Hall-effect ion sources with closed electron drift

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H01J27/143

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HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J27/00Ion beam tubes

Current Industry

H01J27/143Hall-effect ion sources with closed electron drift

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Patents Grantslast 30 patents

Information Patent Grant
Ion throughput pump and method
- Patent number 10,455,683
- Issue date Oct 22, 2019
- Agilent Technologies, Inc.
- Mark Denning
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hall current plasma source having a center-mounted cathode or a sur...
- Patent number 10,269,526
- Issue date Apr 23, 2019
- Colorado State University Research Foundation
- Rafael A. Martinez
- F03 - MACHINES OR ENGINES FOR LIQUIDS WIND, SPRING WEIGHT AND MISCELLANEOUS M...
Information Patent Grant
External discharge hall thruster
- Patent number 9,897,079
- Issue date Feb 20, 2018
- Burak Karadag
- B64 - AIRCRAFT AVIATION COSMONAUTICS
Information Patent Grant
Closed drift magnetic field ion source apparatus containing self-cl...
- Patent number 9,136,086
- Issue date Sep 15, 2015
- General Plasma, Inc.
- John E. Madocks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hall effect plasma thruster with insulated layered ring assembly
- Patent number 9,127,654
- Issue date Sep 8, 2015
- SNECMA
- Serge Barral
- F03 - MACHINES OR ENGINES FOR LIQUIDS WIND, SPRING WEIGHT AND MISCELLANEOUS M...
Information Patent Grant
Ion source apparatus and methods of using the same
- Patent number 8,575,565
- Issue date Nov 5, 2013
- Guardian Industries Corp.
- Maximo Frati
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Closed drift ion source
- Patent number 8,304,744
- Issue date Nov 6, 2012
- General Plasma, Inc.
- John Eric Madocks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source with recess in electrode
- Patent number 7,872,422
- Issue date Jan 18, 2011
- Guardian Industries Corp.
- Nestor P. Murphy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focused anode layer ion source with converging and charge compensat...
- Patent number 7,622,721
- Issue date Nov 24, 2009
- Michael Gutkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma accelerating apparatus and plasma processing system having t...
- Patent number 7,609,002
- Issue date Oct 27, 2009
- Samsung Electronics Co., Ltd.
- Won-tae Lee
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Ion source and metals used in making components thereof and method...
- Patent number 7,598,500
- Issue date Oct 6, 2009
- Guardian Industries Corp.
- Nestor P. Murphy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source including magnet and magnet yoke assembly
- Patent number 7,488,951
- Issue date Feb 10, 2009
- Guardian Industries Corp.
- Nestor P. Murphy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular ion source
- Patent number 7,425,709
- Issue date Sep 16, 2008
- Veeco Instruments, Inc.
- Daniel E. Siegfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Anode layer particle beam device
- Patent number 7,425,710
- Issue date Sep 16, 2008
- Industrial Technology Research Institute
- Ping-Chun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Combined radio frequency and hall effect ion source and plasma acce...
- Patent number 7,420,182
- Issue date Sep 2, 2008
- Busek Company
- Vladimir Hruby
- F03 - MACHINES OR ENGINES FOR LIQUIDS WIND, SPRING WEIGHT AND MISCELLANEOUS M...
Information Patent Grant
Ion source with multi-piece outer cathode
- Patent number 7,405,411
- Issue date Jul 29, 2008
- Guardian Industries Corp.
- Hugh A. Walton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Closed drift ion source
- Patent number 7,259,378
- Issue date Aug 21, 2007
- Applied Process Technologies, Inc.
- John Madocks
- F03 - MACHINES OR ENGINES FOR LIQUIDS WIND, SPRING WEIGHT AND MISCELLANEOUS M...
Information Patent Grant
Method and apparatus for neutralization of ion beam using AC ion so...
- Patent number 7,241,360
- Issue date Jul 10, 2007
- Advanced Energy Industries, Inc.
- Andrew Shabalin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion source with substantially planar design
- Patent number 7,183,559
- Issue date Feb 27, 2007
- Guardian Industries Corp.
- Henry A. Luten
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-efficient ion source with improved magnetic field
- Patent number 7,116,054
- Issue date Oct 3, 2006
- Viacheslav V. Zhurin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source with electrode kept at potential(s) other than ground by...
- Patent number 7,030,390
- Issue date Apr 18, 2006
- Guardian Industries Corp.
- Vijayen S. Veerasamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam source with gas introduced directly into deposition/vacuum...
- Patent number 6,988,463
- Issue date Jan 24, 2006
- Guardian Industries Corp.
- Vijayen S. Veerasamy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Floating mode ion source
- Patent number 6,987,364
- Issue date Jan 17, 2006
- Guardian Industries Corp.
- Rudolph Hugo Petrmichl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Longitudinal cathode expansion in an ion source
- Patent number 6,984,942
- Issue date Jan 10, 2006
- Veeco Instruments, Inc.
- Daniel E. Siegfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular uniform gas distribution system in an ion source
- Patent number 6,919,690
- Issue date Jul 19, 2005
- Veeco Instruments, Inc.
- Daniel E. Siegfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Closed drift ion source
- Patent number 6,919,672
- Issue date Jul 19, 2005
- Applied Process Technologies, Inc.
- John Madocks
- F03 - MACHINES OR ENGINES FOR LIQUIDS WIND, SPRING WEIGHT AND MISCELLANEOUS M...
Information Patent Grant
Closed-drift hall effect plasma vacuum pump for process reactors
- Patent number 6,899,527
- Issue date May 31, 2005
- Tokyo Electron Limited
- Bill H Quon
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Ion sources
- Patent number 6,864,486
- Issue date Mar 8, 2005
- Veeco Instruments, Inc.
- Valery V. Alekseev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cleaning ion source, and corresponding apparatus/system
- Patent number 6,812,648
- Issue date Nov 2, 2004
- Guardian Industries Corp.
- Henry A. Luten
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic field for small closed-drift ion source
- Patent number 6,456,011
- Issue date Sep 24, 2002
- Front Range Fakel, Inc.
- Antonina Ivanovna Bugrova
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION SOURCE APPARATUS AND METHODS OF USING THE SAME
- Publication number 20130088150
- Publication date Apr 11, 2013
- Guardian Industries Corp.
- Maximo FRATI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLOSED DRIFT ION SOURCE WITH SYMMETRIC MAGNETIC FIELD
- Publication number 20120187843
- Publication date Jul 26, 2012
- John E. Madocks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HALL EFFECT PLASMA THRUSTER
- Publication number 20120117938
- Publication date May 17, 2012
- Serge Barral
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
CLOSED DRIFT MAGNETIC FIELD ION SOURCE APPARATUS CONTAINING SELF-CL...
- Publication number 20110226611
- Publication date Sep 22, 2011
- John E. Madocks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLOSED DRIFT ION SOURCE
- Publication number 20100207529
- Publication date Aug 19, 2010
- General Plasma, Inc.
- John Eric Madocks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Focused anode layer ion source with converging and charge compensat...
- Publication number 20080191629
- Publication date Aug 14, 2008
- Michael Gutkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and apparatuses for directing an ion beam source
- Publication number 20080073557
- Publication date Mar 27, 2008
- John German
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ion source and metals used in making components thereof and method...
- Publication number 20080067400
- Publication date Mar 20, 2008
- Nestor P. Murphy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion source including magnet and magnet yoke assembly
- Publication number 20080048127
- Publication date Feb 28, 2008
- Guardian Industries Corp.,
- Nestor P. Murphy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion source with recess in electrode
- Publication number 20080017112
- Publication date Jan 24, 2008
- Guardian Industries Corp.
- Nestor P. Murphy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma accelerating apparatus and plasma processing system having t...
- Publication number 20070024201
- Publication date Feb 1, 2007
- SAMSUNG ELECTRONICS CO., LTD.
- Won-tae Lee
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Combined radio frequency and hall effect ion source and plasma acce...
- Publication number 20060284562
- Publication date Dec 21, 2006
- Vladimir Hruby
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Ion source with multi-piece outer cathode
- Publication number 20060249376
- Publication date Nov 9, 2006
- Guardian Industries Corp.
- Hugh A. Walton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Anode layer particle beam device
- Publication number 20060138342
- Publication date Jun 29, 2006
- INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Ping-Chun Liu
- G02 - OPTICS
Information Patent Application
Ion source with substantially planar design
- Publication number 20060103319
- Publication date May 18, 2006
- Guardian Industries Corp.
- Henry A. Luten
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Closed drift ion source
- Publication number 20050247885
- Publication date Nov 10, 2005
- John Madocks
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
High-efficient ion source with improved magnetic field
- Publication number 20050237000
- Publication date Oct 27, 2005
- Viacheslav V. Zhurin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion source with electrode kept at potential(s) other than ground by...
- Publication number 20050104007
- Publication date May 19, 2005
- Vijayen S. Veerasamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Floating mode ion source
- Publication number 20050082493
- Publication date Apr 21, 2005
- Guardian Industries Corp.
- Rudolph Hugo Petrmichl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Modular ion source
- Publication number 20050057167
- Publication date Mar 17, 2005
- Daniel E. Siegfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Longitudinal cathode expansion in an ion source
- Publication number 20050057166
- Publication date Mar 17, 2005
- Daniel E. Siegfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Modular uniform gas distribution system in an ion source
- Publication number 20050045035
- Publication date Mar 3, 2005
- Daniel E. Siegfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion sorces
- Publication number 20040195521
- Publication date Oct 7, 2004
- Valery V. Alekseev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Closed-drift hall effect plasma vacuum pump for process reactors
- Publication number 20040151595
- Publication date Aug 5, 2004
- TOKYO ELECTRON LIMITED
- Bill H. Quon
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Ion beam source with gas introduced directly into deposition/vacuum...
- Publication number 20040074444
- Publication date Apr 22, 2004
- Viyayen S. Veerasamy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of cleaning ion source, and corresponding apparatus/system
- Publication number 20040075060
- Publication date Apr 22, 2004
- Henry A. Luten
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Closed drift ion source
- Publication number 20030230961
- Publication date Dec 18, 2003
- John Madocks
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and apparatus for neutralization of ion beam using AC ion so...
- Publication number 20030196602
- Publication date Oct 23, 2003
- Andrew Shabalin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETIC FIELD FOR SMALL CLOSED-DRIFT ION SOURCE
- Publication number 20020145389
- Publication date Oct 10, 2002
- Front Range Fakel, Inc.
- Antonina Ivanovna Bugrova
- H01 - BASIC ELECTRIC ELEMENTS

Hall-effect ion sources with closed electron drift

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Ion throughput pump and method

Hall current plasma source having a center-mounted cathode or a sur...

External discharge hall thruster

Closed drift magnetic field ion source apparatus containing self-cl...

Hall effect plasma thruster with insulated layered ring assembly

Ion source apparatus and methods of using the same

Closed drift ion source

Ion source with recess in electrode

Focused anode layer ion source with converging and charge compensat...

Plasma accelerating apparatus and plasma processing system having t...

Ion source and metals used in making components thereof and method...

Ion source including magnet and magnet yoke assembly

Modular ion source

Anode layer particle beam device

Combined radio frequency and hall effect ion source and plasma acce...

Ion source with multi-piece outer cathode

Closed drift ion source

Method and apparatus for neutralization of ion beam using AC ion so...

Ion source with substantially planar design

High-efficient ion source with improved magnetic field

Ion source with electrode kept at potential(s) other than ground by...

Ion beam source with gas introduced directly into deposition/vacuum...

Floating mode ion source

Longitudinal cathode expansion in an ion source

Modular uniform gas distribution system in an ion source

Closed drift ion source

Closed-drift hall effect plasma vacuum pump for process reactors

Ion sources

Method of cleaning ion source, and corresponding apparatus/system

Magnetic field for small closed-drift ion source

Patents Applicationslast 30 patents

ION SOURCE APPARATUS AND METHODS OF USING THE SAME

CLOSED DRIFT ION SOURCE WITH SYMMETRIC MAGNETIC FIELD

HALL EFFECT PLASMA THRUSTER

CLOSED DRIFT MAGNETIC FIELD ION SOURCE APPARATUS CONTAINING SELF-CL...

CLOSED DRIFT ION SOURCE

Focused anode layer ion source with converging and charge compensat...

Methods and apparatuses for directing an ion beam source

Ion source and metals used in making components thereof and method...

Ion source including magnet and magnet yoke assembly

Ion source with recess in electrode

Plasma accelerating apparatus and plasma processing system having t...

Combined radio frequency and hall effect ion source and plasma acce...

Ion source with multi-piece outer cathode

Anode layer particle beam device

Ion source with substantially planar design

Closed drift ion source

High-efficient ion source with improved magnetic field

Ion source with electrode kept at potential(s) other than ground by...

Floating mode ion source

Modular ion source

Longitudinal cathode expansion in an ion source

Modular uniform gas distribution system in an ion source

Ion sorces

Closed-drift hall effect plasma vacuum pump for process reactors

Ion beam source with gas introduced directly into deposition/vacuum...

Method of cleaning ion source, and corresponding apparatus/system

Closed drift ion source

Method and apparatus for neutralization of ion beam using AC ion so...

MAGNETIC FIELD FOR SMALL CLOSED-DRIFT ION SOURCE