from metal halides

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CPC
C23C16/08

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/08from metal halides

Industries

Patents Grantslast 30 patents

Information Patent Grant
Film forming method and tungsten film
- Patent number 12,227,843
- Issue date Feb 18, 2025
- Tokyo Electron Limited
- Takuya Kawaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for stabilizing vanadium compounds
- Patent number 12,221,357
- Issue date Feb 11, 2025
- ASM IP Holding B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a molybdenum nitride film on a surface of a...
- Patent number 12,215,416
- Issue date Feb 4, 2025
- ASM IP Holding B.V.
- Eric Christopher Stevens
- G11 - INFORMATION STORAGE
Information Patent Grant
Deposition of transition metal—comprising material
- Patent number 12,209,305
- Issue date Jan 28, 2025
- ASM IP Holding B.V.
- Miika Mattinen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for filling a gap
- Patent number 12,104,244
- Issue date Oct 1, 2024
- ASM IP Holding B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition processes
- Patent number 12,104,250
- Issue date Oct 1, 2024
- ASM IP Holding B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition processes
- Patent number 12,065,739
- Issue date Aug 20, 2024
- ASM IP Holding B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rapid flush purging during atomic layer deposition
- Patent number 12,060,639
- Issue date Aug 13, 2024
- Lam Research Corporation
- Pragna Nannapaneni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for silicon germanium uniformity control using multiple pre...
- Patent number 12,057,314
- Issue date Aug 6, 2024
- ASM IP Holding B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 12,051,586
- Issue date Jul 30, 2024
- Samsung Electronics Co., Ltd.
- Seung-Min Ryu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for selectively depositing a metallic film on a substrate
- Patent number 12,033,861
- Issue date Jul 9, 2024
- ASM IP Holding B.V.
- Delphine Longrie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for selective deposition using self-assembled monolayers
- Patent number 12,024,770
- Issue date Jul 2, 2024
- Applied Materials, Inc.
- Chang Ke
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tungsten gapfill using molybdenum co-flow
- Patent number 12,014,956
- Issue date Jun 18, 2024
- Applied Materials, Inc.
- Xi Cen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming structures including silicon germanium and silic...
- Patent number 11,996,289
- Issue date May 28, 2024
- ASM IP Holding B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chromium-enriched diffused aluminide coating
- Patent number 11,987,877
- Issue date May 21, 2024
- RTX Corporation
- Mark A. Livings
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition of metal films
- Patent number 11,970,776
- Issue date Apr 30, 2024
- Lam Research Corporation
- Joshua Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclic deposition methods for forming metal-containing material and...
- Patent number 11,952,658
- Issue date Apr 9, 2024
- ASM IP Holding B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas delivery for tungsten-containing layer
- Patent number 11,939,668
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Zubin Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,915,914
- Issue date Feb 27, 2024
- Tokyo Electron Limited
- Sena Fujita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming a polycrystalline molybdenum film over a surfac...
- Patent number 11,898,242
- Issue date Feb 13, 2024
- ASM IP Holding B.V.
- Bhushan Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Creating and protecting magnetic nanomaterials
- Patent number 11,851,757
- Issue date Dec 26, 2023
- UChicago Argonne, LLC
- Anil U. Mane
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Methods for depositing a molybdenum nitride film on a surface of a...
- Patent number 11,827,978
- Issue date Nov 28, 2023
- ASM IP Holding B.V.
- Eric Christopher Stevens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition of rhenium containing thin films
- Patent number 11,821,084
- Issue date Nov 21, 2023
- ASM IP Holding, B.V.
- Jani Hamalainen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system, substrate processing method, and contr...
- Patent number 11,823,877
- Issue date Nov 21, 2023
- Tokyo Electron Limited
- Koichi Miyashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclic deposition methods for forming metal-containing material and...
- Patent number 11,814,715
- Issue date Nov 14, 2023
- ASM IP Holding B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stabilized metal monolayer structure
- Patent number 11,814,723
- Issue date Nov 14, 2023
- IUCF-HYU (Industry-University Cooperation Foundation Hanyang University)
- Myung Mo Sung
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Water droplet erosion resistant coatings for turbine blades and oth...
- Patent number 11,795,830
- Issue date Oct 24, 2023
- Hardide PLC
- Yuri Zhuk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tungsten defluorination by high pressure treatment
- Patent number 11,705,337
- Issue date Jul 18, 2023
- Applied Materials, Inc.
- Keith Tatseun Wong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming nucleation layers with halogenated silanes
- Patent number 11,702,742
- Issue date Jul 18, 2023
- Applied Materials, Inc.
- Kelvin Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for the generation of metal-containing films
- Patent number 11,655,262
- Issue date May 23, 2023
- David Dominique Schweinfurth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR STABILIZING VANADIUM COMPOUNDS
- Publication number 20250033990
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Charles Dezelah
- C01 - INORGANIC CHEMISTRY
Information Patent Application
GROWTH INHIBITOR FOR FORMING THIN FILM, METHOD FOR FORMING THIN FIL...
- Publication number 20250034705
- Publication date Jan 30, 2025
- Soulbrain Co., LTD
- Changbong Yeon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION PROCESSES
- Publication number 20240417852
- Publication date Dec 19, 2024
- ASM IP HOLDING B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HAFNIUM PRECURSORS AND RELATED METHODS
- Publication number 20240409430
- Publication date Dec 12, 2024
- Entegris, Inc.
- Juan Valdez
- C01 - INORGANIC CHEMISTRY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE
- Publication number 20240371636
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei-Min Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vapor Deposition Processes
- Publication number 20240368763
- Publication date Nov 7, 2024
- ASM IP HOLDING B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID SOURCE CHEMICAL VAPORIZER
- Publication number 20240360554
- Publication date Oct 31, 2024
- ASM IP HOLDING B.V.
- Davide Proserpio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HALIDE AND ORGANIC PRECURSORS FOR METAL DEPOSITION
- Publication number 20240360557
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Srinivas Gandikota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR FILLING A GAP
- Publication number 20240352576
- Publication date Oct 24, 2024
- ASM IP HOLDING B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR SELECTIVE DEPOSITION USING SELF-ASSEMBLED MONOLAYERS
- Publication number 20240352577
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- CHANG KE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING COMPONENTS FOR SEMICONDUCTOR PROCESSING WITH FLUORINE-CONTA...
- Publication number 20240347336
- Publication date Oct 17, 2024
- Applied Materials, Inc.
- Nitin Deepak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR SILICON GERMANIUM UNIFORMITY CONTROL USING MULTIPLE PRE...
- Publication number 20240332016
- Publication date Oct 3, 2024
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTAINER FOR VOLATILE RAW MATERIALS, AND SOLID GASIFICATION AND SU...
- Publication number 20240318310
- Publication date Sep 26, 2024
- KOJUNDO CHEMICAL LABORATORY CO., LTD.
- Atsushi Itsuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240290609
- Publication date Aug 29, 2024
- Tokyo Electron Limited
- Tadahiro ISHIZAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR DEPOSITING NOBLE METAL-CONTAINING LAYER
- Publication number 20240279805
- Publication date Aug 22, 2024
- ASM IP HOLDING B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING STRUCTURES INCLUDING SILICON GERMANIUM AND SILIC...
- Publication number 20240274437
- Publication date Aug 15, 2024
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION OF METAL FILMS
- Publication number 20240271281
- Publication date Aug 15, 2024
- LAM RESEARCH CORPORATION
- Joshua COLLINS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DELIVERY FOR TUNGSTEN-CONTAINING LAYER
- Publication number 20240229230
- Publication date Jul 11, 2024
- Applied Materials, Inc.
- Zubin HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING APPARATUS, FILM-FORMING METHOD, GALLIUM OXIDE FILM AND...
- Publication number 20240229236
- Publication date Jul 11, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takahiro SAKATSUME
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240229229
- Publication date Jul 11, 2024
- Kokusai Electric Corporation
- Koei KURIBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND ASSEMBLIES FOR SELECTIVELY DEPOSITING MOLYBDENUM
- Publication number 20240218501
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20240213032
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Koki MUKAIYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE PRECURSOR DELIVERY SYSTEM
- Publication number 20240175137
- Publication date May 30, 2024
- ASM IP HOLDING B.V.
- Dieter Pierreux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR SELECTIVE DEPOSITION OF PRECURSOR MATERIALS AND RELATED...
- Publication number 20240170290
- Publication date May 23, 2024
- Entegris, Inc.
- Philip S. H. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND USE RELATED TO A FILM AND A FILM
- Publication number 20240158914
- Publication date May 16, 2024
- BENEQ OY
- Ville MALINEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE CO-FLOW EPITAXIAL DEPOSITION PROCESS
- Publication number 20240145240
- Publication date May 2, 2024
- Applied Materials, Inc.
- Chen-Ying WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE PRECURSOR DELIVERY SYSTEM
- Publication number 20240141485
- Publication date May 2, 2024
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED SUBSTRATE SUPPORT ASSEMBLY FOR SUBSTRATE PROCESSING IN PROCE...
- Publication number 20240141488
- Publication date May 2, 2024
- Applied Materials, Inc.
- David JORGENSEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240133026
- Publication date Apr 25, 2024
- Koei KURIBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM-FORMING APPARATUS, FILM-FORMING METHOD, GALLIUM OXIDE FILM AND...
- Publication number 20240133029
- Publication date Apr 25, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takahiro SAKATSUME
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

from metal halides

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Film forming method and tungsten film

Methods and apparatus for stabilizing vanadium compounds

Methods for depositing a molybdenum nitride film on a surface of a...

Deposition of transition metal—comprising material

Methods and systems for filling a gap

Vapor deposition processes

Vapor deposition processes

Rapid flush purging during atomic layer deposition

Methods for silicon germanium uniformity control using multiple pre...

Method of manufacturing semiconductor device

Method for selectively depositing a metallic film on a substrate

Methods for selective deposition using self-assembled monolayers

Tungsten gapfill using molybdenum co-flow

Methods of forming structures including silicon germanium and silic...

Chromium-enriched diffused aluminide coating

Atomic layer deposition of metal films

Cyclic deposition methods for forming metal-containing material and...

Gas delivery for tungsten-containing layer

Film forming method and film forming apparatus

Methods for forming a polycrystalline molybdenum film over a surfac...

Creating and protecting magnetic nanomaterials

Methods for depositing a molybdenum nitride film on a surface of a...

Atomic layer deposition of rhenium containing thin films

Substrate processing system, substrate processing method, and contr...

Cyclic deposition methods for forming metal-containing material and...

Stabilized metal monolayer structure

Water droplet erosion resistant coatings for turbine blades and oth...

Tungsten defluorination by high pressure treatment

Methods of forming nucleation layers with halogenated silanes

Process for the generation of metal-containing films

Patents Applicationslast 30 patents

METHODS AND APPARATUS FOR STABILIZING VANADIUM COMPOUNDS

GROWTH INHIBITOR FOR FORMING THIN FILM, METHOD FOR FORMING THIN FIL...

VAPOR DEPOSITION PROCESSES

HAFNIUM PRECURSORS AND RELATED METHODS

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE

Vapor Deposition Processes

SOLID SOURCE CHEMICAL VAPORIZER

HALIDE AND ORGANIC PRECURSORS FOR METAL DEPOSITION

METHODS AND SYSTEMS FOR FILLING A GAP

METHODS FOR SELECTIVE DEPOSITION USING SELF-ASSEMBLED MONOLAYERS

COATING COMPONENTS FOR SEMICONDUCTOR PROCESSING WITH FLUORINE-CONTA...

METHODS FOR SILICON GERMANIUM UNIFORMITY CONTROL USING MULTIPLE PRE...

CONTAINER FOR VOLATILE RAW MATERIALS, AND SOLID GASIFICATION AND SU...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

METHOD AND SYSTEM FOR DEPOSITING NOBLE METAL-CONTAINING LAYER

METHODS OF FORMING STRUCTURES INCLUDING SILICON GERMANIUM AND SILIC...

DEPOSITION OF METAL FILMS

GAS DELIVERY FOR TUNGSTEN-CONTAINING LAYER

FILM-FORMING APPARATUS, FILM-FORMING METHOD, GALLIUM OXIDE FILM AND...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

METHODS AND ASSEMBLIES FOR SELECTIVELY DEPOSITING MOLYBDENUM

ETCHING METHOD AND PLASMA PROCESSING APPARATUS

VAPOR PHASE PRECURSOR DELIVERY SYSTEM

METHODS FOR SELECTIVE DEPOSITION OF PRECURSOR MATERIALS AND RELATED...

METHOD AND USE RELATED TO A FILM AND A FILM

LOW TEMPERATURE CO-FLOW EPITAXIAL DEPOSITION PROCESS

VAPOR PHASE PRECURSOR DELIVERY SYSTEM

COATED SUBSTRATE SUPPORT ASSEMBLY FOR SUBSTRATE PROCESSING IN PROCE...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

FILM-FORMING APPARATUS, FILM-FORMING METHOD, GALLIUM OXIDE FILM AND...