Geometrical arrangement of electrodes for beam-forming

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H01J37/063

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HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/063Geometrical arrangement of electrodes for beam-forming

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Patents Grantslast 30 patents

Information Patent Grant
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Schottky thermal field emitter with integrated beam splitter
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Multibeam inspection apparatus
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Multiple electron beams irradiation apparatus
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- Issue date Aug 31, 2021
- ASML Netherlands B.V.
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Charged particle source
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Ion beam processing apparatus, electrode assembly, and method of cl...
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Beam position monitors for medical radiation machines
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Charged-particle source and method for cleaning a charged-particle...
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Charged particle beam inspection method
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- Issue date Jul 28, 2020
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Information Patent Grant
Simplified particle emitter and method of operating thereof
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Electron-beam spot optimization
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High performance inspection scanning electron microscope device and...
- Patent number 10,504,684
- Issue date Dec 10, 2019
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Patents Applicationslast 30 patents

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EBEAM INSPECTION
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- Sumitomo Heavy Industries Ion Technology Co., Ltd.
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Cold-Field-Emitter Electron Gun with Self-Cleaning Extractor Using...
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- Sumitomo Heavy Industries Ion Technology Co., Ltd.
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APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
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SCHOTTKY THERMAL FIELD EMITTER WITH INTEGRATED BEAM SPLITTER
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ELECTRON BEAM GENERATOR, PLASMA PROCESSING APPARATUS HAVING THE SAM...
- Publication number 20210110997
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- Samsung Electronics Co., Ltd.
- Dongkyu SHIN
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ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...
- Publication number 20210104377
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ION GENERATOR AND ION IMPLANTER
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MULTIPLE ELECTRON BEAMS IRRADIATION APPARATUS
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- NuFlare Technology, Inc.
- Kazuhiko INOUE
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CHARGED PARTICLE MULTI-BEAM DEVICE
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ELECTRON GUN AND ELECTRON BEAM APPLICATION DEVICE
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- Hitachi High-Technologies Corporation
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Information Patent Application
ION SOURCE DEVICE
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- Publication date Jul 9, 2020
- Sumitomo Heavy Industries, Ltd.
- Toshikazu Hiasa
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Information Patent Application
CHARGED PARTICLE SOURCE
- Publication number 20200126753
- Publication date Apr 23, 2020
- ASML NETHERLANDS B.V.
- Shuai LI
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CHARGED PARTICLE BEAM INSPECTION METHOD
- Publication number 20190259572
- Publication date Aug 22, 2019
- NuFlare Technology, Inc.
- Chosaku NODA
- H01 - BASIC ELECTRIC ELEMENTS

Geometrical arrangement of electrodes for beam-forming

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Ion beam processing apparatus, electrode assembly, and method of cl...

Multiple electron-beam image acquisition apparatus and multiple ele...

Electron source, method for manufacturing same, emitter, and device...

Ion generator and ion implanter

Cold-field-emitter electron gun with self-cleaning extractor using...

Charged-particle source

Emitter, electron gun using same, and electronic device

Schottky thermal field emitter with integrated beam splitter

Enhanced electron beam generation

Apparatus for generating electron radiation and 3D printing apparatus

Ion generator and ion implanter

Ion source device

Ion beam processing apparatus, electrode assembly, and method of cl...

Electron beam system for inspection and review of 3D devices

Charged particle multi-beam device

Electron gun and electron beam device

Electron gun and electron beam application device

Electron beam generator, plasma processing apparatus having the sam...

Multibeam inspection apparatus

Multiple electron beams irradiation apparatus

Apparatus of plural charged-particle beams

Charged particle source

Charged-particle beam apparatus, charged-particle beam writing appa...

Ion beam processing apparatus, electrode assembly, and method of cl...

Beam position monitors for medical radiation machines

Charged-particle source and method for cleaning a charged-particle...

Charged particle beam inspection method

Simplified particle emitter and method of operating thereof

Electron-beam spot optimization

High performance inspection scanning electron microscope device and...

Patents Applicationslast 30 patents

ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...

PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION REACTORS AND ASSOCIATED M...

Structure for Particle Acceleration And Charged Particle Beam Appar...

WIRE OR ROD SHAPED EXTRACTION ELECTRODE OPTICS

EBEAM INSPECTION

ION GENERATOR AND ION IMPLANTER

ELECTRON SOURCE, METHOD FOR MANUFACTURING SAME, EMITTER, AND DEVICE...

Electron Gun, Electron Beam Applicator, and Method for Controlling...

FLOOD COLUMN, CHARGED PARTICLE TOOL AND METHOD FOR CHARGED PARTICLE...

Cold-Field-Emitter Electron Gun with Self-Cleaning Extractor Using...

ION GENERATOR AND ION IMPLANTER

ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

SCHOTTKY THERMAL FIELD EMITTER WITH INTEGRATED BEAM SPLITTER

Emitter, Electron Gun Using Same, and Electronic Device

ELECTRON SOURCE WITH MAGNETIC SUPPRESSOR ELECTRODE

CHARGED PARTICLE SOURCE

ELECTRON BEAM SYSTEM FOR INSPECTION AND REVIEW OF 3D DEVICES

ELECTRON BEAM GENERATOR, PLASMA PROCESSING APPARATUS HAVING THE SAM...

ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...

MULTIPLE ELECTRON-BEAM IMAGE ACQUISITION APPARATUS AND MULTIPLE ELE...

MULTIBEAM INSPECTION APPARATUS

METHOD AND APPARATUS FOR ANGLED ETCHING

ION GENERATOR AND ION IMPLANTER

MULTIPLE ELECTRON BEAMS IRRADIATION APPARATUS

CHARGED PARTICLE MULTI-BEAM DEVICE

ELECTRON GUN AND ELECTRON BEAM APPLICATION DEVICE

ION SOURCE DEVICE

CHARGED PARTICLE SOURCE

CHARGED PARTICLE BEAM INSPECTION METHOD