Gas flow

Industry

CPC
G03F9/7057

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F9/00Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces

Current Industry

G03F9/7057Gas flow

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method of determining a height profile, a measurement system and a...
- Patent number 11,137,695
- Issue date Oct 5, 2021
- ASML Netherlands B.V.
- Arend Johannes Donkerbroek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for performing lithography process in semiconduct...
- Patent number 10,976,672
- Issue date Apr 13, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jui-Ching Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Proximity sensor, lithographic apparatus and device manufacturing m...
- Patent number 10,551,182
- Issue date Feb 4, 2020
- ASML Netherlands B.V.
- Tiannan Guan
- G01 - MEASURING TESTING
Information Patent Grant
Lens contamination prevention device and method
- Patent number 10,539,887
- Issue date Jan 21, 2020
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Baotong Hao
- G02 - OPTICS
Information Patent Grant
Methods for controlling lithographic apparatus, lithographic appara...
- Patent number 10,503,087
- Issue date Dec 10, 2019
- ASML Netherlands B.V.
- Rene Marinus Gerardus Johan Queens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus including a gas gauge and method of operating the same
- Patent number 10,429,748
- Issue date Oct 1, 2019
- ASML Holding N.V.
- Joseph Harry Lyons
- G01 - MEASURING TESTING
Information Patent Grant
Environmental control of systems for photolithography process
- Patent number 10,036,966
- Issue date Jul 31, 2018
- Applied Materials, Inc.
- Benjamin M. Johnston
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus with detection apparatus for detection of upper...
- Patent number 9,523,927
- Issue date Dec 20, 2016
- Canon Kabushiki Kaisha
- Hironori Maeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Low and high pressure proximity sensors
- Patent number 9,358,696
- Issue date Jun 7, 2016
- ASML Holding N.V.
- Joseph H. Lyons
- B26 - HAND CUTTING TOOLS CUTTING SEVERING
Information Patent Grant
Fluid gauge with multiple reference gaps
- Patent number 8,717,542
- Issue date May 6, 2014
- Nikon Corporation
- Michael R. Sogard
- G01 - MEASURING TESTING
Information Patent Grant
Gas gauge, lithographic apparatus and device manufacturing method
- Patent number 8,220,315
- Issue date Jul 17, 2012
- ASML Netherlands B.V.
- Dzmitry Labetski
- G01 - MEASURING TESTING
Information Patent Grant
Reverse flow gas gauge proximity sensor
- Patent number 8,144,306
- Issue date Mar 27, 2012
- ASML Holding N.V.
- Joseph H. Lyons
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for operating an air gauge at programmable or con...
- Patent number 7,797,985
- Issue date Sep 21, 2010
- ASML Holding N.V.
- Daniel N. Galburt
- G01 - MEASURING TESTING
Information Patent Grant
Measuring distance using gas gauge proximity sensor
- Patent number 7,500,380
- Issue date Mar 10, 2009
- ASML Holding N.V.
- Frederick Michael Carter
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for operating an air gauge at programmable or con...
- Patent number 7,437,911
- Issue date Oct 21, 2008
- ASML Holding N.V.
- Daniel N. Galburt
- G01 - MEASURING TESTING
Information Patent Grant
High resolution gas gauge proximity sensor
- Patent number 7,021,120
- Issue date Apr 4, 2006
- ASML Holding N.V.
- Frederick Michael Carter
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for transfer of a reticle pattern onto a subst...
- Patent number 5,835,195
- Issue date Nov 10, 1998
- Megalpanel Corporation
- John A. Gibson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment and exposure apparatus and method for manufacture of inte...
- Patent number 5,365,342
- Issue date Nov 15, 1994
- Canon Kabushiki Kaisha
- Naoki Ayata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for transfer of a reticle pattern onto a subst...
- Patent number 5,298,939
- Issue date Mar 29, 1994
- Paul A. Swanson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
On-axis air gage focus system
- Patent number 5,087,927
- Issue date Feb 11, 1992
- Ateo Corporation
- Tim Thomas
- G02 - OPTICS
Information Patent Grant
Alignment and exposure apparatus and method for manufacture of inte...
- Patent number 5,050,111
- Issue date Sep 17, 1991
- Canon Kabushiki Kaisha
- Naoki Ayata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment and exposure apparatus and method for manufacture of inte...
- Patent number 4,937,618
- Issue date Jun 26, 1990
- Canon Kabushiki Kaisha
- Naoki Ayata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light exposure apparatus
- Patent number 4,716,441
- Issue date Dec 29, 1987
- Matsushita Electric Industrial Co., Ltd.
- Kazufumi Ogawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for automatic focusing
- Patent number 4,714,331
- Issue date Dec 22, 1987
- Canon Kabushiki Kaisha
- Kazuyuki Oda
- G02 - OPTICS
Information Patent Grant
Optical exposure apparatus
- Patent number 4,615,614
- Issue date Oct 7, 1986
- Hitachi, Ltd.
- Shuji Sugiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment apparatus
- Patent number 4,600,282
- Issue date Jul 15, 1986
- Canon Kabushiki Kaisha
- Mitsugu Yamamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 4,561,773
- Issue date Dec 31, 1985
- Canon Kabushiki Kaisha
- Hiroshi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Single lens repeater
- Patent number 4,521,114
- Issue date Jun 4, 1985
- TRE Semiconductor Equipment Corporation
- Christian K. Van Peski
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Automatic focusing apparatus
- Patent number 4,477,183
- Issue date Oct 16, 1984
- Hitachi, Ltd.
- Yoshio Kawamura
- G02 - OPTICS
Information Patent Grant
Mask alignment for semiconductor processing
- Patent number 4,315,692
- Issue date Feb 16, 1982
- International Standard Electric Corporation
- Rudolf A. H. Heinecke
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
METHOD, APPARATUS AND COMPUTER PROGRAM FOR PROCESSING A SURFACE OF...
- Publication number 20240118632
- Publication date Apr 11, 2024
- Carl Zeiss SMT GMBH
- Stefan Friedrich Rohrlack
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROXIMITY SENSOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING M...
- Publication number 20190086202
- Publication date Mar 21, 2019
- ASML NETHERLANDS B.V.
- Tiannan GUAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTION APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURIN...
- Publication number 20130230798
- Publication date Sep 5, 2013
- Canon Kabushiki Kaisha
- Hironori Maeda
- G01 - MEASURING TESTING
Information Patent Application
LOW AND HIGH PRESSURE PROXIMITY SENSORS
- Publication number 20120120380
- Publication date May 17, 2012
- ASML Holding N.V.
- Joseph H. Lyons
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
FLUID GAUGE WITH MULTIPLE REFERENCE GAPS
- Publication number 20110157576
- Publication date Jun 30, 2011
- Michael R. Sogard
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM FOR COLLISION DETECTION BETWEEN OBJECTS
- Publication number 20110015861
- Publication date Jan 20, 2011
- Vitaly Burkatovsky
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
Gas Gauge, Lithographic Apparatus and Device Manufacturing Method
- Publication number 20100116029
- Publication date May 13, 2010
- ASML NETHERLANDS B.V.
- Dzmitry Labetski
- G01 - MEASURING TESTING
Information Patent Application
Reverse Flow Gas Gauge Proximity Sensor
- Publication number 20100110399
- Publication date May 6, 2010
- ASML Holding N.V.
- Joseph H. LYONS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Fluid Assisted Gas Gauge Proximity Sensor
- Publication number 20100103399
- Publication date Apr 29, 2010
- ASML Holding N.V.
- Joseph H. LYONS
- G01 - MEASURING TESTING
Information Patent Application
Method and System for Operating an Air Gauge at Programmable or Con...
- Publication number 20090000354
- Publication date Jan 1, 2009
- ASML Holding N.V.
- Daniel N. GALBURT
- G01 - MEASURING TESTING
Information Patent Application
High resolution gas gauge proximity sensor
- Publication number 20060272394
- Publication date Dec 7, 2006
- ASML Holding N.V.
- Frederick Michael Carter
- G01 - MEASURING TESTING
Information Patent Application
Method and system for operating an air gauge at programmable or con...
- Publication number 20060123888
- Publication date Jun 15, 2006
- ASML Holding N.V.
- Daniel N. Galburt
- G01 - MEASURING TESTING
Information Patent Application
High resolution gas gauge proximity sensor
- Publication number 20050241371
- Publication date Nov 3, 2005
- ASML Holding N.V.
- Frederick Michael Carter
- G01 - MEASURING TESTING

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of determining a height profile, a measurement system and a...

System and method for performing lithography process in semiconduct...

Proximity sensor, lithographic apparatus and device manufacturing m...

Lens contamination prevention device and method

Methods for controlling lithographic apparatus, lithographic appara...

Apparatus including a gas gauge and method of operating the same

Environmental control of systems for photolithography process

Exposure apparatus with detection apparatus for detection of upper...

Low and high pressure proximity sensors

Fluid gauge with multiple reference gaps

Gas gauge, lithographic apparatus and device manufacturing method

Reverse flow gas gauge proximity sensor

Method and system for operating an air gauge at programmable or con...

Measuring distance using gas gauge proximity sensor

Method and system for operating an air gauge at programmable or con...

High resolution gas gauge proximity sensor

Method and apparatus for transfer of a reticle pattern onto a subst...

Alignment and exposure apparatus and method for manufacture of inte...

Method and apparatus for transfer of a reticle pattern onto a subst...

On-axis air gage focus system

Alignment and exposure apparatus and method for manufacture of inte...

Alignment and exposure apparatus and method for manufacture of inte...

Light exposure apparatus

Method and apparatus for automatic focusing

Optical exposure apparatus

Alignment apparatus

Projection exposure apparatus

Single lens repeater

Automatic focusing apparatus

Mask alignment for semiconductor processing

Patents Applicationslast 30 patents

METHOD, APPARATUS AND COMPUTER PROGRAM FOR PROCESSING A SURFACE OF...

PROXIMITY SENSOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING M...

DETECTION APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURIN...

LOW AND HIGH PRESSURE PROXIMITY SENSORS

FLUID GAUGE WITH MULTIPLE REFERENCE GAPS

SYSTEM FOR COLLISION DETECTION BETWEEN OBJECTS

Gas Gauge, Lithographic Apparatus and Device Manufacturing Method

Reverse Flow Gas Gauge Proximity Sensor

Fluid Assisted Gas Gauge Proximity Sensor

Method and System for Operating an Air Gauge at Programmable or Con...

High resolution gas gauge proximity sensor

Method and system for operating an air gauge at programmable or con...

High resolution gas gauge proximity sensor