Heating of the reaction chamber

Industry

CPC
C30B31/12

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

CCHEMISTRY METALLURGY C30Crystal growth C30BSINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL REFINING BY ZONE-MELTING OF MATERIAL PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH D... C30B31/00Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure Apparatus therefor

Current Industry

C30B31/12Heating of the reaction chamber

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Methods of preparation of organometallic halide structures
- Patent number 11,001,939
- Issue date May 11, 2021
- King Abdullah University of Science and Technology
- Osman Bakr
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System based on low-pressure chemical vapor deposition for fabricat...
- Patent number 10,975,498
- Issue date Apr 13, 2021
- OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION
- Yabing Qi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of preparation of organometallic halide structures
- Patent number 10,557,214
- Issue date Feb 11, 2020
- King Abdullah University of Science and Technology
- Osman Bakr
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Single crystal production apparatus
- Patent number 9,938,636
- Issue date Apr 10, 2018
- Toyota Jidosha Kabushiki Kaisha
- Nobuhira Abe
- C30 - CRYSTAL GROWTH
Information Patent Grant
Pulsed processing semiconductor heating methods using combinations...
- Patent number 8,837,923
- Issue date Sep 16, 2014
- Mattson Technology, Inc.
- Paul J. Timans
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
System and process for heating semiconductor wafers by optimizing a...
- Patent number 8,669,496
- Issue date Mar 11, 2014
- Mattson Technology, Inc.
- Paul Janis Timans
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and process for heating semiconductor wafers by optimizing a...
- Patent number 8,222,570
- Issue date Jul 17, 2012
- Mattson Technology, Inc.
- Paul Janis Timans
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulsed processing semiconductor heating methods and associated syst...
- Patent number 8,000,587
- Issue date Aug 16, 2011
- Mattson Technology, Inc.
- Paul J. Timans
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Heating configuration for use in thermal processing chambers
- Patent number 7,949,237
- Issue date May 24, 2011
- Mattson Technology, Inc.
- Zion Koren
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and process for heating semiconductor wafers by optimizing a...
- Patent number 7,847,218
- Issue date Dec 7, 2010
- Mattson Technology, Inc.
- Paul Janis Timans
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and process for heating semiconductor wafers by optimizing a...
- Patent number 7,453,051
- Issue date Nov 18, 2008
- Mattson Technology, Inc.
- Paul Janis Timans
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treating apparatus and method
- Patent number 7,327,947
- Issue date Feb 5, 2008
- Dainippon Screen Mfg. Co., Ltd.
- Tatsufumi Kusuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pulsed processing semiconductor heating methods using combinations...
- Patent number 7,317,870
- Issue date Jan 8, 2008
- Mattson Technology, Inc.
- Paul J. Timans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for thermally treating substrates
- Patent number 7,316,969
- Issue date Jan 8, 2008
- Mattson Technology, Inc.
- Markus Hauf
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating configuration for use in thermal processing chambers
- Patent number 7,269,343
- Issue date Sep 11, 2007
- Mattson Technology, Inc.
- Zion Koren
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for thermal treatment of substrates
- Patent number 7,056,389
- Issue date Jun 6, 2006
- Mattson Thermal Products
- Markus Hauf
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal processing apparatus and thermal processing method
- Patent number 7,038,173
- Issue date May 2, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Mitsukazu Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and process for heating semiconductor wafers by optimizing a...
- Patent number 7,015,422
- Issue date Mar 21, 2006
- Mattson Technology, Inc.
- Paul Janis Timans
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating configuration for use in thermal processing chambers
- Patent number 6,970,644
- Issue date Nov 29, 2005
- Mattson Technology, Inc.
- Zion Koren
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat-treating methods and systems
- Patent number 6,963,692
- Issue date Nov 8, 2005
- Vortek Industries Ltd.
- David Malcolm Camm
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Forced convection assisted rapid thermal furnace
- Patent number 6,952,889
- Issue date Oct 11, 2005
- WaferMasters, Inc.
- Woo Sik Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pulsed processing semiconductor heating methods using combinations...
- Patent number 6,951,996
- Issue date Oct 4, 2005
- Mattson Technology, Inc.
- Paul J. Timans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat-treating methods and systems
- Patent number 6,941,063
- Issue date Sep 6, 2005
- Mattson Technology Canada, Inc.
- David Malcolm Camm
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Pulsed processing semiconductor heating methods using combinations...
- Patent number 6,849,831
- Issue date Feb 1, 2005
- Mattson Technology, Inc.
- Paul J. Timans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermally processing a substrate
- Patent number 6,803,546
- Issue date Oct 12, 2004
- Applied Materials, Inc.
- Ryan C Boas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RTA chamber with in situ reflective index monitor
- Patent number 6,740,196
- Issue date May 25, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd
- Fu-Su Lee
- G01 - MEASURING TESTING
Information Patent Grant
Method for processing wafers in a semiconductor fabrication system
- Patent number 6,592,661
- Issue date Jul 15, 2003
- Micron Technology, Inc.
- Randhir P. S. Thakur
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heat-treating methods and systems
- Patent number 6,594,446
- Issue date Jul 15, 2003
- Vortek Industries Ltd.
- David Malcolm Camm
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
System and method for lamp split zone control
- Patent number 6,570,137
- Issue date May 27, 2003
- Applied Materials, Inc.
- Dean Jennings
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of boron doping wafers using a vertical oven system
- Patent number 6,548,378
- Issue date Apr 15, 2003
- Vishay Semiconductor Itzehoe GmbH
- Henning Boness
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHODS OF PREPARATION OF ORGANOMETALLIC HALIDE STRUCTURES
- Publication number 20200102666
- Publication date Apr 2, 2020
- King Abdullah University of Science and Technology
- Osman BAKR
- C30 - CRYSTAL GROWTH
Information Patent Application
THERMAL PROCESSING TECHNIQUES FOR METALLIC MATERIALS
- Publication number 20200029396
- Publication date Jan 23, 2020
- Carnegie Mellon University
- Michael E. McHenry
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHODS OF PREPARATION OF ORGANOMETALLIC HALIDE STRUCTURES
- Publication number 20180066383
- Publication date Mar 8, 2018
- King Abdullah University of Science and Technology
- Osman BAKR
- C30 - CRYSTAL GROWTH
Information Patent Application
SYSTEM AND METHOD BASED ON LOW-PRESSURE CHEMICAL VAPOR DEPOSITION F...
- Publication number 20170268128
- Publication date Sep 21, 2017
- OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION
- Yabing QI
- C30 - CRYSTAL GROWTH
Information Patent Application
Heating Configuration for Use in Thermal Processing Chambers
- Publication number 20140246422
- Publication date Sep 4, 2014
- Mattson Technology, Inc.
- ZION KOREN
- C30 - CRYSTAL GROWTH
Information Patent Application
System and Process For Heating Semiconductor Wafers by Optimizing A...
- Publication number 20120252229
- Publication date Oct 4, 2012
- Mattson Technology, Inc.
- Paul Janis Timans
- C30 - CRYSTAL GROWTH
Information Patent Application
APPARATUS WITH MULTIPLE HEATING SYSTEMS FOR IN-LINE THERMAL TREATME...
- Publication number 20120085281
- Publication date Apr 12, 2012
- Sandvik Thermal Process, Inc.
- Aubrey L. HELMS, JR.
- C30 - CRYSTAL GROWTH
Information Patent Application
PULSED PROCESSING SEMICONDUCTOR HEATING METHODS USING COMBINATIONS...
- Publication number 20110236844
- Publication date Sep 29, 2011
- Paul J. Timans
- C30 - CRYSTAL GROWTH
Information Patent Application
Heating Configuration For Use in Thermal Processing Chambers
- Publication number 20110222840
- Publication date Sep 15, 2011
- Zion Koren
- C30 - CRYSTAL GROWTH
Information Patent Application
System and Process for Heating Semiconductor Wafers by Optimizing A...
- Publication number 20090098742
- Publication date Apr 16, 2009
- Mattson Technology, Inc.
- Paul Janis Timans
- C30 - CRYSTAL GROWTH
Information Patent Application
Pulsed Processing Semiconductor Heating Methods using Combinations...
- Publication number 20080069550
- Publication date Mar 20, 2008
- Paul J. Timans
- C30 - CRYSTAL GROWTH
Information Patent Application
System and Process for Heating Semiconductor Wafers by Optimizing A...
- Publication number 20080050688
- Publication date Feb 28, 2008
- Mattson Technology, Inc.
- Paul Janis Timans
- C30 - CRYSTAL GROWTH
Information Patent Application
System and process for heating semiconductor wafers by optimizing a...
- Publication number 20080008460
- Publication date Jan 10, 2008
- Paul Janis Timans
- C30 - CRYSTAL GROWTH
Information Patent Application
Heating Configuration for Use in Thermal Processing Chambers
- Publication number 20070297775
- Publication date Dec 27, 2007
- Zion Koren
- C30 - CRYSTAL GROWTH
Information Patent Application
HEAT TREATING APPARATUS AND METHOD
- Publication number 20070084848
- Publication date Apr 19, 2007
- Dainippon Screen Mfg. Co., Ltd.
- Tatsufumi Kusuda
- C30 - CRYSTAL GROWTH
Information Patent Application
Method and apparatus for thermally treating substrates
- Publication number 20060291834
- Publication date Dec 28, 2006
- Markus Hauf
- C30 - CRYSTAL GROWTH
Information Patent Application
WAFER HEATER AND WAFER CHUCK INCLUDING THE SAME
- Publication number 20060249079
- Publication date Nov 9, 2006
- Ping-Hua Yao
- C30 - CRYSTAL GROWTH
Information Patent Application
Device for producing electroconductive passages in a semiconductor...
- Publication number 20060243385
- Publication date Nov 2, 2006
- HTM REETZ GMBH
- Frank Kudella
- C30 - CRYSTAL GROWTH
Information Patent Application
Heat treating apparatus
- Publication number 20050274709
- Publication date Dec 15, 2005
- DAINPPON SCREEN MFG. CO., LTD
- Tatsufumi Kusuda
- C30 - CRYSTAL GROWTH
Information Patent Application
Pulsed processing semiconductor heating methods using combinations...
- Publication number 20050236395
- Publication date Oct 27, 2005
- Paul J. Timans
- C30 - CRYSTAL GROWTH
Information Patent Application
Heating configuration for use in thermal processing chambers
- Publication number 20050213949
- Publication date Sep 29, 2005
- Zion Koren
- C30 - CRYSTAL GROWTH
Information Patent Application
Heat-treating methods and systems
- Publication number 20050062388
- Publication date Mar 24, 2005
- David Malcolm Camm
- C30 - CRYSTAL GROWTH
Information Patent Application
Wafer heater with protected heater element
- Publication number 20040250774
- Publication date Dec 16, 2004
- Brent Elliot
- C30 - CRYSTAL GROWTH
Information Patent Application
Method and device for thermal treatment of substrates
- Publication number 20040185680
- Publication date Sep 23, 2004
- Markus Hauf
- C30 - CRYSTAL GROWTH
Information Patent Application
Pulsed processing semiconductor heating methods using combinations...
- Publication number 20040149715
- Publication date Aug 5, 2004
- Paul J. Timans
- C30 - CRYSTAL GROWTH
Information Patent Application
Forced convection assisted rapid thermal furnace
- Publication number 20040083621
- Publication date May 6, 2004
- Woo Sik Yoo
- C30 - CRYSTAL GROWTH
Information Patent Application
Heating configuration for use in thermal processing chambers
- Publication number 20040018008
- Publication date Jan 29, 2004
- Mattson Technology, Inc.
- Zion Koren
- C30 - CRYSTAL GROWTH
Information Patent Application
Heat-treating methods and systems
- Publication number 20030206732
- Publication date Nov 6, 2003
- David Malcolm Camm
- C30 - CRYSTAL GROWTH
Information Patent Application
Pulsed processing semiconductor heating methods using combinations...
- Publication number 20030183612
- Publication date Oct 2, 2003
- Paul J. Timans
- C30 - CRYSTAL GROWTH
Information Patent Application
RTA chamber with in situ reflective index monitor
- Publication number 20030155072
- Publication date Aug 21, 2003
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Fu-Su Lee
- C30 - CRYSTAL GROWTH

Heating of the reaction chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods of preparation of organometallic halide structures

System based on low-pressure chemical vapor deposition for fabricat...

Methods of preparation of organometallic halide structures

Single crystal production apparatus

Pulsed processing semiconductor heating methods using combinations...

System and process for heating semiconductor wafers by optimizing a...

System and process for heating semiconductor wafers by optimizing a...

Pulsed processing semiconductor heating methods and associated syst...

Heating configuration for use in thermal processing chambers

System and process for heating semiconductor wafers by optimizing a...

System and process for heating semiconductor wafers by optimizing a...

Heat treating apparatus and method

Pulsed processing semiconductor heating methods using combinations...

Method and apparatus for thermally treating substrates

Heating configuration for use in thermal processing chambers

Method and device for thermal treatment of substrates

Thermal processing apparatus and thermal processing method

System and process for heating semiconductor wafers by optimizing a...

Heating configuration for use in thermal processing chambers

Heat-treating methods and systems

Forced convection assisted rapid thermal furnace

Pulsed processing semiconductor heating methods using combinations...

Heat-treating methods and systems

Pulsed processing semiconductor heating methods using combinations...

Thermally processing a substrate

RTA chamber with in situ reflective index monitor

Method for processing wafers in a semiconductor fabrication system

Heat-treating methods and systems

System and method for lamp split zone control

Method of boron doping wafers using a vertical oven system

Patents Applicationslast 30 patents

METHODS OF PREPARATION OF ORGANOMETALLIC HALIDE STRUCTURES

THERMAL PROCESSING TECHNIQUES FOR METALLIC MATERIALS

METHODS OF PREPARATION OF ORGANOMETALLIC HALIDE STRUCTURES

SYSTEM AND METHOD BASED ON LOW-PRESSURE CHEMICAL VAPOR DEPOSITION F...

Heating Configuration for Use in Thermal Processing Chambers

System and Process For Heating Semiconductor Wafers by Optimizing A...

APPARATUS WITH MULTIPLE HEATING SYSTEMS FOR IN-LINE THERMAL TREATME...

PULSED PROCESSING SEMICONDUCTOR HEATING METHODS USING COMBINATIONS...

Heating Configuration For Use in Thermal Processing Chambers

System and Process for Heating Semiconductor Wafers by Optimizing A...

Pulsed Processing Semiconductor Heating Methods using Combinations...

System and Process for Heating Semiconductor Wafers by Optimizing A...

System and process for heating semiconductor wafers by optimizing a...

Heating Configuration for Use in Thermal Processing Chambers

HEAT TREATING APPARATUS AND METHOD

Method and apparatus for thermally treating substrates

WAFER HEATER AND WAFER CHUCK INCLUDING THE SAME

Device for producing electroconductive passages in a semiconductor...

Heat treating apparatus

Pulsed processing semiconductor heating methods using combinations...

Heating configuration for use in thermal processing chambers

Heat-treating methods and systems

Wafer heater with protected heater element

Method and device for thermal treatment of substrates

Pulsed processing semiconductor heating methods using combinations...

Forced convection assisted rapid thermal furnace

Heating configuration for use in thermal processing chambers

Heat-treating methods and systems

Pulsed processing semiconductor heating methods using combinations...

RTA chamber with in situ reflective index monitor