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H01J37/32
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ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/32
Gas-filled discharge tubes
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Patents Grants
last 30 patents
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Patent Grant
System dedicated for parts cleaning
Patent number
11,986,868
Issue date
May 21, 2024
ASM IP Holding B.V.
Yukihiro Mori
B08 - CLEANING
Information
Patent Grant
Filter circuit
Patent number
11,990,318
Issue date
May 21, 2024
Tokyo Electron Limited
Yohei Yamazawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for processing a substrate
Patent number
11,990,319
Issue date
May 21, 2024
Applied Materials, Inc.
Yida Lin
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus for preventing contamination of self-plasma chamber
Patent number
11,990,320
Issue date
May 21, 2024
NANOTECH INC.
Dong Ho Cha
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Manufacturing method and inspection method of interior member of pl...
Patent number
11,987,880
Issue date
May 21, 2024
HITACHI HIGH-TECH CORPORATION
Kazuhiro Ueda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Variable capacitor bank
Patent number
11,990,884
Issue date
May 21, 2024
AES Global Holdings, PTE. LTD
Courtney L. Crandell
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Composite sintered body, electrostatic chuck member, electrostatic...
Patent number
11,990,362
Issue date
May 21, 2024
Sumitomo Osaka Cement Co., Ltd.
Nobuhiro Hidaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High-frequency power supply system
Patent number
11,990,317
Issue date
May 21, 2024
Daihen Corporation
Yuichi Hasegawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fast response pedestal assembly for selective preclean
Patent number
11,990,321
Issue date
May 21, 2024
Applied Materials, Inc.
Lara Hawrylchak
B08 - CLEANING
Information
Patent Grant
Ceramic susceptor
Patent number
11,990,322
Issue date
May 21, 2024
MiCo Ceramics Ltd.
Haneum Bae
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Electrostatic chuck (ESC) pedestal voltage isolation
Patent number
11,990,360
Issue date
May 21, 2024
Lam Research Corporation
Miguel Benjamin Vasquez
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sample preparation system and method for electron microscope observ...
Patent number
11,990,314
Issue date
May 21, 2024
SANYU ELECTRON CO., LTD.
Shinsuke Shibata
G01 - MEASURING TESTING
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
11,990,316
Issue date
May 21, 2024
Tokyo Electron Limited
Masaki Hirayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Focus ring replacement method and plasma processing system
Patent number
11,990,323
Issue date
May 21, 2024
Tokyo Electron Limited
Shigeru Ishizawa
B08 - CLEANING
Information
Patent Grant
Adaptive predictive control system
Patent number
11,990,324
Issue date
May 21, 2024
Advanced Energy Industries, Inc.
Chad S. Samuels
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer processing apparatus and wafer processing method using the same
Patent number
11,990,348
Issue date
May 21, 2024
Samsung Electronics Co., Ltd.
Chanyeong Jeong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,986,867
Issue date
May 21, 2024
SCREEN Holdings Co., Ltd.
Akira Horikoshi
B08 - CLEANING
Information
Patent Grant
Deposition device apparatus
Patent number
11,984,299
Issue date
May 14, 2024
Samsung Display Co., Ltd.
Youngsik Cha
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetic-material shield around plasma chambers near pedestal
Patent number
11,984,302
Issue date
May 14, 2024
Applied Materials, Inc.
Job George Konnoth Joseph
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate pedestal for improved substrate processing
Patent number
11,984,305
Issue date
May 14, 2024
Applied Materials, Inc.
Viren Kalsekar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Edge ring, substrate support, substrate processing apparatus and me...
Patent number
11,984,301
Issue date
May 14, 2024
Tokyo Electron Limited
Takashi Taira
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma chamber and chamber component cleaning methods
Patent number
11,984,306
Issue date
May 14, 2024
Applied Materials, Inc.
Rajinder Dhindsa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automated temperature controlled substrate support
Patent number
11,981,989
Issue date
May 14, 2024
Applied Materials, Inc.
Robert Hartwig
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
Forming method of component and substrate processing system
Patent number
11,981,993
Issue date
May 14, 2024
Tokyo Electron Limited
Michishige Saito
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Systems and methods for substrate support temperature control
Patent number
11,981,998
Issue date
May 14, 2024
Applied Materials, Inc.
Zubin Huang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma control device and plasma processing system
Patent number
11,984,297
Issue date
May 14, 2024
Samsung Electronics Co., Ltd.
Sejin Oh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,984,300
Issue date
May 14, 2024
Tokyo Electron Limited
Takehiro Tanikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate support with improved process uniformity
Patent number
11,984,296
Issue date
May 14, 2024
Lam Research Corporation
Fangli Hao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Impedance transformation in radio-frequency-assisted plasma generation
Patent number
11,984,298
Issue date
May 14, 2024
Lam Research Corporation
Eller Y. Juco
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Holding method of edge ring, plasma processing apparatus, and subst...
Patent number
11,984,303
Issue date
May 14, 2024
Tokyo Electron Limited
Gen Tamamushi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
FLUIDIC BAFFLE FOR HIGH PRESSURE FLUID DISTRIBUTION AND SUBSTRATE P...
Publication number
20240167156
Publication date
May 23, 2024
SEMES CO., LTD.
Hyungseok KANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VOLTAGE WAVEFORM CONTROLLING METHOD, SUBSTRATE PROCESSING METHOD, A...
Publication number
20240170255
Publication date
May 23, 2024
ASMSUNG ELECTRONICS CO., LTD.
Hyong seo YOON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING METHOD
Publication number
20240170260
Publication date
May 23, 2024
TOKYO ELECTRON LIMITED
Taro IKEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPOSITE STRUCTURE AND SEMICONDUCTOR MANUFACTURING DEVICE PROVIDED...
Publication number
20240170264
Publication date
May 23, 2024
TOTO LTD.
Hiroaki ASHIZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPONENT FOR SEMICONDUCTOR DEVICE FABRICATION APPARATUS, SEMICONDU...
Publication number
20240170266
Publication date
May 23, 2024
SK enpulse Co., Ltd.
Hyun Soo LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
Publication number
20240170253
Publication date
May 23, 2024
Kokusai Electric Corporation
Teruo YOSHINO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING SYSTEM AND PLASMA PROCESSING METHOD
Publication number
20240170258
Publication date
May 23, 2024
TOKYO ELECTRON LIMITED
Gen TAMAMUSHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20240170259
Publication date
May 23, 2024
TOKYO ELECTRON LIMITED
Hiroshi KONDO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA GENERATOR FOR EDGE UNIFORMITY
Publication number
20240170261
Publication date
May 23, 2024
Applied Materials, Inc.
Vladimir NAGORNY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING WITH INDEPENDENT TEMPERATURE CONTROL
Publication number
20240170263
Publication date
May 23, 2024
Applied Materials, Inc.
Wei LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20240170257
Publication date
May 23, 2024
TOKYO ELECTRON LIMITED
Chishio Koshimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20240170267
Publication date
May 23, 2024
Tokyo Electron Limited
Yoshiki NAKANO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEM AND METHODS FOR DEPOSITING MATERIAL ON A SUBSTRATE
Publication number
20240170269
Publication date
May 23, 2024
Applied Materials, Inc.
Harish PENMETHSA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR STRUCTURE BONDING METHOD, BONDING EQUIPMENT, MEMORY,...
Publication number
20240170295
Publication date
May 23, 2024
Yangtze Memory Technologies Co., Ltd.
Guoliang Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYMMETRIC SEMICONDUCTOR PROCESSING CHAMBER
Publication number
20240170262
Publication date
May 23, 2024
Applied Materials, Inc.
Yogananda SARODE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20240170265
Publication date
May 23, 2024
TOKYO ELECTRON LIMITED
Hiroyuki Matsuura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BATCH PROCESSING CHAMBERS FOR PLASMA-ENHANCED DEPOSITION
Publication number
20240170254
Publication date
May 23, 2024
Applied Materials, Inc.
Jianming Fu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VHF Broadband Coaxial Adapter
Publication number
20240170256
Publication date
May 23, 2024
TOKYO ELECTRON LIMITED
John Carroll
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS CHAMBER WITH IMPROVED PROCESS FEEDBACK
Publication number
20240170268
Publication date
May 23, 2024
Applied Materials, Inc.
Tobin KAUFMAN-OSBORN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITION METHOD AND DEPOSITION APPARATUS
Publication number
20240170281
Publication date
May 23, 2024
TOKYO ELECTRON LIMITED
Yuya TAKAMURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FABRICATING A CAPACITOR
Publication number
20240162279
Publication date
May 16, 2024
STMicroelectronics International N.V.
Vincent CARO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INDUCTIVE COIL STRUCTURE AND INDUCTIVELY COUPLED PLASMA GENERATION...
Publication number
20240162004
Publication date
May 16, 2024
EN2CORE technology, Inc
Sae Hoon Uhm
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION DEVICE
Publication number
20240158910
Publication date
May 16, 2024
Wuhan Youmeike Automation Co., Ltd
Zhiwen KANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
Publication number
20240162008
Publication date
May 16, 2024
Applied Materials, Inc.
Yue GUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS INCLUDING COATING FILM AND INSPECTIO...
Publication number
20240162012
Publication date
May 16, 2024
SEMES CO., LTD.
Ki Ryong LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS CHAMBER, SUBSTRATE TREATING APPARATUS INCLUDING THE SAME, A...
Publication number
20240162014
Publication date
May 16, 2024
Samsung Electronics Co., Ltd.
Heewon Min
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FOCUS RING INSPECTION DEVICE AND FOCUS RING INSPECTION METHOD
Publication number
20240159590
Publication date
May 16, 2024
SEMES CO., LTD.
Jin Il SUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PERFORMING RADIO FREQUENCY MATCHING CONTROL USING A MODEL-BASED DIG...
Publication number
20240162009
Publication date
May 16, 2024
Applied Materials, Inc.
Tao Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER PLACEMENT TABLE
Publication number
20240162016
Publication date
May 16, 2024
NGK Insulators, Ltd.
Ryuji TAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20240162045
Publication date
May 16, 2024
TOKYO ELECTRON LIMITED
Fumiya TAKATA
H01 - BASIC ELECTRIC ELEMENTS