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CPC
G03F1/06
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Parent Industries
G
PHYSICS
G03
Photography
G03F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
G03F1/00
Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles Mask blanks or pellicles therefor Containers specially adapted therefor Preparation thereof
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G03F1/06
from printing surfaces
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Patent Grant
Technique for defining active regions of semiconductor devices with...
Patent number
10,199,259
Issue date
Feb 5, 2019
GLOBALFOUNDRIES Inc.
Elliot John Smith
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY