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Heating or cooling of the substrates
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CPC
C23C14/541
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Parent Industries
C
CHEMISTRY METALLURGY
C23
Surface treatment
C23C
COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C14/00
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
Current Industry
C23C14/541
Heating or cooling of the substrates
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Patents Grants
last 30 patents
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Patent Grant
Al-rich AlTin-based films
Patent number
11,965,234
Issue date
Apr 23, 2024
OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
Denis Kurapov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering reaction chamber and process assembly of sputtering reac...
Patent number
11,952,653
Issue date
Apr 9, 2024
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Liren Han
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wafer temperature measurement in an ion implantation system
Patent number
11,942,343
Issue date
Mar 26, 2024
Advanced Ion Beam Technology, Inc.
Chien-Li Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Material deposition apparatus having at least one heating assembly...
Patent number
11,905,589
Issue date
Feb 20, 2024
Applied Materials, Inc.
Andreas Lopp
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering apparatus and method of fabricating magnetic memory devi...
Patent number
11,834,738
Issue date
Dec 5, 2023
Samsung Electronics Co., Ltd.
Joonmyoung Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and a method for forming patterns on a surface of a subst...
Patent number
11,827,968
Issue date
Nov 28, 2023
VOLFRAMI OY LTD
Jukka Vuoristo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for manufacturing glass article and method for heating thin...
Patent number
11,814,729
Issue date
Nov 14, 2023
Nippon Electric Glass Co., Ltd.
Takayoshi Saitoh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Continuous thin film of a metal chalcogenide
Patent number
11,804,253
Issue date
Oct 31, 2023
National University of Singapore
Kian Ping Loh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
SiC single crystal manufacturing apparatus
Patent number
11,761,113
Issue date
Sep 19, 2023
Resonac Corporation
Kotaro Ishita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Heat treatment apparatus heating substrate
Patent number
11,746,410
Issue date
Sep 5, 2023
SCREEN Holdings Co., Ltd.
Yasuaki Kondo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Movable wafer holder for film deposition chamber having six degrees...
Patent number
11,742,231
Issue date
Aug 29, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Hsuan-Chih Chu
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Method, system and apparatus for cooling a substrate
Patent number
11,725,272
Issue date
Aug 15, 2023
Canon Kabushiki Kaisha
Byung-Jin Choi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
DC magnetron sputtering
Patent number
11,718,908
Issue date
Aug 8, 2023
SPTS Technologies Limited
Scott Haymore
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering method
Patent number
11,710,624
Issue date
Jul 25, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Bingliang Guo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Negative ion irradiation device
Patent number
11,694,877
Issue date
Jul 4, 2023
Sumitomo Heavy Industries, Ltd.
Hisashi Kitami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for depositing aluminum by physical vapor dep...
Patent number
11,674,216
Issue date
Jun 13, 2023
Applied Materials, Inc.
Siew Kit Hoi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor component with oxidized aluminum nitride film and man...
Patent number
11,652,190
Issue date
May 16, 2023
SKY TECH INC.
Jing-Cheng Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Coating device for conducting high efficient low temperature coating
Patent number
11,637,000
Issue date
Apr 25, 2023
OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
Siegfried Krassnitzer
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for heating a wide bandgap substrate by providing a resistiv...
Patent number
11,629,401
Issue date
Apr 18, 2023
SILANNA UV TECHNOLOGIES PTE LTD
Petar Atanackovic
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Top buffer layer for magnetic tunnel junction application
Patent number
11,621,393
Issue date
Apr 4, 2023
Applied Materials, Inc.
Lin Xue
G11 - INFORMATION STORAGE
Information
Patent Grant
Wafer support and thin-film deposition apparatus using the same
Patent number
11,598,006
Issue date
Mar 7, 2023
SKY TECH INC.
Jing-Cheng Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and device for decreasing generation of surface oxide of alu...
Patent number
11,597,999
Issue date
Mar 7, 2023
SKY TECH INC.
Jing-Cheng Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Temperature control roller, transporting arrangement and vacuum arr...
Patent number
11,566,321
Issue date
Jan 31, 2023
VON ARDENNE Asset GmbH & Co. KG
Uwe Wehner
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method to deposit thin film high quality absorber layer
Patent number
11,563,138
Issue date
Jan 24, 2023
China Triumph International Engineering Co., Ltd.
Shou Peng
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System and method for vapor deposition of substrates with circular...
Patent number
11,555,237
Issue date
Jan 17, 2023
QUANTUM INNOVATIONS, INC.
Norman L. Kester
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering apparatus
Patent number
11,549,173
Issue date
Jan 10, 2023
ULVAC, Inc.
Koji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method of manufacturing display apparatus
Patent number
11,534,790
Issue date
Dec 27, 2022
Samsung Display Co., Ltd.
Sangjin Han
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sputtering apparatus and method of fabricating magnetic memory devi...
Patent number
11,535,930
Issue date
Dec 27, 2022
Samsung Electronics Co., Ltd.
Joonmyoung Lee
G11 - INFORMATION STORAGE
Information
Patent Grant
Substrate processing apparatus and method
Patent number
11,532,784
Issue date
Dec 20, 2022
Tokyo Electron Limited
Manabu Nakagawasai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Physical vapor deposition processing systems target cooling
Patent number
11,515,132
Issue date
Nov 29, 2022
Applied Materials, Inc.
Sanjay Bhat
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING DEVICE AND METHOD FOR MANUFACTURING SAME
Publication number
20240136162
Publication date
Apr 25, 2024
LG Display Co., Ltd.
Young Gon KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METAL MATERIAL AND METHOD FOR PRODUCING THE SAME
Publication number
20240076773
Publication date
Mar 7, 2024
City University of Hong Kong Shenzhen Futian Research Institute
Sida Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD, DEVICE, AND SYSTEM FOR MANUFACTURING COMPOSITE METAL FOIL
Publication number
20240052479
Publication date
Feb 15, 2024
Chongqing JIMAT New Material Technology Co., Ltd.
Shiwei ZANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Al-RICH AlTiN-BASED FILMS
Publication number
20240043985
Publication date
Feb 8, 2024
OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
Denis KURAPOV
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMATION APPARATUS
Publication number
20230407458
Publication date
Dec 21, 2023
SHIBAURA MECHATRONICS CORPORATION
Yoji TAKIZAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
COATING INSTALLATION, CLAMPING RING AND MAGAZINE FOR SPECTACLE LENS...
Publication number
20230279537
Publication date
Sep 7, 2023
SCHNEIDER GMBH & CO. KG
Gunter SCHNEIDER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEM FOR DEPOSITING PIEZOELECTRIC MATERIALS, METHODS FOR USING TH...
Publication number
20230257869
Publication date
Aug 17, 2023
QORVO BIOTECHNOLOGIES, LLC
Derya Deniz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR FABRICATING PVD PEROVSKITE FILMS
Publication number
20230257868
Publication date
Aug 17, 2023
Applied Materials, Inc.
Zihao YANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM
Publication number
20230212735
Publication date
Jul 6, 2023
Applied Materials, Inc.
Nagabhushana NANJUNDAPPA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LOADED BODY, APPARATUS FOR PRODUCINGLOADED BODY AND METHOD FOR PROD...
Publication number
20230203642
Publication date
Jun 29, 2023
Atsushi NAKAJIMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND SYSTEMS FOR HEATING A WIDE BANDGAP SUBSTRATE
Publication number
20230203643
Publication date
Jun 29, 2023
Silanna UV Technologies Pte Ltd
Petar Atanackovic
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VACUUM CHAMBER, VACUUM SYSTEM AND METHOD FOR VACUUM PROCESSING
Publication number
20230193455
Publication date
Jun 22, 2023
Applied Materials, Inc.
Wolfgang MUTLU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BISMUTH FERRITE FILM MATERIAL, METHOD FOR INTEGRALLY PREPARING BISM...
Publication number
20230183853
Publication date
Jun 15, 2023
QILU UNIVERSITY OF TECHNOLOGY
Jun OUYANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Apparatus for the Temperature Control of a Substrate and Correspond...
Publication number
20230148124
Publication date
May 11, 2023
ERS electronic GmbH
Klaus Reitinger
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD, SYSTEM AND APPARATUS FOR COOLING A SUBSTRATE
Publication number
20230137182
Publication date
May 4, 2023
Canon Kabushiki Kaisha
Byung-Jin Choi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM DEPOSITION APPARATUS
Publication number
20230133258
Publication date
May 4, 2023
Toyota Jidosha Kabushiki Kaisha
Takayasu SATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Laser Deposition with a Reactive Gas
Publication number
20230129777
Publication date
Apr 27, 2023
The United States of America, as represented by the Secretary of the Navy
Alexandru Hening
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for heating a wide bandgap substrate by providing a resistiv...
Publication number
20230131472
Publication date
Apr 27, 2023
Silanna UV Technologies Pte Ltd
Petar Atanackovic
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS FOR SELECTIVE REMOVAL OF CONTACT OXIDES
Publication number
20230100602
Publication date
Mar 30, 2023
Tuck Foong KOH
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for producing a coating of a base body and functional elemen...
Publication number
20230100972
Publication date
Mar 30, 2023
TECHNISCHE UNIVERSITAT DARMSTADT
Nils SCHÄFER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ENERGY EFFICIENCY IMPROVEMENT WITH CONTINUOUS FLOW MODULATION IN CL...
Publication number
20230088457
Publication date
Mar 23, 2023
Applied Materials, Inc.
Lakshmikanth Krishnamurthy SHIRAHATTI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPROACHES TO MODIFYING A COLOR OF AN ELECTROCHROMIC STACK IN A TIN...
Publication number
20230077782
Publication date
Mar 16, 2023
SAGE Electrochromics, Inc.
Wen Li
G02 - OPTICS
Information
Patent Application
SPUTTERING REACTION CHAMBER AND PROCESS ASSEMBLY OF SPUTTERING REAC...
Publication number
20230055006
Publication date
Feb 23, 2023
Beijing NAURA Microelectronics Equipment Co., Ltd.
Liren HAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EVAPORATOR FOR EFFECTIVE SURFACE AREA EVAPORATION
Publication number
20230048728
Publication date
Feb 16, 2023
Applied Materials, Inc.
Sambhu KUNDU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE TRANSFER SYSTEM WITH LAMP HEATER, CHAMBER PURGE METHOD
Publication number
20230022174
Publication date
Jan 26, 2023
ASM IP HOLDING, B.V.
Wataru Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SPUTTERING APPARATUS AND METHOD OF FABRICATING MAGNETIC MEMORY DEVI...
Publication number
20230013146
Publication date
Jan 19, 2023
Samsung Electronics Co., Ltd.
Joonmyoung LEE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR DEPOSITION OF PIEZO-ELECTRIC MATERIALS
Publication number
20230009085
Publication date
Jan 12, 2023
Applied Materials, Inc.
Lizhong SUN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS, CONTROL APPARATUS FOR FILM FORMING APPARTUS...
Publication number
20230002886
Publication date
Jan 5, 2023
CANON ANELVA CORPORATION
HIROSHI YAKUSHIJI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
AUTOMATED TEMPERATURE CONTROLLED SUBSTRATE SUPPORT
Publication number
20220389566
Publication date
Dec 8, 2022
Applied Materials, Inc.
Robert HARTWIG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE FIXING DEVICE FOR SCINTILLATOR DEPOSITION, SUBSTRATE DEPO...
Publication number
20220372613
Publication date
Nov 24, 2022
VIEWORKS CO., LTD.
In Hyuck RYU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...