Membership
Tour
Register
Log in
formation by plasma treatment
Follow
Industry
CPC
H01L21/02252
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Current Industry
H01L21/02252
formation by plasma treatment
Industries
Overview
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Fill structures with air gaps
Patent number
11,961,884
Issue date
Apr 16, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Hsiu-Yung Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Display substrate and manufacturing method therefor, and display de...
Patent number
11,961,848
Issue date
Apr 16, 2024
Hefei Xinsheng Optoelectronics Technology Co., Ltd.
Jun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor memory device and method of manufacturing thereof
Patent number
11,956,961
Issue date
Apr 9, 2024
Kioxia Corporation
Shinichi Sotome
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Steam oxidation initiation for high aspect ratio conformal radical...
Patent number
11,948,791
Issue date
Apr 2, 2024
Applied Materials, Inc.
Christopher S. Olsen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor memory device and method for manufacturing the same
Patent number
11,917,827
Issue date
Feb 27, 2024
Kioxia Corporation
Naoki Yasuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device, substrate processing...
Patent number
11,908,682
Issue date
Feb 20, 2024
Kokusai Electric Corporation
Hiroto Igawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing semiconductor device, and recording medium
Patent number
11,905,596
Issue date
Feb 20, 2024
Kokusai Electric Corporation
Teruo Yoshino
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing a semiconductor device
Patent number
11,894,446
Issue date
Feb 6, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Ling-Yen Yeh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming oxide layer on a doped substrate using nitridatio...
Patent number
11,862,461
Issue date
Jan 2, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Tzung-Han Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
DC bias in plasma process
Patent number
11,854,766
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Sheng-Liang Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Anti-oxidation layer to prevent dielectric loss from planarization...
Patent number
11,854,822
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Zhen Yu Guan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of making a metal silicide contact to a silicon substrate
Patent number
11,854,881
Issue date
Dec 26, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC.
Biao Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for manufacturing semiconductor memory
Patent number
11,854,797
Issue date
Dec 26, 2023
Changxin Memory Technologies, Inc.
Haodong Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for near surface work function engineering
Patent number
11,837,473
Issue date
Dec 5, 2023
Applied Materials, Inc.
Taichou Papo Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for seamless gap filling of dielectric material
Patent number
11,830,728
Issue date
Nov 28, 2023
Applied Materials, Inc.
Chengyu Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for radical and thermal processing of substrates
Patent number
11,823,901
Issue date
Nov 21, 2023
Applied Materials Inc.
Xinming Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming semiconductor structure with high aspect ratio
Patent number
11,823,960
Issue date
Nov 21, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Han-Pin Chung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for fabricating semiconductor devices
Patent number
11,800,701
Issue date
Oct 24, 2023
Samsung Electronics Co., Ltd.
Ho Kyun An
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Nanostructure field-effect transistor device and method of forming
Patent number
11,791,216
Issue date
Oct 17, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Te-Yang Lai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device
Patent number
11,777,030
Issue date
Oct 3, 2023
Rohm Co., Ltd.
Shuhei Mitani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure and fabrication method thereof
Patent number
11,769,707
Issue date
Sep 26, 2023
Semiconductor Manufacturing International (Shanghai) Corporation
Fei Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Forming an oxide volume within a fin
Patent number
11,764,104
Issue date
Sep 19, 2023
Intel Corporation
Cheng-Ying Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self-aligned inner spacer on gate-all-around structure and methods...
Patent number
11,749,742
Issue date
Sep 5, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Tsungyu Hung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etch monitoring and performing
Patent number
11,749,570
Issue date
Sep 5, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Wei-De Ho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fin field-effect transistor device and method
Patent number
11,735,430
Issue date
Aug 22, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yin Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for forming substrate surfaces with exposed cr...
Patent number
11,735,432
Issue date
Aug 22, 2023
Exogenesis Corporation
Sean R. Kirkpatrick
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming epitaxial source/drain features using a self-ali...
Patent number
11,735,483
Issue date
Aug 22, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yao-Sheng Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing device member, plasma processing device comprisin...
Patent number
11,715,629
Issue date
Aug 1, 2023
Kyocera Corporation
Kazuhiro Ishikawa
C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information
Patent Grant
Plasma block with integrated cooling
Patent number
11,710,630
Issue date
Jul 25, 2023
Applied Materials, Inc.
Tanmay P. Gurjar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Low-k dielectric damage prevention
Patent number
11,699,618
Issue date
Jul 11, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chen-Yi Lee
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
MANUFACTURING METHOD OF INSULATION FILM
Publication number
20240112906
Publication date
Apr 4, 2024
ABIT TECHNOLOGIES CO., LTD
Kiyokazu NAKAGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STABILIZING DIELECTRIC STRESS IN A GALVANIC ISOLATION DEVICE
Publication number
20240113095
Publication date
Apr 4, 2024
TEXAS INSTRUMENTS INCORPORATED
Yoshihiro Takei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ANTI-OXIDATION LAYER TO PREVENT DIELECTRIC LOSS FROM PLANARIZATION...
Publication number
20240087906
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Zhen Yu Guan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR RADICAL AND THERMAL PROCESSING OF SUBSTRATES
Publication number
20240087889
Publication date
Mar 14, 2024
Applied Materials, Inc.
Xinming ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING
Publication number
20240087947
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chung-Ting Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DC Bias in Plasma Process
Publication number
20240071722
Publication date
Feb 29, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Sheng-Liang Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA SURFACE TREATMENT FOR WAFER BONDING METHODS
Publication number
20240071746
Publication date
Feb 29, 2024
TOKYO ELECTRON LIMITED
Yu-Hao Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20240063014
Publication date
Feb 22, 2024
ASM IP HOLDING B.V.
SangHeon Yong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING SEMICONDUCTOR STRUCTURE WITH HIGH ASPECT RATIO
Publication number
20240047276
Publication date
Feb 8, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Han-Pin CHUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCH MONITORING AND PERFORMING
Publication number
20240030073
Publication date
Jan 25, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Wei-De HO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
Publication number
20240014035
Publication date
Jan 11, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Jian-Zhi HUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SILICON NITROGENEOUS FILM
Publication number
20230420244
Publication date
Dec 28, 2023
Merck Patent GmbH
Atsuhiko SATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING EPITAXIAL SOURCE/DRAIN FEATURES USING A SELF-ALI...
Publication number
20230395433
Publication date
Dec 7, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yao-Sheng Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELF-ALIGNED INNER SPACER ON GATE-ALL-AROUND STRUCTURE AND METHODS...
Publication number
20230387253
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Co., LTD
Tsungyu Hung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FORMING AN OXIDE VOLUME WITHIN A FIN
Publication number
20230377947
Publication date
Nov 23, 2023
Intel Corporation
Cheng-Ying HUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THIN FILM TRANSISTOR INCLUDING A COMPOSITIONALLY-GRADED GATE DIELEC...
Publication number
20230369439
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Company Limited
Wu-Wei TSAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Nanostructure Field-Effect Transistor Device and Method of Forming
Publication number
20230369124
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Te-Yang Lai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR GROWING A SEMICONDUCTOR ASSEMBLY AND SEMICONDUCTOR ASSEMBLY
Publication number
20230360908
Publication date
Nov 9, 2023
OTTO-VON GUERICKE-UNIVERSITAT MAGDEBURG
Armin DADGAR
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE HAVING NANOSTRUCTURE TRANSISTOR AND METHODS OF...
Publication number
20230361201
Publication date
Nov 9, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Wen-Kai LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND SEMICONDUCTOR DEV...
Publication number
20230317451
Publication date
Oct 5, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Shih-Ming CHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Tuning Threshold Voltage Through Meta Stable Plasma Treatment
Publication number
20230282484
Publication date
Sep 7, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Shao-Jyun Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
BORON NITRIDE LAYER, APPARATUS INCLUDING THE SAME, AND METHOD OF FA...
Publication number
20230272554
Publication date
Aug 31, 2023
Samsung Electronics Co., Ltd.
Changseok LEE
C30 - CRYSTAL GROWTH
Information
Patent Application
METHODS FOR NEAR SURFACE WORK FUNCTION ENGINEERING
Publication number
20230230838
Publication date
Jul 20, 2023
Applied Materials, Inc.
Taichou Papo CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DUAL PRESSURE OXIDATION METHOD FOR FORMING AN OXIDE LAYER IN A FEATURE
Publication number
20230207291
Publication date
Jun 29, 2023
Applied Materials, Inc.
Christopher S. OLSEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING SEMICONDUCTOR STRUCTURE
Publication number
20230207315
Publication date
Jun 29, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC
TZUNG-HAN LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD TO REDUCE BREAKDOWN FAILURE IN A MIM CAPACITOR
Publication number
20230187478
Publication date
Jun 15, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Hsing-Lien Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Treatment for Adhesion Improvement
Publication number
20230187201
Publication date
Jun 15, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Ching-Yi Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING SAME
Publication number
20230187219
Publication date
Jun 15, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC
Meng ZHU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NH RADICAL THERMAL NITRIDATION TO FORM METAL SILICON NITRIDE FILMS
Publication number
20230178365
Publication date
Jun 8, 2023
Applied Materials, Inc.
Wei Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCALED LINER LAYER FOR ISOLATION STRUCTURE
Publication number
20230178419
Publication date
Jun 8, 2023
Applied Materials, Inc.
Benjamin COLOMBEAU
H01 - BASIC ELECTRIC ELEMENTS