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H
ELECTRICITY
H05
Electric techniques
H05B
ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
H05B1/00
Details of electric heating devices
Current Industry
H05B1/0233
for semiconductors manufacturing
Industries
Overview
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Impact
Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus
Patent number
11,978,654
Issue date
May 7, 2024
Semes Co., Ltd.
Min Sung Han
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heater and heater system
Patent number
11,961,747
Issue date
Apr 16, 2024
Kyocera Corporation
Yuusaku Ishimine
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-zone heater
Patent number
11,956,863
Issue date
Apr 9, 2024
NGK Insulators, Ltd.
Yutaka Unno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ceramic heater and method of forming using transient liquid phase b...
Patent number
11,943,845
Issue date
Mar 26, 2024
Watlow Electric Manufacturing Company
Patrick Margavio
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Plasma processing apparatus, plasma state detection method, and pla...
Patent number
11,935,731
Issue date
Mar 19, 2024
Tokyo Electron Limited
Daisuke Hayashi
G08 - SIGNALLING
Information
Patent Grant
Correction data creating method, substrate processing method, and s...
Patent number
11,923,211
Issue date
Mar 5, 2024
Tokyo Electron Limited
Hiroki Endo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing system and substrate processing method
Patent number
11,917,729
Issue date
Feb 27, 2024
Tokyo Electron Limited
Hiroki Endo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High throughput and metal contamination control oven for chamber co...
Patent number
11,898,245
Issue date
Feb 13, 2024
Applied Materials, Inc.
Chien-Min Liao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-zone pedestal heater having a routing layer
Patent number
11,895,741
Issue date
Feb 6, 2024
Watlow Electric Manufacturing Company
Kevin Ptasienski
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Consolidated filter arrangement for devices in an RF environment
Patent number
11,870,252
Issue date
Jan 9, 2024
Applied Materials, Inc.
Phillip Criminale
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Processing apparatus
Patent number
11,862,505
Issue date
Jan 2, 2024
Disco Corporation
Yoshinori Kakinuma
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,856,655
Issue date
Dec 26, 2023
Tokyo Electron Limited
Hirofumi Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature controlling apparatus, temperature controlling method,...
Patent number
11,837,480
Issue date
Dec 5, 2023
Tokyo Electron Limited
Katsuyuki Koizumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate fixing device, electrostatic chuck, and method of manufac...
Patent number
11,830,752
Issue date
Nov 28, 2023
Shinko Electric Industries Co., Ltd.
Yoichi Harayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reflector plate for substrate processing
Patent number
11,828,656
Issue date
Nov 28, 2023
Applied Materials, Inc.
Wolfgang R. Aderhold
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heater assembly with purge gap control and temperature uniformity f...
Patent number
11,818,810
Issue date
Nov 14, 2023
Applied Materials, Inc.
Dhritiman Subha Kashyap
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer-use member, wafer-use system, and method for manufacturing wa...
Patent number
11,818,813
Issue date
Nov 14, 2023
Kyocera Corporation
Yasunori Kawanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Post-fabrication trimming of silicon ring resonators via integrated...
Patent number
11,808,978
Issue date
Nov 7, 2023
McMaster University
Andrew Knights
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Thermal processing system with transmission switch plate
Patent number
11,812,523
Issue date
Nov 7, 2023
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Michael X. Yang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Thermal head for independent control of zones
Patent number
11,796,589
Issue date
Oct 24, 2023
AEM Holdings Ltd.
Thomas P. Jones
G01 - MEASURING TESTING
Information
Patent Grant
Substrate processing apparatus, substrate processing method, and st...
Patent number
11,798,821
Issue date
Oct 24, 2023
Tokyo Electron Limited
Yukinobu Otsuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Holding device and method for manufacturing holding device
Patent number
11,784,067
Issue date
Oct 10, 2023
NITERRA CO., LTD.
Makoto Kuribayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection apparatus including power supply for supplying power to...
Patent number
11,774,488
Issue date
Oct 3, 2023
Tokyo Electron Limited
Shigeru Kasai
G01 - MEASURING TESTING
Information
Patent Grant
Heater power feeding mechanism
Patent number
11,756,806
Issue date
Sep 12, 2023
Tokyo Electron Limited
Dai Kitagawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck and semiconductor manufacturing apparatus
Patent number
11,756,820
Issue date
Sep 12, 2023
Toto Ltd.
Akihito Ono
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate heating device
Patent number
11,751,287
Issue date
Sep 5, 2023
NISSIN ION EQUIPMENT CO., LTD.
Masatoshi Onoda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chamber matching and calibration
Patent number
11,749,543
Issue date
Sep 5, 2023
Applied Materials, Inc.
Xuesong Lu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Fluid control apparatus
Patent number
11,678,406
Issue date
Jun 13, 2023
Fujikin Incorporated
Teruyuki Funabiki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Solid state heater and method of manufacture
Patent number
11,665,786
Issue date
May 30, 2023
Applied Materials, Inc.
David Morrell
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ceramic heater
Patent number
11,664,244
Issue date
May 30, 2023
NGK Insulators, Ltd.
Tomohiro Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
Publication number
20240155737
Publication date
May 9, 2024
TOKYO ELECTRON LIMITED
Hiroki ENDO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIGHT IRRADIATION TYPE HEAT TREATMENT APPARATUS
Publication number
20240105474
Publication date
Mar 28, 2024
SCREEN Holdings Co., Ltd.
Takahiro KITAZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANAGING BEAM POWER EFFECTS BY VARYING BASE EMISSIVITY
Publication number
20240087839
Publication date
Mar 14, 2024
Applied Materials, Inc.
Dawei Sun
G02 - OPTICS
Information
Patent Application
TRANSPARENT HEATERS FOR IMPROVED EPITAXY REACTOR PRODUCTIVITY
Publication number
20240040672
Publication date
Feb 1, 2024
Applied Materials, Inc.
Sathya Shrinivas CHARY
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ACTIVELY CONTROLLED PRE-HEAT RING FOR PROCESS TEMPERATURE CONTROL
Publication number
20240035161
Publication date
Feb 1, 2024
Applied Materials, Inc.
Zhepeng CONG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
Publication number
20240030049
Publication date
Jan 25, 2024
TOKYO ELECTRON LIMITED
Yukinobu OTSUKA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PLASMA PROCESSING APPARATUS AND TEMPERATURE CONTROLLING METHOD
Publication number
20240030009
Publication date
Jan 25, 2024
TOKYO ELECTRON LIMITED
Kazuhito YAMADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20230397303
Publication date
Dec 7, 2023
Kokusai Electric Corporation
Hiroyuki YAMADA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DEVICE AND PROCESSING METHOD THEREFOR, AND METHOD FOR...
Publication number
20230377920
Publication date
Nov 23, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC
Meng HU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUPPORTING UNIT AND TEMPERATURE CONTROL METHOD THEREOF
Publication number
20230376055
Publication date
Nov 23, 2023
TES CO., LTD.
Kyung-Tae LIM
G05 - CONTROLLING REGULATING
Information
Patent Application
DEVICE AND METHOD FOR TREATING SUBSTRATE
Publication number
20230352277
Publication date
Nov 2, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Zi-Wei ZHU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIGHT-EMISSION HEAT TREATMENT APPARATUS
Publication number
20230290654
Publication date
Sep 14, 2023
SCREEN Holdings Co., Ltd.
Ryuta TOBE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MODEL-BASED CONTROL METHOD, MODEL-BASED CONTROL SYSTEM, AND STORAGE...
Publication number
20230239966
Publication date
Jul 27, 2023
TOKYO ELECTRON LIMITED
Jun TAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEATING APPARATUS FOR A SEMICONDUCTOR DEVICE, HEATING SYSTEM, AND S...
Publication number
20230223283
Publication date
Jul 13, 2023
ALIBABA GROUP HOLDING LIMITED
Chengchun TANG
G05 - CONTROLLING REGULATING
Information
Patent Application
DYNAMIC AND LOCALIZED TEMPERATURE CONTROL FOR EPITAXIAL DEPOSITION...
Publication number
20230223284
Publication date
Jul 13, 2023
Applied Materials, Inc.
Sathya Shrinivas CHARY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR HEATING AND TEMPERATURE MONITORING
Publication number
20230217548
Publication date
Jul 6, 2023
ASM IP HOLDING B.V.
Ankit Kimtee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING SYSTEM AND FARADAY SHIELDING APPARATUS WHICH CAN BE...
Publication number
20230207283
Publication date
Jun 29, 2023
BEIJING LEUVEN SEMICONDUCTOR TECHNOLOGY CO. LTD
Song GUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND SYSTEMS FOR HEATING A WIDE BANDGAP SUBSTRATE
Publication number
20230203643
Publication date
Jun 29, 2023
Silanna UV Technologies Pte Ltd
Petar Atanackovic
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
Publication number
20230143372
Publication date
May 11, 2023
TOKYO ELECTRON LIMITED
Wataru MATSUMOTO
B08 - CLEANING
Information
Patent Application
Method for heating a wide bandgap substrate by providing a resistiv...
Publication number
20230131472
Publication date
Apr 27, 2023
Silanna UV Technologies Pte Ltd
Petar Atanackovic
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS, AND TEMPERATURE CONTROL METHOD
Publication number
20230105165
Publication date
Apr 6, 2023
TOKYO ELECTRON LIMITED
Shinsuke OKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEATER SUBSTRATE, PROBE CARD SUBSTRATE, AND PROBE CARD
Publication number
20230084616
Publication date
Mar 16, 2023
KYOCERA CORPORATION
Daisuke JINGU
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
HEATER COMPONENT
Publication number
20230079853
Publication date
Mar 16, 2023
TOCALO CO., LTD.
Shikou ABUKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATES AND TEMPERATURE CONTROL METHOD OF...
Publication number
20230070679
Publication date
Mar 9, 2023
SEMES CO., LTD.
Tae Dong PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS, METHODS, AND APPARATUS FOR CORRECTING THERMAL PROCESSING O...
Publication number
20230069444
Publication date
Mar 2, 2023
Applied Materials, Inc.
Wolfgang R. ADERHOLD
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SUPPORTING UNIT AND APPARATUS FOR TREATING SUBSTRATE
Publication number
20230060901
Publication date
Mar 2, 2023
Semes Co., Ltd.
Tae Dong PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUPPORT UNIT, HEATING UNIT AND SUBSTRATE TREATING APPARATUS INCLUDI...
Publication number
20230029721
Publication date
Feb 2, 2023
SEMES CO., LTD.
Chung Woo LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POWER CONVERTER FOR A THERMAL SYSTEM
Publication number
20230021550
Publication date
Jan 26, 2023
WATLOW ELECTRIC MANUFACTURING COMPANY
Stanton H. BREITLOW
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE SUPPORTS WITH INTEGRATED RF FILTERS
Publication number
20220415625
Publication date
Dec 29, 2022
LAM RESEARCH CORPORATION
Sunil KAPOOR
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND TEMPERATURE CONTROL METHOD
Publication number
20220390288
Publication date
Dec 8, 2022
TOKYO ELECTRON LIMITED
Tadashi ENOMOTO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...