Grating as beam-splitter

Industry

CPC
G01B2290/30

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Parent Industries

GPHYSICS G01Measuring instruments G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS G01B2290/00Aspects of interferometers not specifically covered by any group under G01B9/02

Current Industry

G01B2290/30Grating as beam-splitter

Industries

Patents Grantslast 30 patents

Information Patent Grant
Spatially filtered talbot interferometer for wafer distortion measu...
- Patent number 12,104,891
- Issue date Oct 1, 2024
- Daniel Gene Smith
- G01 - MEASURING TESTING
Information Patent Grant
Interferometric measurement method and interferometric measurement...
- Patent number 11,879,721
- Issue date Jan 23, 2024
- Carl Zeiss SMT GmbH
- Alexander Wolf
- G01 - MEASURING TESTING
Information Patent Grant
System for precision displacement measurement based on self-traceab...
- Patent number 11,802,758
- Issue date Oct 31, 2023
- Tongji University
- Xiao Deng
- G01 - MEASURING TESTING
Information Patent Grant
System and method for defect detection using multi-spot scanning
- Patent number 11,385,188
- Issue date Jul 12, 2022
- APPLIED MATERIAL ISRAEL, LTD.
- Amir Shoham
- G01 - MEASURING TESTING
Information Patent Grant
Detection of fields
- Patent number 11,353,523
- Issue date Jun 7, 2022
- SINTEF TTO AS
- Sverre Knudsen
- G02 - OPTICS
Information Patent Grant
Compensation optical system for an interferometric measuring system
- Patent number 11,199,396
- Issue date Dec 14, 2021
- Carl Zeiss SMT GmbH
- Jochen Hetzler
- G01 - MEASURING TESTING
Information Patent Grant
Separated beams displacement measurement with a grating
- Patent number 11,156,449
- Issue date Oct 26, 2021
- Keysight Technologies, Inc.
- Greg C. Felix
- G01 - MEASURING TESTING
Information Patent Grant
Retro-reflective interferometer
- Patent number 11,092,478
- Issue date Aug 17, 2021
- X-BEAMER TECHNOLOGIES LTD.
- Igal Zlochin
- G01 - MEASURING TESTING
Information Patent Grant
Photo-detection apparatus including light-shielding film, optically...
- Patent number 10,605,586
- Issue date Mar 31, 2020
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Seiji Nishiwaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lateral shearing interferometer for auto alignment beam sensing
- Patent number 10,571,261
- Issue date Feb 25, 2020
- Raytheon Company
- Kyle Heideman
- G02 - OPTICS
Information Patent Grant
Grating measurement apparatus
- Patent number 10,571,245
- Issue date Feb 25, 2020
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Ping Wu
- G01 - MEASURING TESTING
Information Patent Grant
Phase shift interferometer
- Patent number 10,444,004
- Issue date Oct 15, 2019
- Mitutoyo Corporation
- Kazuhiko Kawasaki
- G01 - MEASURING TESTING
Information Patent Grant
System and method for defect detection using multi-spot scanning
- Patent number 10,386,311
- Issue date Aug 20, 2019
- Applied Materials Israel, Ltd.
- Amir Shoham
- G01 - MEASURING TESTING
Information Patent Grant
Interferometric measuring arrangement
- Patent number 10,337,850
- Issue date Jul 2, 2019
- Carl Zeiss SMT GmbH
- Jochen Hetzler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical position-measuring device having grating fields with differ...
- Patent number 10,119,802
- Issue date Nov 6, 2018
- Dr. Johannes Heidenhain GmbH
- Peter Speckbacher
- G01 - MEASURING TESTING
Information Patent Grant
Light detection device including light detector, light coupling lay...
- Patent number 10,088,293
- Issue date Oct 2, 2018
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Seiji Nishiwaki
- G01 - MEASURING TESTING
Information Patent Grant
Displacement detection apparatus
- Patent number 10,066,924
- Issue date Sep 4, 2018
- DMG MORI CO., LTD.
- Kenji Matsushita
- G01 - MEASURING TESTING
Information Patent Grant
Optical telemetry device
- Patent number 10,012,495
- Issue date Jul 3, 2018
- Centre National de la Recherche Scientifique CNRS
- Pierre Bon
- G02 - OPTICS
Information Patent Grant
Common-path optical fiber-based handheld parallel optical coherence...
- Patent number 10,001,363
- Issue date Jun 19, 2018
- Korea Basic Science Institute
- Kye Sung Lee
- G01 - MEASURING TESTING
Information Patent Grant
Polarization-based coherent gradient sensing systems and methods
- Patent number 9,784,570
- Issue date Oct 10, 2017
- Ultratech, Inc.
- David G. Stites
- G01 - MEASURING TESTING
Information Patent Grant
Device for interferential distance measurement
- Patent number 9,739,598
- Issue date Aug 22, 2017
- Dr. Johannes Heidenhain GmbH
- Ralph Joerger
- G01 - MEASURING TESTING
Information Patent Grant
Interferometer and phase shift amount measuring apparatus with diff...
- Patent number 9,719,859
- Issue date Aug 1, 2017
- LASERTEC CORPORATION
- Haruhiko Kusunose
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Grazing-incidence interferometer with dual-side measurement capabil...
- Patent number 9,651,358
- Issue date May 16, 2017
- Corning Incorporated
- Joshua Monroe Cobb
- G01 - MEASURING TESTING
Information Patent Grant
Device for distance measurement
- Patent number 9,400,168
- Issue date Jul 26, 2016
- Dr. Johannes Heidenhain GmbH
- Walter Huber
- G01 - MEASURING TESTING
Information Patent Grant
Grazing and normal incidence interferometer having common reference...
- Patent number 9,273,952
- Issue date Mar 1, 2016
- KLA-Tencor Corporation
- Dieter Mueller
- G01 - MEASURING TESTING
Information Patent Grant
Force sensor and industrial robot including the same
- Patent number 8,965,577
- Issue date Feb 24, 2015
- Canon Kabushiki Kaisha
- Yasumichi Arimitsu
- G01 - MEASURING TESTING
Information Patent Grant
Polarizing different phases of interfered light used in a method an...
- Patent number 8,860,946
- Issue date Oct 14, 2014
- Hitachi, Ltd.
- Toshihiko Nakata
- G01 - MEASURING TESTING
Information Patent Grant
Fizeau reference arm using a chirped fiber bragg grating
- Patent number 8,817,269
- Issue date Aug 26, 2014
- Carl Zeiss Meditec, Inc.
- Alexandre R. Tumlinson
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Interferometric distance measurement device using a scanning plate...
- Patent number 8,797,546
- Issue date Aug 5, 2014
- Dr. Johannes Heidenhain GmbH
- Walter Huber
- G01 - MEASURING TESTING
Information Patent Grant
Grazing and normal incidence interferometer having common reference...
- Patent number 8,786,842
- Issue date Jul 22, 2014
- KLA-Tencor Corporation
- Dieter Muller
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM FOR PRECISION DISPLACEMENT MEASUREMENT BASED ON SELF-TRACEAB...
- Publication number 20230042098
- Publication date Feb 9, 2023
- Tongji University
- Xiao DENG
- G01 - MEASURING TESTING
Information Patent Application
MEASURING APPARATUS FOR INTERFEROMETRIC SHAPE MEASUREMENT
- Publication number 20220349700
- Publication date Nov 3, 2022
- Carl Zeiss SMT GMBH
- Jochen HETZLER
- G01 - MEASURING TESTING
Information Patent Application
COMPENSATION OPTICAL SYSTEM FOR AN INTERFEROMETRIC MEASURING SYSTEM
- Publication number 20200225028
- Publication date Jul 16, 2020
- Carl Zeiss SMT GMBH
- Jochen HETZLER
- G01 - MEASURING TESTING
Information Patent Application
LATERAL SHEARING INTERFEROMETER FOR AUTO ALIGNMENT BEAM SENSING
- Publication number 20200049493
- Publication date Feb 13, 2020
- Raytheon Company
- Kyle Heideman
- G02 - OPTICS
Information Patent Application
GRATING MEASUREMENT APPARATUS
- Publication number 20190310072
- Publication date Oct 10, 2019
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Ping WU
- G01 - MEASURING TESTING
Information Patent Application
COMMON-PATH OPTICAL FIBER-BASED HANDHELD PARALLEL OPTICAL COHERENCE...
- Publication number 20180128594
- Publication date May 10, 2018
- KOREA BASIC SCIENCE INSTITUTE
- Kye Sung LEE
- G01 - MEASURING TESTING
Information Patent Application
PHASE SHIFT INTERFEROMETER
- Publication number 20180128593
- Publication date May 10, 2018
- MITUTOYO CORPORATION
- Kazuhiko Kawasaki
- G01 - MEASURING TESTING
Information Patent Application
Sagnac Fourier Spectrometer (SAFOS)
- Publication number 20180120086
- Publication date May 3, 2018
- Matthias Lenzner
- G01 - MEASURING TESTING
Information Patent Application
AN APPARATUS FOR MULTI-MODE IMAGING OF EYE
- Publication number 20180028059
- Publication date Feb 1, 2018
- FORUS HEALTH PRIVATE LIMITED
- SANTOSH KUMAR COTHURU
- G01 - MEASURING TESTING
Information Patent Application
DISPLACEMENT DETECTION APPARATUS
- Publication number 20170350689
- Publication date Dec 7, 2017
- DMG MORI CO., LTD.
- Kenji MATSUSHITA
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL TELEMETRY DEVICE
- Publication number 20170299375
- Publication date Oct 19, 2017
- Centre National De La Recherche Scientifique-cnrs
- Pierre Bon
- G02 - OPTICS
Information Patent Application
LIGHT DETECTION DEVICE INCLUDING LIGHT DETECTOR, LIGHT COUPLING LAY...
- Publication number 20170284789
- Publication date Oct 5, 2017
- Panasonic Intellectual Property Management Co., Ltd.
- SEIJI NISHIWAKI
- G01 - MEASURING TESTING
Information Patent Application
SEPARATED BEAMS DISPLACEMENT MEASUREMENT WITH A GRATING
- Publication number 20170219334
- Publication date Aug 3, 2017
- Keysight Technologies, Inc.
- Greg C. Felix
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL POSITION-MEASURING DEVICE
- Publication number 20170211923
- Publication date Jul 27, 2017
- Dr. Johannes Heidenhain Gmbh
- Peter Speckbacher
- G01 - MEASURING TESTING
Information Patent Application
Grazing and Normal Incidence Interferometer Having Common Reference...
- Publication number 20140333937
- Publication date Nov 13, 2014
- Dieter Mueller
- G01 - MEASURING TESTING
Information Patent Application
DEVICE FOR DISTANCE MEASUREMENT
- Publication number 20130335746
- Publication date Dec 19, 2013
- Walter Huber
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE FOR MEASURING MOTION ERROR OF LINEAR STAGE
- Publication number 20120314220
- Publication date Dec 13, 2012
- Gwangju Institute of Science and Technology
- Sun-Kyu LEE
- G01 - MEASURING TESTING
Information Patent Application
FIZEAU REFERENCE ARM USING A CHIRPED FIBER BRAGG GRATING
- Publication number 20120274943
- Publication date Nov 1, 2012
- Carl Zeiss Meditec, Inc.
- Alexandre R. Tumlinson
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
INTERFEROMETRIC DISTANCE MEASUREMENT DEVICE
- Publication number 20120242994
- Publication date Sep 27, 2012
- Johannes Heidenhain GmbH
- Walter Huber
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR MEASURING DISPLACEMENT OF A SAMPLE TO BE I...
- Publication number 20120062903
- Publication date Mar 15, 2012
- Toshihiko Nakata
- G01 - MEASURING TESTING
Information Patent Application
Optical Distance-Measuring Device
- Publication number 20120002188
- Publication date Jan 5, 2012
- Wolfgang Holzapfel
- G01 - MEASURING TESTING
Information Patent Application
HETERODYNE INTERFEROMETRY DISPLACEMENT MEASUREMENT APPARATUS
- Publication number 20110249270
- Publication date Oct 13, 2011
- Canon Kabushiki Kaisha
- Ko Ishizuka
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR INTERFEROMETRY
- Publication number 20110235045
- Publication date Sep 29, 2011
- UNIVERSITAET STUTTGART
- Klaus Koerner
- G02 - OPTICS
Information Patent Application
MEASURING APPARATUS
- Publication number 20110102805
- Publication date May 5, 2011
- Canon Kabushiki Kaisha
- Yoshiyuki Kuramoto
- G01 - MEASURING TESTING
Information Patent Application
FORCE SENSOR AND INDUSTRIAL ROBOT INCLUDING THE SAME
- Publication number 20100312394
- Publication date Dec 9, 2010
- Canon Kabushiki Kaisha
- Yasumichi Arimitsu
- G01 - MEASURING TESTING
Information Patent Application
TALBOT INTERFEROMETER, ITS ADJUSTMENT METHOD, AND MEASUREMENT METHOD
- Publication number 20100271636
- Publication date Oct 28, 2010
- Canon Kabushiki Kaisha
- Toshiyuki Naoi
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR INTERFEROMETRIC ANALYSIS OF SURFACES AND RE...
- Publication number 20100060898
- Publication date Mar 11, 2010
- PETER J. DE GROOT
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR MEASURING DISPLACEMENT OF A SAMPLE
- Publication number 20100039652
- Publication date Feb 18, 2010
- Toshihiko Nakata
- G01 - MEASURING TESTING
Information Patent Application
Interferometer using vertical-cavity surface-emitting lasers
- Publication number 20090201509
- Publication date Aug 13, 2009
- Kyungpook National University Industry-Academic Cooperation Foundation
- Young-Gu Ju
- G01 - MEASURING TESTING
Information Patent Application
INTERFEROMETER DEVICE AND METHOD
- Publication number 20090128830
- Publication date May 21, 2009
- Christian KOTTLER
- G01 - MEASURING TESTING

Grating as beam-splitter

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Spatially filtered talbot interferometer for wafer distortion measu...

Interferometric measurement method and interferometric measurement...

System for precision displacement measurement based on self-traceab...

System and method for defect detection using multi-spot scanning

Detection of fields

Compensation optical system for an interferometric measuring system

Separated beams displacement measurement with a grating

Retro-reflective interferometer

Photo-detection apparatus including light-shielding film, optically...

Lateral shearing interferometer for auto alignment beam sensing

Grating measurement apparatus

Phase shift interferometer

System and method for defect detection using multi-spot scanning

Interferometric measuring arrangement

Optical position-measuring device having grating fields with differ...

Light detection device including light detector, light coupling lay...

Displacement detection apparatus

Optical telemetry device

Common-path optical fiber-based handheld parallel optical coherence...

Polarization-based coherent gradient sensing systems and methods

Device for interferential distance measurement

Interferometer and phase shift amount measuring apparatus with diff...

Grazing-incidence interferometer with dual-side measurement capabil...

Device for distance measurement

Grazing and normal incidence interferometer having common reference...

Force sensor and industrial robot including the same

Polarizing different phases of interfered light used in a method an...

Fizeau reference arm using a chirped fiber bragg grating

Interferometric distance measurement device using a scanning plate...

Grazing and normal incidence interferometer having common reference...

Patents Applicationslast 30 patents

SYSTEM FOR PRECISION DISPLACEMENT MEASUREMENT BASED ON SELF-TRACEAB...

MEASURING APPARATUS FOR INTERFEROMETRIC SHAPE MEASUREMENT

COMPENSATION OPTICAL SYSTEM FOR AN INTERFEROMETRIC MEASURING SYSTEM

LATERAL SHEARING INTERFEROMETER FOR AUTO ALIGNMENT BEAM SENSING

GRATING MEASUREMENT APPARATUS

COMMON-PATH OPTICAL FIBER-BASED HANDHELD PARALLEL OPTICAL COHERENCE...

PHASE SHIFT INTERFEROMETER

Sagnac Fourier Spectrometer (SAFOS)

AN APPARATUS FOR MULTI-MODE IMAGING OF EYE

DISPLACEMENT DETECTION APPARATUS

OPTICAL TELEMETRY DEVICE

LIGHT DETECTION DEVICE INCLUDING LIGHT DETECTOR, LIGHT COUPLING LAY...

SEPARATED BEAMS DISPLACEMENT MEASUREMENT WITH A GRATING

OPTICAL POSITION-MEASURING DEVICE

Grazing and Normal Incidence Interferometer Having Common Reference...

DEVICE FOR DISTANCE MEASUREMENT

METHOD AND DEVICE FOR MEASURING MOTION ERROR OF LINEAR STAGE

FIZEAU REFERENCE ARM USING A CHIRPED FIBER BRAGG GRATING

INTERFEROMETRIC DISTANCE MEASUREMENT DEVICE

METHOD AND APPARATUS FOR MEASURING DISPLACEMENT OF A SAMPLE TO BE I...

Optical Distance-Measuring Device

HETERODYNE INTERFEROMETRY DISPLACEMENT MEASUREMENT APPARATUS

METHOD AND APPARATUS FOR INTERFEROMETRY

MEASURING APPARATUS

FORCE SENSOR AND INDUSTRIAL ROBOT INCLUDING THE SAME

TALBOT INTERFEROMETER, ITS ADJUSTMENT METHOD, AND MEASUREMENT METHOD

METHODS AND SYSTEMS FOR INTERFEROMETRIC ANALYSIS OF SURFACES AND RE...

METHOD AND APPARATUS FOR MEASURING DISPLACEMENT OF A SAMPLE

Interferometer using vertical-cavity surface-emitting lasers

INTERFEROMETER DEVICE AND METHOD