Formation of thin functional dielectric layers

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H01L2221/1052

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L2221/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00

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H01L2221/1052Formation of thin functional dielectric layers

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Patents Grantslast 30 patents

Information Patent Grant
Vapor deposition unit, vapor deposition device, and vapor depositio...
- Patent number 10,100,397
- Issue date Oct 16, 2018
- SHARP KABUSHIKI KAISHA
- Yuhki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents