unit and substrate treating apparatus includi...
- Patent number 12,300,531
- Issue date May 13, 2025
- Semes Co., Ltd.
- Chung Woo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and substrate treating method
- Patent number 12,300,515
- Issue date May 13, 2025
- Semes Co., Ltd.
- Miso Park
- B08 - CLEANING
Information Patent Grant
Methods and systems for heating a wide bandgap substrate
- Patent number 12,291,773
- Issue date May 6, 2025
- SILANNA UV TECHNOLOGIES PTE LTD
- Petar Atanackovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for filtering radio frequencies from a signal o...
- Patent number 12,283,451
- Issue date Apr 22, 2025
- Lam Research Corporation
- Vince Burkhart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating device and heating method
- Patent number 12,278,122
- Issue date Apr 15, 2025
- Tokyo Electron Limited
- Takashi Sugimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for heating substrate and method thereof
- Patent number 12,256,471
- Issue date Mar 18, 2025
- Tokyo Electron Limited
- Takahisa Mase
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Base structure and wafer placing device
- Patent number 12,238,827
- Issue date Feb 25, 2025
- Kyocera Corporation
- Yasunori Kawanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for providing variable ramp-up control for an ele...
- Patent number 12,225,635
- Issue date Feb 11, 2025
- Watlow Electric Manufacturing Company
- Brittany Phillips
- G05 - CONTROLLING REGULATING
Information Patent Grant
Support unit, substrate treating apparatus including the same and t...
- Patent number 12,207,362
- Issue date Jan 21, 2025
- Semes Co., Ltd.
- Chung Woo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical heating device
- Patent number 12,165,889
- Issue date Dec 10, 2024
- Ushio Denki Kabushiki Kaisha
- Yoshiaki Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Identification of and compensation for a failure in a heater array
- Patent number 12,165,891
- Issue date Dec 10, 2024
- Lam Research Corporation
- Changyou Jing
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer placement table
- Patent number 12,150,215
- Issue date Nov 19, 2024
- NGK Insulators, Ltd.
- Seiya Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and temperature control method
- Patent number 12,142,501
- Issue date Nov 12, 2024
- Tokyo Electron Limited
- Kenichiro Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 12,133,297
- Issue date Oct 29, 2024
- Tokyo Electron Limited
- Yoshifumi Amano
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Heat treatment method and heat treatment apparatus
- Patent number 12,125,723
- Issue date Oct 22, 2024
- SCREEN Holdings Co., Ltd.
- Oma Nakajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-zone pedestal heater without vias
- Patent number 12,127,310
- Issue date Oct 22, 2024
- Watlow Electric Manufacturing Company
- Kevin Ptasienski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing holding device, method of manufacturing str...
- Patent number 12,120,781
- Issue date Oct 15, 2024
- NITERRA CO., LTD.
- Hideki Uematsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer placement table
- Patent number 12,108,498
- Issue date Oct 1, 2024
- NGK Insulators, Ltd.
- Yuma Iwata
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Deposition system with integrated carrier cleaning modules
- Patent number 12,104,242
- Issue date Oct 1, 2024
- Veeco Instruments Inc.
- Alexander I. Gurary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-zone temperature control plasma reactor
- Patent number 12,094,695
- Issue date Sep 17, 2024
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Tuqiang Ni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems, methods, and apparatus for correcting thermal processing o...
- Patent number 12,085,965
- Issue date Sep 10, 2024
- Applied Materials, Inc.
- Wolfgang R. Aderhold
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
BAKING SYSTEM FOR PROCESSING UNIT ASSEMBLY
- Publication number 20250239562
- Publication date Jul 24, 2025
- ZT Group Int’l, Inc. dba ZT Systems
- Sruti Chigullapalli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR D...
- Publication number 20250226244
- Publication date Jul 10, 2025
- Kokusai Electric Corporation
- Kento NAKANISHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ceramic Susceptor
- Publication number 20250220776
- Publication date Jul 3, 2025
- MICO CERAMICS LTD.
- Je Ho CHAE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHODS AND SYSTEMS FOR HEATING A WIDE BANDGAP SUBSTRATE
- Publication number 20250215551
- Publication date Jul 3, 2025
- Silanna UV Technologies Pte Ltd
- Petar Atanackovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATING DEVICE AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME
- Publication number 20250201531
- Publication date Jun 19, 2025
- SEMES CO., LTD.
- Chan Young CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATER CIRCUIT, CONTROLLING METHOD THEREOF, AND SUBSTRATE PROCESSIN...
- Publication number 20250201615
- Publication date Jun 19, 2025
- SEMES CO., LTD.
- Byeong Hyeon KONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRE-HEAT RINGS, HEATING SYSTEMS, AND PROCESSING CHAMBERS INCLUDING...
- Publication number 20250132174
- Publication date Apr 24, 2025
- Applied Materials, Inc.
- Haifeng ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE ZONE HEATED ENCLOSURE FOR OPTIMIZED SUBLIMATION OF SOLID-P...
- Publication number 20250106944
- Publication date Mar 27, 2025
- VERSUM MATERIALS US, LLC
- THOMAS W. PILTZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR PROVIDING VARIABLE RAMP-UP CONTROL FOR AN ELE...
- Publication number 20250089130
- Publication date Mar 13, 2025
- WATLOW ELECTRIC MANUFACTURING COMPANY
- Brittany PHILLIPS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS, METHODS, AND APPARATUS FOR CORRECTING THERMAL PROCESSING O...
- Publication number 20250068195
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Wolfgang R. ADERHOLD
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IDENTIFICATION OF AND COMPENSATION FOR A FAILURE IN A HEATER ARRAY
- Publication number 20250054788
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Changyou Jing
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE SENSOR, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUF...
- Publication number 20250004489
- Publication date Jan 2, 2025
- Kokusai Electric Corporation
- Takayuki NAKADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION SYSTEM WITH INTEGRATED CARRIER CLEANING MODULES
- Publication number 20240425973
- Publication date Dec 26, 2024
- VEECO INSTRUMENTS INC.
- Alexander I. Gurary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT APPARATUS AND TEMPERATURE REGULATING METHOD FOR SEMI...
- Publication number 20240430986
- Publication date Dec 26, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Wenyan WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING EQUIPMENT AND CONTROL METHOD THEREOF
- Publication number 20240419199
- Publication date Dec 19, 2024
- LAPLACE RENEWABLE ENERGY TECHNOLOGY CO., LTD.
- Yang Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATER, TEMPERATURE CONTROL SYSTEM, AND PROCESSING APPARATUS
- Publication number 20240393050
- Publication date Nov 28, 2024
- Kokusai Electric Corporation
- Tetsuya KOSUGI
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
PROGRESSIVE HEATING OF COMPONENTS OF SUBSTRATE PROCESSING SYSTEMS U...
- Publication number 20240395569
- Publication date Nov 28, 2024
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL DYNAMIC RESPONSE SENSING SYSTEMS FOR HEATERS
- Publication number 20240371665
- Publication date Nov 7, 2024
- WATLOW ELECTRIC MANUFACTURING COMPANY
- Louis P. STEINHAUSER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USING CUMULATIVE HEAT AMOUNT DATA TO QUALIFY HOT PLATE USED FOR POS...
- Publication number 20240371639
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Cheng Chao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Workpiece Processing Apparatus with Thermal Processing Systems
- Publication number 20240347356
- Publication date Oct 17, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
- Publication number 20240321620
- Publication date Sep 26, 2024
- Applied Materials, Inc.
- Vijay D. PARKHE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE PROCESSING DEVICE, AND MICROWAVE PROCESSING METHOD
- Publication number 20240268004
- Publication date Aug 8, 2024
- Microwave Chemical Co., Ltd.
- Yasunori TSUKAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Measuring Thermal Performance of Substrates u...
- Publication number 20240222168
- Publication date Jul 4, 2024
- Western Digital Technologies, Inc.
- Vishnu Chandar Janakiraman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA STATE DETECTION METHOD, AND PLA...
- Publication number 20240186125
- Publication date Jun 6, 2024
- TOKYO ELECTRON LIMITED
- Daisuke HAYASHI
- G05 - CONTROLLING REGULATING
Information Patent Application
REFLECTOR PLATE FOR SUBSTRATE PROCESSING
- Publication number 20240175753
- Publication date May 30, 2024
- Applied Materials, Inc.
- Wolfgang R. ADERHOLD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20240155737
- Publication date May 9, 2024
- TOKYO ELECTRON LIMITED
- Hiroki ENDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT IRRADIATION TYPE HEAT TREATMENT APPARATUS
- Publication number 20240105474
- Publication date Mar 28, 2024
- SCREEN Holdings Co., Ltd.
- Takahiro KITAZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANAGING BEAM POWER EFFECTS BY VARYING BASE EMISSIVITY
- Publication number 20240087839
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Dawei Sun
- G02 - OPTICS
Information Patent Application
TRANSPARENT HEATERS FOR IMPROVED EPITAXY REACTOR PRODUCTIVITY
- Publication number 20240040672
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Sathya Shrinivas CHARY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACTIVELY CONTROLLED PRE-HEAT RING FOR PROCESS TEMPERATURE CONTROL
- Publication number 20240035161
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

for semiconductors manufacturing

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and system for providing variable ramp-down control for an e...

Reflector plate for substrate processing

Temperature control unit

Using cumulative heat amount data to qualify hot plate used for pos...

Dynamic and localized temperature control for epitaxial deposition...

Temperature control apparatus for semiconductor processing equipmen...

Tunable temperature controlled substrate support assembly

Multi-zone heater control for wafer processing equipment

Heated substrate support

Support unit, heating unit and substrate treating apparatus includi...

Substrate treating apparatus and substrate treating method

Methods and systems for heating a wide bandgap substrate

Systems and methods for filtering radio frequencies from a signal o...

Heating device and heating method

Apparatus for heating substrate and method thereof

Base structure and wafer placing device

Method and system for providing variable ramp-up control for an ele...

Support unit, substrate treating apparatus including the same and t...

Optical heating device

Identification of and compensation for a failure in a heater array

Wafer placement table

Substrate processing system and temperature control method

Substrate processing apparatus

Heat treatment method and heat treatment apparatus

Multi-zone pedestal heater without vias

Method of manufacturing holding device, method of manufacturing str...

Wafer placement table

Deposition system with integrated carrier cleaning modules

Multi-zone temperature control plasma reactor

Systems, methods, and apparatus for correcting thermal processing o...

Patents Applicationslast 30 patents

BAKING SYSTEM FOR PROCESSING UNIT ASSEMBLY

TEMPERATURE CONTROL METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR D...

Ceramic Susceptor

METHODS AND SYSTEMS FOR HEATING A WIDE BANDGAP SUBSTRATE

HEATING DEVICE AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME

HEATER CIRCUIT, CONTROLLING METHOD THEREOF, AND SUBSTRATE PROCESSIN...

PRE-HEAT RINGS, HEATING SYSTEMS, AND PROCESSING CHAMBERS INCLUDING...

MULTIPLE ZONE HEATED ENCLOSURE FOR OPTIMIZED SUBLIMATION OF SOLID-P...

METHOD AND SYSTEM FOR PROVIDING VARIABLE RAMP-UP CONTROL FOR AN ELE...

SYSTEMS, METHODS, AND APPARATUS FOR CORRECTING THERMAL PROCESSING O...

IDENTIFICATION OF AND COMPENSATION FOR A FAILURE IN A HEATER ARRAY

TEMPERATURE SENSOR, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUF...

DEPOSITION SYSTEM WITH INTEGRATED CARRIER CLEANING MODULES

HEAT TREATMENT APPARATUS AND TEMPERATURE REGULATING METHOD FOR SEMI...

PROCESSING EQUIPMENT AND CONTROL METHOD THEREOF

HEATER, TEMPERATURE CONTROL SYSTEM, AND PROCESSING APPARATUS

PROGRESSIVE HEATING OF COMPONENTS OF SUBSTRATE PROCESSING SYSTEMS U...

THERMAL DYNAMIC RESPONSE SENSING SYSTEMS FOR HEATERS

USING CUMULATIVE HEAT AMOUNT DATA TO QUALIFY HOT PLATE USED FOR POS...

Workpiece Processing Apparatus with Thermal Processing Systems

TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY

MICROWAVE PROCESSING DEVICE, AND MICROWAVE PROCESSING METHOD

System and Method for Measuring Thermal Performance of Substrates u...

PLASMA PROCESSING APPARATUS, PLASMA STATE DETECTION METHOD, AND PLA...

REFLECTOR PLATE FOR SUBSTRATE PROCESSING

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

LIGHT IRRADIATION TYPE HEAT TREATMENT APPARATUS

MANAGING BEAM POWER EFFECTS BY VARYING BASE EMISSIVITY

TRANSPARENT HEATERS FOR IMPROVED EPITAXY REACTOR PRODUCTIVITY

ACTIVELY CONTROLLED PRE-HEAT RING FOR PROCESS TEMPERATURE CONTROL