TREA

Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure Apparatus therefor

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Industry

  • CPC
  • C30B31/00
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Parent Industries

CCHEMISTRY METALLURGY C30Crystal growth C30BSINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL REFINING BY ZONE-MELTING OF MATERIAL PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH D...

Current Industry

C30B31/00Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure Apparatus therefor

Sub Industries

C30B31/02by contacting with diffusion material in the solid state C30B31/04by contacting with diffusion material in the liquid state C30B31/045by electrolysis C30B31/06by contacting with diffusion material in the gaseous state C30B31/08the diffusion material being a compound of the elements to be diffused C30B31/10Reaction chambers Selection of material therefor C30B31/103Mechanisms for moving either the charge or heater C30B31/106Continuous processes C30B31/12Heating of the reaction chamber C30B31/14Substrate holders or susceptors C30B31/16Feed and outlet means for the gases Modifying the flow of the gases C30B31/165Diffusion sources C30B31/18Controlling or regulating C30B31/185Pattern diffusion C30B31/20Doping by irradiation with electromagnetic waves or by particle radiation C30B31/22by ion-implantation
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