having arrangements for gas injection at different locations of the reactor for each ALD half-reaction

Industry

CPC
C23C16/45548

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45548having arrangements for gas injection at different locations of the reactor for each ALD half-reaction

Industries

Patents Grantslast 30 patents

Information Patent Grant
Showerhead for providing multiple materials to a process chamber
- Patent number 11,970,775
- Issue date Apr 30, 2024
- Applied Materials, Inc.
- Prashanth Kothnur
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method of operating a deposition or cleaning apparatus
- Patent number 11,970,774
- Issue date Apr 30, 2024
- Picosun Oy
- Timo Malinen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition method
- Patent number 11,961,716
- Issue date Apr 16, 2024
- Industrial Technology Research Institute
- Hsuan-Fu Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for processing a substrate by oscillating a boundary layer o...
- Patent number 11,761,080
- Issue date Sep 19, 2023
- Applied Materials, Inc.
- Tsung-Han Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition of thick inorganic coating on a polarizer
- Patent number 11,746,418
- Issue date Sep 5, 2023
- Moxtek, Inc.
- Matthew R. Linford
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for supplying improved gas flow to a processin...
- Patent number 11,732,355
- Issue date Aug 22, 2023
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition or cleaning apparatus with movable structure
- Patent number 11,725,279
- Issue date Aug 15, 2023
- Picosun Oy
- Timo Malinen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for supplying improved gas flow to a processin...
- Patent number 11,697,875
- Issue date Jul 11, 2023
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Film-forming apparatus and film-forming method
- Patent number 11,578,407
- Issue date Feb 14, 2023
- Tokyo Electron Limited
- Jun Yamawaku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming a microelectronic device, and related systems an...
- Patent number 11,551,926
- Issue date Jan 10, 2023
- Micron Technology, Inc.
- Farrell M. Good
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method
- Patent number 11,549,179
- Issue date Jan 10, 2023
- Tokyo Electron Limited
- Satoshi Wakabayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deuterium-containing films
- Patent number 11,508,584
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Sean M. Seutter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 11,488,803
- Issue date Nov 1, 2022
- Jusung Engineering Co., Ltd.
- Ho Chul Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film-forming device
- Patent number 11,377,731
- Issue date Jul 5, 2022
- Murata Manufacturing Co., Ltd.
- Yasuhiro Chikaishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,367,611
- Issue date Jun 21, 2022
- Tokyo Electron Limited
- Yuji Nishino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition apparatus and method for processing substra...
- Patent number 11,339,474
- Issue date May 24, 2022
- ASM International N.V.
- Ernst Hendrik August Granneman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film deposition apparatus
- Patent number 11,274,372
- Issue date Mar 15, 2022
- Tokyo Electron Limited
- Shigehiro Miura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 11,222,772
- Issue date Jan 11, 2022
- ASM IP Holding B.V.
- Young Hoon Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming apparatus
- Patent number 11,155,918
- Issue date Oct 26, 2021
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition method and computer program storage medium
- Patent number 11,118,265
- Issue date Sep 14, 2021
- Tokyo Electron Limited
- Shigenori Ozaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device to increase deposition uniformity in spatial ALD processing...
- Patent number 11,085,129
- Issue date Aug 10, 2021
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition apparatus
- Patent number 10,954,597
- Issue date Mar 23, 2021
- ASM IP Holding B.V.
- Chris G. M. de Ridder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition method
- Patent number 10,858,736
- Issue date Dec 8, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chia-Yi Chuang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformality modulation of metal oxide films using chemical inhibition
- Patent number 10,843,618
- Issue date Nov 24, 2020
- Lam Research Corporation
- David C. Smith
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Shower head of combinatorial spatial atomic layer deposition apparatus
- Patent number 10,815,569
- Issue date Oct 27, 2020
- Samsung Electronics Co., Ltd.
- Xianyu Wenxu
- C40 - COMBINATORIAL CHEMISTRY
Information Patent Grant
Gas injector for semiconductor processes and film deposition apparatus
- Patent number 10,801,110
- Issue date Oct 13, 2020
- Hermes-Epitek Corporation
- Shih-Yung Shieh
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Showerhead with air-gapped plenums and overhead isolation gas distr...
- Patent number 10,745,806
- Issue date Aug 18, 2020
- Lam Research Corporation
- Nagraj Shankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning method and film deposition apparatus executing the cleanin...
- Patent number 10,648,076
- Issue date May 12, 2020
- Tokyo Electron Limited
- Tatsuya Tamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition apparatus and method for processing substra...
- Patent number 10,648,078
- Issue date May 12, 2020
- ASM International N.V.
- Ernst Hendrik August Granneman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus
- Patent number 10,550,467
- Issue date Feb 4, 2020
- Tokyo Electron Limited
- Hiroaki Ikegawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR SUPPLYING IMPROVED GAS FLOW TO A PROCESSIN...
- Publication number 20230407471
- Publication date Dec 21, 2023
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
DEVICE INCLUDING TRANSPARENT POLYMER WITH HYDROPHILIC COATING, AND...
- Publication number 20230399744
- Publication date Dec 14, 2023
- Agilent Technologies, Inc.
- Elizabeth CARR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20230340667
- Publication date Oct 26, 2023
- KIOXIA Corporation
- Tomoki ISHIMARU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND SUBSTRATE TREATMENT METHO...
- Publication number 20230272532
- Publication date Aug 31, 2023
- Samsung Electronics Co., LTD
- Jae Hyun YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20230235457
- Publication date Jul 27, 2023
- Jusung Engineering Co., Ltd.
- Cheong SON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OR CLEANING APPARATUS WITH MOVABLE STRUCTURE AND METHOD...
- Publication number 20230193461
- Publication date Jun 22, 2023
- Picosun Oy
- Timo MALINEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS AND DEPOSITION METHOD
- Publication number 20230187177
- Publication date Jun 15, 2023
- Industrial Technology Research Institute
- Hsuan-Fu Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING S...
- Publication number 20230178393
- Publication date Jun 8, 2023
- KIOXIA Corporation
- Junya FUJITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CANISTER OF SEMICONDUCTOR PRODUCT DEVICE
- Publication number 20230128048
- Publication date Apr 27, 2023
- DUKSAN TECHOPIA CO., LTD.
- Sangwoong Yoon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20230060617
- Publication date Mar 2, 2023
- Creative Coatings Co., Ltd.
- Eiji SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20230049118
- Publication date Feb 16, 2023
- Jusung Engineering Co., Ltd.
- InSeo YOO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEUTERIUM-CONTAINING FILMS
- Publication number 20230037450
- Publication date Feb 9, 2023
- Applied Materials, Inc.
- Sean M. Seutter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor Device, Method, and Tool of Manufacture
- Publication number 20220364236
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yung-Chang Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20220243329
- Publication date Aug 4, 2022
- TOKYO ELECTRON LIMITED
- Reita IGARASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF FORMING A MICROELECTRONIC DEVICE, AND RELATED SYSTEMS AN...
- Publication number 20220238324
- Publication date Jul 28, 2022
- Micron Technology, Inc.
- Farrell M. Good
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OSCILLATING FLOW BOUNDARY LAYERS IN APPARATUS, METHODS, AND SYSTEMS...
- Publication number 20220213595
- Publication date Jul 7, 2022
- Applied Materials, Inc.
- Tsung-Han YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING DEVICE
- Publication number 20220186373
- Publication date Jun 16, 2022
- Jusung Engineering Co., Ltd.
- JongSik KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTILAYER ENCAPSULATION THIN-FILM
- Publication number 20220018022
- Publication date Jan 20, 2022
- Research & Business Foundation Sungkyunkwan University
- Choelmin JANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20210363638
- Publication date Nov 25, 2021
- TOKYO ELECTRON LIMITED
- Satoshi WAKABAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING DEVICE AND FILM-FORMING METHOD
- Publication number 20210222296
- Publication date Jul 22, 2021
- TOKYO ELECTRON LIMITED
- Jun YAMAWAKU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NOZZLE HEAD
- Publication number 20210214847
- Publication date Jul 15, 2021
- BENEQ OY
- Pekka Soininen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UNIFORM DEPOSITION
- Publication number 20210087687
- Publication date Mar 25, 2021
- Picosun Oy
- Timo MALINEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210050182
- Publication date Feb 18, 2021
- JUSUNG ENGINEERING CO., LTD.
- Ho Chul KANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEUTERIUM-CONTAINING FILMS
- Publication number 20200395218
- Publication date Dec 17, 2020
- Applied Materials, Inc.
- Sean M. Seutter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION APPARATUS AND METHOD FOR PROCESSING SUBSTRA...
- Publication number 20200263300
- Publication date Aug 20, 2020
- ASM INTERNATIONAL N.V.
- Ernst Hendrik August Granneman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SUPPLYING IMPROVED GAS FLOW TO A PROCESSIN...
- Publication number 20200199748
- Publication date Jun 25, 2020
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Chemical Vapor Deposition of Thick Inorganic Coating on a Polarizer
- Publication number 20200173021
- Publication date Jun 4, 2020
- MOXTEK, INC.
- Matthew R. Linford
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods For Metal Oxide Post-Treatment
- Publication number 20200165725
- Publication date May 28, 2020
- Applied Materials, Inc.
- Tatsuya E. Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Device To Increase Deposition Uniformity In Spatial ALD Processing...
- Publication number 20200087816
- Publication date Mar 19, 2020
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD WITH AIR-GAPPED PLENUMS AND OVERHEAD ISOLATION GAS DISTR...
- Publication number 20200063261
- Publication date Feb 27, 2020
- LAM RESEARCH CORPORATION
- Nagraj Shankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

having arrangements for gas injection at different locations of the reactor for each ALD half-reaction

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Showerhead for providing multiple materials to a process chamber

Method of operating a deposition or cleaning apparatus

Atomic layer deposition method

Method for processing a substrate by oscillating a boundary layer o...

Chemical vapor deposition of thick inorganic coating on a polarizer

Method and apparatus for supplying improved gas flow to a processin...

Deposition or cleaning apparatus with movable structure

Method and apparatus for supplying improved gas flow to a processin...

Film-forming apparatus and film-forming method

Methods of forming a microelectronic device, and related systems an...

Film forming method

Deuterium-containing films

Substrate processing apparatus

Film-forming device

Film forming method and film forming apparatus

Atomic layer deposition apparatus and method for processing substra...

Film deposition apparatus

Substrate processing apparatus

Film forming apparatus

Film deposition method and computer program storage medium

Device to increase deposition uniformity in spatial ALD processing...

Atomic layer deposition apparatus

Atomic layer deposition method

Conformality modulation of metal oxide films using chemical inhibition

Shower head of combinatorial spatial atomic layer deposition apparatus

Gas injector for semiconductor processes and film deposition apparatus

Showerhead with air-gapped plenums and overhead isolation gas distr...

Cleaning method and film deposition apparatus executing the cleanin...

Atomic layer deposition apparatus and method for processing substra...

Film formation apparatus

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR SUPPLYING IMPROVED GAS FLOW TO A PROCESSIN...

DEVICE INCLUDING TRANSPARENT POLYMER WITH HYDROPHILIC COATING, AND...

FILM FORMING APPARATUS AND FILM FORMING METHOD

SEMICONDUCTOR MANUFACTURING APPARATUS AND SUBSTRATE TREATMENT METHO...

SUBSTRATE PROCESSING METHOD

DEPOSITION OR CLEANING APPARATUS WITH MOVABLE STRUCTURE AND METHOD...

DEPOSITION APPARATUS AND DEPOSITION METHOD

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING S...

CANISTER OF SEMICONDUCTOR PRODUCT DEVICE

FILM FORMING APPARATUS

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

DEUTERIUM-CONTAINING FILMS

Semiconductor Device, Method, and Tool of Manufacture

PROCESSING APPARATUS AND PROCESSING METHOD

METHODS OF FORMING A MICROELECTRONIC DEVICE, AND RELATED SYSTEMS AN...

OSCILLATING FLOW BOUNDARY LAYERS IN APPARATUS, METHODS, AND SYSTEMS...

SUBSTRATE PROCESSING DEVICE

MULTILAYER ENCAPSULATION THIN-FILM

FILM FORMING METHOD AND FILM FORMING APPARATUS

FILM-FORMING DEVICE AND FILM-FORMING METHOD

NOZZLE HEAD

UNIFORM DEPOSITION

SUBSTRATE PROCESSING APPARATUS

DEUTERIUM-CONTAINING FILMS

ATOMIC LAYER DEPOSITION APPARATUS AND METHOD FOR PROCESSING SUBSTRA...

METHOD AND APPARATUS FOR SUPPLYING IMPROVED GAS FLOW TO A PROCESSIN...

Chemical Vapor Deposition of Thick Inorganic Coating on a Polarizer

Methods For Metal Oxide Post-Treatment

Device To Increase Deposition Uniformity In Spatial ALD Processing...

SHOWERHEAD WITH AIR-GAPPED PLENUMS AND OVERHEAD ISOLATION GAS DISTR...